JP2002302248A - Substrate reversing device, and panel manufacturing device using it - Google Patents

Substrate reversing device, and panel manufacturing device using it

Info

Publication number
JP2002302248A
JP2002302248A JP2001101839A JP2001101839A JP2002302248A JP 2002302248 A JP2002302248 A JP 2002302248A JP 2001101839 A JP2001101839 A JP 2001101839A JP 2001101839 A JP2001101839 A JP 2001101839A JP 2002302248 A JP2002302248 A JP 2002302248A
Authority
JP
Japan
Prior art keywords
substrate
holding
pair
reversing device
holding plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001101839A
Other languages
Japanese (ja)
Other versions
JP4328472B2 (en
Inventor
Shinichi Ogimoto
眞一 荻本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Priority to JP2001101839A priority Critical patent/JP4328472B2/en
Publication of JP2002302248A publication Critical patent/JP2002302248A/en
Application granted granted Critical
Publication of JP4328472B2 publication Critical patent/JP4328472B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Liquid Crystal (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PROBLEM TO BE SOLVED: To increase yield of a process of part mounting on both faces of a substrate, by stabilizing reversing operation of the substrate with one side face previously connected with a part. SOLUTION: The substrate 1 mounting the part 2 is clamped by a pair of holding plates 71, 72. A pair of holding plates 31, 32 press and hold the pair of holding plates 71, 72. The pair of the holding mechanism 31, 32 clamping the substrate 1 through the pair of holding plates 71, 72 rotationally drive a motor 10a, and transfer the substrate 1 reversed by 180 deg.. Thus, the substrate mounting the part 2 is pressed and held from both surfaces by the pair of the holding plates 71, 72 to be reversed, whereby the fluttering or the like and breakage of the substrate 1 and the part 2 are largely reduced, thereby enable mounting of the part with high quality.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、たとえば液晶パネ
ルやプラズマディスプレイパネル等の組立て製造に好適
な基板反転装置、及びそれを用いたパネル製造装置の改
良に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate reversing device suitable for assembling and manufacturing, for example, a liquid crystal panel or a plasma display panel, and to an improvement in a panel manufacturing device using the same.

【0002】[0002]

【従来の技術】液晶表示パネルやプラズマディスプレイ
パネル等の平面ディスプレイは、ガラス製の基板の電極
部に、TCP(Tape Carrier Packa
ge)等のフィルム状の電子部品を接続搭載して製造さ
れる。このような平板ディスプレイを製造する装置とし
て、パネル製造装置が知られている。
2. Description of the Related Art In a flat display such as a liquid crystal display panel or a plasma display panel, a TCP (Tape Carrier Packa) is formed on an electrode portion of a glass substrate.
ge) and the like, and are connected and mounted. As an apparatus for manufacturing such a flat panel display, a panel manufacturing apparatus is known.

【0003】平板ディスプレイの中でも、単純マトリク
ス方式の液晶表示パネルは、液晶層を、矩形状からなる
ガラス製の2枚の基板で挟み込むように構成されてい
て、電子部品を接続する電極部は、対向する2枚の基板
の対向面に互いに直交する向きに形成されている。この
ように2枚の基板の電極部は互いに対向して設けられて
いるので、個々の基板に電子部品を接続するには、基板
を一度180度反転させる必要があった。そのためパネ
ル製造装置には基板反転装置が設けられている。
[0003] Among flat panel displays, a simple matrix type liquid crystal display panel is configured so that a liquid crystal layer is sandwiched between two rectangular glass substrates. The two substrates are formed so as to be orthogonal to each other on opposing surfaces of two opposing substrates. As described above, since the electrode portions of the two substrates are provided to face each other, it is necessary to once turn the substrates by 180 degrees in order to connect electronic components to the individual substrates. Therefore, the panel manufacturing apparatus is provided with a substrate reversing device.

【0004】図13は、2枚重ねの基板を反転させる従
来の基板反転装置の概要構成を示した斜視図、図14は
その要部側面図で、基板反転装置で反転される2枚重ね
の基板のうち、一方の基板の電極部には、異方性導電体
等の接続部材を介して予め電子部品が接続されている。
FIG. 13 is a perspective view showing a schematic structure of a conventional substrate reversing device for reversing a two-layer substrate, and FIG. 14 is a side view of a main part thereof. An electronic component is connected in advance to an electrode portion of one of the substrates via a connection member such as an anisotropic conductor.

【0005】すなわち、図13に示すように、2枚貼り
合わせの基板1(1A,1B)のうち、一方(図示下
方)の基板1(1A)の電極部には接続部品である電子
部品2が予め接続されていて、基板1は、図14にも示
すように、基板反転装置のコ字状の把持部3により上下
両外側面から挟み込まれて押圧保持されている。
That is, as shown in FIG. 13, one of the two substrates 1 (1A, 1B) bonded to each other (the lower part in the figure) has an electrode portion on the electrode portion of an electronic component 2 as a connection component. As shown in FIG. 14, the substrate 1 is sandwiched from above and below both outer surfaces by a U-shaped grip portion 3 of the substrate reversing device and is pressed and held.

【0006】把持部3は反転機構4に連結されていて、
把持部3は、反転機構4に内蔵されたモータの駆動によ
り、矢印R方向に180度の往復回動可能に構成され、
基板1は180度反転されて次の部品実装装置に受け渡
される。
The grip 3 is connected to a reversing mechanism 4,
The grip part 3 is configured to be able to reciprocate 180 degrees in the direction of arrow R by driving a motor built in the reversing mechanism 4.
The substrate 1 is turned 180 degrees and delivered to the next component mounting apparatus.

【0007】なお、図13において、反転機構4はシリ
ンダ等の移動機構5に連結され、基板反転装置における
矩形状の基板1の反転操作が、周囲の機構部等と接触す
ることなく円滑に行なわれることが要求される。そのた
め、移動機構5は、反転機構4を一対のガイドレール6
1,62に案内されつつ、矢印Z方向に上昇移動し、基
板1の回転空間を確保した状態で基板1を反転させるよ
うに構成されている。
In FIG. 13, the reversing mechanism 4 is connected to a moving mechanism 5 such as a cylinder, so that the reversing operation of the rectangular substrate 1 in the substrate reversing device can be performed smoothly without coming into contact with the surrounding mechanisms. Is required. Therefore, the moving mechanism 5 connects the reversing mechanism 4 to the pair of guide rails 6.
While being guided by 1, 62, it is configured to move upward in the direction of arrow Z and turn over the substrate 1 in a state where the rotation space of the substrate 1 is secured.

【0008】また、図13及び図14では、把持部3の
詳細は省略して示していないが、把持部3はシリンダ機
構やばね機構を有していて、必要に応じ、基板1を両外
面側からの押圧保持、ないしは開放を行い、前工程から
の基板1の受取りと、反転後の次工程への受渡しが可能
となるように構成されている。
Further, in FIGS. 13 and 14, the details of the gripping portion 3 are not shown, but the gripping portion 3 has a cylinder mechanism and a spring mechanism. The side is pressed and held or released, so that the substrate 1 can be received from the previous process and can be delivered to the next process after the reversal.

【0009】上記のような構成の基板反転装置により、
基板1は反転され、図15で示すように下方の基板1
(1B)の電極部を上向きに露出した反転後の基板1を
受け取った次工程では、同じく電極部に異方性導電体を
介した電子部品2の実装が行われる。
With the substrate reversing device having the above structure,
The substrate 1 is inverted, and as shown in FIG.
In the next step of receiving the inverted substrate 1 in which the electrode portion of (1B) is exposed upward, the electronic component 2 is similarly mounted on the electrode portion via an anisotropic conductor.

【0010】[0010]

【発明が解決しようとする課題】上述のように、従来の
基板反転装置では、予め一方の基板(1A)に電子部品
2を搭載した基板1を、把持部3により保持しつつ反転
操作を行うように構成されている。
As described above, in the conventional board reversing apparatus, the reversing operation is performed while holding the board 1 on which the electronic component 2 is mounted on one of the boards (1A) in advance by the holding section 3. It is configured as follows.

【0011】ところで、最近の液晶表示パネルやプラズ
マディスプレイパネルをはじめとした平板ディスプレイ
は、ますます大型化される傾向にあり、基板自体も大型
化に伴い相当な大きな重量を占めるようになってきてい
る。また基板の大型化は、基板1の電極部に接続搭載さ
れる電子部品2の大容量化や高機能化をうながし、接続
搭載される部品もLSI等の半導体チップだけにとどま
らず放熱板や印刷配線基板等の付加接続も行われるよう
になってきた。
Meanwhile, flat panel displays such as recent liquid crystal display panels and plasma display panels tend to become larger and larger, and the substrates themselves also take up a considerable weight with the increase in size. I have. In addition, the increase in the size of the substrate has led to an increase in the capacity and functionality of the electronic components 2 connected and mounted on the electrode portions of the substrate 1, and the components mounted and connected are not limited to semiconductor chips such as LSIs, but also to heat sinks and printing. Additional connection of a wiring board or the like has also been performed.

【0012】その結果、基板反転装置における反転操作
では、回転中心軸から遠い電極部に接続された部品等
は、反転時に大きな慣性応力(ないしはモーメント)を
有することとなり、それが基板に大きな曲げ応力を与え
て、ガラス製等の基板を折り曲げ破損させる要因の一つ
となった。
As a result, in the reversing operation in the substrate reversing device, parts and the like connected to the electrode portion far from the rotation center axis have a large inertial stress (or moment) at the time of reversal, which causes a large bending stress on the substrate. This is one of the factors that cause the substrate made of glass or the like to bend and break.

【0013】特に電子部品2がFPC(Flexibl
e Printed Circuit)やCOF(Ch
ip On Film)等の場合は、主要部分であるフ
ィルム部はもともと曲がりやすい上、回動反転動作によ
り接続部品がばたついてしまい、基板と衝突して部品自
体が損傷を受けたり、衝突相手の基板が割れてしまう等
の不具合を引き起こしかねず、さらには遠心力により接
続部が剥がれてしまう等のおそれも生じたので改善が要
望されていた。
In particular, when the electronic component 2 is an FPC (Flexible
e Printed Circuit) or COF (Ch
In the case of (ip On Film), the film portion, which is the main portion, is originally easily bent, and the connecting component fluctuates due to the rotation reversal operation. There has been a risk of causing problems such as breakage of the substrate and the like, and there has been a fear that the connection portion may be peeled off due to centrifugal force. Therefore, improvement has been demanded.

【0014】そこで、本発明は、基板や搭載された部品
の損傷を回避するとともに、部品接続部等の破損を回避
し、信頼性の高い基板反転装置及びそれを用いたパネル
製造装置を提供することを目的とする。
Accordingly, the present invention provides a highly reliable substrate reversing apparatus and a panel manufacturing apparatus using the same, which avoids damage to a substrate and mounted components, and also avoids damage to component connection portions and the like. The purpose is to:

【0015】[0015]

【課題を解決するための手段】第1の発明は、基板反転
装置において、部品を実装した基板を両面から挟持する
一対の保持板と、この一対の保持板を外側から押圧しつ
つ保持する把持部と、この把持部を回動させ前記基板を
反転させる反転機構とを具備することを特徴とする。
According to a first aspect of the present invention, in a board reversing device, a pair of holding plates for holding a board on which components are mounted from both sides and a grip for holding the pair of holding plates while pressing the pair from the outside. And a reversing mechanism for reversing the substrate by rotating the gripping portion.

【0016】このように、第1の発明によれば、反転機
構は部品を搭載した基板を一対の保持板で挟持して反転
する。従って、部品及び基板は保持板に保護されるとと
もに、ばたつき等は大幅に抑制され、基板や部品の破損
を回避した基板反転装置を提供することができる。
As described above, according to the first aspect, the reversing mechanism reverses the substrate on which the components are mounted by sandwiching the substrate between the pair of holding plates. Therefore, while the components and the substrate are protected by the holding plate, the fluttering and the like are greatly suppressed, and a substrate reversing device that avoids damage to the substrate and the components can be provided.

【0017】第2の発明は、部品を外周部から突出させ
た状態で実装された基板を反転させる基板反転装置にお
いて、前記基板を保持する保持部材と、前記部品を支持
する支持部材と、前記保持部材と前記支持部材とを前記
基板の表面に平行な直線を共通の回転中心軸として回転
させる回転機構とを具備することを特徴とする。
According to a second aspect of the present invention, there is provided a board reversing device for reversing a board mounted with parts protruding from an outer peripheral portion, wherein a holding member for holding the board, a supporting member for supporting the parts, A rotation mechanism configured to rotate the holding member and the support member around a straight line parallel to the surface of the substrate as a common rotation center axis.

【0018】このように、第2の発明によれば、回転機
構は、基板を保持する保持部材と部品を支持する支持部
材とを反転させる。従って、部品及び基板は保持部材及
び支持部材に保護されるとともにばたつき等も大幅に抑
制され、基板や部品の損傷を回避した基板反転装置を提
供することができる。
As described above, according to the second aspect, the rotating mechanism reverses the holding member for holding the substrate and the supporting member for supporting the components. Therefore, the component and the substrate are protected by the holding member and the support member, and the fluttering and the like are greatly suppressed, so that it is possible to provide a substrate reversing device in which the substrate and the component are prevented from being damaged.

【0019】第3の発明は、パネル製造装置において、
前記第1または第2の発明に係る基板反転装置を用いた
ことを特徴とする。
A third invention relates to a panel manufacturing apparatus,
It is characterized in that the substrate reversing device according to the first or second invention is used.

【0020】このように、第3の発明によれば、パネル
製造装置において、上記第1または第2の基板反転装置
を採用したので、基板反転時に基板や部品が損傷するの
を回避することができ、歩留まりがよく信頼性の高い液
晶パネル等を組み立て製造することが出来る。
As described above, according to the third aspect, in the panel manufacturing apparatus, since the first or second substrate reversing device is employed, it is possible to prevent the substrate and components from being damaged when the substrate is reversed. This makes it possible to assemble and manufacture a highly reliable liquid crystal panel or the like with a high yield.

【0021】[0021]

【発明の実施の形態】以下本発明による基板反転装置及
びそれを用いたパネル製造装置の一実施の形態を図1乃
至図12を参照して詳細に説明する。なお、図13乃至
図15に示した従来の基板反転装置と同一構成には同一
符号を付して詳細な説明は省略する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a substrate reversing apparatus and a panel manufacturing apparatus using the same according to the present invention will be described below in detail with reference to FIGS. The same components as those of the conventional substrate reversing device shown in FIGS. 13 to 15 are denoted by the same reference numerals, and detailed description is omitted.

【0022】図1は、本発明による基板反転装置を用い
たパネル製造装置のレイアウト図である。
FIG. 1 is a layout diagram of a panel manufacturing apparatus using a substrate reversing apparatus according to the present invention.

【0023】図1において、このパネル製造装置20
は、液晶パネルやプラズマディスプレイパネル等の平板
ディスプレイの製造に用いられるものであり、図2以下
で説明の基板1を提供する基板供給装置21、第1基板
清掃装置22a、第1接続部材貼付装置23a、第1電
子部品実装装置24a、基板反転装置25、第2基板清
掃装置22b、第2接続部材貼付装置23b、第2電子
部品実装装置24b、基板収容装置26を有して構成さ
れている。
In FIG. 1, the panel manufacturing apparatus 20
Is used for manufacturing a flat panel display such as a liquid crystal panel or a plasma display panel, and is provided with a substrate supply device 21, a first substrate cleaning device 22a, and a first connecting member attaching device for providing the substrate 1 described in FIG. 23a, a first electronic component mounting device 24a, a substrate reversing device 25, a second substrate cleaning device 22b, a second connecting member attaching device 23b, a second electronic component mounting device 24b, and a substrate housing device 26. .

【0024】基板供給装置21は、マガジン等に収容さ
れた基板1を取り出し一枚ずつ供給するものである。基
板供給装置21にて供給された基板1は、不図示の搬送
装置にて第1基板清掃装置22aに搬送される。
The substrate supply device 21 takes out the substrates 1 housed in a magazine or the like and supplies them one by one. The substrate 1 supplied by the substrate supply device 21 is transported to a first substrate cleaning device 22a by a transport device (not shown).

【0025】第1基板清掃装置22aは、基板1におけ
る電子部品2が接続される辺、図13を参照して説明す
れば、貼り合わされた2枚の基板1(1A,1B)のう
ち、電極部を上向きに露出した基板1Aにおける電極部
が形成された縁部を溶剤を用いて清掃し電極部の汚れを
除去するものである。清掃が完了した基板1は、不図示
の搬送装置にて第1接続部材貼付装置23aに搬送され
る。
The first substrate cleaning device 22a is provided on the side of the substrate 1 to which the electronic component 2 is connected, as described with reference to FIG. 13, of the two substrates 1 (1A, 1B) bonded together. The edge of the substrate 1A where the portion is exposed upward is formed by cleaning the edge of the substrate 1A where the electrode is formed, using a solvent to remove dirt from the electrode. The substrate 1 that has been cleaned is transported to a first connection member attaching device 23a by a transport device (not shown).

【0026】第1接続部材貼付装置23aは、第1基板
清掃装置22aにて清掃された縁部に対して、異方性導
電体等の接続部材を貼付するものである。接続部材が貼
付された基板1は、不図示の搬送装置にて第1電子部品
実装装置24aに搬送される。
The first connecting member sticking device 23a sticks a connecting member such as an anisotropic conductor to the edge portion cleaned by the first substrate cleaning device 22a. The substrate 1 to which the connecting member is attached is transported to the first electronic component mounting device 24a by a transport device (not shown).

【0027】第1電子部品実装装置24aは、第1接続
部材貼付装置23aにて貼付された接続部材を介して、
基板1Aの電極部と電子部品2の電極部とを接続するも
のである。第1電子部品実装装置24aにて電子部品2
が実装された基板1は、不図示の搬送装置にて基板反転
装置25に搬送される。
The first electronic component mounting device 24a is connected to the first connecting member attaching device 23a through the connecting member attached by the first connecting member attaching device 23a.
The electrode section of the substrate 1A is connected to the electrode section of the electronic component 2. Electronic component 2 by the first electronic component mounting apparatus 24a
The substrate 1 on which is mounted is transported to the substrate reversing device 25 by a transport device (not shown).

【0028】基板反転装置25は、後に詳述するが、基
板1Aの電極部に電子部品2が接続された基板1を表裏
反転させて、今まで下方を向いていた基板1Bの電極部
を上向きに露出させるものである。反転された基板1は
不図示の搬送装置にて第2基板清掃装置22bに搬送さ
れる。
As will be described in detail later, the substrate reversing device 25 reverses the substrate 1 in which the electronic parts 2 are connected to the electrode portions of the substrate 1A, and turns the electrode portion of the substrate 1B, which has been facing downward, upward. Is to be exposed. The inverted substrate 1 is transported to a second substrate cleaning device 22b by a transport device (not shown).

【0029】この後、第2基板清掃装置22b、第2接
続部材貼付装置23b、第2電子部品実装装置24bに
て、上向きに露出された基板1Bの電極部に対して上述
と同様の動作を実施する。基板1Bの電極部に電子部品
2が接続された基板1は、不図示の搬送装置にて基板収
容装置26に搬送され、マガジン等に一枚ずつ収容され
る。
Thereafter, the same operation as described above is performed on the electrode portion of the substrate 1B exposed upward by the second substrate cleaning device 22b, the second connecting member attaching device 23b, and the second electronic component mounting device 24b. carry out. The substrate 1 in which the electronic components 2 are connected to the electrode portions of the substrate 1B is transferred to the substrate storage device 26 by a transfer device (not shown), and stored one by one in a magazine or the like.

【0030】図2は本発明による基板反転装置25の第
1の実施の形態を示した正面図で、図3は図2の要部拡
大図正面図である。
FIG. 2 is a front view showing a first embodiment of the substrate reversing device 25 according to the present invention, and FIG. 3 is an enlarged front view of an essential part of FIG.

【0031】図2及び図3に示した基板反転装置は、ま
ず2枚貼り合わせの基板1の一方(基板1A)の電極部
には既にLSI等の半導体チップが搭載された電子部品
2が接続されて、基板反転装置に装着され、基板反転装
置が180度反転操作可能な状態を示している。ここ
で、電子部品2は主要部分をポリイミド樹脂等のフィル
ム状部材にて構成される。
In the substrate reversing device shown in FIGS. 2 and 3, first, an electronic component 2 on which a semiconductor chip such as an LSI is already mounted is connected to an electrode portion of one of two substrates 1 (substrate 1A). Then, it is mounted on the substrate reversing device and shows a state in which the substrate reversing device can perform a 180-degree reversing operation. Here, the electronic component 2 is mainly composed of a film-like member such as a polyimide resin.

【0032】すなわち、基板反転装置の一部を構成する
上下一対の平板状の保持板71,72の対向面には、複
数個の緩衝部材7aが突設されていて、その緩衝部材7
aを設けた保持板71,72間に基板1が挟まれた状態
で基板反転装置本体に搬送装着される。
That is, a plurality of buffer members 7a are provided on the opposing surfaces of a pair of upper and lower plate-like holding plates 71 and 72 which constitute a part of the substrate reversing device.
The substrate 1 is conveyed and mounted on the substrate reversing device main body in a state where the substrate 1 is sandwiched between the holding plates 71 and 72 provided with a.

【0033】なお、緩衝部材7a自体は、ゴム部材ある
いはばね部材等の弾性体で構成され、各緩衝部材7aの
個々の高さは、基板1及び各保持板71,72が平行と
なり、保持板71,72を両外側面から押圧したとき、
その力が基板1及び部品2に対しほぼ均一に加わるよう
に設けられている。
The cushioning member 7a itself is made of an elastic body such as a rubber member or a spring member. The height of each cushioning member 7a is such that the substrate 1 and the holding plates 71 and 72 are parallel, When 71 and 72 are pressed from both outer surfaces,
It is provided so that the force is applied to the substrate 1 and the component 2 almost uniformly.

【0034】このように基板1が緩衝部材7aを介して
保持板71,72に挟まれた状態で、図2に示す搬送装
置8から基板反転装置本体側への受け渡しが行われる。
In the state where the substrate 1 is sandwiched between the holding plates 71 and 72 with the buffer member 7a interposed therebetween, the transfer from the transfer device 8 shown in FIG. 2 to the substrate reversing device main body is performed.

【0035】そこでまず基板反転装置本体は、左右一組
の把持機構31,32は、それぞれ正面から見てコ字状
のアームを形成し、図示左右各両端部において、吸着部
材3aを介して基板1を挟んだ上下一対の保持板71,
72を、押圧把持するように構成されている。
Therefore, the main body of the substrate reversing device has a pair of left and right gripping mechanisms 31 and 32, each of which forms a U-shaped arm when viewed from the front. 1, a pair of upper and lower holding plates 71
72 is configured to be pressed and gripped.

【0036】すなわち、各把持機構31,32は、それ
ぞれ上下に対をなす把持片3b,3cを有し、両把持片
3b,3cがシリンダ3dによる操作によりリニアガイ
ド3e,3eにそれぞれ案内されつつ矢印Z1方向へ移
動し、保持板71,72を両把持片3b,3cの間に挟
んで保持固定する。
That is, each of the gripping mechanisms 31 and 32 has upper and lower pairs of gripping pieces 3b and 3c, respectively, and both gripping pieces 3b and 3c are guided by the linear guides 3e and 3e by the operation of the cylinder 3d. It moves in the direction of arrow Z1, and holds and fixes the holding plates 71, 72 by sandwiching the holding plates 71, 72 between the gripping pieces 3b, 3c.

【0037】なお、把持機構31,32の把持片3b,
3cには、図3に示すように排気孔3g,3gが形成さ
れていて、その排気孔3g,3gは不図示の吸気ポンプ
に接続されて、排気孔3g,3gにつらなる各吸着部材
3a,3aが、上記吸気ポンプの吸気動作に対応して保
持板71,72を吸着保持する。
The gripping pieces 3b of the gripping mechanisms 31, 32,
3c, exhaust holes 3g, 3g are formed as shown in FIG. 3, and the exhaust holes 3g, 3g are connected to an intake pump (not shown), and each of the adsorbing members 3a, 3g connected to the exhaust holes 3g, 3g. 3a sucks and holds the holding plates 71, 72 in response to the suction operation of the suction pump.

【0038】また、図2に示すように、把持機構31,
32のシリンダ3d,3dは、それぞれの把持本体3
f,3fに固定され、その把持本体3f,3fは、それ
ぞれ対応して設けられた一組のボールねじ機構91,9
2に組み込まれている。
Further, as shown in FIG.
32 cylinders 3d, 3d
f, 3f, and a pair of ball screw mechanisms 91, 9 provided correspondingly to the grip main bodies 3f, 3f, respectively.
2 is incorporated.

【0039】またボールねじ機構91,92は、サーボ
モータ9a,9aの回転駆動により、把持機構31,3
2を図示矢印X方向に移動自在に構成されている。
The ball screw mechanisms 91 and 92 are driven by the rotation of the servo motors 9a and 9a to hold the gripping mechanisms 31 and 3 respectively.
2 is configured to be movable in the X direction shown in the figure.

【0040】すなわち、ボールねじ機構91,92のサ
ーボモータ9a,9aは、反転機構10のモータ10a
駆動により一体に回動するL字状の枠体10b,10b
に組み込み固定され、一組の各把持機構31,32がそ
の反転機構10の回転軸上で相対的に近付く前進移動及
び反対に遠ざかる後退移動が可能に構成されている。
That is, the servo motors 9a and 9a of the ball screw mechanisms 91 and 92 are
L-shaped frames 10b, 10b which rotate together by driving
The pair of gripping mechanisms 31 and 32 are configured to be capable of moving forward and backward on the rotation axis of the reversing mechanism 10 and moving away from each other.

【0041】なお、図2に示すように、上記一組のL字
状の枠体10b,10b間は、平面視略コ字状の連結梁
10cにより共通に連結されており、これら連結梁10
c及び枠体10b,10bが他端部の軸受10dに支え
られつつ、モータ10aによる矢印R方向への回動によ
り、180度の反転動作を繰り返すことができる。
As shown in FIG. 2, the pair of L-shaped frame members 10b, 10b are commonly connected by a connection beam 10c having a substantially U-shape in plan view.
While the c and the frames 10b, 10b are supported by the bearing 10d at the other end, the motor 10a rotates in the direction of the arrow R to repeat the 180-degree reversing operation.

【0042】また、図2に示した構成では、基板反転装
置は、基板1を中央にして挟んだ保持板71,72を、
搬送装置8から受け取り保持した状態を示しているが、
基板1反転後は、反転された基板1は保持板71,72
とともに搬送装置8に受け渡される。この搬送装置8
は、基板1を搭載する搬送テーブル8a、搬送テーブル
8aをX,Y,θ方向に移動自在に支持するX−Y−θ
ステージ8bを有し、搬送テーブル8aは、基板1を吸
着し、かつ、シリンダ8c等の上下動装置にて矢印Z方
向に移動する吸着部材8dを有する。
In the configuration shown in FIG. 2, the substrate reversing device includes the holding plates 71 and 72 sandwiching the substrate 1 at the center.
The state of receiving and holding from the transport device 8 is shown,
After the substrate 1 is inverted, the inverted substrate 1 is held by the holding plates 71 and 72.
Is transferred to the transport device 8. This transport device 8
Is a transfer table 8a on which the substrate 1 is mounted, and XY-θ which supports the transfer table 8a movably in X, Y, and θ directions.
The transfer table 8a has a stage 8b, and has a suction member 8d that sucks the substrate 1 and moves in the arrow Z direction by a vertical movement device such as a cylinder 8c.

【0043】次に、搬送装置8によって、基板1が保持
板71,72とともに基板反転装置本体に受渡され、反
転された基板1が保持板71,72とともに搬送装置8
に受け渡される手順を、図2、及び図4並びに図5を参
照して以下説明する。
Next, the transfer device 8 transfers the substrate 1 together with the holding plates 71 and 72 to the substrate reversing device main body, and the inverted substrate 1 is transferred together with the holding plates 71 and 72 to the transfer device 8.
Will be described below with reference to FIGS. 2, 4, and 5. FIG.

【0044】まず、図4に示したように、基板反転装置
本体側のサーボモータ9a,9aは、不図示の制御手段
による制御により駆動されて一組の把持機構31,32
は左右に移動(後退)し、その開いた空間に、基板1を
間に挟んだ一対の保持板71,72は、吸着部材8dに
保持されつつ、搬送装置8の搬送テーブル8a上からシ
リンダ8cの操作により図示矢印Z1方向へ押し上げら
れ、図5に示す位置に位置決めされる。
First, as shown in FIG. 4, the servo motors 9a, 9a on the main body of the substrate reversing device are driven under the control of control means (not shown) to form a pair of gripping mechanisms 31, 32.
Moves (retreats) left and right, and in the open space, the pair of holding plates 71 and 72 sandwiching the substrate 1 are held by the suction member 8d while the cylinder 8c is moved from above the transfer table 8a of the transfer device 8. Is pushed up in the direction of arrow Z1 shown in the figure, and is positioned at the position shown in FIG.

【0045】この状態において、不図示の制御手段は、
サーボモータ9a,9aを作動させ、左右の把持機構3
1,32を矢印X1方向に前進移動させ、各吸着部材3
a,3aを予め設定された位置で、保持板71,72を
押圧しつつ吸着できる位置に停止させる。
In this state, the control means (not shown)
Activate the servo motors 9a, 9a, and
1 and 32 are moved forward in the arrow X1 direction,
The a and 3a are stopped at predetermined positions at positions where the holding plates 71 and 72 can be attracted while being pressed.

【0046】次に一対の把持機構31,32の各シリン
ダ3dの操作により、図2に示したように、上下から保
持板71,72を押圧保持するとともに、搬送装置8の
吸着部材8dは、吸着を解除し、そしてシリンダ8cの
操作によって、図2に示した位置まで下降し、その状態
で、モータ10aの駆動により矢印R方向への180度
の回転操作により基板1を保持した保持板71,72は
反転される。
Next, by operating the cylinders 3d of the pair of gripping mechanisms 31, 32, as shown in FIG. 2, the holding plates 71, 72 are pressed and held from above and below, and the suction member 8d of the transfer device 8 is The suction is released, and the cylinder 8c is moved down to the position shown in FIG. 2 by the operation of the cylinder 8c. In this state, the holding plate 71 holding the substrate 1 is rotated by 180 degrees in the direction of arrow R by driving the motor 10a. , 72 are inverted.

【0047】反転された基板1は、図示しないが上記と
は反対の操作、すなわち「搬送装置8の吸着部材8dの
上昇移動」→「吸着部材8dによる保持板の吸着」→
「シリンダ3dによる保持板71,72の開放」→「サ
ーボモータ9a,9aによる把持機構31,32の後
退」→「吸着部材8dの下降移動」の手順を順次経て、
反転された基板1は保持板71,72とともに、次の部
品実装工程へと搬送され受け渡される。
The inverted substrate 1 is not shown in the drawing, but is operated in the opposite manner, ie, "upward movement of the suction member 8d of the transfer device 8" → "suction of the holding plate by the suction member 8d" →
Through the sequence of “opening of the holding plates 71, 72 by the cylinder 3d” → “retraction of the gripping mechanisms 31, 32 by the servomotors 9a, 9a” → “downward movement of the suction member 8d”,
The inverted substrate 1 is transported and transferred to the next component mounting step together with the holding plates 71 and 72.

【0048】受け渡された次の工程では、保持板71,
72が取り外され、図15に示した状態となるので、反
転により上向きの基板1Bの電極部上に電子部品等の部
品実装が行われる。
In the next step of the delivery, the holding plate 71,
Since the state 72 is removed and the state shown in FIG. 15 is obtained, parts such as electronic parts are mounted on the electrode portion of the substrate 1B facing upward by inversion.

【0049】上記第1の実施の形態では、複数個の吸着
部材3a,3aは、保持板71,72を吸着保持するよ
うに構成したが、保持板71,72とともに、基板1あ
るいは部品2を吸着するように構成することもできる。
In the first embodiment, the plurality of suction members 3a, 3a are configured to suck and hold the holding plates 71, 72. However, together with the holding plates 71, 72, the substrate 1 or the component 2 is held. It can also be configured to adsorb.

【0050】すなわち、図6は本発明の基板反転装置の
第2の実施の形態を示した要部側面図で、保持板71,
72に貫通孔71a,72aが設けられ、一部の吸着部
材3a,3aはその貫通孔71a,72aを通して、基
板1(1A,1B)を直接吸着保持し、反転動作の際に
基板1がずれるのを軽減するように構成されている。
FIG. 6 is a side view of a main part of a substrate reversing device according to a second embodiment of the present invention.
Through holes 71a, 72a are provided in 72, and some of the suction members 3a, 3a directly suck and hold the substrate 1 (1A, 1B) through the through holes 71a, 72a, and the substrate 1 shifts during the reversing operation. It is configured to reduce the

【0051】勿論、貫通孔71a,72aは、吸着部材
3a,3aが直接電子部品2を吸着するように構成して
も良い。
Of course, the through holes 71a, 72a may be configured so that the suction members 3a, 3a directly suck the electronic component 2.

【0052】また、上記第1及び第2の実施の形態で、
もしも基板1の板面に排気管等が立設された場合には、
その排気管等を回避するように、各保持板71、72に
は予め貫通孔等を設けるとともに、把持機構31,32
もまたその前進及び後退等の動作において、排気管等に
接触しないように適宜形状を変形して構成することがで
きる。
In the first and second embodiments,
If an exhaust pipe or the like is erected on the surface of the substrate 1,
In order to avoid the exhaust pipe and the like, each of the holding plates 71 and 72 is provided with a through hole or the like in advance, and the holding mechanisms 31 and 32 are provided.
It can also be configured by appropriately modifying its shape so that it does not come into contact with the exhaust pipe or the like during its forward and backward operations.

【0053】いずれにしても、上記第1、第2の実施の
形態による基板反転装置によれば、電子部品等の部品を
搭載した基板を、一対の保持板で挟持し、その保持板を
保持して反転させるように構成したので、部品等の回転
運動に伴う応力が基板へ及ぼす影響は軽減され、搭載さ
れた部品や基板の損傷はもとより、基板と部品との間の
接続部の破損等をも軽減することができる。
In any case, according to the substrate reversing devices according to the first and second embodiments, a substrate on which components such as electronic components are mounted is sandwiched between a pair of holding plates, and the holding plates are held. The effect of the stress caused by the rotational movement of components and the like on the board is reduced, and the mounted parts and the board are not only damaged, but also the connection parts between the board and the parts are damaged. Can also be reduced.

【0054】次に、本発明による基板反転装置の第3の
実施の形態について、図7乃至図12を参照し説明す
る。
Next, a third embodiment of the substrate reversing device according to the present invention will be described with reference to FIGS.

【0055】図7図は、本発明による基板反転装置の第
3の実施の形態を示す平面図、図8は、図7の横断面
図、図9は、図7に示す基板反転装置の動作状態を示す
平面図、図10は、図9の横断面図、図11は、図7に
示す基板反転装置の他の動作状態を示す平面図、図12
は、図11の横断面図である。
FIG. 7 is a plan view showing a third embodiment of the substrate reversing device according to the present invention, FIG. 8 is a transverse sectional view of FIG. 7, and FIG. 9 is an operation of the substrate reversing device shown in FIG. FIG. 10 is a cross-sectional view of FIG. 9, FIG. 11 is a plan view of another operation state of the substrate reversing device shown in FIG. 7, and FIG.
FIG. 12 is a cross-sectional view of FIG.

【0056】図7乃至図12に示す基板反転装置40
は、一対の保持板71,72を用いることなく、基板1
を上下一対の吸着部材(保持部材を構成する)3a,3
aにて直接吸着保持し、基板1に接続された電子部品2
を上下一対のサポート部材(支持部材を構成する)4
1,41にて上下両面から支持することを特徴とする。
The substrate reversing device 40 shown in FIGS. 7 to 12
Can be mounted on the substrate 1 without using the pair of holding plates 71 and 72.
To a pair of upper and lower suction members (constituting a holding member) 3a, 3
a electronic components 2 directly held by suction and connected to the substrate 1
A pair of upper and lower support members (constituting a support member) 4
It is characterized in that it is supported from both upper and lower surfaces by 1, 41.

【0057】すなわち、基板1を吸着保持する上下一対
の吸着部材3a,3aは、左右一組のスライド機構4
2,42にそれぞれ2対ずつ設けられている。スライド
機構42,42は、回転フレーム43の上側と下側にそ
れぞれ配置されていて、モータ等を駆動源とする送り機
構にて矢印X方向にガイドされつつ移動自在なスライド
アーム44,44を有して構成されている。そして、そ
れそれのスライドアーム44,44には、上下シリンダ
45,45を介して上下方向に移動自在に支持ブラケッ
ト46,46が支持されていて、吸着部材3a,3aは
この支持ブラケット46,46に支持されている。ま
た、それぞれのスライドアーム44,44には、サポー
ト部材41,41が固定配置されていて、上下方向に対
向するサポート部材41,41の互いに対向する面は、
電子部品2をその表裏両面から保持可能とする支持面と
して機能する。
That is, a pair of upper and lower suction members 3a, 3a for sucking and holding the substrate 1 are formed by a pair of left and right slide mechanisms 4.
Two pairs are provided for each of the pair 2 and 42. The slide mechanisms 42, 42 are respectively disposed on the upper side and the lower side of the rotating frame 43, and have slide arms 44, 44 which are movable while being guided in the arrow X direction by a feed mechanism using a motor or the like as a drive source. It is configured. Support arms 46, 46 are supported on the respective slide arms 44, 44 via vertical cylinders 45, movably in the vertical direction, and the suction members 3a, 3a are supported by the support brackets 46, 46. It is supported by. Further, support members 41, 41 are fixedly arranged on the respective slide arms 44, 44, and the opposing surfaces of the support members 41, 41 opposing in the vertical direction are
The electronic component 2 functions as a support surface that can hold the electronic component 2 from both front and back surfaces.

【0058】回転フレーム43は、不図示の支柱に固定
支持されたフレーム部材47に左右の支軸48,48を
介して回転自在に支持されている。ここで、一方(図示
左側)の支軸48には、プーリ49が固定されていて、
フレーム部材47に固定されたモータ50の出力軸に固
定されたプーリ51とベルト53を介して連結されてい
る。これにより、回転フレーム43は、モータ50の駆
動により支軸48を中心として回転できる。
The rotary frame 43 is rotatably supported by left and right support shafts 48, 48 on a frame member 47 fixedly supported by a support (not shown). Here, a pulley 49 is fixed to one of the support shafts 48 (left side in the figure).
It is connected to a pulley 51 fixed to an output shaft of a motor 50 fixed to the frame member 47 via a belt 53. Thus, the rotating frame 43 can rotate around the support shaft 48 by driving the motor 50.

【0059】なお、回転フレーム43において、互いに
対向するスライドアーム44,44の間には、一対の基
板サポート部材52,52が配置される。基板サポート
部材52,52は、回転フレーム43の上下両面にそれ
ぞれ設けられ、図7に実線で示した状態と2点鎖線で示
した状態との間で90度回転移動可能に支持されるとと
もに、回転フレーム43に対し上下方向に移動自在に支
持されている。
In the rotary frame 43, a pair of substrate support members 52, 52 are disposed between the slide arms 44, 44 facing each other. The substrate support members 52, 52 are provided on the upper and lower surfaces of the rotating frame 43, respectively, and supported so as to be rotatable by 90 degrees between a state shown by a solid line and a state shown by a two-dot chain line in FIG. It is supported movably up and down with respect to the rotating frame 43.

【0060】次にこの基板反転装置40において、基板
1が前工程から受け渡されて、反転後、後工程に受け渡
されるまでの手順を以下に説明する。
Next, in the substrate reversing device 40, a procedure from the transfer of the substrate 1 from the previous process to the transfer of the substrate 1 to the subsequent process after the reversal will be described below.

【0061】まず、図9に示したように、回転フレーム
43のスライドアーム44,44のうち、回転フレーム
43の上側に位置するスライドアーム44,44が相離
れる方向(図7に示す状態から図9に示す状態)に移動
するとともに、同じく上側の基板サポート部材52が図
7に2点鎖線で示す状態に回動し、基板1を搬入するた
めの空間を形成する。そして、不図示の搬送装置にて搬
送された基板1は、この空間を通って回転フレーム43
の下側に位置するスライドアーム44,44に支持され
た吸着部材3a,3a及び基板サポート部材52,52
によって支持される。このとき、基板1に接続された電
子部品2の下方には、サポート部材41,41が位置付
けられる。
First, as shown in FIG. 9, of the sliding arms 44, 44 of the rotating frame 43, the sliding arms 44, 44 located above the rotating frame 43 are separated from each other (from the state shown in FIG. 9), the upper substrate support member 52 is also rotated to a state shown by a two-dot chain line in FIG. 7 to form a space for carrying the substrate 1. Then, the substrate 1 transported by the transport device (not shown) passes through this space,
The suction members 3a, 3a and the substrate support members 52, 52 supported by the slide arms 44, 44 located below the
Supported by At this time, the support members 41 are positioned below the electronic component 2 connected to the substrate 1.

【0062】次に、図11に示したように、回転フレー
ム43の上側に位置するスライドアーム44,44が下
側に位置するスライドアーム44,44と対向する位置
まで基板1側に接近動するとともに、図7に示すよう
に、同じく上側の基板サポート部材52,52が基板1
上に回動する。そして、吸着部材3a,3aが下降する
とともに、基板サポート部材52,52が下降して、基
板1を上下両面から押圧保持する。
Next, as shown in FIG. 11, the slide arms 44, 44 located on the upper side of the rotating frame 43 move closer to the substrate 1 to a position facing the slide arms 44, 44 located on the lower side. At the same time, as shown in FIG.
Swivel up. Then, the suction members 3a, 3a are lowered, and the substrate support members 52, 52 are lowered to hold the substrate 1 from both upper and lower surfaces.

【0063】この状態で、モータ50の駆動により回転
フレーム43が180度回転されることにより基板1が
反転される。このとき、図7に示したように、基板1に
接続された電子部品2は、サポート部材41,41にて
表裏から丁度保持された状態とされる。
In this state, the substrate 1 is inverted by rotating the rotating frame 43 by 180 degrees by driving the motor 50. At this time, as shown in FIG. 7, the electronic component 2 connected to the board 1 is held by the support members 41, 41 just from the front and back.

【0064】反転された基板1は、上記とは反対の動
作、すなわち、「吸着部材3a,3aの上昇、及び基板
サポート部材52,52の上昇」→「上側に位置するス
ライドアーム44,44の相離れる方向への移動、及び
上側に位置する基板サポート部材52,52の図7に2
点鎖線で示した位置への回動」の手順を経て、次の電子
部品実装工程へと搬送され受け渡される。
The inverted substrate 1 is operated in the opposite manner to the above, that is, "the lifting of the suction members 3a, 3a and the lifting of the substrate support members 52, 52" → "the lifting of the slide arms 44, 44 located on the upper side. Movement in the direction away from each other, and 2 of FIG.
It is conveyed and passed to the next electronic component mounting process through the procedure of “rotation to the position indicated by the chain line”.

【0065】上記第3の実施の形態では、基板1を、吸
着部材3a,3aと基板サポート部材52,52にて上
下から押圧保持した状態で反転させるようにしたことか
ら、回転運動に伴う応力が基板1に及ぼす影響が軽減さ
れ、しかも、この基板1の反転動作中、基板1に接続さ
れた電子部品2はサポート部材41,41にて保持され
る状態とされることから、回転動作により電子部品2が
ばたつくことが防止でき、基板1や電子部品2の破損を
防止することが出来る。
In the third embodiment, since the substrate 1 is reversed while being pressed and held by the suction members 3a, 3a and the substrate support members 52, 52 from above and below, the stress caused by the rotational movement is reduced. Of the electronic component 2 connected to the substrate 1 during the reversing operation of the substrate 1 is held by the support members 41, 41. The electronic component 2 can be prevented from fluttering, and the substrate 1 and the electronic component 2 can be prevented from being damaged.

【0066】[0066]

【発明の効果】本発明によれば、基板に搭載した部品が
振り回されることなく安定した反転操作が可能となるの
で、歩留まりが良く信頼性の高い液晶パネル等の基板を
組み立て製造することができ、実用上得られる効果大で
ある。
According to the present invention, a stable reversing operation can be performed without components mounted on the substrate being swung, so that a substrate such as a liquid crystal panel with high yield and high reliability can be assembled and manufactured. The effect is practically large.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明による基板反転装置を用いたパネル製造
装置のレイアウト図である。
FIG. 1 is a layout diagram of a panel manufacturing apparatus using a substrate reversing device according to the present invention.

【図2】本発明による基板反転装置の第1の実施の形態
を示す正面図である。
FIG. 2 is a front view showing a first embodiment of the substrate reversing device according to the present invention.

【図3】図2に示す装置の要部拡大正面図である。FIG. 3 is an enlarged front view of a main part of the device shown in FIG. 2;

【図4】図2に示す装置において、基板が搬送される状
態を示す正面図である。
FIG. 4 is a front view showing a state in which a substrate is transferred in the apparatus shown in FIG. 2;

【図5】図2に示す装置において、図3に続き、搬送さ
れた基板を保持しようとする状態を示した正面図であ
る。
5 is a front view showing a state in which the transported substrate is to be held, following FIG. 3, in the apparatus shown in FIG. 2;

【図6】本発明による基板反転装置の第2の実施の形態
を示す要部拡大正面図である。
FIG. 6 is a main part enlarged front view showing a second embodiment of the substrate reversing device according to the present invention.

【図7】本発明による基板反転装置の第3の実施の形態
を示す平面図である。
FIG. 7 is a plan view showing a third embodiment of the substrate reversing device according to the present invention.

【図8】図7に示す基板反転装置の横断面図である。8 is a cross-sectional view of the substrate reversing device shown in FIG.

【図9】図7に示す基板反転装置の動作状態を示す平面
図である。
9 is a plan view showing an operation state of the substrate reversing device shown in FIG.

【図10】図7に示す基板反転装置の動作状態を示す横
断面図である。
FIG. 10 is a cross-sectional view showing an operation state of the substrate reversing device shown in FIG.

【図11】図7に示す基板反転装置の他の動作状態を示
す平面図である。
FIG. 11 is a plan view showing another operation state of the substrate reversing device shown in FIG. 7;

【図12】図11に示す基板反転装置の横断面図であ
る。
FIG. 12 is a cross-sectional view of the substrate reversing device shown in FIG.

【図13】従来の基板反転装置を示す斜視図である。FIG. 13 is a perspective view showing a conventional substrate reversing device.

【図14】図13に示した装置の要部側面図である。FIG. 14 is a side view of a main part of the device shown in FIG.

【図15】図13に示した装置で反転された基板に部品
が実装される状態を示した斜視図である。
FIG. 15 is a perspective view showing a state where components are mounted on a substrate which has been inverted by the device shown in FIG. 13;

【符号の説明】[Explanation of symbols]

1,1A,1B 基板 2 部品 3 把持部 31,32 把持機構 3a 吸着部材 3b 把持片 3c 把持部 3d シリンダ 3e リニアガイド 3f 把持本体 3g 排気孔 4,10 反転機構 5 移動機構 71,72 保持板 71a,72a 貫通穴 7a 緩衝部材 8 搬送装置 8a 搬送テーブル 8b X−Y−θステージ 8c シリンダ 8d 吸着部材 91,92 ボールねじ機構 9a サーボモータ 10a モータ 10b 枠体 10c 連結梁 10d 軸受 20 パネル製造装置 21 基板供給装置 22a 第1基板清掃装置 22b 第2基板清掃装置 23a 第1接続部材貼付装置 23b 第2接続部材貼付装置 24a 第1電子部品実装装置 24b 第2電子部品実装装置 25 基板反転装置 26 基板収容装置 40 基板反転装置 41 サポート部材 42 スライド機構 43 回転フレーム 44 スライドアーム 45 シリンダ 46 支持ブラケット 47 フレーム部材 48 支軸 49 プーリ 50 モータ 51 プーリ 52 基板サポート部材 53 ベルト 1, 1A, 1B board 2 component 3 gripping part 31, 32 gripping mechanism 3a suction member 3b gripping piece 3c gripping part 3d cylinder 3e linear guide 3f gripping body 3g exhaust hole 4, 10 inversion mechanism 5 moving mechanism 71, 72 holding plate 71a , 72a Through hole 7a Buffer member 8 Transfer device 8a Transfer table 8b XY-θ stage 8c Cylinder 8d Suction member 91,92 Ball screw mechanism 9a Servo motor 10a Motor 10b Frame 10c Connecting beam 10d Bearing 20 Panel manufacturing device 21 Substrate Supply device 22a First substrate cleaning device 22b Second substrate cleaning device 23a First connection member bonding device 23b Second connection member bonding device 24a First electronic component mounting device 24b Second electronic component mounting device 25 Substrate reversing device 26 Substrate accommodation device 40 substrate reversing device 41 support member 42 Id mechanism 43 rotates the frame 44 slide arm 45 cylinder 46 support bracket 47 frame members 48 support shaft 49 a pulley 50 the motor 51 a pulley 52 the substrate support member 53 belt

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 2H088 FA16 FA17 FA18 FA24 FA30 MA20 2H092 GA50 GA59 MA31 MA35 NA29 5C012 AA09 5F031 CA05 FA02 FA20 GA24 PA18 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2H088 FA16 FA17 FA18 FA24 FA30 MA20 2H092 GA50 GA59 MA31 MA35 NA29 5C012 AA09 5F031 CA05 FA02 FA20 GA24 PA18

Claims (9)

【特許請求の範囲】[Claims] 【請求項1】 部品を実装した基板を両面から挟持する
一対の保持板と、 この一対の保持板を外側から押圧しつつ保持する把持部
と、 この把持部を回動させ前記基板を反転させる反転機構と
を具備することを特徴とする基板反転装置。
1. A pair of holding plates for holding a board on which components are mounted from both sides, a holding portion for holding the pair of holding plates while pressing them from outside, and turning the holding portion to invert the board. A substrate reversing device, comprising: a reversing mechanism.
【請求項2】 前記把持部は、対向配置した一組の把持
機構により構成され、 前記反転機構は、前記一組の把
持機構を同期して回動させるように構成されたことを特
徴とする請求項1記載の基板反転装置。
2. The method according to claim 1, wherein the grip portion is configured by a pair of grip mechanisms arranged to face each other, and the reversing mechanism is configured to rotate the pair of grip mechanisms in synchronization. The substrate reversing device according to claim 1.
【請求項3】 前記一対の保持板は、緩衝部材を介して
前記基板を挟持するように構成されたことを特徴とする
請求項1または2に記載の基板反転装置。
3. The substrate reversing device according to claim 1, wherein the pair of holding plates are configured to hold the substrate via a buffer member.
【請求項4】 前記一対の保持板は、緩衝部材を介して
前記部品を挟持するように構成されたことを特徴とする
請求項3記載の基板反転装置。
4. The substrate reversing device according to claim 3, wherein the pair of holding plates are configured to hold the component via a buffer member.
【請求項5】 前記把持部は、吸着部材を介して前記保
持板を保持するように構成されたことを特徴とする請求
項1から4のうちのいずれか1項に記載の基板反転装
置。
5. The substrate reversing device according to claim 1, wherein the holding unit is configured to hold the holding plate via a suction member.
【請求項6】 部品を外周部から突出させた状態で実装
された基板を反転させる基板反転装置において、 前記基板を保持する保持部材と、前記部品を支持する支
持部材と、前記保持部材と前記支持部材とを前記基板の
表面に平行な直線を共通の回転中心軸として回転させる
回転機構とを具備することを特徴とする基板反転装置。
6. A board reversing device for reversing a board mounted with components protruding from an outer peripheral portion, wherein: a holding member for holding the board; a support member for supporting the component; A substrate reversing device, comprising: a rotation mechanism configured to rotate the support member and a straight line parallel to the surface of the substrate as a common rotation center axis.
【請求項7】 前記保持部材は、上下一対の吸着部材を
有し、かつ前記上下一対の吸着部材を前記基板の表面に
沿う方向に複数配置したことを特徴とする請求項6記載
の基板反転装置。
7. The substrate reversing device according to claim 6, wherein said holding member has a pair of upper and lower suction members, and a plurality of said pair of upper and lower suction members are arranged in a direction along a surface of said substrate. apparatus.
【請求項8】 前記支持部材は、前記部品をその表裏両
面から保持可能とする一対の支持面を有することを特徴
とする請求項6または7記載の基板反転装置。
8. The substrate reversing device according to claim 6, wherein the support member has a pair of support surfaces capable of holding the component from both front and back surfaces.
【請求項9】 請求項1乃至8いずれか1項に記載の基
板反転装置を用いたパネル製造装置。
9. A panel manufacturing apparatus using the substrate reversing device according to claim 1.
JP2001101839A 2001-03-30 2001-03-30 Substrate reversing apparatus and panel manufacturing apparatus using the same Expired - Lifetime JP4328472B2 (en)

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