JP2002519575A5 - - Google Patents

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Publication number
JP2002519575A5
JP2002519575A5 JP2000557081A JP2000557081A JP2002519575A5 JP 2002519575 A5 JP2002519575 A5 JP 2002519575A5 JP 2000557081 A JP2000557081 A JP 2000557081A JP 2000557081 A JP2000557081 A JP 2000557081A JP 2002519575 A5 JP2002519575 A5 JP 2002519575A5
Authority
JP
Japan
Prior art keywords
blade
exhaust
radial
molecular pump
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000557081A
Other languages
English (en)
Japanese (ja)
Other versions
JP4086470B2 (ja
JP2002519575A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP1999/003524 external-priority patent/WO2000000746A1/en
Publication of JP2002519575A publication Critical patent/JP2002519575A/ja
Publication of JP2002519575A5 publication Critical patent/JP2002519575A5/ja
Application granted granted Critical
Publication of JP4086470B2 publication Critical patent/JP4086470B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2000557081A 1998-06-30 1999-06-30 ターボ分子ポンプ Expired - Fee Related JP4086470B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP19966898 1998-06-30
JP10-199668 1998-06-30
PCT/JP1999/003524 WO2000000746A1 (en) 1998-06-30 1999-06-30 Turbo-molecular pump

Publications (3)

Publication Number Publication Date
JP2002519575A JP2002519575A (ja) 2002-07-02
JP2002519575A5 true JP2002519575A5 (enExample) 2005-09-29
JP4086470B2 JP4086470B2 (ja) 2008-05-14

Family

ID=16411645

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000557081A Expired - Fee Related JP4086470B2 (ja) 1998-06-30 1999-06-30 ターボ分子ポンプ

Country Status (6)

Country Link
US (1) US6409468B1 (enExample)
EP (1) EP2140144A1 (enExample)
JP (1) JP4086470B2 (enExample)
KR (1) KR20010053279A (enExample)
TW (1) TW504548B (enExample)
WO (1) WO2000000746A1 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3777498B2 (ja) * 2000-06-23 2006-05-24 株式会社荏原製作所 ターボ分子ポンプ
DE10046506A1 (de) * 2000-09-20 2002-03-28 Leybold Vakuum Gmbh Turbomolekularvakuumpumpe mit Rotorschaufelreihen und Statorschaufelreihen
US6503050B2 (en) * 2000-12-18 2003-01-07 Applied Materials Inc. Turbo-molecular pump having enhanced pumping capacity
JP2004263635A (ja) * 2003-03-03 2004-09-24 Tadahiro Omi 真空装置および真空ポンプ
JP2005042709A (ja) * 2003-07-10 2005-02-17 Ebara Corp 真空ポンプ
US7628577B2 (en) * 2006-08-31 2009-12-08 Varian, S.P.A. Vacuum pumps with improved pumping channel configurations
US8070419B2 (en) * 2008-12-24 2011-12-06 Agilent Technologies, Inc. Spiral pumping stage and vacuum pump incorporating such pumping stage
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
JP6228839B2 (ja) * 2013-12-26 2017-11-08 エドワーズ株式会社 真空排気機構、複合型真空ポンプ、および回転体部品
JP6586275B2 (ja) * 2015-01-30 2019-10-02 エドワーズ株式会社 真空ポンプ
JP6390478B2 (ja) * 2015-03-18 2018-09-19 株式会社島津製作所 真空ポンプ
CN105275834B (zh) * 2015-10-27 2018-05-11 上海华鼓鼓风机有限公司 一种低速多级垂直剖分筒型结构的三元流离心鼓风机
JP7357564B2 (ja) * 2020-02-07 2023-10-06 エドワーズ株式会社 真空ポンプ、及び、真空ポンプ構成部品

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
DE2654055B2 (de) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor- und Statorscheibe für Turbomolekularpumpe
JPS60139098U (ja) * 1984-02-24 1985-09-13 セイコ−精機株式会社 組合せ型軸流分子ポンプ
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump
USRE33129E (en) * 1985-04-26 1989-12-12 Hitachi, Ltd. Vacuum pump
JPS6385292A (ja) * 1986-09-29 1988-04-15 Hitachi Ltd 真空ポンプ
JPS6385290A (ja) * 1986-09-29 1988-04-15 Hitachi Ltd 真空ポンプ
DE3922782A1 (de) * 1988-07-12 1990-02-08 Beijing Lab Of Vacuum Physics Molekularpumpe in kombinierter bauart
EP0363503B1 (de) * 1988-10-10 1993-11-24 Leybold Aktiengesellschaft Pumpenstufe für eine Hochvakuumpumpe
IT1241431B (it) 1990-03-09 1994-01-17 Varian Spa Pompa turbomolecolare perfezionata.
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
DE4410656A1 (de) * 1994-03-26 1995-09-28 Balzers Pfeiffer Gmbh Reibungspumpe
JP3510007B2 (ja) * 1995-06-13 2004-03-22 日本原子力研究所 分子ポンプ
JPH0914184A (ja) * 1995-06-28 1997-01-14 Daikin Ind Ltd ターボ分子ポンプ
JP3160504B2 (ja) * 1995-09-05 2001-04-25 三菱重工業株式会社 ターボ分子ポンプ
IT1281025B1 (it) * 1995-11-10 1998-02-11 Varian Spa Pompa turbomolecolare.

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