|
JP3427944B2
(ja)
|
1993-06-30 |
2003-07-22 |
株式会社安川電機 |
軌跡追従位置決め制御方法
|
|
US5459624A
(en)
|
1993-10-26 |
1995-10-17 |
International Business Machines Corporation |
Activator control method and apparatus for positioning a transducer using a phase plane trajectory trough function for a direct access storage device with estimated velocity and position states
|
|
JP3501304B2
(ja)
|
1994-08-05 |
2004-03-02 |
株式会社安川電機 |
軌跡追従位置決め制御方法
|
|
US6236895B1
(en)
|
1998-09-02 |
2001-05-22 |
Cirrus Logic, Inc. |
Reference estimator in a discrete-time sliding mode controller
|
|
US6185467B1
(en)
|
1998-09-02 |
2001-02-06 |
Cirrus Logic, Inc. |
Adaptive discrete-time sliding mode controller
|
|
US6798611B1
(en)
|
1998-09-02 |
2004-09-28 |
Cirrus Logic, Inc. |
Disk storage system employing a discrete-time sliding mode controller for servo control
|
|
JP3821642B2
(ja)
|
1999-11-17 |
2006-09-13 |
富士通株式会社 |
ディスク装置のヘッド位置決め制御方法及び装置
|
|
MY144124A
(en)
*
|
2002-07-11 |
2011-08-15 |
Molecular Imprints Inc |
Step and repeat imprint lithography systems
|
|
JP4209373B2
(ja)
*
|
2003-10-13 |
2009-01-14 |
エーエスエムエル ネザーランズ ビー.ブイ. |
リソグラフィ装置またはリソグラフィ処理セルの作動方法、リソグラフィ装置およびリソグラフィ処理セル
|
|
US20060082922A1
(en)
|
2004-10-15 |
2006-04-20 |
Teng-Yuan Shih |
Trajectories-based seek
|
|
US7262831B2
(en)
*
|
2004-12-01 |
2007-08-28 |
Asml Netherlands B.V. |
Lithographic projection apparatus and device manufacturing method using such lithographic projection apparatus
|
|
US7442029B2
(en)
|
2005-05-16 |
2008-10-28 |
Asml Netherlands B.V. |
Imprint lithography
|
|
JP4290177B2
(ja)
|
2005-06-08 |
2009-07-01 |
キヤノン株式会社 |
モールド、アライメント方法、パターン形成装置、パターン転写装置、及びチップの製造方法
|
|
JP4819577B2
(ja)
|
2006-05-31 |
2011-11-24 |
キヤノン株式会社 |
パターン転写方法およびパターン転写装置
|
|
JP2008089868A
(ja)
*
|
2006-09-29 |
2008-04-17 |
Fujifilm Corp |
描画点データ取得方法および装置ならびに描画方法および装置
|
|
NL1036290A1
(nl)
|
2007-12-19 |
2009-06-22 |
Asml Netherlands Bv |
Lithographic apparatus.
|
|
US8279401B2
(en)
*
|
2008-04-25 |
2012-10-02 |
Asml Netherlands B.V. |
Position control system, a lithographic apparatus and a method for controlling a position of a movable object
|
|
US8470188B2
(en)
|
2008-10-02 |
2013-06-25 |
Molecular Imprints, Inc. |
Nano-imprint lithography templates
|
|
NL2003453A
(en)
|
2008-10-09 |
2010-04-12 |
Asml Netherlands Bv |
A positioning system, method, and lithographic apparatus.
|
|
US7719782B1
(en)
|
2009-01-07 |
2010-05-18 |
International Business Machines Corporation |
Fast forward magnetic tape cartridge at first mount
|
|
US9142235B1
(en)
|
2009-10-27 |
2015-09-22 |
Western Digital Technologies, Inc. |
Disk drive characterizing microactuator by injecting sinusoidal disturbance and evaluating feed-forward compensation values
|
|
NL2006981A
(en)
*
|
2010-07-26 |
2012-01-30 |
Asml Netherlands Bv |
Position control system, lithographic apparatus, and method to control a position of a movable object.
|
|
US8508881B1
(en)
|
2011-05-26 |
2013-08-13 |
Western Digital Technologies, Inc. |
Disk drive employing system inversion for tuning seek to settle servo loop
|
|
JP5545601B2
(ja)
|
2011-11-07 |
2014-07-09 |
信越化学工業株式会社 |
蛍光体高充填波長変換シート、それを用いた発光半導体装置の製造方法、及び該発光半導体装置
|
|
US8737013B2
(en)
|
2011-11-16 |
2014-05-27 |
Western Digital Technologies, Inc. |
Disk drive selecting disturbance signal for feed-forward compensation
|
|
US9142234B1
(en)
|
2012-06-08 |
2015-09-22 |
Western Digital Technologies, Inc. |
Disk drive employing model-based feed-forward compensation during seek settling
|
|
US8929022B1
(en)
|
2012-12-19 |
2015-01-06 |
Western Digital Technologies, Inc. |
Disk drive detecting microactuator degradation by evaluating frequency component of servo signal
|
|
US9053724B1
(en)
|
2013-08-19 |
2015-06-09 |
Western Digital Technologies, Inc. |
Disk drive actuating first head microactuator while sensing signal from second head microactuator
|
|
JP6438219B2
(ja)
*
|
2014-06-17 |
2018-12-12 |
キヤノン株式会社 |
ステージ装置、リソグラフィ装置、物品の製造方法、および決定方法
|
|
US9418689B2
(en)
|
2014-10-09 |
2016-08-16 |
Western Digital Technologies, Inc. |
Data storage device generating an operating seek time profile as a function of a base seek time profile
|
|
US9208815B1
(en)
|
2014-10-09 |
2015-12-08 |
Western Digital Technologies, Inc. |
Data storage device dynamically reducing coast velocity during seek to reduce power consumption
|
|
US9111575B1
(en)
|
2014-10-23 |
2015-08-18 |
Western Digital Technologies, Inc. |
Data storage device employing adaptive feed-forward control in timing loop to compensate for vibration
|
|
JP6562795B2
(ja)
|
2015-02-12 |
2019-08-21 |
キヤノン株式会社 |
インプリント装置、および物品の製造方法
|
|
NL2016509A
(en)
*
|
2015-04-03 |
2016-10-10 |
Asml Netherlands Bv |
Inspection apparatus for measuring properties of a target structure, methods of operating an optical system, method of manufacturing devices.
|
|
JP2016207926A
(ja)
*
|
2015-04-27 |
2016-12-08 |
株式会社アドバンテスト |
露光装置および露光方法
|
|
JP6436067B2
(ja)
|
2015-11-19 |
2018-12-12 |
オムロン株式会社 |
制御装置、制御方法、情報処理プログラム、および記録媒体
|
|
JP6694717B2
(ja)
*
|
2016-01-25 |
2020-05-20 |
デクセリアルズ株式会社 |
露光装置および露光方法
|
|
US10866510B2
(en)
*
|
2017-07-31 |
2020-12-15 |
Canon Kabushiki Kaisha |
Overlay improvement in nanoimprint lithography
|
|
US10409178B2
(en)
|
2017-12-18 |
2019-09-10 |
Canon Kabushiki Kaisha |
Alignment control in nanoimprint lithography based on real-time system identification
|
|
JP7116552B2
(ja)
|
2018-02-13 |
2022-08-10 |
キヤノン株式会社 |
インプリント装置、および、物品製造方法
|