KR20020038513A - 모듈 또는 부품을 동적으로 조작 및 조정하는 방법 - Google Patents

모듈 또는 부품을 동적으로 조작 및 조정하는 방법 Download PDF

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Publication number
KR20020038513A
KR20020038513A KR1020010070935A KR20010070935A KR20020038513A KR 20020038513 A KR20020038513 A KR 20020038513A KR 1020010070935 A KR1020010070935 A KR 1020010070935A KR 20010070935 A KR20010070935 A KR 20010070935A KR 20020038513 A KR20020038513 A KR 20020038513A
Authority
KR
South Korea
Prior art keywords
module
sub
processing unit
data processing
component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020010070935A
Other languages
English (en)
Korean (ko)
Inventor
아벨레칼-유젠
Original Assignee
케이.그나찌그, 뮬러 리브만
칼-짜이스-스티프퉁 트레이딩 에즈 칼 짜이스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 케이.그나찌그, 뮬러 리브만, 칼-짜이스-스티프퉁 트레이딩 에즈 칼 짜이스 filed Critical 케이.그나찌그, 뮬러 리브만
Publication of KR20020038513A publication Critical patent/KR20020038513A/ko
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems ; Auxiliary parts of microstructural devices or systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Control Of Position Or Direction (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Micromachines (AREA)
  • Lens Barrels (AREA)
KR1020010070935A 2000-11-16 2001-11-15 모듈 또는 부품을 동적으로 조작 및 조정하는 방법 Ceased KR20020038513A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10056782.7 2000-11-16
DE10056782A DE10056782A1 (de) 2000-11-16 2000-11-16 Verfahren zur dynamischen Manipulation der Position einer Baugruppe in einem optischen System

Publications (1)

Publication Number Publication Date
KR20020038513A true KR20020038513A (ko) 2002-05-23

Family

ID=7663506

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020010070935A Ceased KR20020038513A (ko) 2000-11-16 2001-11-15 모듈 또는 부품을 동적으로 조작 및 조정하는 방법

Country Status (6)

Country Link
US (1) US6759670B2 (https=)
EP (1) EP1209502B1 (https=)
JP (1) JP2002361598A (https=)
KR (1) KR20020038513A (https=)
DE (2) DE10056782A1 (https=)
TW (1) TW519573B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100662872B1 (ko) * 2005-11-22 2007-01-02 삼성전자주식회사 임펄스 신호 획득 방법 및 장치

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005062081A1 (de) * 2005-12-22 2007-07-05 Carl Zeiss Smt Ag Projektionsobjektiv mit dezentraler Steuerung
DE102006046200A1 (de) * 2006-09-29 2008-04-03 Carl Zeiss Smt Ag Verfahren und Vorrichtung zur Positionierung eines Elements in einem optischen System
DE102010013298B4 (de) * 2010-03-29 2012-10-04 Carl Zeiss Smt Gmbh Positionierverfahren für eine optische Anordnung einer Projektionsbelichtungsanlage

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4305283A (en) * 1979-08-29 1981-12-15 Whessoe Limited Position determining apparatus
US4857717A (en) * 1986-10-14 1989-08-15 Hitachi, Ltd. Automatic focusing device using a light sensor of center-split type
EP0596301A1 (de) * 1992-11-01 1994-05-11 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Vorrichtung zum Justieren von optischen Bauelementen, insbesondere zum Justieren eines Multi-Mirror-Polygons
JPH11154018A (ja) * 1997-11-21 1999-06-08 Minolta Co Ltd フィードバック周期を一定に維持する方法、並びにそのように制御される駆動制御装置および光学装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6560059B1 (en) * 1999-05-07 2003-05-06 Seagate Technology Llc Method and apparatus for suppressing seek-induced vibration in a disc drive

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4305283A (en) * 1979-08-29 1981-12-15 Whessoe Limited Position determining apparatus
US4857717A (en) * 1986-10-14 1989-08-15 Hitachi, Ltd. Automatic focusing device using a light sensor of center-split type
EP0596301A1 (de) * 1992-11-01 1994-05-11 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Vorrichtung zum Justieren von optischen Bauelementen, insbesondere zum Justieren eines Multi-Mirror-Polygons
JPH11154018A (ja) * 1997-11-21 1999-06-08 Minolta Co Ltd フィードバック周期を一定に維持する方法、並びにそのように制御される駆動制御装置および光学装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100662872B1 (ko) * 2005-11-22 2007-01-02 삼성전자주식회사 임펄스 신호 획득 방법 및 장치

Also Published As

Publication number Publication date
EP1209502A2 (de) 2002-05-29
EP1209502B1 (de) 2004-08-25
TW519573B (en) 2003-02-01
US6759670B2 (en) 2004-07-06
DE50103386D1 (de) 2004-09-30
JP2002361598A (ja) 2002-12-18
DE10056782A1 (de) 2002-05-23
EP1209502A3 (de) 2003-08-27
US20020074529A1 (en) 2002-06-20

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