JP2003508780A - 静電容量圧力センサーのためのバッフル - Google Patents

静電容量圧力センサーのためのバッフル

Info

Publication number
JP2003508780A
JP2003508780A JP2001522057A JP2001522057A JP2003508780A JP 2003508780 A JP2003508780 A JP 2003508780A JP 2001522057 A JP2001522057 A JP 2001522057A JP 2001522057 A JP2001522057 A JP 2001522057A JP 2003508780 A JP2003508780 A JP 2003508780A
Authority
JP
Japan
Prior art keywords
baffle
diaphragm
housing
opening
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001522057A
Other languages
English (en)
Japanese (ja)
Inventor
ポーリン、ジェームス
ヒンクル、ルーク・ディー
グラジエン、クリス・ピー
Original Assignee
エムケイエス・インストゥルメンツ・インコーポレーテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エムケイエス・インストゥルメンツ・インコーポレーテッド filed Critical エムケイエス・インストゥルメンツ・インコーポレーテッド
Publication of JP2003508780A publication Critical patent/JP2003508780A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0636—Protection against aggressive medium in general using particle filters

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP2001522057A 1999-09-10 2000-09-08 静電容量圧力センサーのためのバッフル Pending JP2003508780A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/394,804 1999-09-10
US09/394,804 US6443015B1 (en) 1999-09-10 1999-09-10 Baffle for a capacitive pressure sensor
PCT/US2000/024862 WO2001018516A1 (en) 1999-09-10 2000-09-08 Baffle for a capacitive pressure sensor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011041671A Division JP5453335B2 (ja) 1999-09-10 2011-02-28 静電容量圧力センサーのためのバッフル

Publications (1)

Publication Number Publication Date
JP2003508780A true JP2003508780A (ja) 2003-03-04

Family

ID=23560493

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2001522057A Pending JP2003508780A (ja) 1999-09-10 2000-09-08 静電容量圧力センサーのためのバッフル
JP2011041671A Expired - Lifetime JP5453335B2 (ja) 1999-09-10 2011-02-28 静電容量圧力センサーのためのバッフル

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2011041671A Expired - Lifetime JP5453335B2 (ja) 1999-09-10 2011-02-28 静電容量圧力センサーのためのバッフル

Country Status (7)

Country Link
US (1) US6443015B1 (enExample)
EP (2) EP1340971B1 (enExample)
JP (2) JP2003508780A (enExample)
KR (1) KR20020033173A (enExample)
DE (2) DE60017954T2 (enExample)
TW (1) TW463039B (enExample)
WO (1) WO2001018516A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007502433A (ja) * 2003-05-16 2007-02-08 エム　ケー　エス　インストルメンツ　インコーポレーテッド 容量性差圧変換器を備えた汚染物質堆積制御バッフル
JP2016526153A (ja) * 2013-04-30 2016-09-01 エム ケー エス インストルメンツ インコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 一体型バッフル付きｍｅｍｓ圧力センサ
JP2019204920A (ja) * 2018-05-25 2019-11-28 東京エレクトロン株式会社 ラジカル失活部品及びこれを用いたプラズマ処理装置、並びにラジカル失活方法

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040099061A1 (en) 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US6901808B1 (en) * 2002-02-12 2005-06-07 Lam Research Corporation Capacitive manometer having reduced process drift
US7252011B2 (en) * 2002-03-11 2007-08-07 Mks Instruments, Inc. Surface area deposition trap
JP4177294B2 (ja) * 2004-06-07 2008-11-05 三菱電機株式会社 圧力センサ装置
US7201057B2 (en) 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7137301B2 (en) 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7141447B2 (en) 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7204150B2 (en) 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
DE102008025045A1 (de) * 2007-06-02 2008-12-04 Marquardt Gmbh Sensor
CN105758579B (zh) 2011-10-11 2019-06-11 Mks 仪器公司 压力传感器
JP6002016B2 (ja) * 2012-11-30 2016-10-05 アズビル株式会社 静電容量型圧力センサ
JP2014126504A (ja) 2012-12-27 2014-07-07 Azbil Corp 静電容量型圧力センサ
JP6231812B2 (ja) * 2013-08-09 2017-11-15 アズビル株式会社 静電容量型圧力センサ
US9430925B2 (en) * 2014-09-05 2016-08-30 Google Inc. Detector unit and sensing chamber therefor with matter retention member and method for making same
EP3109612A1 (en) 2015-06-26 2016-12-28 Nina Wojtas Mems deposition trap for vacuum transducer protection
JP6669553B2 (ja) * 2016-03-29 2020-03-18 ローム株式会社 電子部品
JP6815221B2 (ja) * 2017-02-17 2021-01-20 アズビル株式会社 静電容量型圧力センサ
JP6985071B2 (ja) * 2017-09-05 2021-12-22 アズビル株式会社 異常検知方法および異常検知装置
EP3737926B1 (de) * 2018-01-09 2022-11-16 Kistler Holding AG Schutzvorrichtung
JP2020030066A (ja) 2018-08-21 2020-02-27 アズビル株式会社 圧力センサ
JP2021025957A (ja) 2019-08-08 2021-02-22 アズビル株式会社 圧力センサ
JP7444628B2 (ja) 2020-02-19 2024-03-06 アズビル株式会社 圧力センサ
US11287342B2 (en) * 2020-03-20 2022-03-29 Mks Instruments, Inc. Capacitance manometer with improved baffle for improved detection accuracy
CN114264403A (zh) * 2021-12-03 2022-04-01 北京晨晶精仪电子有限公司 真空规颗粒阻挡结构
CN117928814A (zh) * 2024-01-24 2024-04-26 阿尔法仪器技术(深圳)有限公司 一种新型的微差压传感器芯体

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58101155U (ja) * 1981-12-29 1983-07-09 株式会社大阪真空機器製作所 真空計用ダストトラツプ
JPH0311583A (ja) * 1989-06-08 1991-01-18 Showa Kogyo Kk 面状発熱体およびその製造法
WO1998026263A1 (en) * 1996-12-11 1998-06-18 Mks Instruments, Inc. Fluid pressure sensor with contaminant exclusion system
JPH11201847A (ja) * 1998-01-19 1999-07-30 Fuji Electric Co Ltd 静電容量式圧力センサ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3675072A (en) * 1971-01-28 1972-07-04 Atomic Energy Commission Fast-closing valve system for cyclotrons
US4020674A (en) * 1976-05-19 1977-05-03 Harry Robert Fechter Pipeline leak detector with baffles
JPH0812123B2 (ja) * 1987-11-27 1996-02-07 日本碍子株式会社 圧力センサ
US5271277A (en) * 1991-12-23 1993-12-21 The Boc Group, Inc. Capacitance pressure transducer
JP3011583U (ja) * 1994-11-25 1995-05-30 エヌテーシー工業株式会社 半導体圧力センサを用いた水位検出器
US5808206A (en) * 1996-01-16 1998-09-15 Mks Instruments, Inc. Heated pressure transducer assembly
US5948169A (en) 1998-03-11 1999-09-07 Vanguard International Semiconductor Corporation Apparatus for preventing particle deposition in a capacitance diaphragm gauge

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58101155U (ja) * 1981-12-29 1983-07-09 株式会社大阪真空機器製作所 真空計用ダストトラツプ
JPH0311583A (ja) * 1989-06-08 1991-01-18 Showa Kogyo Kk 面状発熱体およびその製造法
WO1998026263A1 (en) * 1996-12-11 1998-06-18 Mks Instruments, Inc. Fluid pressure sensor with contaminant exclusion system
JPH11201847A (ja) * 1998-01-19 1999-07-30 Fuji Electric Co Ltd 静電容量式圧力センサ

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007502433A (ja) * 2003-05-16 2007-02-08 エム　ケー　エス　インストルメンツ　インコーポレーテッド 容量性差圧変換器を備えた汚染物質堆積制御バッフル
JP2016526153A (ja) * 2013-04-30 2016-09-01 エム ケー エス インストルメンツ インコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 一体型バッフル付きｍｅｍｓ圧力センサ
US10107315B2 (en) 2013-04-30 2018-10-23 Mks Instruments, Inc. MEMS pressure sensors with integrated baffles
JP2019204920A (ja) * 2018-05-25 2019-11-28 東京エレクトロン株式会社 ラジカル失活部品及びこれを用いたプラズマ処理装置、並びにラジカル失活方法
JP7085898B2 (ja) 2018-05-25 2022-06-17 東京エレクトロン株式会社 ラジカル失活部品及びこれを用いたプラズマ処理装置

Also Published As

Publication number Publication date
EP1340971B1 (en) 2005-02-02
EP1214573A1 (en) 2002-06-19
US6443015B1 (en) 2002-09-03
EP1214573B1 (en) 2004-01-21
JP2011149946A (ja) 2011-08-04
KR20020033173A (ko) 2002-05-04
DE60007884T2 (de) 2004-12-16
WO2001018516A1 (en) 2001-03-15
DE60007884D1 (de) 2004-02-26
DE60017954D1 (de) 2005-03-10
EP1340971A2 (en) 2003-09-03
TW463039B (en) 2001-11-11
DE60017954T2 (de) 2006-01-12
JP5453335B2 (ja) 2014-03-26
EP1340971A3 (en) 2003-10-01

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