JP2004296201A5 - - Google Patents

Download PDF

Info

Publication number
JP2004296201A5
JP2004296201A5 JP2003085417A JP2003085417A JP2004296201A5 JP 2004296201 A5 JP2004296201 A5 JP 2004296201A5 JP 2003085417 A JP2003085417 A JP 2003085417A JP 2003085417 A JP2003085417 A JP 2003085417A JP 2004296201 A5 JP2004296201 A5 JP 2004296201A5
Authority
JP
Japan
Prior art keywords
vapor deposition
source according
deposition source
container
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003085417A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004296201A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2003085417A priority Critical patent/JP2004296201A/ja
Priority claimed from JP2003085417A external-priority patent/JP2004296201A/ja
Priority to TW093107925A priority patent/TW200423809A/zh
Priority to KR1020040020632A priority patent/KR20040085002A/ko
Publication of JP2004296201A publication Critical patent/JP2004296201A/ja
Publication of JP2004296201A5 publication Critical patent/JP2004296201A5/ja
Pending legal-status Critical Current

Links

JP2003085417A 2003-03-26 2003-03-26 蒸着源、蒸着装置、有機ｅｌ素子、有機ｅｌ素子の製造方法 Pending JP2004296201A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2003085417A JP2004296201A (ja) 2003-03-26 2003-03-26 蒸着源、蒸着装置、有機ｅｌ素子、有機ｅｌ素子の製造方法
TW093107925A TW200423809A (en) 2003-03-26 2004-03-24 Vapor deposition source, vapor deposition apparatus, organic EL device, and method of manufacturing organic EL device
KR1020040020632A KR20040085002A (ko) 2003-03-26 2004-03-26 증착원, 증착 장치, 유기 ｅｌ 소자 및 이 유기 ｅｌ소자의 제조 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003085417A JP2004296201A (ja) 2003-03-26 2003-03-26 蒸着源、蒸着装置、有機ｅｌ素子、有機ｅｌ素子の製造方法

Publications (2)

Publication Number Publication Date
JP2004296201A JP2004296201A (ja) 2004-10-21
JP2004296201A5 true JP2004296201A5 (enExample) 2005-10-27

Family

ID=33400347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003085417A Pending JP2004296201A (ja) 2003-03-26 2003-03-26 蒸着源、蒸着装置、有機ｅｌ素子、有機ｅｌ素子の製造方法

Country Status (3)

Country Link
JP (1) JP2004296201A (enExample)
KR (1) KR20040085002A (enExample)
TW (1) TW200423809A (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100689189B1 (ko) * 2004-12-28 2007-03-09 동부일렉트로닉스 주식회사 입자 증착 시스템용 용기 및 이를 채용한 입자 증착 시스템
KR20090041316A (ko) * 2007-10-23 2009-04-28 가부시키가이샤 한도오따이 에네루기 켄큐쇼 성막 방법 및 발광 장치의 제작 방법
KR20150026011A (ko) * 2013-08-30 2015-03-11 삼성디스플레이 주식회사 증착원
CN103687240B (zh) 2013-12-17 2016-03-30 深圳市华星光电技术有限公司 过压过流保护电路及电子装置
CN103757591B (zh) * 2013-12-31 2016-03-30 深圳市华星光电技术有限公司 一种坩埚设备及其在液晶面板生产中的应用
CN105590869A (zh) * 2014-10-24 2016-05-18 中芯国际集成电路制造(上海)有限公司 一种半导体器件及其制作方法
KR101746956B1 (ko) * 2015-10-29 2017-06-14 주식회사 포스코 미립자 발생장치 및 이를 포함하는 코팅 시스템
GB2586634B (en) * 2019-08-30 2022-04-20 Dyson Technology Ltd Multizone crucible apparatus
WO2021058093A1 (en) * 2019-09-24 2021-04-01 Applied Materials, Inc. Evaporation apparatus for evaporating a material to be evaporated, evaporation source, and evaporation method

Similar Documents

Publication Publication Date Title
JP5201932B2 (ja) 供給装置、及び有機蒸着装置
CN100340695C (zh) 用于蒸发有机电发光层的蒸发源
KR100687007B1 (ko) 유기전계 발광 소자 제조에 사용되는 유기 박박 증착 장치
CN204417579U (zh) 一种蒸镀装置
CN1743495A (zh) 有机物蒸镀装置
CN104357797B (zh) 一种坩埚用加热装置、坩埚和蒸发源
CN109385605A (zh) 蒸发源装置及其控制方法
CN1623688A (zh) 清洗方法、清洗装置及电光学装置
KR20130045432A (ko) 회전식 증착 장치
KR101030005B1 (ko) 증착 소스
CN103510052B (zh) 一种支撑加热坩埚的装置以及包括它的沉积设备
KR102608846B1 (ko) 증착원 및 그 제조 방법
CN201785478U (zh) 一种蒸镀设备
CN104131253B (zh) 沉积源以及具有其的沉积设备
CN104694883A (zh) 一种坩埚
JP2015116823A (ja) ガスバリア性積層体およびこの製造方法
TWI386499B (zh) 蒸鍍裝置
CN104060227A (zh) 蒸发源及蒸镀装置
JP2012153959A (ja) 真空蒸着装置、有機エレクトロルミネッセンス素子の製造方法及び有機エレクトロルミネッセンス素子
KR20140083503A (ko) 증발원 및 이를 구비한 증착장치
TW201333231A (zh) 用於連續沉積薄膜的設備
KR102114864B1 (ko) 하향식 oled 증착 장치
KR20180066427A (ko) 증발원용 도가니
KR100658731B1 (ko) 증발원 및 이를 구비하는 유기물 증착장치
JP2007113077A (ja) 坩堝