JP2004164837A5 - - Google Patents
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- Publication number
- JP2004164837A5 JP2004164837A5 JP2003382287A JP2003382287A JP2004164837A5 JP 2004164837 A5 JP2004164837 A5 JP 2004164837A5 JP 2003382287 A JP2003382287 A JP 2003382287A JP 2003382287 A JP2003382287 A JP 2003382287A JP 2004164837 A5 JP2004164837 A5 JP 2004164837A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- magnetic
- cofe
- magnetic head
- spacer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 claims 32
- 125000006850 spacer group Chemical group 0.000 claims 16
- 229910003321 CoFe Inorganic materials 0.000 claims 12
- 238000000034 method Methods 0.000 claims 12
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 8
- 230000008878 coupling Effects 0.000 claims 8
- 238000010168 coupling process Methods 0.000 claims 8
- 238000005859 coupling reaction Methods 0.000 claims 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 7
- 239000001301 oxygen Substances 0.000 claims 7
- 229910052760 oxygen Inorganic materials 0.000 claims 7
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims 4
- 230000005290 antiferromagnetic effect Effects 0.000 claims 4
- 229910052786 argon Inorganic materials 0.000 claims 4
- 238000000151 deposition Methods 0.000 claims 3
- 229910016553 CuOx Inorganic materials 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000009499 grossing Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/294,109 US6937448B2 (en) | 2002-11-13 | 2002-11-13 | Spin valve having copper oxide spacer layer with specified coupling field strength between multi-layer free and pinned layer structures |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004164837A JP2004164837A (ja) | 2004-06-10 |
| JP2004164837A5 true JP2004164837A5 (enExample) | 2006-12-14 |
Family
ID=32229776
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003382287A Pending JP2004164837A (ja) | 2002-11-13 | 2003-11-12 | ピン固定磁気層のプラズマ平滑化による強化gmr磁気ヘッド及びその製造方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (2) | US6937448B2 (enExample) |
| JP (1) | JP2004164837A (enExample) |
| CN (1) | CN1315111C (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060042930A1 (en) * | 2004-08-26 | 2006-03-02 | Daniele Mauri | Method for reactive sputter deposition of a magnesium oxide (MgO) tunnel barrier in a magnetic tunnel junction |
| US20060042929A1 (en) * | 2004-08-26 | 2006-03-02 | Daniele Mauri | Method for reactive sputter deposition of an ultra-thin metal oxide film |
| DE112005003336T5 (de) * | 2005-01-05 | 2007-11-22 | ULVAC, Inc., Chigasaki | Verfahren zum Herstellen magnetischer mehrfachgeschichteter Filme |
| US7918014B2 (en) * | 2005-07-13 | 2011-04-05 | Headway Technologies, Inc. | Method of manufacturing a CPP structure with enhanced GMR ratio |
| US7524381B2 (en) * | 2005-12-22 | 2009-04-28 | Hitachi Global Storage Technologies Netherlands B.V. | Method for controlling magnetostriction in a free layer of a magnetoresistive sensor |
| US8094421B2 (en) * | 2007-12-26 | 2012-01-10 | Hitachi Global Storage Technologies Netherlands, B.V. | Current-perpendicular-to-plane (CPP) read sensor with multiple reference layers |
| US8381391B2 (en) * | 2009-06-26 | 2013-02-26 | Western Digital (Fremont), Llc | Method for providing a magnetic recording transducer |
| CN102074266A (zh) * | 2010-12-17 | 2011-05-25 | 电子科技大学 | 一种稳定剩磁态的自旋阀存储单元 |
| US10312433B2 (en) * | 2012-04-06 | 2019-06-04 | Taiwan Semiconductor Manufacturing Company, Ltd | Reduction of capping layer resistance area product for magnetic device applications |
| US9159353B2 (en) * | 2012-05-16 | 2015-10-13 | HGST Netherlands B.V. | Plasma polish for magnetic recording media |
| US8984740B1 (en) | 2012-11-30 | 2015-03-24 | Western Digital (Fremont), Llc | Process for providing a magnetic recording transducer having a smooth magnetic seed layer |
| EP2953178B1 (en) | 2013-02-04 | 2017-11-22 | Alps Electric Co., Ltd. | Giant magnetoresistive element and current sensor using same |
| US9940963B1 (en) | 2016-11-17 | 2018-04-10 | Western Digital Technologies, Inc. | Magnetic media with atom implanted magnetic layer |
Family Cites Families (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4495242A (en) * | 1981-04-02 | 1985-01-22 | Fuji Photo Film Co., Ltd. | Magnetic recording medium |
| JPS59203238A (ja) * | 1983-04-30 | 1984-11-17 | Tdk Corp | 磁気記録媒体の製造方法 |
| US4575475A (en) * | 1983-07-12 | 1986-03-11 | Tdk Corporation | Magnetic recording medium |
| JPH0610856B2 (ja) * | 1984-08-04 | 1994-02-09 | ティーディーケイ株式会社 | 磁気記録媒体 |
| JPH076072B2 (ja) * | 1986-08-08 | 1995-01-25 | 日本ペイント株式会社 | フエライト膜の形成方法 |
| JP3661949B2 (ja) * | 1994-03-11 | 2005-06-22 | 富士写真フイルム株式会社 | 磁気記録媒体 |
| EP0814519B1 (en) * | 1996-06-17 | 2004-01-21 | Sharp Kabushiki Kaisha | Magnetoresistive effect device, process for fabricating the same, and magnetic head produced using the same |
| US6175477B1 (en) * | 1997-12-05 | 2001-01-16 | International Business Machines Corporation | Spin valve sensor with nonmagnetic oxide seed layer |
| JPH11296823A (ja) * | 1998-04-09 | 1999-10-29 | Nec Corp | 磁気抵抗効果素子およびその製造方法、ならびに磁気抵抗効果センサ,磁気記録システム |
| US6738236B1 (en) * | 1998-05-07 | 2004-05-18 | Seagate Technology Llc | Spin valve/GMR sensor using synthetic antiferromagnetic layer pinned by Mn-alloy having a high blocking temperature |
| US6063244A (en) * | 1998-05-21 | 2000-05-16 | International Business Machines Corporation | Dual chamber ion beam sputter deposition system |
| JP3234814B2 (ja) * | 1998-06-30 | 2001-12-04 | 株式会社東芝 | 磁気抵抗効果素子、磁気ヘッド、磁気ヘッドアセンブリ及び磁気記録装置 |
| US6219212B1 (en) * | 1998-09-08 | 2001-04-17 | International Business Machines Corporation | Magnetic tunnel junction head structure with insulating antiferromagnetic layer |
| US6108177A (en) * | 1998-11-19 | 2000-08-22 | International Business Machines Corporation | Tunnel junction structure with FeX ferromagnetic layers |
| JP3833850B2 (ja) | 1999-06-04 | 2006-10-18 | 富士通株式会社 | 磁気センサーとその製造方法および磁気記録装置 |
| US6226159B1 (en) * | 1999-06-25 | 2001-05-01 | International Business Machines Corporation | Multilayered pinned layer of cobalt based films separated by a nickel base film for improved coupling field and GMR for spin valve sensors |
| US6398924B1 (en) * | 1999-06-29 | 2002-06-04 | International Business Machines Corporation | Spin valve sensor with improved pinning field between nickel oxide (NiO) pinning layer and pinned layer |
| US6613240B2 (en) * | 1999-12-06 | 2003-09-02 | Epion Corporation | Method and apparatus for smoothing thin conductive films by gas cluster ion beam |
| US6396669B1 (en) * | 2000-02-08 | 2002-05-28 | International Business Machines Corporation | AP pinned PtMn spin valve read head biased for playback symmetry and magnetic stability |
| JP2001229511A (ja) * | 2000-02-10 | 2001-08-24 | Fujitsu Ltd | 磁気抵抗効果膜、磁気抵抗効果型ヘッド、情報再生装置、および磁気抵抗効果膜製造方法 |
| JP2001308413A (ja) * | 2000-02-18 | 2001-11-02 | Sony Corp | 磁気抵抗効果薄膜、磁気抵抗効果素子及び磁気抵抗効果型磁気ヘッド |
| TW495745B (en) * | 2000-03-09 | 2002-07-21 | Koninkl Philips Electronics Nv | Magnetic field element having a biasing magnetic layer structure |
| US6353318B1 (en) * | 2000-03-10 | 2002-03-05 | Read-Rite Corporation | Magnetoresistive sensor having hard biased current perpendicular to the plane sensor |
| US6306266B1 (en) * | 2000-05-17 | 2001-10-23 | International Business Machines Corporation | Method of making a top spin valve sensor with an in-situ formed seed layer structure for improving sensor performance |
| JP2001358381A (ja) * | 2000-06-14 | 2001-12-26 | Fujitsu Ltd | 磁気抵抗効果膜、磁気抵抗効果型ヘッド、および情報再生装置 |
| JP2002117508A (ja) * | 2000-10-06 | 2002-04-19 | Hitachi Ltd | 磁気ヘッドおよびその製造方法 |
| JP2002150511A (ja) | 2000-11-06 | 2002-05-24 | Fujitsu Ltd | スピンバルブ磁気抵抗素子及びこれを用いる磁気ヘッド |
| US6954342B2 (en) * | 2001-04-30 | 2005-10-11 | Hitachi Global Storage Technologies Netherlands B.V. | Underlayer for high amplitude spin valve sensors |
| US6709767B2 (en) * | 2001-07-31 | 2004-03-23 | Hitachi Global Storage Technologies Netherlands B.V. | In-situ oxidized films for use as cap and gap layers in a spin-valve sensor and methods of manufacture |
| US6600638B2 (en) * | 2001-09-17 | 2003-07-29 | International Business Machines Corporation | Corrosion resistive GMR and MTJ sensors |
| US6731477B2 (en) * | 2001-09-20 | 2004-05-04 | Hitachi Global Storage Technologies Netherlands B.V. | Current-perpendicular-to-plane spin-valve sensor with metallic oxide barrier layer and method of fabrication |
-
2002
- 2002-11-13 US US10/294,109 patent/US6937448B2/en not_active Expired - Fee Related
-
2003
- 2003-11-12 JP JP2003382287A patent/JP2004164837A/ja active Pending
- 2003-11-13 CN CNB2003101149250A patent/CN1315111C/zh not_active Expired - Fee Related
-
2004
- 2004-07-16 US US10/892,581 patent/US7650684B2/en not_active Expired - Fee Related
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