DE60027044T2 - Turbomolekularvakuumpumpe mit radialströmung - Google Patents

Turbomolekularvakuumpumpe mit radialströmung Download PDF

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Publication number
DE60027044T2
DE60027044T2 DE60027044T DE60027044T DE60027044T2 DE 60027044 T2 DE60027044 T2 DE 60027044T2 DE 60027044 T DE60027044 T DE 60027044T DE 60027044 T DE60027044 T DE 60027044T DE 60027044 T2 DE60027044 T2 DE 60027044T2
Authority
DE
Germany
Prior art keywords
vacuum pump
blades
gas
rotor
turbomolecular vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60027044T
Other languages
German (de)
English (en)
Other versions
DE60027044D1 (de
Inventor
K. Donald Belmont SMITH
M. Matthew Andover BESEN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23757860&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE60027044(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Application granted granted Critical
Publication of DE60027044D1 publication Critical patent/DE60027044D1/de
Publication of DE60027044T2 publication Critical patent/DE60027044T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/10—Centrifugal pumps for compressing or evacuating
    • F04D17/12—Multi-stage pumps
    • F04D17/127—Multi-stage pumps with radially spaced stages, e.g. for contrarotating type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE60027044T 1999-11-18 2000-11-14 Turbomolekularvakuumpumpe mit radialströmung Expired - Lifetime DE60027044T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/442,712 US6508631B1 (en) 1999-11-18 1999-11-18 Radial flow turbomolecular vacuum pump
US442712 1999-11-18
PCT/US2000/031270 WO2001036825A1 (en) 1999-11-18 2000-11-14 Radial flow turbomolecular vacuum pump

Publications (2)

Publication Number Publication Date
DE60027044D1 DE60027044D1 (de) 2006-05-18
DE60027044T2 true DE60027044T2 (de) 2007-03-29

Family

ID=23757860

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60027044T Expired - Lifetime DE60027044T2 (de) 1999-11-18 2000-11-14 Turbomolekularvakuumpumpe mit radialströmung

Country Status (5)

Country Link
US (1) US6508631B1 (enExample)
EP (1) EP1234115B1 (enExample)
JP (1) JP2003515037A (enExample)
DE (1) DE60027044T2 (enExample)
WO (1) WO2001036825A1 (enExample)

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* Cited by examiner, † Cited by third party
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DE10004271A1 (de) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Reibungsvakuumpumpe
DE10353034A1 (de) * 2003-11-13 2005-06-09 Leybold Vakuum Gmbh Mehrstufige Reibungsvakuumpumpe
KR100610012B1 (ko) * 2004-08-16 2006-08-09 삼성전자주식회사 터보 펌프
US20090081022A1 (en) * 2007-09-21 2009-03-26 Honeywell International Inc. Radially Staged Microscale Turbomolecular Pump
US8070419B2 (en) * 2008-12-24 2011-12-06 Agilent Technologies, Inc. Spiral pumping stage and vacuum pump incorporating such pumping stage
WO2012165105A1 (ja) * 2011-06-03 2012-12-06 エドワーズ株式会社 真空ポンプ
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
EP2620649B1 (en) 2012-01-27 2019-03-13 Edwards Limited Gas transfer vacuum pump
US12044611B2 (en) 2013-03-15 2024-07-23 Particles Plus, Inc. Particle counter with integrated bootloader
US10352844B2 (en) 2013-03-15 2019-07-16 Particles Plus, Inc. Multiple particle sensors in a particle counter
US10983040B2 (en) 2013-03-15 2021-04-20 Particles Plus, Inc. Particle counter with integrated bootloader
US9677990B2 (en) 2014-04-30 2017-06-13 Particles Plus, Inc. Particle counter with advanced features
US11579072B2 (en) 2013-03-15 2023-02-14 Particles Plus, Inc. Personal air quality monitoring system
US20150063982A1 (en) * 2013-09-01 2015-03-05 Particles Plus, Inc. Multi-stage inflow turbine pump for particle counters
EP3441617B1 (de) * 2017-08-09 2019-12-25 Pfeiffer Vacuum Gmbh Verfahren zum erwärmen eines rotors einer vakuumpumpe
DE102018119747B3 (de) 2018-08-14 2020-02-13 Bruker Daltonik Gmbh Turbomolekularpumpe für massenspektrometer
US11988591B2 (en) 2020-07-01 2024-05-21 Particles Plus, Inc. Modular optical particle counter sensor and apparatus
CN112160919A (zh) * 2020-09-28 2021-01-01 东北大学 涡轮分子泵和包括该分子泵的复合分子泵
CN114165542B (zh) * 2021-10-28 2023-09-26 北京建筑大学 一种在内叶片与外叶片之间设有倾斜槽的通风式制动盘
US20230339792A1 (en) * 2022-04-26 2023-10-26 James Robert Kiner Rotating biological contactor media and shaft/load transfer mechanism

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BE437875A (enExample) *
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US2335445A (en) * 1943-01-11 1943-11-30 Richard Edgar Fluid discharging apparatus
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BE757353A (fr) * 1969-10-27 1971-03-16 Sargent Welch Scientific Co Perfectionnements aux pompes a vide
FR2086525A5 (enExample) 1970-04-01 1971-12-31 Commissariat Energie Atomique
BE790969A (fr) 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives
DE2457783C2 (de) 1974-12-06 1986-10-09 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetische Lagerung
US4252185A (en) 1979-08-27 1981-02-24 Grumman Aerospace Corporation Down pumping heat transfer device
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US4622687A (en) 1981-04-02 1986-11-11 Arthur H. Iversen Liquid cooled anode x-ray tubes
FR2517739A1 (fr) * 1981-12-09 1983-06-10 Snecma Dispositif de montage et de fixation d'aubes a pied marteau de compresseur et de turbine et procede de montage
DE3204750C2 (de) 1982-02-11 1984-04-26 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetisch gelagerte Turbomolekularpumpe
FR2589529A1 (fr) * 1985-11-06 1987-05-07 Guimbal Jean Systeme rotatif de compression ou de refoulement a haute pression
JPS6477792A (en) * 1987-09-16 1989-03-23 Dainippon Screen Mfg Centrifugal high vacuum pump
JPH0813430B2 (ja) * 1988-10-05 1996-02-14 株式会社小松製作所 レーザ加工装置
JPH07117076B2 (ja) 1989-05-26 1995-12-18 太平洋機工株式会社 ウオータジェット推進機のためのターボ型ポンプ用羽根車およびこの羽根車を有するターボ型ポンプ
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FR2656658B1 (fr) 1989-12-28 1993-01-29 Cit Alcatel Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.
JPH03237295A (ja) 1990-02-09 1991-10-23 Shimadzu Corp ターボ分子ポンプ
JPH03237296A (ja) 1990-02-09 1991-10-23 Shimadzu Corp ターボ分子ポンプ
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DE4237050A1 (de) 1992-11-03 1994-05-05 Klein Schanzlin & Becker Ag Bohrlochpumpe
DE4243132C1 (de) 1992-12-19 1994-07-07 Klein Schanzlin & Becker Ag Turbopumpe zur Förderung hochviskoser Stoffe
DE4314418A1 (de) 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
JP2606568B2 (ja) * 1993-10-29 1997-05-07 株式会社島津製作所 リークデテクタ
DE4410656A1 (de) 1994-03-26 1995-09-28 Balzers Pfeiffer Gmbh Reibungspumpe
US5456575A (en) 1994-05-16 1995-10-10 Varian Associates, Inc. Non-centric improved pumping stage for turbomolecular pumps
DE4427154A1 (de) 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Reibungspumpe mit Magnetlagerung
DE4427153A1 (de) 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Fluteinrichtung für magnetisch gelagerte Vakuumpumpen
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US5730580A (en) 1995-03-24 1998-03-24 Concepts Eti, Inc. Turbomachines having rogue vanes
JP3095338B2 (ja) * 1995-06-19 2000-10-03 富士通株式会社 ターボ分子ポンプ
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GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
DE19632375A1 (de) * 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe
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GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump

Also Published As

Publication number Publication date
WO2001036825A1 (en) 2001-05-25
US6508631B1 (en) 2003-01-21
EP1234115B1 (en) 2006-03-29
EP1234115A1 (en) 2002-08-28
DE60027044D1 (de) 2006-05-18
JP2003515037A (ja) 2003-04-22

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8363 Opposition against the patent