JP2003524892A5 - - Google Patents

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Publication number
JP2003524892A5
JP2003524892A5 JP2001560735A JP2001560735A JP2003524892A5 JP 2003524892 A5 JP2003524892 A5 JP 2003524892A5 JP 2001560735 A JP2001560735 A JP 2001560735A JP 2001560735 A JP2001560735 A JP 2001560735A JP 2003524892 A5 JP2003524892 A5 JP 2003524892A5
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JP
Japan
Prior art keywords
workpiece
radiation
stage
light source
pulses
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JP2001560735A
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English (en)
Japanese (ja)
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JP2003524892A (ja
JP4921673B2 (ja
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Priority claimed from US09/505,605 external-priority patent/US6366308B1/en
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Publication of JP2003524892A publication Critical patent/JP2003524892A/ja
Publication of JP2003524892A5 publication Critical patent/JP2003524892A5/ja
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Publication of JP4921673B2 publication Critical patent/JP4921673B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001560735A 2000-02-16 2000-12-28 レーザー熱加工装置および方法 Expired - Fee Related JP4921673B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/505,605 2000-02-16
US09/505,605 US6366308B1 (en) 2000-02-16 2000-02-16 Laser thermal processing apparatus and method
PCT/US2000/035613 WO2001061407A1 (en) 2000-02-16 2000-12-28 Laser thermal processing apparatus and method

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011226032A Division JP2012023397A (ja) 2000-02-16 2011-10-13 レーザー熱加工装置および方法

Publications (3)

Publication Number Publication Date
JP2003524892A JP2003524892A (ja) 2003-08-19
JP2003524892A5 true JP2003524892A5 (enExample) 2008-01-24
JP4921673B2 JP4921673B2 (ja) 2012-04-25

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Family Applications (2)

Application Number Title Priority Date Filing Date
JP2001560735A Expired - Fee Related JP4921673B2 (ja) 2000-02-16 2000-12-28 レーザー熱加工装置および方法
JP2011226032A Withdrawn JP2012023397A (ja) 2000-02-16 2011-10-13 レーザー熱加工装置および方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2011226032A Withdrawn JP2012023397A (ja) 2000-02-16 2011-10-13 レーザー熱加工装置および方法

Country Status (6)

Country Link
US (1) US6366308B1 (enExample)
EP (1) EP1256030B1 (enExample)
JP (2) JP4921673B2 (enExample)
KR (1) KR100751741B1 (enExample)
DE (1) DE60041833D1 (enExample)
WO (1) WO2001061407A1 (enExample)

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US8610986B2 (en) * 2009-04-06 2013-12-17 The Board Of Trustees Of The University Of Illinois Mirror arrays for maskless photolithography and image display
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