JP2002361598A - 光学システムにおけるモジュールの位置のダイナミックな操作方法 - Google Patents

光学システムにおけるモジュールの位置のダイナミックな操作方法

Info

Publication number
JP2002361598A
JP2002361598A JP2001351023A JP2001351023A JP2002361598A JP 2002361598 A JP2002361598 A JP 2002361598A JP 2001351023 A JP2001351023 A JP 2001351023A JP 2001351023 A JP2001351023 A JP 2001351023A JP 2002361598 A JP2002361598 A JP 2002361598A
Authority
JP
Japan
Prior art keywords
speed
processing unit
data processing
module
electronic data
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001351023A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002361598A5 (https=
Inventor
Karl-Eugen Aubele
カール−オイゲン・オーベレ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss AG
Original Assignee
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss AG filed Critical Carl Zeiss AG
Publication of JP2002361598A publication Critical patent/JP2002361598A/ja
Publication of JP2002361598A5 publication Critical patent/JP2002361598A5/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems ; Auxiliary parts of microstructural devices or systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Control Of Position Or Direction (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Micromachines (AREA)
  • Lens Barrels (AREA)
JP2001351023A 2000-11-16 2001-11-16 光学システムにおけるモジュールの位置のダイナミックな操作方法 Pending JP2002361598A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10056782.7 2000-11-16
DE10056782A DE10056782A1 (de) 2000-11-16 2000-11-16 Verfahren zur dynamischen Manipulation der Position einer Baugruppe in einem optischen System

Publications (2)

Publication Number Publication Date
JP2002361598A true JP2002361598A (ja) 2002-12-18
JP2002361598A5 JP2002361598A5 (https=) 2005-07-07

Family

ID=7663506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001351023A Pending JP2002361598A (ja) 2000-11-16 2001-11-16 光学システムにおけるモジュールの位置のダイナミックな操作方法

Country Status (6)

Country Link
US (1) US6759670B2 (https=)
EP (1) EP1209502B1 (https=)
JP (1) JP2002361598A (https=)
KR (1) KR20020038513A (https=)
DE (2) DE10056782A1 (https=)
TW (1) TW519573B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011211201A (ja) * 2010-03-29 2011-10-20 Carl Zeiss Smt Gmbh 投影照明システムの光学装置用の位置合わせ方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100662872B1 (ko) * 2005-11-22 2007-01-02 삼성전자주식회사 임펄스 신호 획득 방법 및 장치
DE102005062081A1 (de) * 2005-12-22 2007-07-05 Carl Zeiss Smt Ag Projektionsobjektiv mit dezentraler Steuerung
DE102006046200A1 (de) * 2006-09-29 2008-04-03 Carl Zeiss Smt Ag Verfahren und Vorrichtung zur Positionierung eines Elements in einem optischen System

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4305283A (en) * 1979-08-29 1981-12-15 Whessoe Limited Position determining apparatus
JPS6396613A (ja) * 1986-10-14 1988-04-27 Hitachi Ltd 自動焦点調節装置
DE4236795C1 (de) * 1992-11-01 1993-12-23 Fraunhofer Ges Forschung Vorrichtung zum Justieren von mechanischen Baugruppen insbesondere zum Herstellen eines multi-mirror-Polygons
JP3689783B2 (ja) * 1997-11-21 2005-08-31 コニカミノルタフォトイメージング株式会社 フィードバック周期を一定に維持する方法、並びにそのように制御される駆動制御装置および光学装置
US6560059B1 (en) * 1999-05-07 2003-05-06 Seagate Technology Llc Method and apparatus for suppressing seek-induced vibration in a disc drive

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011211201A (ja) * 2010-03-29 2011-10-20 Carl Zeiss Smt Gmbh 投影照明システムの光学装置用の位置合わせ方法
US8810934B2 (en) 2010-03-29 2014-08-19 Carl Zeiss Smt Gmbh Positioning method for an optical arrangement of a projection illumination system

Also Published As

Publication number Publication date
EP1209502A2 (de) 2002-05-29
KR20020038513A (ko) 2002-05-23
EP1209502B1 (de) 2004-08-25
TW519573B (en) 2003-02-01
US6759670B2 (en) 2004-07-06
DE50103386D1 (de) 2004-09-30
DE10056782A1 (de) 2002-05-23
EP1209502A3 (de) 2003-08-27
US20020074529A1 (en) 2002-06-20

Similar Documents

Publication Publication Date Title
JP2964915B2 (ja) レンズ駆動制御装置
EP0762255B1 (en) Drive control apparatus
US7209219B2 (en) System for controlling a position of a mass
TWI355565B (en) System and method for moving a component through a
JP2000036531A (ja) 位置決め装置およびステ―ジ制御方法
JP2008199020A (ja) リソグラフィ装置およびデバイス製造方法
JP2007034781A (ja) 位置決め制御装置の制御パラメータ調整方法
JP2002361598A (ja) 光学システムにおけるモジュールの位置のダイナミックな操作方法
US6287735B2 (en) Method and apparatus for controlling the leveling table of a wafer stage
WO2019208109A1 (ja) 制御システム、制御方法、および制御プログラム
US7154242B2 (en) Moving member mechanism and control method therefor
US9762167B2 (en) Computer-readable storage medium, generating method, generating apparatus, driving apparatus, processing apparatus, lithography apparatus, and method of manufacturing article
US20070236163A1 (en) Method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device
JP3437327B2 (ja) 半導体露光装置の位置決め装置
CN112462601B (zh) 一种面向晶圆扫描平台的精密鲁棒控制方法及系统
JP2002361598A5 (https=)
JP2022061834A (ja) 位置決め装置、リソグラフィ装置及び物品の製造方法
JP2003084225A (ja) ガルバノスキャナの制御方法、装置、及び、ガルバノスキャナ
US20250116944A1 (en) Lithographic apparatus controller system
JPS63825A (ja) 光情報記録再生装置
EP1455231A2 (en) Controlling a position of a mass, especially in a lithographic apparatus
EP1480093A1 (en) Control system, lithographic apparatus, device manufacturing method and device manufactured thereby
WO2023238672A1 (ja) アクチュエータドライバおよびこれを用いたカメラモジュール、電子機器
JP2010272686A (ja) 移動体制御装置、露光装置、及び移動体制御方法
KR20200055045A (ko) 모터, 이중 행정 스테이지 및 리소그래피 장치

Legal Events

Date Code Title Description
A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20040810

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20041109

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20041109

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080325

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20080829

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20080919

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20081111