JP2004079223A5 - - Google Patents

Download PDF

Info

Publication number
JP2004079223A5
JP2004079223A5 JP2002234297A JP2002234297A JP2004079223A5 JP 2004079223 A5 JP2004079223 A5 JP 2004079223A5 JP 2002234297 A JP2002234297 A JP 2002234297A JP 2002234297 A JP2002234297 A JP 2002234297A JP 2004079223 A5 JP2004079223 A5 JP 2004079223A5
Authority
JP
Japan
Prior art keywords
conductive
electron source
bonding material
source according
carbon nanotube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002234297A
Other languages
English (en)
Japanese (ja)
Other versions
JP3832402B2 (ja
JP2004079223A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002234297A priority Critical patent/JP3832402B2/ja
Priority claimed from JP2002234297A external-priority patent/JP3832402B2/ja
Priority to TW092119556A priority patent/TWI275565B/zh
Priority to US10/636,701 priority patent/US6930313B2/en
Priority to KR1020030055263A priority patent/KR100686294B1/ko
Publication of JP2004079223A publication Critical patent/JP2004079223A/ja
Publication of JP2004079223A5 publication Critical patent/JP2004079223A5/ja
Application granted granted Critical
Publication of JP3832402B2 publication Critical patent/JP3832402B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2002234297A 2002-08-12 2002-08-12 カーボンナノチューブを有する電子源とそれを用いた電子顕微鏡および電子線描画装置 Expired - Fee Related JP3832402B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2002234297A JP3832402B2 (ja) 2002-08-12 2002-08-12 カーボンナノチューブを有する電子源とそれを用いた電子顕微鏡および電子線描画装置
TW092119556A TWI275565B (en) 2002-08-12 2003-07-17 Emission source having carbon nanotube, electron microscope using this emission source, and electron beam drawing device
US10/636,701 US6930313B2 (en) 2002-08-12 2003-08-08 Emission source having carbon nanotube, electron microscope using this emission source, and electron beam drawing device
KR1020030055263A KR100686294B1 (ko) 2002-08-12 2003-08-11 카본 나노튜브를 갖는 전자원과 그것을 이용한 전자현미경 및 전자선 묘화 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002234297A JP3832402B2 (ja) 2002-08-12 2002-08-12 カーボンナノチューブを有する電子源とそれを用いた電子顕微鏡および電子線描画装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006155551A Division JP3982558B2 (ja) 2006-06-05 2006-06-05 カーボンナノチューブを有する電子源とそれを用いた電子顕微鏡および電子線描画装置

Publications (3)

Publication Number Publication Date
JP2004079223A JP2004079223A (ja) 2004-03-11
JP2004079223A5 true JP2004079223A5 (https=) 2005-02-17
JP3832402B2 JP3832402B2 (ja) 2006-10-11

Family

ID=31492446

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002234297A Expired - Fee Related JP3832402B2 (ja) 2002-08-12 2002-08-12 カーボンナノチューブを有する電子源とそれを用いた電子顕微鏡および電子線描画装置

Country Status (4)

Country Link
US (1) US6930313B2 (https=)
JP (1) JP3832402B2 (https=)
KR (1) KR100686294B1 (https=)
TW (1) TWI275565B (https=)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6528785B1 (en) * 1998-12-03 2003-03-04 Daiken Chemical Co., Ltd. Fusion-welded nanotube surface signal probe and method of attaching nanotube to probe holder
US7879308B1 (en) * 2000-03-17 2011-02-01 University Of Central Florida Research Foundation, Inc. Multiwall carbon nanotube field emitter fabricated by focused ion beam technique
JP4148517B2 (ja) * 2002-01-15 2008-09-10 インターナショナル・ビジネス・マシーンズ・コーポレーション 微細構造
JP3797299B2 (ja) * 2002-08-30 2006-07-12 石川島播磨重工業株式会社 高電圧用カソード及びその接合方法
JP2005032500A (ja) * 2003-07-10 2005-02-03 Hitachi High-Technologies Corp 冷陰極とそれを用いた電子源及び電子線装置
JP4317779B2 (ja) 2004-03-26 2009-08-19 株式会社日立ハイテクノロジーズ 電界放出型電子銃およびそれを用いた電子ビーム応用装置
JP2006049293A (ja) * 2004-06-30 2006-02-16 Hitachi High-Technologies Corp 電界放出型電子銃およびそれを用いた電子ビーム応用装置
JP2006093141A (ja) * 2004-09-24 2006-04-06 Fei Co 電子源及びその電子源を有する荷電粒子装置
JP2006092927A (ja) * 2004-09-24 2006-04-06 Sony Corp 微小電子源装置及びその製造方法、平面型表示装置
EP1641012A3 (en) * 2004-09-24 2008-12-03 FEI Company Electron source with low energy spread
JP2006125846A (ja) * 2004-10-26 2006-05-18 Olympus Corp カンチレバー
KR100660189B1 (ko) 2004-11-12 2006-12-21 한국과학기술원 전해에칭을 이용한 나노팁의 접착장치 및 접착방법
CN100530518C (zh) * 2004-12-25 2009-08-19 鸿富锦精密工业（深圳）有限公司 场发射照明光源
US9287356B2 (en) * 2005-05-09 2016-03-15 Nantero Inc. Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same
KR20070014741A (ko) * 2005-07-29 2007-02-01 삼성에스디아이 주식회사 전자방출원, 그 제조방법 및 이를 채용한 전자 방출 소자
US7735147B2 (en) * 2005-10-13 2010-06-08 The Regents Of The University Of California Probe system comprising an electric-field-aligned probe tip and method for fabricating the same
KR100792385B1 (ko) 2005-12-14 2008-01-09 주식회사 하이닉스반도체 나노팁전자방출원, 그의 제조 방법 및 그를 구비한 나노팁리소그래피 장치
US7544523B2 (en) * 2005-12-23 2009-06-09 Fei Company Method of fabricating nanodevices
US20100258724A1 (en) * 2005-12-28 2010-10-14 Hitachi High-Technologies Corporation Tip-sharpened carbon nanotubes and electron source using thereof
CN101042977B (zh) * 2006-03-22 2011-12-21 清华大学 碳纳米管场发射电子源及其制造方法以及一场发射阵列
CN100573783C (zh) * 2006-04-05 2009-12-23 清华大学 碳纳米管场发射电子源的制造方法
GB2453302B (en) * 2006-06-30 2012-04-18 Shimadzu Corp Electron beam generating apparatus and methods of forming an emitter
JP2008041289A (ja) * 2006-08-02 2008-02-21 Hitachi High-Technologies Corp 電界放出型電子銃およびそれを用いた電子線応用装置
JP2008047309A (ja) * 2006-08-11 2008-02-28 Hitachi High-Technologies Corp 電界放出型電子銃、およびその運転方法
WO2008042920A2 (en) * 2006-10-02 2008-04-10 The Regents Of The University Of California Solid state thermal rectifier
DE102007010463B4 (de) * 2007-03-01 2010-08-26 Sellmair, Josef, Dr. Vorrichtung zur Feldemission von Teilchen
US7847273B2 (en) * 2007-03-30 2010-12-07 Eloret Corporation Carbon nanotube electron gun
KR101118698B1 (ko) * 2007-05-29 2012-03-12 전자빔기술센터 주식회사 시엔티 팁을 이용한 전자 칼럼 및 시엔티 팁을 정렬하는방법
WO2009044564A1 (ja) * 2007-10-05 2009-04-09 Denki Kagaku Kogyo Kabushiki Kaisha 電子源及び電子ビーム装置
CN101499328B (zh) * 2008-02-01 2013-06-05 清华大学 绞线
US20110000703A1 (en) * 2008-02-27 2011-01-06 Japan Science And Technology Agency Carbon nanotube supporting body and process for producing the carbon nanotube supporting body
JP4644723B2 (ja) * 2008-03-31 2011-03-02 株式会社日立ハイテクノロジーズ ナノチューブ探針を有する測定装置
CN101609771B (zh) * 2008-06-20 2010-12-08 清华大学 透射电镜微栅的制备方法
JP2010210449A (ja) * 2009-03-11 2010-09-24 Hitachi High-Technologies Corp 導電性ナノチューブ探針、それを用いた電気特性評価装置及び走査型プローブ顕微鏡
US8729470B2 (en) * 2009-06-14 2014-05-20 DLA Instruments Electron microscope with an emitter operating in medium vacuum
WO2011084146A1 (en) * 2009-12-21 2011-07-14 Dla Instruments, Inc. Electron microscope with an emitter operating in medium vacuum
JP5063715B2 (ja) * 2010-02-04 2012-10-31 株式会社日立ハイテクノロジーズ 電子源，電子銃、それを用いた電子顕微鏡装置及び電子線描画装置
US8766522B1 (en) * 2010-06-02 2014-07-01 The United States Of America As Represented By The Secretary Of The Air Force Carbon nanotube fiber cathode
FR2965102B1 (fr) * 2010-09-17 2016-12-16 Centre Nat De La Rech Scient (Cnrs) Canon a electrons emettant sous haute tension, destine notamment a la microscopie electronique
CN103531423A (zh) * 2013-10-21 2014-01-22 严建新 针状带电粒子束发射体及制作方法
JP6369987B2 (ja) * 2014-12-03 2018-08-08 国立研究開発法人物質・材料研究機構 電子源
JP6704229B2 (ja) * 2015-09-14 2020-06-03 リンテック オブ アメリカ インコーポレーテッドＬｉｎｔｅｃ ｏｆ Ａｍｅｒｉｃａ， Ｉｎｃ． 柔軟性シート、熱伝導部材、導電性部材、帯電防止部材、発熱体、電磁波遮蔽体、及び柔軟性シートの製造方法
CN105712281B (zh) * 2016-02-18 2017-08-04 国家纳米科学中心 一种锥形纳米碳材料功能化针尖及其制备方法
US10566170B2 (en) 2017-09-08 2020-02-18 Electronics And Telecommunications Research Institute X-ray imaging device and driving method thereof
JP2019220559A (ja) * 2018-06-19 2019-12-26 株式会社ニューフレアテクノロジー マルチ荷電粒子ビーム描画装置及びそのビーム評価方法
CN109490580A (zh) * 2018-11-09 2019-03-19 昆明理工大学 一种扫描隧道显微镜针尖的热处理装置
WO2020158297A1 (ja) * 2019-01-30 2020-08-06 国立研究開発法人物質・材料研究機構 エミッタ、それを用いた電子銃および電子機器
US11380511B2 (en) * 2020-03-24 2022-07-05 Fei Company Charged particle beam source
GB2619965A (en) * 2022-06-24 2023-12-27 Aquasium Tech Limited Electron beam emitting assembly
JP7554332B1 (ja) * 2023-09-27 2024-09-19 浜松ホトニクス株式会社 電子源、これを用いた電子銃及びデバイス

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08250054A (ja) * 1995-03-14 1996-09-27 Hitachi Ltd 拡散補給型電子線源およびそれを用いた電子線装置
US6528785B1 (en) * 1998-12-03 2003-03-04 Daiken Chemical Co., Ltd. Fusion-welded nanotube surface signal probe and method of attaching nanotube to probe holder
JP2002162335A (ja) * 2000-11-26 2002-06-07 Yoshikazu Nakayama 垂直式走査型顕微鏡用カンチレバー及びこれを使用した垂直式走査型顕微鏡用プローブ
JP3811004B2 (ja) * 2000-11-26 2006-08-16 喜萬 中山 導電性走査型顕微鏡用プローブ
US6700127B2 (en) * 2002-01-09 2004-03-02 Biomed Solutions Llc Point source for producing electrons beams

Similar Documents

Publication Publication Date Title
JP2004079223A5 (https=)
JP4482010B2 (ja) カーボンナノチューブを利用する電子放出素子及びその製造方法
US7993180B2 (en) Manufacturing method of field emission element having carbon nanotubes
US7772755B2 (en) Thermionic emission device
US10877187B2 (en) Hydrophobic mirror and vehicle using the same
ATE464646T1 (de) Verbesserte feldemission von mit partikeln gemischten kohlenstoffnanoroehren
US7648406B2 (en) Carbon nanotube array element and method for producing the same
US11247430B2 (en) Hydrophobic film
US7973464B2 (en) Field emission element having carbon nanotube and manufacturing method thereof
Chang-Jian et al. Fabrication of carbon nanotube field emission cathodes in patterns by a laser transfer method
CN101290857A (zh) 场发射阴极及其制备方法
US7531206B2 (en) Flexible emitter using high molecular compound and method for fabricating the same
JP2006164896A5 (https=)
CN103730302B (zh) 场发射电子源及场发射装置
CN103730305A (zh) 场发射电子源的制备方法
JP2002093305A (ja) 電子放出陰極
RU171829U1 (ru) Автоэмиссионный катод
KR20040039325A (ko) 전계전자방출소자
US11111175B2 (en) Hydrophobic window, house and vehicle using the same
CN103730303B (zh) 场发射电子源阵列及场发射装置
TW200812453A (en) Substrate structures and fabrication methods thereof
JP3488411B2 (ja) 電界放出チップ
KR101458267B1 (ko) 전계방출용 에미터, 그 제조방법 및 이를 이용한 전계방출장치
KR20140006659A (ko) 탄소나노튜브 구조체, 이의 제조방법 및 이를 이용한 전계방출장치
TWI310202B (en) Method for manufacturing cathode structure of field emission display