JP2002372562A5 - - Google Patents

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Publication number
JP2002372562A5
JP2002372562A5 JP2002009492A JP2002009492A JP2002372562A5 JP 2002372562 A5 JP2002372562 A5 JP 2002372562A5 JP 2002009492 A JP2002009492 A JP 2002009492A JP 2002009492 A JP2002009492 A JP 2002009492A JP 2002372562 A5 JP2002372562 A5 JP 2002372562A5
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JP
Japan
Prior art keywords
circuit board
electrode portion
terminal
inspection
electrons
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Application number
JP2002009492A
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English (en)
Japanese (ja)
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JP2002372562A (ja
JP3804047B2 (ja
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Priority to JP2002009492A priority Critical patent/JP3804047B2/ja
Priority claimed from JP2002009492A external-priority patent/JP3804047B2/ja
Publication of JP2002372562A publication Critical patent/JP2002372562A/ja
Publication of JP2002372562A5 publication Critical patent/JP2002372562A5/ja
Application granted granted Critical
Publication of JP3804047B2 publication Critical patent/JP3804047B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2002009492A 2001-04-10 2002-01-18 回路基板の検査装置および検査方法 Expired - Lifetime JP3804047B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002009492A JP3804047B2 (ja) 2001-04-10 2002-01-18 回路基板の検査装置および検査方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001111132 2001-04-10
JP2001-111132 2001-04-10
JP2002009492A JP3804047B2 (ja) 2001-04-10 2002-01-18 回路基板の検査装置および検査方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006067136A Division JP2006184291A (ja) 2001-04-10 2006-03-13 回路基板の検査装置および検査方法

Publications (3)

Publication Number Publication Date
JP2002372562A JP2002372562A (ja) 2002-12-26
JP2002372562A5 true JP2002372562A5 (https=) 2004-10-28
JP3804047B2 JP3804047B2 (ja) 2006-08-02

Family

ID=26613352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002009492A Expired - Lifetime JP3804047B2 (ja) 2001-04-10 2002-01-18 回路基板の検査装置および検査方法

Country Status (1)

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JP (1) JP3804047B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4287255B2 (ja) * 2003-11-27 2009-07-01 日本電産リード株式会社 基板検査装置及び基板検査方法

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