DE60017954T2 - Stauscheibe für einen kapazitiven Drucksensor - Google Patents

Stauscheibe für einen kapazitiven Drucksensor Download PDF

Info

Publication number
DE60017954T2
DE60017954T2 DE60017954T DE60017954T DE60017954T2 DE 60017954 T2 DE60017954 T2 DE 60017954T2 DE 60017954 T DE60017954 T DE 60017954T DE 60017954 T DE60017954 T DE 60017954T DE 60017954 T2 DE60017954 T2 DE 60017954T2
Authority
DE
Germany
Prior art keywords
membrane
partition
pressure sensor
housing
openings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60017954T
Other languages
German (de)
English (en)
Other versions
DE60017954D1 (de
Inventor
James Poulin
Luke D Hinkle
Chris P Grudzien
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Publication of DE60017954D1 publication Critical patent/DE60017954D1/de
Application granted granted Critical
Publication of DE60017954T2 publication Critical patent/DE60017954T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0636—Protection against aggressive medium in general using particle filters

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE60017954T 1999-09-10 2000-09-08 Stauscheibe für einen kapazitiven Drucksensor Expired - Lifetime DE60017954T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US394804 1999-09-10
US09/394,804 US6443015B1 (en) 1999-09-10 1999-09-10 Baffle for a capacitive pressure sensor

Publications (2)

Publication Number Publication Date
DE60017954D1 DE60017954D1 (de) 2005-03-10
DE60017954T2 true DE60017954T2 (de) 2006-01-12

Family

ID=23560493

Family Applications (2)

Application Number Title Priority Date Filing Date
DE60017954T Expired - Lifetime DE60017954T2 (de) 1999-09-10 2000-09-08 Stauscheibe für einen kapazitiven Drucksensor
DE60007884T Expired - Lifetime DE60007884T2 (de) 1999-09-10 2000-09-08 Stauscheibe für einen kapazitiven drucksensor

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE60007884T Expired - Lifetime DE60007884T2 (de) 1999-09-10 2000-09-08 Stauscheibe für einen kapazitiven drucksensor

Country Status (7)

Country Link
US (1) US6443015B1 (enExample)
EP (2) EP1340971B1 (enExample)
JP (2) JP2003508780A (enExample)
KR (1) KR20020033173A (enExample)
DE (2) DE60017954T2 (enExample)
TW (1) TW463039B (enExample)
WO (1) WO2001018516A1 (enExample)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040099061A1 (en) 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US6901808B1 (en) * 2002-02-12 2005-06-07 Lam Research Corporation Capacitive manometer having reduced process drift
US7252011B2 (en) * 2002-03-11 2007-08-07 Mks Instruments, Inc. Surface area deposition trap
US6993973B2 (en) * 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
JP4177294B2 (ja) * 2004-06-07 2008-11-05 三菱電機株式会社 圧力センサ装置
US7201057B2 (en) 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7137301B2 (en) 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7141447B2 (en) 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7204150B2 (en) 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
DE102008025045A1 (de) * 2007-06-02 2008-12-04 Marquardt Gmbh Sensor
CN105758579B (zh) 2011-10-11 2019-06-11 Mks 仪器公司 压力传感器
JP6002016B2 (ja) * 2012-11-30 2016-10-05 アズビル株式会社 静電容量型圧力センサ
JP2014126504A (ja) 2012-12-27 2014-07-07 Azbil Corp 静電容量型圧力センサ
US10107315B2 (en) * 2013-04-30 2018-10-23 Mks Instruments, Inc. MEMS pressure sensors with integrated baffles
JP6231812B2 (ja) * 2013-08-09 2017-11-15 アズビル株式会社 静電容量型圧力センサ
US9430925B2 (en) * 2014-09-05 2016-08-30 Google Inc. Detector unit and sensing chamber therefor with matter retention member and method for making same
EP3109612A1 (en) 2015-06-26 2016-12-28 Nina Wojtas Mems deposition trap for vacuum transducer protection
JP6669553B2 (ja) * 2016-03-29 2020-03-18 ローム株式会社 電子部品
JP6815221B2 (ja) * 2017-02-17 2021-01-20 アズビル株式会社 静電容量型圧力センサ
JP6985071B2 (ja) * 2017-09-05 2021-12-22 アズビル株式会社 異常検知方法および異常検知装置
EP3737926B1 (de) * 2018-01-09 2022-11-16 Kistler Holding AG Schutzvorrichtung
JP7085898B2 (ja) * 2018-05-25 2022-06-17 東京エレクトロン株式会社 ラジカル失活部品及びこれを用いたプラズマ処理装置
JP2020030066A (ja) 2018-08-21 2020-02-27 アズビル株式会社 圧力センサ
JP2021025957A (ja) 2019-08-08 2021-02-22 アズビル株式会社 圧力センサ
JP7444628B2 (ja) 2020-02-19 2024-03-06 アズビル株式会社 圧力センサ
US11287342B2 (en) * 2020-03-20 2022-03-29 Mks Instruments, Inc. Capacitance manometer with improved baffle for improved detection accuracy
CN114264403A (zh) * 2021-12-03 2022-04-01 北京晨晶精仪电子有限公司 真空规颗粒阻挡结构
CN117928814A (zh) * 2024-01-24 2024-04-26 阿尔法仪器技术(深圳)有限公司 一种新型的微差压传感器芯体

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3675072A (en) * 1971-01-28 1972-07-04 Atomic Energy Commission Fast-closing valve system for cyclotrons
US4020674A (en) * 1976-05-19 1977-05-03 Harry Robert Fechter Pipeline leak detector with baffles
JPS58101155U (ja) * 1981-12-29 1983-07-09 株式会社大阪真空機器製作所 真空計用ダストトラツプ
JPH0812123B2 (ja) * 1987-11-27 1996-02-07 日本碍子株式会社 圧力センサ
JPH0311583A (ja) * 1989-06-08 1991-01-18 Showa Kogyo Kk 面状発熱体およびその製造法
US5271277A (en) * 1991-12-23 1993-12-21 The Boc Group, Inc. Capacitance pressure transducer
JP3011583U (ja) * 1994-11-25 1995-05-30 エヌテーシー工業株式会社 半導体圧力センサを用いた水位検出器
US5808206A (en) * 1996-01-16 1998-09-15 Mks Instruments, Inc. Heated pressure transducer assembly
US5811685A (en) * 1996-12-11 1998-09-22 Mks Instruments, Inc. Fluid pressure sensor with contaminant exclusion system
JPH11201847A (ja) * 1998-01-19 1999-07-30 Fuji Electric Co Ltd 静電容量式圧力センサ
US5948169A (en) 1998-03-11 1999-09-07 Vanguard International Semiconductor Corporation Apparatus for preventing particle deposition in a capacitance diaphragm gauge

Also Published As

Publication number Publication date
EP1340971B1 (en) 2005-02-02
EP1214573A1 (en) 2002-06-19
US6443015B1 (en) 2002-09-03
EP1214573B1 (en) 2004-01-21
JP2011149946A (ja) 2011-08-04
KR20020033173A (ko) 2002-05-04
DE60007884T2 (de) 2004-12-16
WO2001018516A1 (en) 2001-03-15
DE60007884D1 (de) 2004-02-26
DE60017954D1 (de) 2005-03-10
JP2003508780A (ja) 2003-03-04
EP1340971A2 (en) 2003-09-03
TW463039B (en) 2001-11-11
JP5453335B2 (ja) 2014-03-26
EP1340971A3 (en) 2003-10-01

Similar Documents

Publication Publication Date Title
DE60017954T2 (de) Stauscheibe für einen kapazitiven Drucksensor
DE60315957T2 (de) Fangvorrichtung mit oberfläche für ablagerungen
DE69422851T2 (de) Membran-Druckwandler mit einer Stossschutzvorrichtung und Dichtemessgerät mit einem solchen Wandler
DE60002044T2 (de) Sensorgehäuse
DE4034446A1 (de) Gasanalysengeraet mit diffusionsfilter
DE3200507A1 (de) Lufteinlassmessvorrichtung fuer eine brennkraftmaschine
EP3546931B1 (de) Thermoresistiver gassensor, strömungssensor und wärmeleitfähigkeitssensor
US4797175A (en) Method for making solid element fluid filter for removing small particles from fluids
US5015381A (en) Solid element fluid filter for removing small particles from fluids
DE102010001797B4 (de) Mikromechanisches Sensorelement zur kapazitiven Differenzdruckerfassung
DE3002712C2 (enExample)
DE2838023C2 (de) Vorrichtung zur Untersuchung von strömenden Medien
EP1210565B1 (de) Verwendung eines strömungsgleichrichters als kondensationsfalle für eine flüssigkeit in einer gasströmung
DE3741558A1 (de) Vorrichtung zur erfassung der resonanzfrequenz eines mit einem fluid in beruehrung stehenden schwingenden organs
EP0007111A2 (de) Strömungsmesseinrichtung nach dem Prinzip der Kármán'schen Wirbelstrasse
DE102004014919B4 (de) Drucksensor, der eine Metallmembran mit einer Konvexität besitzt
DE102010001537A1 (de) Mikromechanisches Sensorelement zur kapazitiven Druckerfassung
DE68917304T2 (de) Statische drucksonde mit vier platten.
WO2004048915A1 (de) Messumformer mit lecküberwachung
DE102013207629A1 (de) Optischer Sensor
EP0431345A2 (de) Sonde zur Druckmessung eines in einem Rohr strömenden Fluids
DE3527425A1 (de) Messsonde fuer stroemende fluide
EP1379841A1 (de) Wirbelfrequenz-strömungsmesser
EP0433741A1 (de) Verfahren und Vorrichtung zur Detektion von fluidischen, insbesondere gasförmigen oder flüssigen Medien, die nach dem Prinzip der Wärmeleitfähigkeit arbeiten
DE19647201C1 (de) Vorrichtung zur Messung des Wasseranteils in einem Fluid

Legal Events

Date Code Title Description
8364 No opposition during term of opposition