TW200900128A - Delivery of gases from internally regulated cylinders - Google Patents

Abstract

A gas supply package, including a material storage and gas dispensing vessel defining an interior volume adapted to hold source material for the gas, with a gas dispensing stick in the interior volume. The gas dispensing stick includes at least one regulator coupled with a flow passage, with at least one generally planar filter element arranged to filter gas flowed through the flow passage prior to its flow through the regulator(s). The flow passage and the at least one generally planar filter element are arranged to produce: (i) a change in gas flow conductance in the vicinity of the filter element, and/or (ii) a direction of flow of gas at a non-zero angle with respect to the longitudinal axis of the vessel and/or to the longitudinal axis of the flow passage, for enhancement of capture efficiency of said filter element.

Description

200900128 IX. Inventor's Note: [Technical field to which the moon belongs]: The invention relates to the material library with internal adjustment ability. The inside of the container has a distribution adjustment, and the g is the same. The corpus callosum 5 is equipped with components, and the present invention also relates to the modification of the system and the method of using the container. ^Working Milk [Prior Art] In recent years, the semiconductor industry has been used to supply fluids used in microelectronics processes based on safety considerations to reduce the risk of using a gas cylinder. One such safety gas supply package utilizes a gas distribution and dispensing container that couples the splitter assembly and has a physical absorbent storage medium within the interior volume of the container. Such a gas supply package is a product of the t-brand name and SAGE sold by the company of the United States of America (Danbury, CT, USA) and is described in U.S. Patent No. 5,5,8,528. Since the vapor pressure in the adsorbed state is much lower than the pressure of the high pressure gas cylinder, the adsorbent gas supply package can unexpectedly release the danger of high pressure gas. In recent years, another new gas supply package has been developed which uses a gas release adjustment assembly inside the container, such as a set point pressure regulator. This type of internal adjustment controls the pressure of the gas released from the container. Such gas supplies, such as trademarks sold by ATMI (Danbury, CT, USA), are distributed.

The packaging system is high in oxygen. The SDS can be used to reduce the body supply. The use of the VAC 200900128 is described in more detail in U.S. Patent Nos. 6,101,816 and 6,343,476. A gas release adjustment assembly positioned in the interior volume of the container allows the fluid to be stored in the container at a high pressure, and the gas release adjustment assembly can limit gas release and release the gas at a set point pressure or a regulated pressure, the set point pressure Or the regulated pressure is substantially lower than the storage pressure of the bulk of the fluid in the container. In use, it has been proven that such a gas supply package that can be internally pressure regulated is safe and effective. In various commercial implementations of such packages, the internal gas release conditioning assembly includes a plurality of flow control elements to prevent particles from exiting the container with the dispensing gas and/or to avoid flux fluctuations during gas distribution operations. The situation. In the field, efforts are constantly being made to develop and develop safer and more efficient gas supply packaging. [Summary of the Invention]

The present invention relates to a gas supply apparatus and a method of storing and dispensing a gas distribution container using an internal conditioning material, within which a dispensing adjustment device, such as a pressure actuating gas distribution assembly, is disposed. In one aspect, the invention relates to a gas supply package comprising: an elongate container defining a longitudinal axis of the container and having an internal volume for containing a gas or a gas source material Removing gas from the gas source material under dispensing conditions; and a gas release assembly secured to the container for dispensing gas from the container under dispensing conditions; 6 200900128 The gas release assembly is contained in a gas release member in the interior volume, the gas release member defining an elongated flow passage having a longitudinal axis, and providing at least one substantially planar filter element in the flow passage for flowing through the flow passage Capturing particles in the gas; wherein the flow channel and the at least one substantially planar filter element are configured to produce the following effects:

Varying a change in gas flow conductance near the transition element; and/or directing the airflow at a non-zero angle relative to the longitudinal axis of the container and/or relative to the longitudinal axis of the flow channel to enhance The collection efficiency of the filter element. In a preferred aspect, such a gas supply package has no frit gas filtration elements of sintered metal or frit. Another aspect of the invention relates to a gas supply system comprising a gas supply package as described above, and flow circuitry coupled to the gas release assembly for delivering the dispensed gas to a gas Use location. In yet another aspect, the present invention is directed to a semiconductor fabrication facility that includes such a gas supply system. Another aspect of the invention relates to a fluid filter comprising a filter housing and a polymer film, and supporting the polymer film by a plurality of hole-shaped support plates fixed to the filter housing On the surface of the perforated support plates, the filter housing is configured to allow fluid to flow therethrough such that fluid entering the housing contacts each of the perforated support plates and the polymeric thin film 200900128, while the fluid is from the outer Filter the fluid before it is released. As used herein, the term "membrane" refers to a sheet or web having voids therein, the porosity extending from one side of the sheet or web to the other and filling the entire sheet or Mesh. The pores constituting the porosity may have any suitable size, shape, length, and pore size distribution. The pores are of a suitable size to allow a target permeate species to permeate through the pores within the sheet or mesh while one or more other species in the mixture containing the target permeate species are blocked or blocked from passing . The pores have a size and distribution that allows the film to most advantageously capture the particles such that the particles do not pass through the film. As used herein, the term "frit" refers to an object containing or consisting of particles and/or discrete or discontinuous materials formed under heat and/or pressure, and Forms a solid object with porosity inside. The porosity allows the target permeating species to partially penetrate the object from the outer surface of the outer surface of the object to the fraction of the object, while the mixture containing the target permeating species is blocked or blocked from passing.

Other aspects, features, and embodiments of the present invention are not implemented or configured. One or more other aspects of the cold outer surface portion are more clearly [Embodiment] 8 200900128 The present invention relates to an internally regulated gas supply package comprising a material storage and gas distribution container having a dispensing adjustment disposed in an internal volume of the container A device, such as a pressure actuated gas distribution assembly. In one aspect of the invention, the invention relates to a gas supply package having an elongate container defining a longitudinal axis of the container and having an internal volume for containing a gas or a source of gas a material from which gas can be released under dispensing conditions; and a gas release assembly secured to the container for dispensing gas from the container under the dispensing condition; the gas release component comprising a gas release member in the interior volume, the gas release member defining an elongated flow passage having a longitudinal axis, and having at least one substantially planar transition element in the flow passage for flowing through the Capturing the particles in the gas of the flow channel; wherein the flow channel and the at least one substantially planar filter element are configured to produce the following effects: a change in air permeability is produced adjacent the filter element; and/or relative to the container The direction of the airflow at a non-zero angle relative to the axis and/or the longitudinal axis of the flow channel to enhance the collection efficiency of the filter element. Such gas supply packages contain gas filtering elements that do not contain sintered metal or frit. The gas supply package of the present invention can be constructed such that a sharp angle is defined between the longitudinal axis of the elongate flow channel and the longitudinal axis of the container, the sharp angle being in the range of from about 5 to about 25. The substantially planar filter element of the gas supply package of the present invention may be comprised of 9 200900128 membrane filter elements or comprise a membrane filter element, such as a sheet of polymeric film material, which allows the gas to be supplied to the packaged gas. Passing, but effective as a barrier to prevent particles from passing through the film material, such that the gas dispensed from the gas supply package has fewer particles, preferably substantially free of particles.

In a particular embodiment of the invention, the gas supply package comprises a membrane filter element, the membrane filter element being positioned in position in the gas distribution channel, the hole-shaped support plate being filterable A change in air permeability occurs near the element, and a directional air flow flows into the hole, that is, the solid portion of the hole-shaped support plate diverts the air flow into the holes. In another embodiment, the substantially planar filter element of the gas supply package can be disposed in an array of the plurality of longitudinally spaced disc members positioned in the tubular passage and at least the disc-shaped members. One of them defines a gas flow opening for producing a directional gas flow at a non-zero angle relative to the longitudinal axis of the flow channel. In a particular embodiment, the at least one of the plurality of disc-shaped elements (preferably a plurality of disc-shaped elements) of the array of longitudinally spaced disc members has a plurality of laterally offset slit openings (slatted A slot opening) for guiding a vortex of gas in the tubular passage. The gas supply package can have a gas release member comprising a conduit having a first conduit portion and a second conduit portion, the first conduit portion having a longitudinal axis and the longitudinal axis of the container Consistently, the second conduit portion has a longitudinal axis and the longitudinal axis of the second conduit portion 10 Ο Ο 200900128 has a non-zero angle to the longitudinal axis of the container. The second guide portion f is preferably disposed below the first conduit portion, and the second conduit portion terminates at the lower end and has a casing, the filter element being received in the casing and connected to the first The lower end of the second conduit portion. The first-catheter portion can be lightly coupled to the dust-actuated regulating stomach to respond to the release of gas at a set point pressure below the pressure of the lower-pressure regulator. The gas release member in the gas supply package may comprise 8 'the conduit coupled to a pressure ^ » _ ^ ® knife actuation tone state. The gas supply package of the gas supply package can actuate a regulator to actuate the pressure in the internal volume of the containment. Reserve = Γ: The gas supply enclosure may contain a gas or gas source material ^ ^ . ^ Α and may release a gas distribution ', y from the storage medium under dispensing conditions, and the gas flows from the container to the desired use classification. In — use location. The storage medium can be of any suitable type. The storage medium comprises a physical adsorbent material. In the embodiment, the material £ + λ storage medium comprises an ionic liquid material. The gas release assembly in the gas supply package of the present invention may comprise a fluid filter in an internal volume of the setting - pt., the fluid filter package 11 1 - the filter housing, # AL ± 2 _ the peripheral A substantially planar filter element is mounted therein. The overcrowding device is held between the upstream and downstream hole-shaped support plates as if it were a composite assembly. The substantially planar filter element can comprise a polymeric bond gland_1 丄 ^ * membrane material. Examples of polymer materials that can be used are, for example, polyethylene terephthalate, polysulfone 200900128 (polysulfone), polyimide, and polytetrafluoroethylene. The sheet-like polymer material as the filter element may have any suitable thickness, for example, between 0.07 mm and 〇.2 mm (m m).

In use, the gas supply package container can be filled with a semiconductor manufacturing gas such as arsine, ammonia, argon, boron trifluoride, diborane, carbon dioxide ( Carbon dioxide), carbon monoxide, hydrogen fluoride, phosphine, phosphorous trifluoride, silanes, silicon tetrachloride, tetrafluoroethylene Siiic〇n tetr a fluoride, sulfur hexafluoride, halogen gas, hydride gas, metal organic compound and oxide gas. The gas or gas source material that is controlled after filling can be stored, transferred, and suitably deployed at the desired location of use. The gas supply package at the location of use herein interconnects the gas release assembly of the package with a gas utilization location through a flow line to deliver the dispensed gas to the location. The location of use can be a semiconductor fabrication facility in which a gas supply system containing a gas supply package is used to provide a high purity gas to the semiconductor process performed in the facility. Another aspect of the invention relates to a fluid filter comprising a filter housing and a polymer film, and the polymer is supported by a plurality of hole-shaped support plates fixed to the filter housing Film support at 12

200900128 On the surface of the perforated support plates, the filter housing is disposed to flow such that fluid entering the housing contacts the polymer film of each of the holes and the fluid released from the housing. In a preferred embodiment, the polymeric film comprises 5 and each of the apertured support plates is disposed such that the apertured supports are in register with the apertures of the other apertured support plates and flow through the filter. Referring now to the drawings, FIG. 1 is a cross-sectional elevational view showing an internal adjustment and gas distribution package 100, which can be implemented. The package 100 includes a generally cylindrical fluid reservoir 102 and encloses the cylindrical side end with a bottom plate member 106. The upper end of the container is a neck portion 108 that defines and defines the top portion of the container. As shown, the container wall, floor member and neck portion are surrounded 128. At the neck of the container, the threaded end of the valve head assembly 1 14 is helically engaged with the inner threaded opening of the collar 110. The valve head assembly has a central fluid flow passage 120, the central fluid flow communicates with the central working volume central working volume chamber in the valve head assembly and is then connected to the outlet 124, and the outlet external thread is either designed or Connected to a connector and a phase conduit. A valve element 122 is disposed in the central working volume chamber to provide a fluid-like support plate and front, enriching the i-tetrafluoroethylene, the holes in the plate to facilitate the storage of the gas material of the present invention. The lower part of 104 contains a cylinder 3 (埠). Since the internal cavity plug 11 2 and the piece 1 1 4 contain the channel 1 2 0, the flow chamber is connected. 124 may be associated with a conduit, as shown in the example of Embodiment 13 200900128, the valve element 122 is coupled to a hand wheel, or the valve element is coupled to an automatic valve actuator, other type of controller or actuating device at the valve assembly ( Valve bl〇ck)f, valve head assembly 114 also. Filling passage 116, which is in fluid communication with internal volume 128 of fill ram 116. Thus, as shown, the body can be filled into the container 102, then closed and covered, or the gas can be filled into the container through the regulator, by setting the fluid pressure regulator to A suitably low pressure gas or vapor at a pressure below the set point of the pressure regulator may be a conventional pressure regulator that raises the position of the valve member by a biasing element such as a spring biasing element, and when the pressure is above the force The poppet valve member will remain closed while responding, and when the pressure is at a fixed point pressure, the poppet valve member will open and allow fluid to be established by allowing the pressure regulating valve member to exit the valve seat and thereby allow The impregnation of the gas into the container loads the fluid to be stored and subsequently dispensed into the container. In this way, the container can have only one opening, which allows gas to be released from the container for dispensing, and also allows the container to be filled with fluid first. * The central fluid flow path 间2 中 of the intermediate assembly 1 14 is connected to a connector flow tube 130' and the connector flow tube 130 is connected to the connector 132. The regulator is set to a selected pressure that will release the container. The lower end of the adjuster is coupled to a tubular member 122 which can be filled with a container which is still pressurized. 例如ρ 〇 , for example, may be valued such that a pressure is applied to a set point below the set point. The lifting force of the device, the filling operation: the opening (埠) is connected to the regulating fluid holding (tubular 14 200900128 fitting) 1 36 through the single lower end connection, and the tubular joint is then connected to a filter unit by, for example, butt welding. 134. The filter unit 134 has a diffuser end cap 131 at a lower end thereof. The filter unit may be constructed of stainless steel and the diffuser wall may be formed from sintered stainless steel, such as 316L stainless steel. The filter unit has a wall porosity to allow gas released from the system to remove all particles having a size greater than a predetermined diameter (e.g., greater than 0. 003 microns) at a flow rate of 30 standard liters per minute. Such filter units are available from Mott Corporation (Farmington, CT). In use, pressurized gas is contained within the interior volume 128 of the vessel 102. The gas pressure regulator 1 3 2 is set to a selected set point such that when the valve in the valve head assembly 11 4 is open, gas flows through the filter unit 1 3 4, the joint 1 3 6 , the regulator 1 3 2, the connector The flow tube 130, the central fluid flow channel 120 in the valve head assembly, the central working volume chamber and the outlet 124 provide a distributed gas flow. The valve head assembly can be connected to other lines, conduits, flow controllers, monitoring devices, etc. depending on the needs or requirements of the intended end use of the gas supply package. Figure 2 is a front elevational view of a valve head 240 and associated dual regulator rod assembly embodying the present invention in a preferred embodiment of the invention. The rod assembly includes an upper pressure regulator 242 and a lower pressure regulator 244, and a conduit 246 intermediate the lower pressure regulator 244 and the membrane filter 250, the conduit 250 including a bend 248. The angle defined between the centerline of the rod-like device above the curved portion 248 and the central axis of the conduit below the curved portion 24 is between about 5 and 25 degrees, preferably between 8 and 15 . The best range is between 9 ° and 12. between. 15 200900128 The distribution structure of Figure 2 does not have any sintered metal or frit filter elements. Instead, a membrane filter is used in the pipe of the rod-like device and near the open end of the pipe, and the pipe has Some slightly curved bends. This "bent stick" flow channel is highly advantageous in inducing asymmetrical vortices in the gas in the interior volume of the vessel to provide an extended flow path for the gas and to assist in the separation of solid particles from the distribution gas.

Figure 3 is a front elevational view of a valve head 206 and associated rod-like device embodying various features of the present invention, in accordance with an embodiment of the present invention. In this embodiment, the tube 264 of the rod-like device located below the adjuster 262 has a bend 266 that is bent about 10° such that the lower portion of the tube below the bend is linear and the rod-like device above the adjuster The central axis has an included angle with the central axis of the conduit below the curved portion 266, which in this embodiment is 10°. As shown, the bent portion below the conduit has a membrane filtration device 268 and a bottom opening 270 to allow gas in the interior volume of the gas distribution vessel to enter and flow upward through the membrane filter 2 6 8 Flows into the conduit 264 and flows to the pressure regulator 262. The regulator has an appropriate pressure set point such that the regulator opens when the valve of the valve head opens and the pressure regulator experiences a pressure below the set point. The bend 266 provides a small fluid damping and it is found that the bend 266 allows the membrane filter 268 to replenish the particles well, which may otherwise adversely affect the regulator and the downstream process using the dispensed gas. Figure 4 shows the out-of-package of various filter media 16 200900128 Ο

Diagram of moisture outgassing (ρ ρ b) versus time (minutes). Curve 1 represents ρ τ F Ε film, curve 2 represents nickel frit, curve 3 represents stainless steel refining, curve 4 represents ceramic (Tos) filter, curve 5 represents ceramic (Mem) filter, outgassing performance (outgassing performance ). The test method used to generate this curve is SEMASPEC 90120397B-STD. The results show that the pTFE film is the only filter element that releases less than 1 Oppb of moisture and is superior to nickel and stainless steel filters. No _ metal damper can achieve an impurity content of less than 1 pp ppb after a 4 hour purge. Figure 5 shows the same filter media used in the out-of-package moisture outgassing test, the relationship between oxygen outgassing (ppb) and time (minutes) outside the package. Curve 1 represents the PTFE film and curve 2 represents the PTFE film. For the refining block, curve 3 represents a stainless steel frit, curve 4 represents a ceramic (T〇s) filter, and curve 5 represents a gassing performance of a ceramic (Mem) filter. The test method used to generate the data shown in Figure 5 is SEMAspEc 90 1 20 39 7B-STD. PTFE transitioner expansion. After a one hour wash, hold less than 1 ppm of outgassing. The lowest initial oxygen outgassing is shown' PTFE and stainless steel filter protection Figure 6 shows the water concentration (ppb) and time (in one ^ U knife) of different oversized media exposed to ambient air for μ hours of exposure. relation chart. This figure is not in the moisture outgassing and oxygen outgassing test. The same membrane filter used for π is used. The water release gas after 24 hours of exposure under % * brother

Rolling data, curve 1 represents PTFE bond film 'curve 2 represents nickel frit, curve 3 4 . , chiffon 3 represents stainless steel frit, curve 4 represents ceramic (T〇s) filter, curve 5 represents it) Represents a ceramic (Mem) filter. 17 200900128 used to generate Figure 6

The test method for $data is S E M A S P E C 90120397B-STD. All, over-the-counter, and the device were exposed to an ambient air of 2 21 and a relative humidity of 4 5 % for 24 hours. The results show that the outgassing performance of the PTFE filter is substantially better than the humidity outgassing performance of the town 4 and non-scale steel filters. 々崎ου psig, when different filter media are subjected to differential pressure, differential pressure turbulent flow into the reactor, even (t quasi liters / min) diagram. filter

The media includes the media used in the test of the former 沭 名 J J Jian Jian, the curve 1 represents the PTFE film, the curve 2 represents the 锉p lichens recording block 'curve 3 represents the stainless steel frit, and the curve 4 represents the ceramic ( T〇s) A drop of tears, A & ± ~ The curve of the machine 5 represents the megaman (Mem) filter. Used to produce the 7th image;

The test method for the data is SEMASPEC 901203 97B-STD. In all tested filters, pTFE Filtration S was the lowest differential pressure at all inlet flow rates. The pressure drop of the pTFE filter is 2% less than the pressure drop of the stainless steel filter and is about two-fifths of the pressure drop of the nickel filter. The same type of film (pTFE film, recorded frit, non-recorded steel frit, ceramic (T〇s) filter and different ceramic (Mem) filter) used for the above-described outgassing test t was evaluated for particle removal. The test method used was SEMASPEC 930215 1 1A-STD, which included 60 minutes of steady flow, 60 minutes of pulse flow, 10 minutes of impact flow (impacti ο η), and 3 0 minute steady state flow conditions. The ceramic filter measures most of the particles and the PTFE film performs best and is superior to metal and ceramic filters. Complete testing on PTFE membranes included in the pre-pulse 18 Ο

After the 200900128 (pre-pulse) and flushing steps, a particle challenge of 2 χ 〇 7 /min was then applied and the downstream number was calculated. The PTFE film meets the test acceptance criteria for downstream zero particles. Figure 8 is a photograph of the pTFE filter media used in the above test, showing the microstructure of the material. Figure 9 shows a side cross-sectional view of a flow eliminator 200 that can be used in the gas supply package of the present invention. The flow controller includes a main cylinder 202' having one end coupled to a smaller diameter cylindrical extension 218, a plurality of openings 220 in the elongated portion 218, and the main cylindrical housing 2〇2 being joined to a smaller end The straight cylindrical extension 208 has a plurality of openings 210 in the extended period. The cylindrical extension 208 is seated in a cylindrical shape 204 and coaxial with the cylindrical portion 204 having a distal end 206' for coupling the tubing of the rod-like device in the internal volume of the gas supply container of the present invention. A plurality of longitudinally spaced apart and differently configured discs 212, 214 and 216 are disposed in the main cylindrical outer casing 202. The disc has a central opening for airflow. The disc 214 has slit openings defined by the segments of the disc that are turned outwardly in opposite directions. The disk 216 is laterally offset from the slot opening shown by the disk 2 14 by the laterally offset slit opening of the disk from the disk plane toward the reverse The fragment is defined. In use, after the gas enters the flow device through the cylindrical extension 218, the gas to be dispensed is guided by the slit opening to make the flow granule microscopically move the outer casing of the extended 208 portion open and the transverse 212 The narrow disc has a slit opening control body. 19 200900128 The vortex flows through the cylindrical outer casing 2 0 2 . By vortexing the fluid through the main cylindrical shell, the particles are separated from the fluid stream so that the particles do not drift in the fluid stream and subsequently affect the performance of the regulator in the vessel or affect the receipt of gas from the supply package. The downstream gas utilizes the performance of the process.

Figure 10 shows a perspective view of the gas flow path through the continuous disk member of the flow controller of Figure 9. As shown, the disk assembly 300 includes a top plate 302 having a slit opening 304 through which gas passes in the direction indicated by the arrow , and is oriented downwardly by the opening. The tabs are directed to initiate a fluid vortex as shown between the top tray 302 and the intermediate tray 306, which has a central opening 308 in the middle tray 306. The gas then flows through the central opening 3 0 of the intermediate disk 306 and maintains its vortex state flowing toward the slit opening defined by the tabs that are bent downwardly from the slit structure, so when the fluid exits the slit opening Is to vortex the fluid flow. In this manner, the gas flow is directed along an extended length of flow path relative to the length of the flow controller, and flows through the lack of the disk elements that do not have flow diverter angled slot structures The controller of the piece. Fig. 1 is a partially cutaway side view of a membrane filter 500 which can be used in a gas supply package of various embodiments of the present invention. The filter 500 includes an intake pipe 506 having an open end 502. Intake tube 506 is secured to the main housing 504 of the filter. The main outer casing encloses an inner volume 5 1 2 in which one or more membrane filter elements 51 are disposed such that fluid entering the intake pipe 506 flows through the outer casing 50. 4 of the interior 20 200900128 volume 512 and released to the outlet pipe 508 with an open release end 510. The filter 500 can be disposed in the internal volume in the gas supply packaging container and coupled to the regulator member at its outlet pipe The upstream rod-like tube portion is such that the open end 502 of the filter's intake tube 506 is configured to receive gas to be dispensed from the container and cause fluid blockage and removal of particles from the gas.

Figure 12 is the relationship between the differential pressure and the flow rate of the fluid flowing through the filter type as shown in Figure 11 at 23 °C, when the inlet pressure is 30 psig (upper line) and 60 psig (lower line), respectively. The figure utilizes a die cast PFA structure in an electropolished VAR 3 1 6L stainless steel casing to support a hydrophobic PTFE membrane filter element. This data shows that the differential pressure increases as the flow rate through the filter increases, and the pressure drop across the filter is very small for the magnitude of the absolute pressure introduced into the filter inlet. For a suppressor with a diameter greater than 0 · 0 1 micro, _ .a .. does not have 07 frequency granules, the downstream particle faintness achieved by such a filter is less than liters per liter of the cerebral palsy V u.Uj Particles (particles/liter) and reduced volatilization to less than 10 ppb. Wθ A Α丄*'' ^ Μ The most permeable particle size, the particle lag of PTFE film is removed by the particle retention characteristic exceeding the flow rate per standard liter per minute. 99.9999999% (9 LRV )particle. In general, the membrane substrate used in the gas supply package of the present invention can be constructed using any suitable cage face that is more suitable for the surface free energy PTFE-like polymer material. In the form of a shape, it is as good as a gas-permeable barrier structure. Therefore, the milk supply package & 1 of the present invention makes the gas supply container not require any 21 Ο 200900128 sinter sintered metal matrix or the current smelting device, the metal sintered barrier structure, but utilizes the filter structure more effectively. Economical gas permeable polymeric structure. Gas permeability η will be distressed. (4) The material can be relatively thin. For example, in the same example, the 庳 # # 度 度 度 度 度 度 度 度 度 度 度 度 度 度 度 度 度 度 度 度 度 度 度 度 度 度 度 度 约 孔隙 孔隙 孔隙 孔隙 孔隙Nvwa: *, in the same embodiment, the present invention provides a film filter π-washing characteristic '$ is effective to clean the surface of the glare main screen by generating asymmetry or lateral or flow component The film may, for example, be constructed by a botanical line to 'partially distribute the fluid I filter surface to remove any solids accumulated on the surface. For example, the flow controller of Figure 9 can be used to achieve this self-cleaning capability and applied to a filter of similar construction, the disc-like element of the similarly constructed filter system is replaced by the eleventh The film element shown in the filter of Fig. 13 is a gas supplied according to another embodiment of the present invention. The sickle cuts the front view. The package includes a generally cylindrical container encircling an internal volume 604 for containing gas and/or gas. The source of the gas, for example, can produce vapor or solids to be dispensed when the package is used. In a particular embodiment, the internal volume 604 can comprise; or a milk-derived storage medium from which the gas and/or gas source can be left in the storage medium and from which the storage can be stored under the dispensing conditions. . For example, the storage medium may comprise or consist of a solid phase physical attraction, such as activated carbon, molecular sieves, macroscopically, or other barriers to gases and/or gases than metal, and 'There is a mobile ferry. Turning to provide the disc in the middle and also loading the inner D into the 600 602 source, the liquid I body and/or the reverse medium medium release material 5 · the source of the material 22 200900128 has a suction affinity (sorptive affinity) Other materials from which the gas can be desorbed or extracted under dispensing conditions. Alternatively, the storage medium may comprise or consist of an ionic liquid that retains the gas precursor and which can then be released under dispensing conditions. In a preferred embodiment, the internal volume contains a pore carbon adsorbent, such as a specific form of adsorbent in the form of beads, small pellets, granules, etc. to form an adsorbent bed in the internal volume; or to form a brick a monolithic form of a mass, a mass, a disk, or other large agglomerate, and one or more bulk adsorbent articles are disposed in the interior volume for storing a gas or gas precursor and may be The package is desorbed in the dispensing mode to release a gas or gas precursor. Desorption may be achieved in any suitable manner, such as pressure differential (pressure-mediated desorption), heating (thermal-mediated desorption), and/or concentration difference (mass transfer concentration gradient-mediated desorption), such as The gas stream contacts the adsorbent material through the internal volume. The rod-like device 620 in the interior volume 604 includes an upper conduit 621 that connects the regulator 622 and the valve head assembly 606. The valve head assembly includes a one-piece valve head (as shown) including a valve chamber, and a valve member is disposed in the valve chamber, and the valve member is connectable to the valve member by manual rotation The hand wheel 608 of the valve stem is switched between a fully open valve and a fully closed position of the valve. The valve head also includes a release port 610 that is fluidly coupled to a release line (not shown) for transporting the dispensed gas from the container to a downstream use position, such as to The chemical vapor deposition chamber or the original 23 mesh 622 can be any suitable

Special feature, the particle separation chamber (particulates disengage me nt 200900128 sublayer deposition chamber. '·»· ^ QC1 / rAr m set point regulator or variable set point (adjustable two benefits, such as fixed from the outside of the container The position transmission signal is adjusted: 1. For example, the adjustable set point regulator can be adjusted by the internal or external 詷 _ 谷 谷 602. In the internal volume of the container 602, at 626 The inner Qiu Chuan is extended downward from the inner valley of a duct below the ° |7 to the bottom end 632. The guide-caliber opening 634 allows the gas shovel to be lower than the regulator when the valve head is opened and has a fixed point pressure therein. The direction indicated by the arrow 向上 flows upward to the aligner for distribution. A thin film over-the-counter element 628 is disposed in the upper portion of the catheter coffee below the 624. The membrane filter element is disposed in the The orifice opening of the conduit extends across the entire aperture opening. The membrane transition element can be made of PTFE or other suitable material. As shown in Figure 13, the rod-like device 62 of the gas distribution package has a fixed Special micro, the county JSS ikv can be a, .- .. chamber) 630 'The particle separation chamber 63 〇 is characterized by a lower portion of the lower portion of the outward and upward deployment of the D-eight shape. By this configuration, The cross-sectional area of the flow channel defined by the chamber will gradually increase upward until the middle portion of the chamber. By this incremental cross-sectional area, the flow rate of the dispensed air flow will gradually decrease to allow the particles to separate from the gas stream. Degree. Subsequently, the separated particles will fall out of the distribution gas stream and land on the outwardly and upwardly spreading taste of the lower part of the chamber. Therefore, it does not contain unwanted particles, and the fluid continues. 24 flowing through the chamber

In the upper part of 200900128, the section of the upper portion is increased as the upward direction of the package is being distributed, and the flow velocity of the chamber is increased when the chamber passes over the contracted portion of the chamber 630, and the conduit 626 is entered. And the internal passage of the conduit and the gas flow through the damper 6 2 8 flowing through the passage. The membrane filter 268 can be applied, for example, by any suitable configuration, including a distribution gas having suitable porosity and permeation characteristics, for example, in the manufacture of a microelectronic device comprising a polytetracyclic polymer material ( For example, a polyfluorene or a polythene filter. Alternatively, the membrane filter 628 may be passed through a membrane filter 628 after carbon woven to the desired specific use of the woven or non-woven material, and then the raw filtered gas then flows through the regulator. 622, through the valve in the valve head assembly 606, the release 埠 610 is properly connected to a suitable gas for delivery to the downstream use position. It will be understood that the guide portion under the adjuster 622 (bend) For example, the longitudinal centerline of the conduit 621 above the aligner 622 may be, for example, the longitudinal direction of the bend conduit 646 and the conduit 621 may be between 10 and 30 degrees. In the dispensing operation, the gas supply The release of the package is gradually reduced. In this part, the vertical flow velocity of the gas flow (superficial is made of a material that extends across the entire direction of the film, and Film to make the ultra-cleaning quality of the medium. Filtration of fluoroethylene (PTFE) or its ί, etc.) or other suitable for upper listening. In the distribution mode, the distribution is distributed through the conduit 621 and 610. The flow line is configured such that the tube 626 can include a curved device oriented relative to the angle of adjustment. The angle between the centerline 610 is coupled to a 25 200900128 flow line for transporting the dispensed The gas to a downstream allows the flow line to include piping, tubing, and flow monitoring and control devices such as flow control valves, detectors, additional regulators, temperature monitoring sensors, (restricted oriHce device) The pump, the sampling port or the chamber then opens the valve in the valve head assembly 606, for example by opening the valve via the wheel 605, or by operating the valve with the actuator of the valve head assembly. Subsequently, if the flow line coupled to the gas supply package is at the set point pressure, the regulator 622 will operate to initiate the set point pressure flow. The regulator and needle for this purpose The internal fixed pressure (bellows assembly) or external variable pressure bellows set in contact with the component is normally closed by a spring mounted under the poppet valve. When the bellows assembly feels a lower force When the 'opening of the regulator' causes the bellows to expand and the normal closed position of the biasing is switched to the open position, allowing the gas device to reach the release port and the external flow line. Once the dispensing operation is completed, for example The valve in the valve head assembly 606 is automatically actuated by manual 608 or by the use of a valve coupled to the valve head assembly. The gas in the grain 602 can be used as a raw material, such as can be used to manufacture microelectronic products, Manufacturing semiconductor process equipment or other locations where gas can be dispensed from the container. This, the manifold is the result of the pressure monitoring, the flow of equipment, and so on. Manually rotating the valve in the hand to achieve a low pressure air flow. The type of the device may include a bellows assembly member, wherein the pressure riser valve biased to the set point by the component rotates the handwheel from the flow through the rod to close the handle Types of materials, applications in the cleaning industry. Example 26 200900128 For example, vessel 602 can comprise rhodium, boron trifluoride, phosphine, diborane, decane, or an organometallic source reagent. In the pressure regulating gas supply package using the polymer membrane filter element of the present invention, the package does not have any frit filter element or plug metal matrix filter element, so the pressure drop associated with the filtered gas Can be minimized or eliminated altogether. As a result, the pressure drop of the rod-like device is caused by a plurality of components in the rod-like device, such as the pressure drop across the regulator, the pressure drop across the conduit of the rod-like device, and from the rod-like device. Dividing the pressure drop of the filter element. Furthermore, when the membrane filter is formed of a polymer material such as a fluorinated polymer such as polytetrafluoroethylene or polyethylene terephthalate, it will have a low surface energy, for example, less than 30 ergs/ The surface free energy of cm2. The membrane filter having such characteristics exhibits inconspicuous capillary action and can efficiently remove particles from the gas stream. Therefore, the membrane filter element can achieve substantial progress in comparison to the use of a frit and a sintered metal matrix filter as a filter element in a rod-like device in a pressure regulating vessel. . Prior to the development of the present invention, pressure regulation of high pressure gas source materials containing 50 to 2000 psi " (0.34- 13.8 megaPascals) was considered, and a socket sintered metal filter or a thick frit filter must be used in the container. A satisfactory particle trapping effect can be achieved. The present invention exhibits an unpredictable discovery that the use of a membrane filter effectively removes particles from the distribution gas without significantly impairing or reducing the membrane filter, even in extended use. 27 200900128 Furthermore, deviating the entrance of the rod-like device from the center of the internal volume of the container may have the unpredictable advantage of improving the filtration capacity of the membrane filter, since the airflow is directed by the curved rod-like device configuration such that the airflow is distributed It has a radial flow rate component that sweeps across the surface of the membrane filter, improving filtration and effectiveness.

It will be appreciated that the gas supply package of the present invention using a pressure regulating gas distribution container may use a single or multiple membrane filter elements to improve pressure as compared to a container using a fritted and sintered metal receptacle filter element. Lowering and improving dispensing characteristics; and the curved lower rod configuration is advantageous for maximizing the efficiency of the membrane filter when using the gas supply package. Figure 14 is a front cross-sectional view of a fluid supply package 400 having two internally disposed regulators 410 and 412 and a membrane filter assembly 418 in accordance with an embodiment of the present invention. The fluid supply package includes the container 406 defining an interior volume 408 and having a gas release assembly including a valve head 402 and an internal dual regulator flow line. The lower regulator 412 is coupled to the first conduit 414 and the second conduit 416, the first conduit 414 being coaxial with the longitudinal axis of the vessel 406, and the second conduit 416 is coupled to the first conduit 414 and the filter Component 418. The second conduit 4 16 is disposed at an angle relative to the longitudinal axis of the container to define a sharp angle. Figure 15-19 shows an example of a film filter in a gas release assembly for an inventive gas supply package, which was filed on February 16, 2007 by Anthony DiPrizio, Paul Matthews and Jose Arno and titled 28 200900128 "with polymerization The present invention is described in more detail in U.S. Provisional Application Serial No. 60/901,876, the disclosure of which is incorporated herein by reference.

The fluid filter of the first to fifth embodiments includes a filter housing and a polymer film disposed on a surface of the plurality of hole-shaped support plates, and the hole-shaped support plates are fixed to the filter An outer casing, the filter outer casing being configured to allow fluid to flow therethrough such that the fluid enters the outer casing to contact each of the perforated support plates and the polymeric film used to filter the fluid prior to release of the fluid from the outer casing. In a preferred configuration, the polymeric film comprises polytetrafluoroethylene and each of the apertured support plates is disposed such that the apertures in one of the apertured support plates are aligned with the apertures of the other apertured support plate. Figure 15 is a front cross-sectional view of a filter 700 in accordance with an embodiment of the present invention. The filter 700 includes an upper outer casing member 702 that mates with the threads 706 of the lower outer casing member 704. A filter and a blocker are disposed between the upper and lower outer casing members, and the filter and the blocker comprise a lower hole-shaped floor slab 708, a membrane filter element 7 1 2 disposed on the lower hole-shaped support plate 708, and The upper aperture-shaped support plate 7 1 0 on the membrane filter element 7 1 2 . The edges of the filter assembly are pressed and held in place by the upper and lower outer casing members. As shown, the upper and lower outer casing members can have facing grooves to place the shackles 7 14 and 716 in the grooves. The upper outer casing member 702 defines an upwardly converging passage 722 that communicates with the upper cylindrical passage 724 of the conduit 730. Therefore, the filter is provided with a fluid inlet 720 through which fluid can continuously flow through the lower hole-shaped support plate 708, the membrane filter element 711, and the upper hole 29 200900128 support plate 710, and flow in. Channel 722, and finally access channel 724 Figure 16 is a perspective view of the upper portion of the filter of Figure 15, the upper housing member 70 2 thread 70 6 a and the internal channel 7 2 4 I 730. Figure 17 is a perspective view of the lower portion of the filter of Figure 15, the thread 706b of the lower outer casing member 704, and the inner opening 732 for positioning the upper plate. /, Fig. 18 is a plan view of the hole-shaped support plate 7 1 0 之上 above the filter of Fig. 5, showing a plurality of holes 744 therein. The plate 710 has an outer periphery 742 having a plurality of elongate members 748 that are openable to the inner side of the filter (as shown in Figure 17) Opening 7 3 2) Pairing Coupling Fig. 19 is a bottom perspective view of the filter of Fig. 15 with the lower outer casing member 702 coupled to the lower outer casing member 704. The filter device 760 includes a lower hole-shaped support plate 708 having a plurality of holes 744 for exposing the film member to the inflowing airflow (J over the lower hole-shaped support plate, the membrane filter member and the upper hole) The filter element assembly is spliced and released to the conduit 73 0. • While a number of specific aspects, features, and embodiments have been presented herein, the present invention is understood by those of ordinary skill in the art The application is not limited to this, but can be applied to a variety of other variations, modifications and alternative embodiments. Therefore, the invention should be interpreted and interpreted to the fullest extent, including all changes, modifications and modifications falling within the spirit and scope. An alternative embodiment. The catheter shown therein exhibits a lower hole-like top view, a non-porous 746, and a shell member 〇 display and a component set, and the passage of the plate to illustrate the content and cover the present invention 30 200900128 BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 (previous art) shows a cross-sectional elevation view of an internal conditioning material storage and gas distribution package that can be implemented And to be improved. Fig. 2 a front view of the valve head improved system of the embodiment of the present invention is made by means connected to the rod of the embodiment of FIG opposed.

Figure 3 is a front elevational view of a modified valve head and associated rod assembly embodying the present invention in accordance with an embodiment of the present invention. Figure 4 shows a plot of moisture outgassing (ppb) versus time (minutes) for different filter media. Figure 5 shows the relationship between oxygen outgassing (〇2, ppb) and time (minutes) outside the package of different filter media. Figure 6 shows the water filtration concentration (ppb) versus time (minutes) for different filter media exposed to ambient air for 24 hours. Figure 7 shows a plot of differential pressure versus flow rate (standard liters per minute) for different filter media at differential pressures at 60 psig. Figure 8 is a photomicrograph of a PTFE filter media. Figure 9 shows a side cross-sectional view of a flow controller that can be used in the gas supply package of the present invention. Figure 10 shows a perspective view of the gas flow path through which the gas sequentially flows through the plurality of disk members of the flow controller of Figure 9. Figure 11 is a partially cutaway side elevational view of a membrane filter useful in a gas supply package in accordance with various embodiments of the present invention. Figure 12 is a plot of differential pressure vs. flow rate at 23 °C for inlet pressures of 30 psig (upper 31 200900128 line) and 60 psig (lower line). Figure 13 is a front and partial cutaway view of a gas supply package in accordance with another embodiment of the present invention. Figure 14 is a front elevational cross-sectional view of a fluid supply package having two internally disposed regulators and a membrane filter assembly in accordance with an embodiment of the present invention. Figure 15 is a front cross-sectional view of a filter in accordance with an embodiment of the present invention. Figure 16 is a perspective view of the upper portion of the filter of Figure 15. Figure 17 is a perspective view of the lower portion of the filter of Figure 15. Figure 18 is a top plan view of the orifice plate of the filter of Figure 15. Figure 19 is a bottom perspective view of the filter of Figure 15. [Main • Elements • Symbol Description] 100 Gas Distribution Package 102 Container 104 Cylinder Side Wall 106 Base Plate Member 108 Neck 110 Collar 112 Threaded Plug 114 Valve Head Assembly 116 Filling Channel 118 Hand Wheel 120 Central Fluid Flow Channel 122 Valve Element 124 Outlet 128 Internal Volume 130 Connector Flow Tube 131 Diffusion Gas Cover End 132 A-/T 134 Transmitter Unit 136 Joint 200 Flow Controller 202 Main Cylindrical Shell 204 Cylindrical Section 32 200900128 206 Open End 210 220 open α r 212 , 214 , 21 6 disc 208 , 2 1 8 cylindrical extension 240 valve head 242 upper pressure regulator 244 lower pressure regulator 246 pipe 248 bending portion 250 membrane filter 260 valve head 262 Regulator 264 Pipe 266 Bend 268 Filter Device 270 Bottom Opening 300 Disc Assembly 302 Top Plate 304 Slit Opening 306 Intermediate Disk 308 Central Opening 310 Chassis 400 Fluid Supply Package 402 Valve Head 406 408 internal volume 410, 412 adjustment; i 414 first conduit 416 second conduit 41 B membrane filter assembly 500 membrane filter 502 open end 504 main housing 506 inlet tube 508 outlet tube 510 open release end 512 internal volume 5 14 Membrane filter element 600 gas supply package 602 container 604 internal volume 606 valve head assembly 608 hand wheel 610 release 埠 620 rod device 621 upper conduit 622 regulator 624 conduit 33 200900128 626 conduit 628 membrane erector 630 particle separation chamber 632 Bottom end 634 aperture opening 700 filter 702 upper housing member 704 lower housing member 706 '706a, 706b thread 708 hole-shaped support plate 710 hole-shaped support plate 712 film over-twist element 714, 7 1 6 0-ring 720 fluid into σ 722 Channel 724 Channel 730 Catheter 732 Opening 742 Outer Peripheral 744 Hole 746, 748 Extension Element 760 Over the component component

34

Claims (1)

200900128 X. Patent application scope: 1. A gas supply package comprising: an elongated container defining a longitudinal axis of the container and having an internal volume for containing a gas or gas source material, under dispensing conditions Discharging a gas from the gas source material; and a gas release assembly secured to the container for dispensing gas from the container under the dispensing condition; The gas distribution assembly includes a gas distribution member positioned in the interior volume defining an elongate flow channel having a longitudinal axis and at least one substantially planar filter element positioned in the flow channel For collecting particles from the flowing gas; wherein the flow channel and the at least one substantially planar filter element are configured to: change a gas flow conductance in the vicinity of the filter element; / or a direction of air flow at a non-zero angle with respect to the longitudinal axis of the container and / or with respect to the longitudinal axis of the flow channel to enhance the collection efficiency of the filter element 〇 2. As described in claim 1 A gas supply package wherein the gas supply package has no gas metal filter or frit gas filter elements. 3. The gas supply package of claim 1, wherein the longitudinal axis of the length of the 200900128 shaped flow channel and the longitudinal axis of the container define an acute angle ranging from about 5 degrees to about 5 degrees. About 2 5 °. 4. The gas supply package of claim 1, wherein the at least one substantially planar over-concentrated component comprises a thin film overlying component. 5. The gas supply package of claim 3, wherein the thin film filter element is positioned and held in the channel by a plurality of hole-shaped support plates at the filter element A change in gas flow conductance is generated nearby and a directional gas flow is generated to flow into the holes of the hole-shaped support plates. 6. The gas supply package of claim 1, wherein the at least one substantially planar filter element comprises an array of a plurality of longitudinally spaced disc members disposed in the tubular passage, and wherein At least one of the disc members defines a gas flow opening to cause the gas to produce a directional gas flow at a non-zero angle relative to the longitudinal axis of the flow channel. 7. The gas supply package of claim 6, wherein in the array of the plurality of longitudinally spaced disc members, at least one of the disc members has a laterally offset slit opening (slatted Slot openings) to induce eddy currents in the gas in the tubular passage. 36 200900128 8. The gas supply package of claim 7, wherein the plurality of disk-shaped members of the plurality of disk-shaped members have a plurality of transverse openings (si at ted slot openings) to guide the tubular passage Generate eddy currents. 9. The gas supply package of claim 1, wherein the body release member comprises a conduit comprising a first conduit second conduit portion, the first conduit portion having a longitudinal axis and a longitudinal axis thereof conforming The second conduit portion has a longitudinal axis, and the longitudinal axis of the portion has a non-zero degree between the longitudinal axis of the container. 10. The second conduit portion of the gas supply package of claim 9 is located. Below the first conduit portion, and the tube portion terminates at a lower end and has a housing within the housing and coupled to the lower end of the second conduit portion. 1 1. The first conduit portion of the gas supply package of claim 9 is coupled to a pressure actuating regulator for actuating a set point pressure of the regulator below the pressure. . 1 2. The gas supply package gas release assembly of claim 1, comprising a conduit coupled to a pressure in which the array of gas in the slit is displaced by the gas portion and the container portion Two catheter angles. And wherein the second conductive element is received, wherein the downstream gas releases gas, wherein the actuation adjusts 37 200900128. The gas supply package of claim 1, wherein the gas release assembly comprises at least an actuating regulator positioned in an interior volume of the container. 1 4. The gas supply package of claim 1, wherein the container comprises a physical adsorbent material for storing the gas. The gas supply package of claim 1, wherein the container comprises an ionic liquid material for storing the gas. [1] The gas supply package of claim 1, wherein the gas distribution assembly comprises a first-stage device located in an internal volume of the container, comprising a filter housing having a Q-plane disposed therein Filter elements are positioned between the downstream and the apertured support plates, wherein the substantially planar members comprise a polymeric sheet material. 1 7. The gas supply package according to claim 16, wherein the polymer sheet material comprises a material selected from the group consisting of polyethylene terephthalate, polyimine and polytetrafluoroethylene. a material in the group, wherein the pressure is the one of the gas supply packages in which the body is filtered in the upstream device, wherein the ester, poly 38 200900128 1 8 · as described in claim 16 Wherein the polymeric sheet material comprises a polytetrafluoroethylene material. The gas supply package of claim 16, wherein the polymer sheet material has a thickness of between 〇. 7 mm and about 0 mm 2 mm. The gas supply package of claim 1, wherein the container contains a semiconductor manufacturing gas. 21. The gas supply package of claim 1, wherein the container contains a gas selected from the group consisting of hydrazine, ammonia, argon, boron trifluoride, diborane, carbon dioxide, carbon monoxide, hydrogen fluoride. And a group consisting of phosphine, phosphorus trifluoride, decane, antimony tetrachloride, antimony tetrafluoride, sulfur hexafluoride, i gas, hydride gas, metal organic compound and oxide gas. 22. A gas supply system comprising a gas supply package as described in claim 1 and a flow line coupled to the gas release assembly for delivering the dispensed gas to a gas utilization location. 23. A semiconductor manufacturing facility comprising a gas supply system as described in claim 22 of the patent application. 39