JP2005042924A5 - - Google Patents

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Publication number
JP2005042924A5
JP2005042924A5 JP2004266918A JP2004266918A JP2005042924A5 JP 2005042924 A5 JP2005042924 A5 JP 2005042924A5 JP 2004266918 A JP2004266918 A JP 2004266918A JP 2004266918 A JP2004266918 A JP 2004266918A JP 2005042924 A5 JP2005042924 A5 JP 2005042924A5
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JP
Japan
Prior art keywords
fluid
pressure
gas
container
valve
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Granted
Application number
JP2004266918A
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English (en)
Japanese (ja)
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JP2005042924A (ja
JP4615942B2 (ja
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Priority claimed from US09/067,393 external-priority patent/US6101816A/en
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Publication of JP2005042924A publication Critical patent/JP2005042924A/ja
Publication of JP2005042924A5 publication Critical patent/JP2005042924A5/ja
Application granted granted Critical
Publication of JP4615942B2 publication Critical patent/JP4615942B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2004266918A 1998-04-28 2004-09-14 流体貯蔵および供給のためのシステムおよび方法 Expired - Lifetime JP4615942B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/067,393 US6101816A (en) 1998-04-28 1998-04-28 Fluid storage and dispensing system

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP55448099A Division JP4108142B2 (ja) 1998-04-28 1999-04-28 圧縮された流体を貯蔵する手段を備えたガス供給システム

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009024125A Division JP5015181B2 (ja) 1998-04-28 2009-02-04 流体貯蔵およびガス供給のためのシステムおよび方法

Publications (3)

Publication Number Publication Date
JP2005042924A JP2005042924A (ja) 2005-02-17
JP2005042924A5 true JP2005042924A5 (enExample) 2006-06-15
JP4615942B2 JP4615942B2 (ja) 2011-01-19

Family

ID=22075716

Family Applications (4)

Application Number Title Priority Date Filing Date
JP55448099A Expired - Lifetime JP4108142B2 (ja) 1998-04-28 1999-04-28 圧縮された流体を貯蔵する手段を備えたガス供給システム
JP2004266918A Expired - Lifetime JP4615942B2 (ja) 1998-04-28 2004-09-14 流体貯蔵および供給のためのシステムおよび方法
JP2009024125A Expired - Lifetime JP5015181B2 (ja) 1998-04-28 2009-02-04 流体貯蔵およびガス供給のためのシステムおよび方法
JP2011184501A Expired - Lifetime JP5373015B2 (ja) 1998-04-28 2011-08-26 流体貯蔵および供給のためのシステムおよび方法

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP55448099A Expired - Lifetime JP4108142B2 (ja) 1998-04-28 1999-04-28 圧縮された流体を貯蔵する手段を備えたガス供給システム

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2009024125A Expired - Lifetime JP5015181B2 (ja) 1998-04-28 2009-02-04 流体貯蔵およびガス供給のためのシステムおよび方法
JP2011184501A Expired - Lifetime JP5373015B2 (ja) 1998-04-28 2011-08-26 流体貯蔵および供給のためのシステムおよび方法

Country Status (11)

Country Link
US (2) US6101816A (enExample)
EP (2) EP1610053B1 (enExample)
JP (4) JP4108142B2 (enExample)
KR (1) KR100416424B1 (enExample)
AT (2) ATE305590T1 (enExample)
AU (1) AU3766199A (enExample)
DE (2) DE69927461T3 (enExample)
DK (1) DK1610053T3 (enExample)
ES (1) ES2335592T3 (enExample)
MY (1) MY128104A (enExample)
WO (1) WO1999056057A1 (enExample)

Families Citing this family (134)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6132492A (en) * 1994-10-13 2000-10-17 Advanced Technology Materials, Inc. Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same
US5757664A (en) * 1996-06-04 1998-05-26 Warren Rogers Associates, Inc. Method and apparatus for monitoring operational performance of fluid storage systems
US6925397B2 (en) 1994-11-29 2005-08-02 Warren Rogers Associates Meter calibration accuracy
US6934644B2 (en) * 1996-06-04 2005-08-23 Warren Rogers Associates, Inc. Method and apparatus for monitoring operational performance of fluid storage systems
US6691061B1 (en) 1996-06-04 2004-02-10 Warren Rogers Associates, Inc. Method and apparatus for monitoring operational performance of fluid storage systems
US6909986B2 (en) * 1996-06-04 2005-06-21 Warren Rogers Associates, Inc. Method and apparatus for monitoring operational performance of fluid storage systems
GB9724168D0 (en) 1997-11-14 1998-01-14 Air Prod & Chem Gas control device and method of supplying gas
US7013916B1 (en) 1997-11-14 2006-03-21 Air Products And Chemicals, Inc. Sub-atmospheric gas delivery method and apparatus
US6453924B1 (en) * 2000-07-24 2002-09-24 Advanced Technology Materials, Inc. Fluid distribution system and process, and semiconductor fabrication facility utilizing same
US6660063B2 (en) 1998-03-27 2003-12-09 Advanced Technology Materials, Inc Sorbent-based gas storage and delivery system
US6343476B1 (en) * 1998-04-28 2002-02-05 Advanced Technology Materials, Inc. Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ therein
US6910504B2 (en) * 2002-01-03 2005-06-28 Allied Healthcare Products, Inc. Surge prevention device
US6622743B1 (en) * 1999-08-09 2003-09-23 Allied Healthcare Products, Inc. Surge prevention device
US7128080B2 (en) * 1999-08-09 2006-10-31 Allied Healthcare Products, Inc. Surge prevention device
DE19948532A1 (de) * 1999-10-08 2001-04-12 Messer Austria Gmbh Gumpoldski Verfahren und Behälter zum Aufbewahren von Gasen
US6874521B1 (en) 1999-11-12 2005-04-05 Vent-Matic Company, Inc. High to low gas flow regulator
US6257000B1 (en) * 2000-03-22 2001-07-10 Luping Wang Fluid storage and dispensing system featuring interiorly disposed and exteriorly adjustable regulator for high flow dispensing of gas
US6360546B1 (en) * 2000-08-10 2002-03-26 Advanced Technology Materials, Inc. Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing
SG99928A1 (en) * 2000-08-18 2003-11-27 Air Prod & Chem Sub-atmospheric gas delivery method and apparatus
FR2816387B1 (fr) * 2000-11-07 2003-07-25 Atofina Robinet etanche pour recipient de transport de fluides toxiques
US6494343B2 (en) * 2001-02-15 2002-12-17 Advanced Technology Materials, Inc. Fluid storage and dispensing system featuring ex-situ strain gauge pressure monitoring assembly
JP2003166700A (ja) * 2001-11-30 2003-06-13 Nippon Sanso Corp 減圧機能付き容器弁
US6620225B2 (en) * 2002-01-10 2003-09-16 Advanced Technology Materials, Inc. Adsorbents for low vapor pressure fluid storage and delivery
JP2003271218A (ja) * 2002-03-15 2003-09-26 Toshiba Corp 半導体製造装置、半導体製造システム及び基板処理方法
US6637469B2 (en) 2002-03-19 2003-10-28 Air Products And Chemicals, Inc. Product delivery system for stationary or portable bulk containers
US6938654B2 (en) 2002-03-19 2005-09-06 Air Products And Chemicals, Inc. Monitoring of ultra-high purity product storage tanks during transportation
GB0211410D0 (en) * 2002-05-17 2002-06-26 Air Prod & Chem Intra-cylinder tubular pressure regulator
US6857447B2 (en) 2002-06-10 2005-02-22 Advanced Technology Materials, Inc. Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases
US6959724B2 (en) * 2002-07-01 2005-11-01 Praxair Technology, Inc. Multiple regulator vacuum delivery valve assembly
US20040000339A1 (en) * 2002-07-01 2004-01-01 Heiderman Douglas Charles Multiple dispensing check valve delivery system
US6716271B1 (en) 2002-10-29 2004-04-06 Advanced Technology Materials, Inc. Apparatus and method for inhibiting decomposition of germane
USD545393S1 (en) 2002-12-09 2007-06-26 Advanced Technology Materials, Inc. Rectangular parallelepiped fluid storage and dispensing vessel
US7370661B2 (en) * 2002-12-09 2008-05-13 Advanced Technology Materials, Inc. Permeable gas assembly for gas delivery
US6991671B2 (en) 2002-12-09 2006-01-31 Advanced Technology Materials, Inc. Rectangular parallelepiped fluid storage and dispensing vessel
US7494530B2 (en) * 2002-12-10 2009-02-24 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
US6743278B1 (en) * 2002-12-10 2004-06-01 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
US8002880B2 (en) 2002-12-10 2011-08-23 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
US6997202B2 (en) * 2002-12-17 2006-02-14 Advanced Technology Materials, Inc. Gas storage and dispensing system for variable conductance dispensing of gas at constant flow rate
US6868869B2 (en) * 2003-02-19 2005-03-22 Advanced Technology Materials, Inc. Sub-atmospheric pressure delivery of liquids, solids and low vapor pressure gases
US7063097B2 (en) * 2003-03-28 2006-06-20 Advanced Technology Materials, Inc. In-situ gas blending and dilution system for delivery of dilute gas at a predetermined concentration
WO2004088415A2 (en) * 2003-03-28 2004-10-14 Advanced Technology Materials Inc. Photometrically modulated delivery of reagents
US6907740B2 (en) * 2003-07-23 2005-06-21 Advanced Technology Materials, Inc. Gas charging system for fill of gas storage and dispensing vessels
US6909839B2 (en) * 2003-07-23 2005-06-21 Advanced Technology Materials, Inc. Delivery systems for efficient vaporization of precursor source material
WO2005025646A2 (en) * 2003-09-08 2005-03-24 U.S. Government As Represented By The Secretary Of The Army System and method for providing servo-controlled resuscitation
US6955198B2 (en) * 2003-09-09 2005-10-18 Advanced Technology Materials, Inc. Auto-switching system for switch-over of gas storage and dispensing vessels in a multi-vessel array
US7150299B2 (en) 2003-09-12 2006-12-19 Air Products And Chemicals, Inc. Assembly and method for containing, receiving and storing fluids and for dispensing gas from a fluid control and gas delivery assembly having an integrated fluid flow restrictor
US7201179B2 (en) * 2003-09-23 2007-04-10 Air Liquide Industrial U.S. Lp Modular fluid supply system
NL1024370C2 (nl) * 2003-09-24 2005-04-05 Fornix Medical Systems Holding Inrichting en werkwijze voor het afgeven van vloeistof, in het bijzonder voor medische toepassing.
WO2005037421A2 (en) * 2003-10-14 2005-04-28 Advanced Technology Materials, Inc. Hydrogen generation
US7018448B2 (en) * 2003-10-28 2006-03-28 Advanced Technology Materials, Inc. Gas cabinet including integrated effluent scrubber
US7253002B2 (en) 2003-11-03 2007-08-07 Advanced Technology Materials, Inc. Fluid storage and dispensing vessels having colorimetrically verifiable leak-tightness, and method of making same
US7051749B2 (en) * 2003-11-24 2006-05-30 Advanced Technology Materials, Inc. Gas delivery system with integrated valve manifold functionality for sub-atmospheric and super-atmospheric pressure applications
JP2005340405A (ja) * 2004-05-26 2005-12-08 Asahi Denka Kogyo Kk 化学気相成長用原料及び薄膜の製造方法
US7648682B2 (en) * 2004-07-08 2010-01-19 Air Products And Chemicals, Inc. Wick systems for complexed gas technology
US7396381B2 (en) * 2004-07-08 2008-07-08 Air Products And Chemicals, Inc. Storage and delivery systems for gases held in liquid medium
US7741621B2 (en) * 2004-07-14 2010-06-22 City University Of Hong Kong Apparatus and method for focused electric field enhanced plasma-based ion implantation
US7955797B2 (en) * 2004-10-25 2011-06-07 Advanced Technology Materials, Inc. Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel
US20060115591A1 (en) * 2004-11-29 2006-06-01 Olander W K Pentaborane(9) storage and delivery
FR2878863B1 (fr) * 2004-12-07 2007-11-23 Addon Sa Dispositif de depot sous vide a reservoir de recharge et procede de depot sous vide correspondant.
DE102005004592B4 (de) * 2005-02-01 2018-06-28 Bayerische Motoren Werke Aktiengesellschaft Speicher und/oder Druckerhöhungseinrichtung für Wasserstoff
EP1864102A2 (en) * 2005-02-28 2007-12-12 Advanced Technology Materials, Inc. Apparatus and process for leak-testing and qualification of fluid dispensing vessels
US7638058B2 (en) * 2005-04-07 2009-12-29 Matheson Tri-Gas Fluid storage and purification method and system
CN101213008B (zh) * 2005-05-03 2011-09-28 高级技术材料公司 流体储存和分配系统以及包含该系统的流体供应方法
US20060272717A1 (en) * 2005-06-01 2006-12-07 Rajat Agrawal Valve device for containing and preventing backflow of fluids
US20060273275A1 (en) * 2005-06-01 2006-12-07 Rajat Agrawal Valve device for containing and preventing backflow of fluids
TWI552797B (zh) 2005-06-22 2016-10-11 恩特葛瑞斯股份有限公司 整合式氣體混合用之裝置及方法
TW200722344A (en) * 2005-08-22 2007-06-16 Advanced Tech Materials Material containment system
KR101297917B1 (ko) 2005-08-30 2013-08-27 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 대안적인 불화 붕소 전구체를 이용한 붕소 이온 주입 방법,및 주입을 위한 대형 수소화붕소의 형성 방법
CN101287947A (zh) * 2005-09-15 2008-10-15 曼巴斯阿尔法股份公司 压力控制的气体存贮
US20070157804A1 (en) * 2006-01-06 2007-07-12 Mcmanus James V Method and apparatus for decommissioning and recycling retired adsorbent-based fluid storage and dispensing vessels
CN101410164B (zh) * 2006-01-30 2012-05-02 高级技术材料公司 纳米多孔碳材料，以及利用其的系统和方法
JP2007242304A (ja) 2006-03-06 2007-09-20 Toyota Motor Corp バルブ、バルブ制御装置及び燃料電池システム
US20090162550A1 (en) * 2006-06-02 2009-06-25 Advanced Technology Materials, Inc. Copper (i) amidinates and guanidinates, mixed ligand copper complexes, and compositions for chemical vapor deposition, atomic layer deposition, and rapid vapor deposition of copper
US8336734B2 (en) * 2006-06-13 2012-12-25 Advanced Technology Materials, Inc. Liquid dispensing systems encompassing gas removal
US20080000532A1 (en) * 2006-06-30 2008-01-03 Matthew Lincoln Wagner Low release rate cylinder package
US20080029575A1 (en) * 2006-08-02 2008-02-07 Shelton Frederick E Surgical cutting and fastening instrument with distally mounted pneumatically powered rotary drive member
JP5038666B2 (ja) * 2006-09-08 2012-10-03 川崎重工業株式会社 貯蔵容器用弁装置および貯蔵装置
US20110060165A1 (en) * 2006-12-05 2011-03-10 Advanced Technology Materials, Inc. Metal aminotroponiminates, bis-oxazolinates and guanidinates
US7708028B2 (en) * 2006-12-08 2010-05-04 Praxair Technology, Inc. Fail-safe vacuum actuated valve for high pressure delivery systems
US8171950B2 (en) * 2007-01-30 2012-05-08 Ysn Imports, Inc. Compressed air regulator apparatus situated in canister and method for regulating compressed air thereof
US7879020B1 (en) 2007-03-19 2011-02-01 The United States Of America As Represented By The Secretary Of The Army Decision-assist method for resuscitation of patients
US7789657B2 (en) * 2007-10-03 2010-09-07 Honeywell International Inc. Pressure regulator with bleed orifice
CN101836028B (zh) * 2007-10-22 2012-05-23 皇家飞利浦电子股份有限公司 液态到高压气体的转换填充系统和方法
US9395046B2 (en) 2007-10-22 2016-07-19 Koninklijke Philips N.V. Liquid to high pressure gas transfill system and method
US8322569B2 (en) 2007-12-06 2012-12-04 L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Integrated valve regulator assembly and system for the controlled storage and dispensing of a hazardous material
US20100228399A1 (en) * 2007-12-06 2010-09-09 Udischas Richard J Pressure regulator assembly and system for the controlled storage and dispensing of a fluid
WO2009102762A2 (en) 2008-02-11 2009-08-20 Sweeney Joseph D Ion source cleaning in semiconductor processing systems
US8741062B2 (en) * 2008-04-22 2014-06-03 Picosun Oy Apparatus and methods for deposition reactors
US20090320771A1 (en) * 2008-06-10 2009-12-31 Matheson Tri-Gas Ionic liquid mediums for holding solid phase process gas precursors
US7905247B2 (en) * 2008-06-20 2011-03-15 Praxair Technology, Inc. Vacuum actuated valve for high capacity storage and delivery systems
IT1390876B1 (it) 2008-07-31 2011-10-19 Cavagna Group S P A Con Socio Unico Gruppo valvolare regolatore di pressione per recipienti destinati a contenere fluidi compressi
US8220271B2 (en) * 2008-09-30 2012-07-17 Alstom Technology Ltd. Fuel lance for a gas turbine engine including outer helical grooves
US8726947B2 (en) * 2009-03-23 2014-05-20 Lockheed Martin Corporation Fuel fill adaptor
US8568529B2 (en) * 2009-04-10 2013-10-29 Applied Materials, Inc. HVPE chamber hardware
EP2441084B1 (en) 2009-06-10 2016-09-21 Entegris, Inc. Fluid processing systems and methods
WO2011006146A2 (en) 2009-07-09 2011-01-13 Advanced Technology Materials, Inc. Substantially rigid collapsible liner and flexible gusseted or non-gusseted liners and methods of manufacturing the same and methods for limiting choke-off in liners
US8598022B2 (en) 2009-10-27 2013-12-03 Advanced Technology Materials, Inc. Isotopically-enriched boron-containing compounds, and methods of making and using same
JP5898624B2 (ja) 2009-11-02 2016-04-06 シグマ−アルドリッチ・カンパニー、エルエルシー 蒸発器
DE102009060215B4 (de) * 2009-12-23 2012-04-19 Thomas Ripa Restdruckhalteventil zum Befüllen von Druckbehältern
WO2011085012A2 (en) 2010-01-06 2011-07-14 Advanced Technology Materials, Inc. Liquid dispensing systems with gas removal and sensing capabilities
US9109755B2 (en) 2010-06-18 2015-08-18 Entegris, Inc. Endpoint determination for capillary-assisted flow control
US8679231B2 (en) 2011-01-19 2014-03-25 Advanced Technology Materials, Inc. PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same
EP2681124A4 (en) 2011-03-01 2015-05-27 Advanced Tech Materials NESTED BLASHED INNER CLADDING AND PACKAGING AND MANUFACTURING METHOD THEREFOR
KR101303560B1 (ko) * 2011-11-17 2013-09-09 기아자동차주식회사 차량용 엘피지 봄베의 압력유지시스템
JP2013148195A (ja) * 2012-01-23 2013-08-01 Toshiba Corp 水素ガス補給制御システム
US9126139B2 (en) 2012-05-29 2015-09-08 Entegris, Inc. Carbon adsorbent for hydrogen sulfide removal from gases containing same, and regeneration of adsorbent
US9897257B2 (en) 2012-09-21 2018-02-20 Entegris, Inc. Anti-spike pressure management of pressure-regulated fluid storage and delivery vessels
KR102208866B1 (ko) 2012-12-21 2021-01-28 프랙스에어 테크놀로지, 인코포레이티드 탄소 이온 주입을 위한 도판트 조성물의 저장 및 대기압 이하의 전달
US9570271B2 (en) 2014-03-03 2017-02-14 Praxair Technology, Inc. Boron-containing dopant compositions, systems and methods of use thereof for improving ion beam current and performance during boron ion implantation
US10610279B2 (en) * 2014-04-10 2020-04-07 Channel Medsystems, Inc. Apparatus and methods for regulating cryogenic treatment
FR3022972B1 (fr) * 2014-06-25 2017-08-25 Air Liquide Dispositif et procede de fourniture de fluide sous pressions.
KR102408666B1 (ko) * 2014-10-03 2022-06-13 엔테그리스, 아이엔씨. 압력-조절 가스 공급 용기
SG11201706560PA (en) 2015-02-12 2017-09-28 Entegris Inc Smart package
US9909670B2 (en) 2015-03-04 2018-03-06 Praxair Technology, Inc. Modified vacuum actuated valve assembly and sealing mechanism for improved flow stability for fluids sub-atmospherically dispensed from storage and delivery systems
JP6590502B2 (ja) * 2015-03-31 2019-10-16 三菱重工業株式会社 宇宙航行体用の推進薬タンク及び宇宙航行体
KR101638626B1 (ko) 2015-05-06 2016-07-12 한국해양과학기술원 오염저감형 해수 시료 분배 기구
CN109195910B (zh) 2016-03-28 2022-05-24 恩特格里斯公司 氢化且富含三氟化硼同位素的掺杂剂来源的气体组合物
US10564656B2 (en) 2016-12-13 2020-02-18 Praxair Technology, Inc. Gas delivery valve and methods of use thereof
EP3663631B1 (en) * 2017-07-31 2023-10-11 Atomis Inc. Gas storage container
US10837603B2 (en) * 2018-03-06 2020-11-17 Entegris, Inc. Gas supply vessel
US12025997B2 (en) 2018-05-04 2024-07-02 Entegris, Inc. Regulator stability in a pressure regulated storage vessel
KR102522934B1 (ko) * 2018-09-13 2023-04-17 엔테그리스, 아이엔씨. 흡착제 기반의 기계적으로 조절되는 가스 저장 및 전달 용기
IT201800020059A1 (it) * 2018-12-18 2020-06-18 Saipem Spa Sistema di stoccaggio subacqueo
US20210048148A1 (en) * 2019-08-12 2021-02-18 Numat Technologies Inc. Process and apparatus for dispensing and charging gas to a storage vessel
CN110748792B (zh) * 2019-11-05 2020-08-11 迁安怡蕙达新能源有限公司 一种天然气储存罐过压检测及泄压装置
JP7516742B2 (ja) * 2019-11-05 2024-07-17 東京エレクトロン株式会社 基板を処理する装置、処理ガスを濃縮する装置、及び基板を処理する方法
KR20220132609A (ko) * 2020-03-04 2022-09-30 후지필름 가부시키가이샤 처리액, 처리액 수용체
US20210341106A1 (en) * 2020-04-30 2021-11-04 Entegris, Inc. Regulator assembly and test method
CN115485361A (zh) 2020-05-12 2022-12-16 Pbs生物技术公司 材料转移装置和相关的系统和方法
JP2024535279A (ja) * 2021-09-16 2024-09-30 インテグリス・インコーポレーテッド 貯蔵および送達容器ならびに関連方法
KR20240115287A (ko) * 2021-12-01 2024-07-25 엔테그리스, 아이엔씨. 압력 감지 디바이스
CN115159834B (zh) * 2022-08-15 2024-03-22 杨岁达 一种光纤预制棒的mcvd制备设备
CN115634892B (zh) * 2022-10-18 2024-12-10 中科富海(中山)低温装备制造有限公司 一种除冰装置及其除冰方法
WO2024158841A1 (en) * 2023-01-24 2024-08-02 Entegris, Inc. Pressure regulator

Family Cites Families (56)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1679826A (en) * 1923-11-08 1928-08-07 Jenkins Alexander Frederick Fluid-pressure regulator
US1659263A (en) * 1925-05-04 1928-02-14 Harris Calorific Co Regulator
US2047339A (en) * 1934-10-19 1936-07-14 Phillips Petroleum Co Consumer's liquefied petroleum gas storage and utilization equipment
US2514147A (en) * 1941-05-02 1950-07-04 Phillips Petroleum Co Portable liquefied gas container
US2354283A (en) * 1941-08-04 1944-07-25 Phillips Petroleum Co Antibuzz fluid pressure regulator
US2502588A (en) * 1945-04-11 1950-04-04 Linde Air Prod Co Portable apparatus for holding and vaporizing liquefied gases
US2615287A (en) * 1948-10-01 1952-10-28 Air Reduction Gas pressure regulator
US2707484A (en) * 1952-05-12 1955-05-03 Phillips Petroleum Co Valves
BE539182A (enExample) * 1954-06-22 1900-01-01
US2918930A (en) † 1956-09-27 1959-12-29 Howard J Jansen Absolute pressure regulator
US3388962A (en) * 1966-07-07 1968-06-18 Western Ind Inc Gas appliance metering device
ES356596A1 (es) † 1967-08-17 1970-03-16 Mec Fabrica De Aparelhagem Ind Nuevo sistema de reduccion de presion para gases contenidosen recipientes.
US3590860A (en) * 1969-07-31 1971-07-06 Bernzomatic Corp Pressure regulator valve for l. p. cartridges
US3699998A (en) * 1970-12-11 1972-10-24 Frank Baranowski Jr Calibrated pressure regulator
US3791412A (en) * 1972-06-05 1974-02-12 H Mays Reducing valve for high pressure fluids and connecting means therefor
US3972346A (en) * 1974-08-23 1976-08-03 Wingaersheek, Inc. Pressure regulator
US3994674A (en) * 1975-03-14 1976-11-30 Western Industries, Inc. Detachable burner assembly for gas-burning torch
US4173986A (en) * 1977-04-18 1979-11-13 American Safety Equipment Corporation Pressurized gas flow control valve and assembly thereof with reducer regulator
JPS57201527A (en) † 1981-06-01 1982-12-10 Toshiba Corp Ion implantation method
US4793379A (en) * 1982-07-16 1988-12-27 Eidsmore Paul G Supply cylinder shut-off and flow control valve
US4624443A (en) * 1982-07-16 1986-11-25 Integrated Flow Systems, Inc. Fluid-flow control valve
US4694860A (en) * 1984-11-28 1987-09-22 Eidsmore Paul G Fluid-flow isolation and control apparatus and method
US4485739A (en) * 1983-03-02 1984-12-04 H. L. & A. G. Balsinger, Inc. Detonation gas delivery unit
US4618381A (en) † 1983-05-26 1986-10-21 Fuji Electric Corporate Research And Development Ltd. Method for adding impurities to semiconductor base material
JPS6026889A (ja) † 1983-07-21 1985-02-09 Matsushita Electric Ind Co Ltd 液化ガスの気化装置
JPS6026893A (ja) † 1983-07-25 1985-02-09 Matsushita Electric Ind Co Ltd 液化ガスの気化装置
JPS62113875A (ja) * 1985-11-11 1987-05-25 Mitsuwa Seiki Co Ltd 往復動圧縮機
JPS62113875U (enExample) * 1986-01-06 1987-07-20
KR900007686B1 (ko) * 1986-10-08 1990-10-18 후지쓰 가부시끼가이샤 선택적으로 산화된 실리콘 기판상에 에피택셜 실리콘층과 다결정 실리콘층을 동시에 성장시키는 기상 증착방법
DE3876639T2 (de) † 1987-01-20 1993-04-22 American Telephone & Telegraph Gasphasen-epitaxieverfahren zum aufwachsen von eisendotierten und auf indium basierenden halbleitern der gruppen iii-vn.
FR2615270B1 (fr) * 1987-05-15 1989-07-13 Air Liquide Detendeur pour gaz purs
US4958658A (en) † 1987-06-25 1990-09-25 Tegal Corporation Mass flow stabilized
US4744221A (en) * 1987-06-29 1988-05-17 Olin Corporation Zeolite based arsine storage and delivery system
US5158528A (en) 1990-06-15 1992-10-27 Sherwood Medical Company Peristaltic infusion device and charger unit
US5165247A (en) * 1991-02-11 1992-11-24 Rocky Research Refrigerant recycling system
WO1992021905A1 (en) * 1991-05-30 1992-12-10 Wass Lloyd G Crash proof solenoid controlled valve for natural gas powered vehicles
US5230359A (en) * 1992-06-15 1993-07-27 Veriflo Corporation Supply pressure compensated fluid pressure regulator and method
US5233837A (en) * 1992-09-03 1993-08-10 Enerfex, Inc. Process and apparatus for producing liquid carbon dioxide
GB9220975D0 (en) * 1992-10-06 1992-11-18 Air Prod & Chem Apparatus for supplying high purity gas
US5303734A (en) * 1993-02-01 1994-04-19 Eidsmore Paul G Pressure regulator
FR2706051B1 (fr) * 1993-06-03 1995-07-28 Taema Ensemble de commande de distribution de gaz et bouteille de gaz équipée d'un tel ensemble.
US5685159A (en) * 1994-02-04 1997-11-11 Chicago Bridge & Iron Technical Services Company Method and system for storing cold liquid
US5547229A (en) * 1994-05-13 1996-08-20 Eidsmore; Paul G. Fluid coupling assembly
FR2724241B1 (fr) * 1994-09-02 1996-10-25 Air Liquide Ensemble de commande et de distribution de gaz et dispositif de stockage de gaz equipe d'un tel ensemble
US5518528A (en) * 1994-10-13 1996-05-21 Advanced Technology Materials, Inc. Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds
US5704967A (en) 1995-10-13 1998-01-06 Advanced Technology Materials, Inc. Fluid storage and delivery system comprising high work capacity physical sorbent
US5528518A (en) 1994-10-25 1996-06-18 Laser Technology, Inc. System and method for collecting data used to form a geographic information system database
US5595209A (en) * 1995-03-29 1997-01-21 Airtrol Components Inc. Fluid pressure regulator establishing a stable output fluid pressure
GB9513606D0 (en) * 1995-07-04 1995-09-06 Boc Group Plc Apparatus for chilling fluids
FR2741937B1 (fr) * 1995-12-01 1998-02-20 Gaz De France Dispositif d'alimentation en fluide gazeux d'un reseau de distribution
US5645192A (en) * 1995-12-11 1997-07-08 Vent-Matic Co., Inc. Self regulating valve assembly for controlling fluid ingress and egress from a transportable container which stores and distributes liquid under pressure
US5762086A (en) * 1995-12-19 1998-06-09 Veriflo Corporation Apparatus for delivering process gas for making semiconductors and method of using same
JP2762253B2 (ja) * 1996-01-31 1998-06-04 本田技研工業株式会社 圧縮天然ガス充填装置
US5673562A (en) * 1996-02-23 1997-10-07 L'air Liquide, S.A. Bulk delivery of ultra-high purity gases at high flow rates
WO1997044118A1 (en) * 1996-05-20 1997-11-27 Advanced Technology Materials, Inc. Fluid storage and delivery system comprising high work capacity physical sorbent
US5901557A (en) * 1996-10-04 1999-05-11 Mcdonnell Douglas Corporation Passive low gravity cryogenic storage vessel

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