JP2004523350A5 - - Google Patents

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Publication number
JP2004523350A5
JP2004523350A5 JP2002567476A JP2002567476A JP2004523350A5 JP 2004523350 A5 JP2004523350 A5 JP 2004523350A5 JP 2002567476 A JP2002567476 A JP 2002567476A JP 2002567476 A JP2002567476 A JP 2002567476A JP 2004523350 A5 JP2004523350 A5 JP 2004523350A5
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JP
Japan
Prior art keywords
component
substrate
plasma
liquid crystal
crystal polymer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002567476A
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English (en)
Japanese (ja)
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JP2004523350A (ja
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Publication date
Priority claimed from US09/749,921 external-priority patent/US7128804B2/en
Application filed filed Critical
Publication of JP2004523350A publication Critical patent/JP2004523350A/ja
Publication of JP2004523350A5 publication Critical patent/JP2004523350A5/ja
Pending legal-status Critical Current

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JP2002567476A 2000-12-29 2001-11-21 半導体処理装置の耐食性構成要素及びその製造方法 Pending JP2004523350A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/749,921 US7128804B2 (en) 2000-12-29 2000-12-29 Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof
PCT/US2001/043152 WO2002068129A1 (en) 2000-12-29 2001-11-21 Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof

Publications (2)

Publication Number Publication Date
JP2004523350A JP2004523350A (ja) 2004-08-05
JP2004523350A5 true JP2004523350A5 (enExample) 2005-12-22

Family

ID=25015771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002567476A Pending JP2004523350A (ja) 2000-12-29 2001-11-21 半導体処理装置の耐食性構成要素及びその製造方法

Country Status (9)

Country Link
US (3) US7128804B2 (enExample)
EP (1) EP1345703B1 (enExample)
JP (1) JP2004523350A (enExample)
KR (2) KR20080052687A (enExample)
CN (1) CN100434196C (enExample)
AT (1) ATE456985T1 (enExample)
DE (1) DE60141250D1 (enExample)
TW (1) TWI313304B (enExample)
WO (1) WO2002068129A1 (enExample)

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