JP2003515037A - 半径方向流ターボ分子真空ポンプ - Google Patents

半径方向流ターボ分子真空ポンプ

Info

Publication number
JP2003515037A
JP2003515037A JP2001538680A JP2001538680A JP2003515037A JP 2003515037 A JP2003515037 A JP 2003515037A JP 2001538680 A JP2001538680 A JP 2001538680A JP 2001538680 A JP2001538680 A JP 2001538680A JP 2003515037 A JP2003515037 A JP 2003515037A
Authority
JP
Japan
Prior art keywords
vacuum pump
vanes
rotor
blades
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001538680A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003515037A5 (enExample
Inventor
ドナルド ケイ． スミス，
マシュー エム． ビセン，
Original Assignee
エムケイエス インストゥルメンツ， インコーポレイテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23757860&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP2003515037(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by エムケイエス インストゥルメンツ， インコーポレイテッド filed Critical エムケイエス インストゥルメンツ， インコーポレイテッド
Publication of JP2003515037A publication Critical patent/JP2003515037A/ja
Publication of JP2003515037A5 publication Critical patent/JP2003515037A5/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/10—Centrifugal pumps for compressing or evacuating
    • F04D17/12—Multi-stage pumps
    • F04D17/127—Multi-stage pumps with radially spaced stages, e.g. for contrarotating type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2001538680A 1999-11-18 2000-11-14 半径方向流ターボ分子真空ポンプ Pending JP2003515037A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/442,712 US6508631B1 (en) 1999-11-18 1999-11-18 Radial flow turbomolecular vacuum pump
US09/442,712 1999-11-18
PCT/US2000/031270 WO2001036825A1 (en) 1999-11-18 2000-11-14 Radial flow turbomolecular vacuum pump

Publications (2)

Publication Number Publication Date
JP2003515037A true JP2003515037A (ja) 2003-04-22
JP2003515037A5 JP2003515037A5 (enExample) 2011-03-03

Family

ID=23757860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001538680A Pending JP2003515037A (ja) 1999-11-18 2000-11-14 半径方向流ターボ分子真空ポンプ

Country Status (5)

Country Link
US (1) US6508631B1 (enExample)
EP (1) EP1234115B1 (enExample)
JP (1) JP2003515037A (enExample)
DE (1) DE60027044T2 (enExample)
WO (1) WO2001036825A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009074537A (ja) * 2007-09-21 2009-04-09 Honeywell Internatl Inc 半径方向に段階的なマイクロスケールのターボ分子ポンプ
JP2019031969A (ja) * 2017-08-09 2019-02-28 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプの回転子を熱する方法

Families Citing this family (18)

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DE10004271A1 (de) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Reibungsvakuumpumpe
DE10353034A1 (de) * 2003-11-13 2005-06-09 Leybold Vakuum Gmbh Mehrstufige Reibungsvakuumpumpe
KR100610012B1 (ko) * 2004-08-16 2006-08-09 삼성전자주식회사 터보 펌프
US8070419B2 (en) * 2008-12-24 2011-12-06 Agilent Technologies, Inc. Spiral pumping stage and vacuum pump incorporating such pumping stage
WO2012165105A1 (ja) * 2011-06-03 2012-12-06 エドワーズ株式会社 真空ポンプ
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
EP2620649B1 (en) 2012-01-27 2019-03-13 Edwards Limited Gas transfer vacuum pump
US12044611B2 (en) 2013-03-15 2024-07-23 Particles Plus, Inc. Particle counter with integrated bootloader
US10352844B2 (en) 2013-03-15 2019-07-16 Particles Plus, Inc. Multiple particle sensors in a particle counter
US10983040B2 (en) 2013-03-15 2021-04-20 Particles Plus, Inc. Particle counter with integrated bootloader
US9677990B2 (en) 2014-04-30 2017-06-13 Particles Plus, Inc. Particle counter with advanced features
US11579072B2 (en) 2013-03-15 2023-02-14 Particles Plus, Inc. Personal air quality monitoring system
US20150063982A1 (en) * 2013-09-01 2015-03-05 Particles Plus, Inc. Multi-stage inflow turbine pump for particle counters
DE102018119747B3 (de) 2018-08-14 2020-02-13 Bruker Daltonik Gmbh Turbomolekularpumpe für massenspektrometer
US11988591B2 (en) 2020-07-01 2024-05-21 Particles Plus, Inc. Modular optical particle counter sensor and apparatus
CN112160919A (zh) * 2020-09-28 2021-01-01 东北大学 涡轮分子泵和包括该分子泵的复合分子泵
CN114165542B (zh) * 2021-10-28 2023-09-26 北京建筑大学 一种在内叶片与外叶片之间设有倾斜槽的通风式制动盘
US20230339792A1 (en) * 2022-04-26 2023-10-26 James Robert Kiner Rotating biological contactor media and shaft/load transfer mechanism

Citations (5)

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JPS58104304A (ja) * 1981-12-09 1983-06-21 ソシエテ・ナシオナル・デテユ−ド・エ・ドウ・コンストリユクシオン・ドウ・モト−ル・ダヴイアシオン↑：エス・エヌ・ウ・セ・エム・ア−″ ロ−タ、及びロ−タ・リムに羽根を取付ける方法
JPS6477792A (en) * 1987-09-16 1989-03-23 Dainippon Screen Mfg Centrifugal high vacuum pump
JPH0299290A (ja) * 1988-10-05 1990-04-11 Komatsu Ltd レーザ加工装置
JPH07128180A (ja) * 1993-10-29 1995-05-19 Shimadzu Corp リークデテクタ
JPH094594A (ja) * 1995-06-19 1997-01-07 Fujitsu Ltd ターボ分子ポンプ

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BE437875A (enExample) *
GB479427A (en) * 1935-05-31 1938-01-31 Gyoergy Jendrassik Improvements in rotary compressors
US2335445A (en) * 1943-01-11 1943-11-30 Richard Edgar Fluid discharging apparatus
US3369737A (en) * 1962-12-10 1968-02-20 Gen Electric Radial flow machine
BE757353A (fr) * 1969-10-27 1971-03-16 Sargent Welch Scientific Co Perfectionnements aux pompes a vide
FR2086525A5 (enExample) 1970-04-01 1971-12-31 Commissariat Energie Atomique
BE790969A (fr) 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives
DE2457783C2 (de) 1974-12-06 1986-10-09 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetische Lagerung
US4252185A (en) 1979-08-27 1981-02-24 Grumman Aerospace Corporation Down pumping heat transfer device
US4375937A (en) 1981-01-28 1983-03-08 Ingersoll-Rand Company Roto-dynamic pump with a backflow recirculator
US4622687A (en) 1981-04-02 1986-11-11 Arthur H. Iversen Liquid cooled anode x-ray tubes
DE3204750C2 (de) 1982-02-11 1984-04-26 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetisch gelagerte Turbomolekularpumpe
FR2589529A1 (fr) * 1985-11-06 1987-05-07 Guimbal Jean Systeme rotatif de compression ou de refoulement a haute pression
JPH07117076B2 (ja) 1989-05-26 1995-12-18 太平洋機工株式会社 ウオータジェット推進機のためのターボ型ポンプ用羽根車およびこの羽根車を有するターボ型ポンプ
GB8921071D0 (en) * 1989-09-18 1989-11-01 Framo Dev Ltd Pump or compressor unit
FR2656658B1 (fr) 1989-12-28 1993-01-29 Cit Alcatel Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.
JPH03237295A (ja) 1990-02-09 1991-10-23 Shimadzu Corp ターボ分子ポンプ
JPH03237296A (ja) 1990-02-09 1991-10-23 Shimadzu Corp ターボ分子ポンプ
IT1241177B (it) 1990-02-16 1993-12-29 Varian Spa Statore per pompa turbomolecolare.
US5238362A (en) 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
IT1250804B (it) 1991-07-10 1995-04-21 Varian Spa Stadio di pompaggio per pompa turbomolecolare
US5697767A (en) 1991-08-23 1997-12-16 Boeing North American, Inc. Integrated turbine and pump assembly
US5358373A (en) 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
US5261793A (en) 1992-08-05 1993-11-16 The United States Of America As Represented By The Secretary Of The Department Of Health And Human Services Miniature mechanical vacuum pump
DE4237050A1 (de) 1992-11-03 1994-05-05 Klein Schanzlin & Becker Ag Bohrlochpumpe
DE4243132C1 (de) 1992-12-19 1994-07-07 Klein Schanzlin & Becker Ag Turbopumpe zur Förderung hochviskoser Stoffe
DE4314418A1 (de) 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
DE4410656A1 (de) 1994-03-26 1995-09-28 Balzers Pfeiffer Gmbh Reibungspumpe
US5456575A (en) 1994-05-16 1995-10-10 Varian Associates, Inc. Non-centric improved pumping stage for turbomolecular pumps
DE4427154A1 (de) 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Reibungspumpe mit Magnetlagerung
DE4427153A1 (de) 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Fluteinrichtung für magnetisch gelagerte Vakuumpumpen
FR2728618B1 (fr) 1994-12-27 1997-03-14 Europ Propulsion Distributeur supersonique d'etage d'entree de turbomachine
US5730580A (en) 1995-03-24 1998-03-24 Concepts Eti, Inc. Turbomachines having rogue vanes
IT237018Y1 (it) 1995-07-10 2000-08-31 Getters Spa Pompa getter perfezionata in particolare per uno strumento dianalisi chimiche portatile
IT1281025B1 (it) 1995-11-10 1998-02-11 Varian Spa Pompa turbomolecolare.
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
DE19632375A1 (de) * 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe
GB9719634D0 (en) * 1997-09-15 1997-11-19 Boc Group Plc Improvements in vacuum pumps
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58104304A (ja) * 1981-12-09 1983-06-21 ソシエテ・ナシオナル・デテユ−ド・エ・ドウ・コンストリユクシオン・ドウ・モト−ル・ダヴイアシオン↑：エス・エヌ・ウ・セ・エム・ア−″ ロ−タ、及びロ−タ・リムに羽根を取付ける方法
JPS6477792A (en) * 1987-09-16 1989-03-23 Dainippon Screen Mfg Centrifugal high vacuum pump
JPH0299290A (ja) * 1988-10-05 1990-04-11 Komatsu Ltd レーザ加工装置
JPH07128180A (ja) * 1993-10-29 1995-05-19 Shimadzu Corp リークデテクタ
JPH094594A (ja) * 1995-06-19 1997-01-07 Fujitsu Ltd ターボ分子ポンプ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009074537A (ja) * 2007-09-21 2009-04-09 Honeywell Internatl Inc 半径方向に段階的なマイクロスケールのターボ分子ポンプ
JP2019031969A (ja) * 2017-08-09 2019-02-28 プファイファー・ヴァキューム・ゲーエムベーハー 真空ポンプの回転子を熱する方法

Also Published As

Publication number Publication date
WO2001036825A1 (en) 2001-05-25
US6508631B1 (en) 2003-01-21
DE60027044T2 (de) 2007-03-29
EP1234115B1 (en) 2006-03-29
EP1234115A1 (en) 2002-08-28
DE60027044D1 (de) 2006-05-18

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