JP2003532033A5 - - Google Patents
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- Publication number
- JP2003532033A5 JP2003532033A5 JP2001578870A JP2001578870A JP2003532033A5 JP 2003532033 A5 JP2003532033 A5 JP 2003532033A5 JP 2001578870 A JP2001578870 A JP 2001578870A JP 2001578870 A JP2001578870 A JP 2001578870A JP 2003532033 A5 JP2003532033 A5 JP 2003532033A5
- Authority
- JP
- Japan
- Prior art keywords
- gas
- pressure
- valve
- adjusting device
- gas pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims 48
- 239000012530 fluid Substances 0.000 claims 17
- 238000003860 storage Methods 0.000 claims 14
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 229910015900 BF3 Inorganic materials 0.000 claims 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 claims 2
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 claims 2
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 claims 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 1
- 229910000074 antimony hydride Inorganic materials 0.000 claims 1
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 238000004140 cleaning Methods 0.000 claims 1
- -1 diborane Chemical compound 0.000 claims 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 claims 1
- 150000004820 halides Chemical class 0.000 claims 1
- 150000004678 hydrides Chemical class 0.000 claims 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 claims 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 125000002524 organometallic group Chemical group 0.000 claims 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 claims 1
- 229910000077 silane Inorganic materials 0.000 claims 1
- 150000004756 silanes Chemical class 0.000 claims 1
- OUULRIDHGPHMNQ-UHFFFAOYSA-N stibane Chemical compound [SbH3] OUULRIDHGPHMNQ-UHFFFAOYSA-N 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/552,347 US6343476B1 (en) | 1998-04-28 | 2000-04-19 | Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ therein |
| US09/552,347 | 2000-04-19 | ||
| PCT/US2001/011480 WO2001081822A1 (en) | 2000-04-19 | 2001-04-09 | Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ therein |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010215345A Division JP2010281459A (ja) | 2000-04-19 | 2010-09-27 | 流体含有容器内に配置され、その場で調節可能なレギュレータを備えるガス貯蔵送出システム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003532033A JP2003532033A (ja) | 2003-10-28 |
| JP2003532033A5 true JP2003532033A5 (enExample) | 2006-06-01 |
Family
ID=24204949
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001578870A Pending JP2003532033A (ja) | 2000-04-19 | 2001-04-09 | 流体含有容器内に配置され、その場で調節可能なレギュレータを備えるガス貯蔵送出システム |
| JP2010215345A Pending JP2010281459A (ja) | 2000-04-19 | 2010-09-27 | 流体含有容器内に配置され、その場で調節可能なレギュレータを備えるガス貯蔵送出システム |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010215345A Pending JP2010281459A (ja) | 2000-04-19 | 2010-09-27 | 流体含有容器内に配置され、その場で調節可能なレギュレータを備えるガス貯蔵送出システム |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US6343476B1 (enExample) |
| EP (1) | EP1328756B1 (enExample) |
| JP (2) | JP2003532033A (enExample) |
| KR (4) | KR20100032923A (enExample) |
| CN (2) | CN104989942B (enExample) |
| AU (1) | AU2001251459A1 (enExample) |
| DE (1) | DE60142981D1 (enExample) |
| MY (1) | MY122718A (enExample) |
| SG (1) | SG145554A1 (enExample) |
| TW (1) | TW490541B (enExample) |
| WO (1) | WO2001081822A1 (enExample) |
Families Citing this family (66)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6343476B1 (en) * | 1998-04-28 | 2002-02-05 | Advanced Technology Materials, Inc. | Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ therein |
| DE10052856A1 (de) * | 2000-10-24 | 2002-04-25 | Linde Ag | Speicherbehälter für kryogene Medien |
| FR2833861B1 (fr) * | 2001-12-20 | 2004-02-06 | Air Liquide | Dispositif de stockage et de melange de deux gaz |
| US6857447B2 (en) | 2002-06-10 | 2005-02-22 | Advanced Technology Materials, Inc. | Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases |
| US6959724B2 (en) | 2002-07-01 | 2005-11-01 | Praxair Technology, Inc. | Multiple regulator vacuum delivery valve assembly |
| US20040188272A1 (en) * | 2003-03-25 | 2004-09-30 | Blanks Jeremy Daniel | Method for reducing degradation of reactive compounds during transport |
| US6907740B2 (en) * | 2003-07-23 | 2005-06-21 | Advanced Technology Materials, Inc. | Gas charging system for fill of gas storage and dispensing vessels |
| US6955198B2 (en) * | 2003-09-09 | 2005-10-18 | Advanced Technology Materials, Inc. | Auto-switching system for switch-over of gas storage and dispensing vessels in a multi-vessel array |
| US7253002B2 (en) | 2003-11-03 | 2007-08-07 | Advanced Technology Materials, Inc. | Fluid storage and dispensing vessels having colorimetrically verifiable leak-tightness, and method of making same |
| FR2863500B1 (fr) * | 2003-12-11 | 2007-03-30 | Air Liquide | Stockage de gaz destine a fournir un gaz decontamine |
| JP5011630B2 (ja) * | 2004-04-26 | 2012-08-29 | トヨタ自動車株式会社 | 燃料電池システム |
| US7955797B2 (en) * | 2004-10-25 | 2011-06-07 | Advanced Technology Materials, Inc. | Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel |
| US20060115591A1 (en) * | 2004-11-29 | 2006-06-01 | Olander W K | Pentaborane(9) storage and delivery |
| US20060118179A1 (en) * | 2004-12-03 | 2006-06-08 | Paul Kremer | Tap for gas cylinder with adiabatic compression prevention system, with variable pressure drop |
| US7811532B2 (en) * | 2005-04-18 | 2010-10-12 | Air Products And Chemicals, Inc. | Dual-flow valve and internal processing vessel isolation system |
| DE102006026338B4 (de) * | 2005-06-02 | 2013-05-29 | Hochdruck-Reduziertechnik Gmbh | Druckreduzierventil, mobiles Stromversorgungsaggregat sowie damit versorgte elektrische Einrichtungen |
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| KR101297917B1 (ko) | 2005-08-30 | 2013-08-27 | 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 | 대안적인 불화 붕소 전구체를 이용한 붕소 이온 주입 방법,및 주입을 위한 대형 수소화붕소의 형성 방법 |
| CN101287947A (zh) * | 2005-09-15 | 2008-10-15 | 曼巴斯阿尔法股份公司 | 压力控制的气体存贮 |
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| US9109755B2 (en) | 2010-06-18 | 2015-08-18 | Entegris, Inc. | Endpoint determination for capillary-assisted flow control |
| US9897257B2 (en) * | 2012-09-21 | 2018-02-20 | Entegris, Inc. | Anti-spike pressure management of pressure-regulated fluid storage and delivery vessels |
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| KR20170019416A (ko) * | 2014-06-13 | 2017-02-21 | 엔테그리스, 아이엔씨. | 압력-조절형 유체 저장 및 분배 용기의 흡착제-기반의 압력 안정화 |
| KR102408666B1 (ko) * | 2014-10-03 | 2022-06-13 | 엔테그리스, 아이엔씨. | 압력-조절 가스 공급 용기 |
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| JP6590502B2 (ja) * | 2015-03-31 | 2019-10-16 | 三菱重工業株式会社 | 宇宙航行体用の推進薬タンク及び宇宙航行体 |
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| US20190078696A1 (en) * | 2015-07-09 | 2019-03-14 | Entegris, Inc. | Fluid supply package |
| CN109195910B (zh) | 2016-03-28 | 2022-05-24 | 恩特格里斯公司 | 氢化且富含三氟化硼同位素的掺杂剂来源的气体组合物 |
| US10837603B2 (en) * | 2018-03-06 | 2020-11-17 | Entegris, Inc. | Gas supply vessel |
| KR101899470B1 (ko) * | 2018-03-28 | 2018-11-08 | 티이엠씨 주식회사 | 저장능력을 향상시킨 유체압력조정밸브가 구비된 실린더 |
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| US12025997B2 (en) | 2018-05-04 | 2024-07-02 | Entegris, Inc. | Regulator stability in a pressure regulated storage vessel |
| KR102522934B1 (ko) * | 2018-09-13 | 2023-04-17 | 엔테그리스, 아이엔씨. | 흡착제 기반의 기계적으로 조절되는 가스 저장 및 전달 용기 |
| CN109367997B (zh) * | 2018-09-14 | 2024-02-23 | 宁波铭匠扎啤设备有限公司 | 一种酒头可调的酒水饮料保鲜桶 |
| CN109945069B (zh) * | 2019-03-25 | 2020-11-10 | 中国船舶科学研究中心（中国船舶重工集团公司第七0二研究所） | 水下气氧超压排放装置 |
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| US11692671B2 (en) * | 2020-05-07 | 2023-07-04 | Numat Technologies, Inc. | Apparatus and method for dispensing gas from a storage vessel |
| CN115485361A (zh) | 2020-05-12 | 2022-12-16 | Pbs生物技术公司 | 材料转移装置和相关的系统和方法 |
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| KR20230154465A (ko) * | 2021-03-09 | 2023-11-08 | 엔테그리스, 아이엔씨. | 가스 저장 및 분배 용기와, 가스 저장 및 분배 용기로부터의 분배 방법 |
| CN113898872A (zh) * | 2021-10-18 | 2022-01-07 | 詹清楚 | 一种安全防泄漏的氧气管运输设备 |
| CN118382774A (zh) * | 2021-12-01 | 2024-07-23 | 恩特格里斯公司 | 压力感测一体式装置 |
| KR20240115287A (ko) * | 2021-12-01 | 2024-07-25 | 엔테그리스, 아이엔씨. | 압력 감지 디바이스 |
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| WO2024158841A1 (en) * | 2023-01-24 | 2024-08-02 | Entegris, Inc. | Pressure regulator |
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| US6343476B1 (en) * | 1998-04-28 | 2002-02-05 | Advanced Technology Materials, Inc. | Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ therein |
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-
2000
- 2000-04-19 US US09/552,347 patent/US6343476B1/en not_active Expired - Lifetime
-
2001
- 2001-04-09 KR KR1020107002704A patent/KR20100032923A/ko not_active Ceased
- 2001-04-09 AU AU2001251459A patent/AU2001251459A1/en not_active Abandoned
- 2001-04-09 SG SG200500255-5A patent/SG145554A1/en unknown
- 2001-04-09 WO PCT/US2001/011480 patent/WO2001081822A1/en not_active Ceased
- 2001-04-09 KR KR1020027014087A patent/KR100879152B1/ko not_active Expired - Lifetime
- 2001-04-09 CN CN201510282437.3A patent/CN104989942B/zh not_active Expired - Lifetime
- 2001-04-09 JP JP2001578870A patent/JP2003532033A/ja active Pending
- 2001-04-09 KR KR1020127014349A patent/KR20120066082A/ko not_active Ceased
- 2001-04-09 CN CN01810427.4A patent/CN1705846B/zh not_active Expired - Lifetime
- 2001-04-09 EP EP01924842A patent/EP1328756B1/en not_active Expired - Lifetime
- 2001-04-09 KR KR1020087024186A patent/KR100962625B1/ko not_active Expired - Lifetime
- 2001-04-09 DE DE60142981T patent/DE60142981D1/de not_active Expired - Lifetime
- 2001-04-17 MY MYPI20011823A patent/MY122718A/en unknown
- 2001-04-19 TW TW090109377A patent/TW490541B/zh not_active IP Right Cessation
-
2010
- 2010-09-27 JP JP2010215345A patent/JP2010281459A/ja active Pending
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