TW519573B - Method for dynamic manipulation of a position of a module in an optical system - Google Patents

Method for dynamic manipulation of a position of a module in an optical system Download PDF

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Publication number
TW519573B
TW519573B TW090128467A TW90128467A TW519573B TW 519573 B TW519573 B TW 519573B TW 090128467 A TW090128467 A TW 090128467A TW 90128467 A TW90128467 A TW 90128467A TW 519573 B TW519573 B TW 519573B
Authority
TW
Taiwan
Prior art keywords
speed
module
scope
component
patent application
Prior art date
Application number
TW090128467A
Other languages
English (en)
Chinese (zh)
Inventor
Karl-Eugen Aubele
Original Assignee
Zeiss Stiftung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeiss Stiftung filed Critical Zeiss Stiftung
Application granted granted Critical
Publication of TW519573B publication Critical patent/TW519573B/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems ; Auxiliary parts of microstructural devices or systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Control Of Position Or Direction (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Micromachines (AREA)
  • Lens Barrels (AREA)
TW090128467A 2000-11-16 2001-11-16 Method for dynamic manipulation of a position of a module in an optical system TW519573B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10056782A DE10056782A1 (de) 2000-11-16 2000-11-16 Verfahren zur dynamischen Manipulation der Position einer Baugruppe in einem optischen System

Publications (1)

Publication Number Publication Date
TW519573B true TW519573B (en) 2003-02-01

Family

ID=7663506

Family Applications (1)

Application Number Title Priority Date Filing Date
TW090128467A TW519573B (en) 2000-11-16 2001-11-16 Method for dynamic manipulation of a position of a module in an optical system

Country Status (6)

Country Link
US (1) US6759670B2 (https=)
EP (1) EP1209502B1 (https=)
JP (1) JP2002361598A (https=)
KR (1) KR20020038513A (https=)
DE (2) DE10056782A1 (https=)
TW (1) TW519573B (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100662872B1 (ko) * 2005-11-22 2007-01-02 삼성전자주식회사 임펄스 신호 획득 방법 및 장치
DE102005062081A1 (de) * 2005-12-22 2007-07-05 Carl Zeiss Smt Ag Projektionsobjektiv mit dezentraler Steuerung
DE102006046200A1 (de) * 2006-09-29 2008-04-03 Carl Zeiss Smt Ag Verfahren und Vorrichtung zur Positionierung eines Elements in einem optischen System
DE102010013298B4 (de) * 2010-03-29 2012-10-04 Carl Zeiss Smt Gmbh Positionierverfahren für eine optische Anordnung einer Projektionsbelichtungsanlage

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4305283A (en) * 1979-08-29 1981-12-15 Whessoe Limited Position determining apparatus
JPS6396613A (ja) * 1986-10-14 1988-04-27 Hitachi Ltd 自動焦点調節装置
DE4236795C1 (de) * 1992-11-01 1993-12-23 Fraunhofer Ges Forschung Vorrichtung zum Justieren von mechanischen Baugruppen insbesondere zum Herstellen eines multi-mirror-Polygons
JP3689783B2 (ja) * 1997-11-21 2005-08-31 コニカミノルタフォトイメージング株式会社 フィードバック周期を一定に維持する方法、並びにそのように制御される駆動制御装置および光学装置
US6560059B1 (en) * 1999-05-07 2003-05-06 Seagate Technology Llc Method and apparatus for suppressing seek-induced vibration in a disc drive

Also Published As

Publication number Publication date
EP1209502A2 (de) 2002-05-29
KR20020038513A (ko) 2002-05-23
EP1209502B1 (de) 2004-08-25
US6759670B2 (en) 2004-07-06
DE50103386D1 (de) 2004-09-30
JP2002361598A (ja) 2002-12-18
DE10056782A1 (de) 2002-05-23
EP1209502A3 (de) 2003-08-27
US20020074529A1 (en) 2002-06-20

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