JP2002321967A - 低熱膨張セラミックス - Google Patents

低熱膨張セラミックス

Info

Publication number
JP2002321967A
JP2002321967A JP2001126307A JP2001126307A JP2002321967A JP 2002321967 A JP2002321967 A JP 2002321967A JP 2001126307 A JP2001126307 A JP 2001126307A JP 2001126307 A JP2001126307 A JP 2001126307A JP 2002321967 A JP2002321967 A JP 2002321967A
Authority
JP
Japan
Prior art keywords
thermal expansion
ceramic
ceramics
jis
less
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001126307A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002321967A5 (https=
Inventor
Minori Iwashima
みのり 岩島
Tomohiko Ogata
知彦 尾形
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP2001126307A priority Critical patent/JP2002321967A/ja
Publication of JP2002321967A publication Critical patent/JP2002321967A/ja
Publication of JP2002321967A5 publication Critical patent/JP2002321967A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
JP2001126307A 2001-04-24 2001-04-24 低熱膨張セラミックス Pending JP2002321967A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001126307A JP2002321967A (ja) 2001-04-24 2001-04-24 低熱膨張セラミックス

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001126307A JP2002321967A (ja) 2001-04-24 2001-04-24 低熱膨張セラミックス

Publications (2)

Publication Number Publication Date
JP2002321967A true JP2002321967A (ja) 2002-11-08
JP2002321967A5 JP2002321967A5 (https=) 2008-06-19

Family

ID=18975367

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001126307A Pending JP2002321967A (ja) 2001-04-24 2001-04-24 低熱膨張セラミックス

Country Status (1)

Country Link
JP (1) JP2002321967A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004179353A (ja) * 2002-11-27 2004-06-24 Taiheiyo Cement Corp ステージ部材
JP2008007881A (ja) * 2006-06-28 2008-01-17 Kyocera Corp 給油用ローラ及びこれを用いた紡糸引取り装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000247732A (ja) * 1999-02-22 2000-09-12 Kyocera Corp 低抵抗セラミックス及びその製造方法、並びに半導体製造装置用部材
JP2001068536A (ja) * 1999-08-24 2001-03-16 Taiheiyo Cement Corp 露光装置およびそれに用いられる支持部材
JP2001172090A (ja) * 1999-10-08 2001-06-26 Toray Ind Inc セラミックス

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000247732A (ja) * 1999-02-22 2000-09-12 Kyocera Corp 低抵抗セラミックス及びその製造方法、並びに半導体製造装置用部材
JP2001068536A (ja) * 1999-08-24 2001-03-16 Taiheiyo Cement Corp 露光装置およびそれに用いられる支持部材
JP2001172090A (ja) * 1999-10-08 2001-06-26 Toray Ind Inc セラミックス

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004179353A (ja) * 2002-11-27 2004-06-24 Taiheiyo Cement Corp ステージ部材
JP2008007881A (ja) * 2006-06-28 2008-01-17 Kyocera Corp 給油用ローラ及びこれを用いた紡糸引取り装置

Similar Documents

Publication Publication Date Title
JP4416191B2 (ja) 低熱膨張セラミックスおよびその製造方法、並びに半導体製造用部品
KR20170141340A (ko) 정전척용 세라믹 소결체 및 그 제조방법
US7229940B2 (en) Dense cordierite based sintered body and method of manufacturing the same
KR20060103146A (ko) 질화알루미늄 소결체, 반도체 제조용 부재 및 질화알루미늄소결체의 제조 방법
JP5084155B2 (ja) アルミナ焼結体及びその製造方法、並びに、このアルミナ焼結体を用いた静電チャック及びその製造方法
JPH11209171A (ja) 緻密質低熱膨張セラミックス及びその製造方法、並びに半導体製造装置用部材
JP4429742B2 (ja) 焼結体及びその製造方法
JP4446611B2 (ja) 黒色低熱膨張セラミックスおよび露光装置用部材
JP2002321967A (ja) 低熱膨張セラミックス
JP4951753B2 (ja) 炭化ケイ素焼結体の製造方法
JP4578076B2 (ja) アルミナ焼結体、およびｉｃ基板
EP1298104A1 (en) Electrically conductive ceramic sintered compact exhibiting low thermal expansion
JP3805119B2 (ja) 低熱膨張性セラミックスの製造方法
CN120826383A (zh) 热处理夹具的制造方法
JP4429288B2 (ja) 低熱膨張性セラミックスおよびそれを用いた半導体製造装置用部材
JP4719965B2 (ja) セラミックス
JP2004010393A (ja) 低熱膨張セラミックス
JP2001302338A (ja) 複合セラミックスおよびその製造方法
JP2000247732A (ja) 低抵抗セラミックス及びその製造方法、並びに半導体製造装置用部材
KR100502815B1 (ko) 이중 기공구조를 갖는 세라믹 다공질체 및 그 제조방법
JP4912544B2 (ja) 低熱伝導高剛性セラミックス
JPH1112039A (ja) 高放熱リッド用の窒化アルミニウム系焼結体の製造方法
JP2001220260A (ja) アルミナ系多孔質シート状耐火物及びその製造方法
JP5006490B2 (ja) 低熱膨張セラミックス及びその製造方法
JP3260340B2 (ja) 複合セラミックスおよびその製造方法

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080424

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080424

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20100621

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A132

Effective date: 20100706

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20110125