JP2002361598A5 - - Google Patents

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Publication number
JP2002361598A5
JP2002361598A5 JP2001351023A JP2001351023A JP2002361598A5 JP 2002361598 A5 JP2002361598 A5 JP 2002361598A5 JP 2001351023 A JP2001351023 A JP 2001351023A JP 2001351023 A JP2001351023 A JP 2001351023A JP 2002361598 A5 JP2002361598 A5 JP 2002361598A5
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JP
Japan
Prior art keywords
module
detector
data processing
electronic data
velocity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001351023A
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English (en)
Japanese (ja)
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JP2002361598A (ja
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Publication date
Priority claimed from DE10056782A external-priority patent/DE10056782A1/de
Application filed filed Critical
Publication of JP2002361598A publication Critical patent/JP2002361598A/ja
Publication of JP2002361598A5 publication Critical patent/JP2002361598A5/ja
Pending legal-status Critical Current

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JP2001351023A 2000-11-16 2001-11-16 光学システムにおけるモジュールの位置のダイナミックな操作方法 Pending JP2002361598A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10056782.7 2000-11-16
DE10056782A DE10056782A1 (de) 2000-11-16 2000-11-16 Verfahren zur dynamischen Manipulation der Position einer Baugruppe in einem optischen System

Publications (2)

Publication Number Publication Date
JP2002361598A JP2002361598A (ja) 2002-12-18
JP2002361598A5 true JP2002361598A5 (https=) 2005-07-07

Family

ID=7663506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001351023A Pending JP2002361598A (ja) 2000-11-16 2001-11-16 光学システムにおけるモジュールの位置のダイナミックな操作方法

Country Status (6)

Country Link
US (1) US6759670B2 (https=)
EP (1) EP1209502B1 (https=)
JP (1) JP2002361598A (https=)
KR (1) KR20020038513A (https=)
DE (2) DE10056782A1 (https=)
TW (1) TW519573B (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100662872B1 (ko) * 2005-11-22 2007-01-02 삼성전자주식회사 임펄스 신호 획득 방법 및 장치
DE102005062081A1 (de) * 2005-12-22 2007-07-05 Carl Zeiss Smt Ag Projektionsobjektiv mit dezentraler Steuerung
DE102006046200A1 (de) * 2006-09-29 2008-04-03 Carl Zeiss Smt Ag Verfahren und Vorrichtung zur Positionierung eines Elements in einem optischen System
DE102010013298B4 (de) * 2010-03-29 2012-10-04 Carl Zeiss Smt Gmbh Positionierverfahren für eine optische Anordnung einer Projektionsbelichtungsanlage

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4305283A (en) * 1979-08-29 1981-12-15 Whessoe Limited Position determining apparatus
JPS6396613A (ja) * 1986-10-14 1988-04-27 Hitachi Ltd 自動焦点調節装置
DE4236795C1 (de) * 1992-11-01 1993-12-23 Fraunhofer Ges Forschung Vorrichtung zum Justieren von mechanischen Baugruppen insbesondere zum Herstellen eines multi-mirror-Polygons
JP3689783B2 (ja) * 1997-11-21 2005-08-31 コニカミノルタフォトイメージング株式会社 フィードバック周期を一定に維持する方法、並びにそのように制御される駆動制御装置および光学装置
US6560059B1 (en) * 1999-05-07 2003-05-06 Seagate Technology Llc Method and apparatus for suppressing seek-induced vibration in a disc drive

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