JP2004003030A5 - - Google Patents

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Publication number
JP2004003030A5
JP2004003030A5 JP2003156776A JP2003156776A JP2004003030A5 JP 2004003030 A5 JP2004003030 A5 JP 2004003030A5 JP 2003156776 A JP2003156776 A JP 2003156776A JP 2003156776 A JP2003156776 A JP 2003156776A JP 2004003030 A5 JP2004003030 A5 JP 2004003030A5
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JP
Japan
Prior art keywords
plate
thin film
fixing device
magnetic material
deposition apparatus
Prior art date
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JP2003156776A
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English (en)
Japanese (ja)
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JP4545393B2 (ja
JP2004003030A (ja
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Priority claimed from KR1020020030613A external-priority patent/KR100838065B1/ko
Application filed filed Critical
Publication of JP2004003030A publication Critical patent/JP2004003030A/ja
Publication of JP2004003030A5 publication Critical patent/JP2004003030A5/ja
Application granted granted Critical
Publication of JP4545393B2 publication Critical patent/JP4545393B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2003156776A 2002-05-31 2003-06-02 薄膜蒸着装置用基板固定装置及び基板固定方法 Expired - Lifetime JP4545393B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020020030613A KR100838065B1 (ko) 2002-05-31 2002-05-31 박막증착기용 고정장치와 이를 이용한 고정방법

Publications (3)

Publication Number Publication Date
JP2004003030A JP2004003030A (ja) 2004-01-08
JP2004003030A5 true JP2004003030A5 (enExample) 2006-07-27
JP4545393B2 JP4545393B2 (ja) 2010-09-15

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ID=36969574

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003156776A Expired - Lifetime JP4545393B2 (ja) 2002-05-31 2003-06-02 薄膜蒸着装置用基板固定装置及び基板固定方法

Country Status (4)

Country Link
US (2) US7097750B2 (enExample)
JP (1) JP4545393B2 (enExample)
KR (1) KR100838065B1 (enExample)
CN (1) CN100587996C (enExample)

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KR102103176B1 (ko) * 2013-07-17 2020-04-22 주식회사 선익시스템 기판 탈부착 장치
KR102270080B1 (ko) * 2013-10-30 2021-06-29 삼성디스플레이 주식회사 박막 증착 장치
KR102218644B1 (ko) * 2013-12-19 2021-02-23 삼성디스플레이 주식회사 증착 장치
CN106688088B (zh) 2014-08-05 2020-01-10 因特瓦克公司 注入掩膜及对齐
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CN104993070A (zh) * 2015-07-02 2015-10-21 深圳市华星光电技术有限公司 一种制作柔性oled显示器件的方法
CN106337164A (zh) * 2015-07-08 2017-01-18 上海和辉光电有限公司 一种蒸镀装置
KR102396758B1 (ko) * 2015-08-07 2022-05-13 (주)선익시스템 마스크를 이용하는 공정챔버용 처킹시스템
KR102339616B1 (ko) * 2015-08-17 2021-12-17 (주)선익시스템 마스크를 이용하는 공정챔버용 처킹시스템
CN105154830B (zh) * 2015-09-06 2017-04-19 京东方科技集团股份有限公司 一种固定方法和蒸镀方法
JP6298138B2 (ja) * 2015-11-25 2018-03-20 キヤノントッキ株式会社 成膜システム、磁性体部及び膜の製造方法
KR101702785B1 (ko) * 2015-12-02 2017-02-07 에스엔유 프리시젼 주식회사 박막 증착장치
JP6309048B2 (ja) * 2016-07-01 2018-04-11 キヤノントッキ株式会社 マスク吸着装置
CN106756779B (zh) * 2017-01-03 2019-09-06 京东方科技集团股份有限公司 一种磁控溅射台以及磁控溅射装置
JP6785171B2 (ja) * 2017-03-08 2020-11-18 株式会社日本製鋼所 成膜方法および電子装置の製造方法並びにプラズマ原子層成長装置
JP6857522B2 (ja) * 2017-03-17 2021-04-14 株式会社日本製鋼所 成膜方法および電子装置の製造方法並びにマスク保持体
KR102411538B1 (ko) * 2017-09-04 2022-06-22 삼성디스플레이 주식회사 표시 장치의 제조장치 및 표시 장치의 제조방법
CN108060388A (zh) * 2017-12-18 2018-05-22 信利（惠州）智能显示有限公司 一种基板和掩膜板的对位方法
KR102489336B1 (ko) * 2017-12-26 2023-01-19 삼성디스플레이 주식회사 증착 장치 및 이를 이용한 표시 장치의 제조 방법
KR101963982B1 (ko) * 2017-12-27 2019-03-29 캐논 톡키 가부시키가이샤 성막 장치, 성막 방법, 및 전자 디바이스의 제조 방법
KR102036523B1 (ko) * 2017-12-29 2019-10-25 주식회사 에스에프에이 기판 증착장치
KR102020766B1 (ko) * 2017-12-29 2019-09-11 주식회사 에스에프에이 기판 증착장치
CN108110092A (zh) * 2018-02-28 2018-06-01 北京创昱科技有限公司 一种基片装夹装置
KR102591646B1 (ko) * 2018-06-29 2023-10-20 삼성디스플레이 주식회사 증착 장치 및 증착 장치의 마그넷 플레이트 얼라인 방법
CN110004407B (zh) * 2019-05-21 2021-03-02 京东方科技集团股份有限公司 掩膜版组件及其制备方法
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CN112853273B (zh) * 2020-12-31 2022-12-16 南京深光科技有限公司 一种柔性amoled掩模版表面镀膜设备
CN114112573B (zh) * 2021-11-15 2022-06-10 哈尔滨工业大学（威海） 用于介观尺度拉伸试样力学性能测试的磁控溅射成形装置
CN114112574B (zh) * 2021-11-15 2022-06-24 哈尔滨工业大学（威海） 用于介观尺度弯曲试样力学性能测试的磁控溅射成形装置

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