JP2015034842A - Inversion device - Google Patents

Inversion device Download PDF

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JP2015034842A
JP2015034842A JP2013164222A JP2013164222A JP2015034842A JP 2015034842 A JP2015034842 A JP 2015034842A JP 2013164222 A JP2013164222 A JP 2013164222A JP 2013164222 A JP2013164222 A JP 2013164222A JP 2015034842 A JP2015034842 A JP 2015034842A
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holding
substrate
holding member
holding surface
reversing
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JP6300463B2 (en
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浩昭 吉村
Hiroaki Yoshimura
浩昭 吉村
忍 藤川
Shinobu Fujikawa
忍 藤川
洋志 北原
Hiroshi Kitahara
洋志 北原
光彦 中石
Mitsuhiko Nakaishi
光彦 中石
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Mitsuboshi Diamond Industrial Co Ltd
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Mitsuboshi Diamond Industrial Co Ltd
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Priority to JP2013164222A priority Critical patent/JP6300463B2/en
Priority to TW103113069A priority patent/TWI617518B/en
Priority to KR1020140043044A priority patent/KR102250030B1/en
Priority to CN201410168020.XA priority patent/CN104340661B/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide an inversion device configured to stably invert a substrate.SOLUTION: A support member 4 movably supports a first holding member 2a and a second holding member 2b so that first and second holding surfaces 21a, 21b are close to and away from each other. The first holding member 2a and the second holding member can be integrally rotated so that the first holding surface faces a second direction opposite a first direction.

Description

本発明は、反転装置に関するものである。   The present invention relates to a reversing device.

液晶装置は、液晶層を間に介在するように第１基板と第２基板とがシール材によって貼り合わされる貼り合わせ基板によって構成される（例えば特許文献１）。この貼り合わせ基板は、生産性の観点などから一旦大判サイズの状態で作製され、この大判サイズの基板を必要なサイズに分断して複数の貼り合わせ基板を作製することが一般的に行われている。   The liquid crystal device is configured by a bonded substrate in which a first substrate and a second substrate are bonded together with a sealing material so that a liquid crystal layer is interposed (for example, Patent Document 1). This bonded substrate is once manufactured in a large size state from the viewpoint of productivity, etc., and it is generally performed to divide the large size substrate into a necessary size to produce a plurality of bonded substrates. Yes.

この貼り合わせ基板を分断する際、一般的に貼り合わせ基板を表裏反転させる工程が必要となる。この貼り合わせ基板の分断方法の一例について説明すると、まず、第１基板が上側となるように貼り合わせ基板を固定し、第１基板にスクライブ溝を形成する。そして、貼り合わせ基板を表裏反転させて第２基板が上側となるように貼り合わせ基板を固定し、第２基板側から貼り合わせ基板を押圧して撓ませ、第１基板をスクライブ溝に沿って分断する。次に、第２基板が上側になった状態で、貼り合わせ基板の第２基板にスクライブ溝を形成した後、貼り合わせ基板を表裏反転させて第１基板が上側となるように貼り合わせ基板を固定する。そして、第１基板側から貼り合わせ基板を押圧して撓ませ、第２基板をスクライブ溝に沿って分断する。   When dividing this bonded substrate, generally, a step of turning the bonded substrate upside down is required. An example of the method for dividing the bonded substrate will be described. First, the bonded substrate is fixed so that the first substrate is on the upper side, and a scribe groove is formed in the first substrate. Then, the bonded substrate is reversed so that the bonded substrate is fixed so that the second substrate is on the upper side, the bonded substrate is pressed and bent from the second substrate side, and the first substrate is moved along the scribe groove. Divide. Next, after the scribe groove is formed on the second substrate of the bonded substrate with the second substrate on the upper side, the bonded substrate is turned over so that the first substrate is on the upper side. Fix it. Then, the bonded substrate is pressed and bent from the first substrate side, and the second substrate is divided along the scribe groove.

特開２０１２−２０３２３５号公報JP2012-203235A

上述したように、基板を分断する際には、基板を反転させる処理が必要となる。従来の反転装置は次の方法によって基板を反転させる。まず、反転装置は、基板を吸着して反転可能な位置まで水平移動して基板を移動させる。次に、反転装置は反転可能な位置において上下反転することによって、基板の表裏を反転させる。そして、反転装置は、次工程のユニットまで水平移動して、表裏反転された基板を引き渡す。しかしながら、このような反転装置は、予期せぬトラブルなどにより基板を吸着する吸着力が低下してしまう恐れがあり、この結果、基板がずれたり落下したりするおそれがある。なお、貼り合わせ基板ではない他の基板においても、同様の問題を有している。   As described above, when the substrate is divided, a process of inverting the substrate is necessary. The conventional reversing device reverses the substrate by the following method. First, the reversing device moves the substrate by horizontally moving it to a position where the substrate can be sucked and reversed. Next, the reversing device flips the substrate upside down at a reversible position, thereby reversing the front and back of the substrate. Then, the reversing device moves horizontally to the next process unit and delivers the substrate that has been reversed upside down. However, in such a reversing device, there is a possibility that the adsorption force for adsorbing the substrate may be reduced due to an unexpected trouble or the like, and as a result, the substrate may be displaced or dropped. Note that other substrates that are not bonded substrates also have the same problem.

本発明の課題は、安定して基板を反転させることができる反転装置を提供することにある。   The subject of this invention is providing the inversion apparatus which can invert a board | substrate stably.

（１）本発明のある側面に係る反転装置は、基板を反転させるための反転装置であって、第１保持部材と、第２保持部材と、支持部材と、ベース部材とを備える。第１保持部材は、第１方向を向く第１保持面を有する。第２保持部材は、第１保持面と対向する第２保持面を有する。支持部材は、第１保持面と第２保持面とが互いに接近及び離反するように第１保持部材及び第２保持部材の少なくとも一方を移動可能に支持する。ベース部材は、第１保持面が第１方向と反対の第２方向を向くように支持部材を回転可能に支持する。   (1) An inversion device according to an aspect of the present invention is an inversion device for inverting a substrate, and includes a first holding member, a second holding member, a support member, and a base member. The first holding member has a first holding surface that faces the first direction. The second holding member has a second holding surface that faces the first holding surface. The support member movably supports at least one of the first holding member and the second holding member so that the first holding surface and the second holding surface approach and separate from each other. The base member rotatably supports the support member such that the first holding surface faces a second direction opposite to the first direction.

この構成によれば、第１保持部材の第１保持面と第２保持部材の第２保持面とによって基板を挟んで保持することができる。そして、この基板を保持した状態で第１及び第２保持部材を一体的に回転させることによって、基板を反転させることができる。このように、第１及び第２保持部材によって基板を挟んだ状態で基板を反転させるため、安定して基板を反転させることができる。   According to this configuration, the substrate can be held between the first holding surface of the first holding member and the second holding surface of the second holding member. And a board | substrate can be reversed by rotating the 1st and 2nd holding member integrally in the state which hold | maintained this board | substrate. As described above, since the substrate is inverted while the substrate is sandwiched between the first and second holding members, the substrate can be stably inverted.

（２）好ましくは、支持部材は、第１回転方向への回転と、前記第１回転方向とは反対の第２回転方向への回転とを交互に行う。この構成によれば、支持部材などにチューブなどが接続されている場合であっても、支持部材の回転によってチューブがねじれることを防止できる。   (2) Preferably, the support member alternately performs rotation in the first rotation direction and rotation in the second rotation direction opposite to the first rotation direction. According to this configuration, even when a tube or the like is connected to the support member or the like, the tube can be prevented from being twisted by the rotation of the support member.

（３）好ましくは、第１保持面及び第２保持面の少なくとも一方は、基板を吸着する吸着部を有する。この構成によれば、吸着部によって、第１保持面又は第２保持面上に載置された基板などをより安定して保持することができる。   (3) Preferably, at least one of the first holding surface and the second holding surface has a suction portion that sucks the substrate. According to this configuration, the substrate or the like placed on the first holding surface or the second holding surface can be more stably held by the suction portion.

（４）好ましくは、支持部材は、連結部と、第１及び第２支持部とを有する。第１支持部は、連結部の第２方向側端部から延び、第１保持部材を支持する。第２支持部は、連結部の第１方向側端部から延び、第２保持部材を支持する。   (4) Preferably, a support member has a connection part and a 1st and 2nd support part. A 1st support part is extended from the 2nd direction side edge part of a connection part, and supports a 1st holding member. A 2nd support part is extended from the 1st direction side edge part of a connection part, and supports a 2nd holding member.

本発明によれば、安定して基板を反転させる反転装置を提供することができる。   ADVANTAGE OF THE INVENTION According to this invention, the inversion apparatus which inverts a board | substrate stably can be provided.

反転装置の斜視図。The perspective view of an inversion apparatus. 反転装置の側面図。The side view of an inversion apparatus. 反転装置の正面図。The front view of an inversion apparatus. 反転装置の部分斜視図。The partial perspective view of a reversing device. 図３のＡ−Ａ線断面。AA line cross section of FIG. 解除姿勢における第１規制部材の斜視図。The perspective view of the 1st control member in a cancellation | release attitude | position. 規制姿勢における第１規制部材の斜視図。The perspective view of the 1st control member in a control posture.

以下、本発明に係る反転装置の実施形態について図面を参照しつつ説明する。図１は反転装置１の斜視図である。   Hereinafter, embodiments of a reversing device according to the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of the reversing device 1.

反転装置１は、基板Ｗを反転させるための装置である。図１に示すように、反転装置１は、第１保持部材２ａ、第２保持部材２ｂ、及び支持部材４を備えている。なお、これら第１保持部材２ａ、第２保持部材２ｂ、及び支持部材４を合わせて、反転ユニット１０と称する。この反転ユニット１０が回転することによって基板Ｗを反転させる。   The reversing device 1 is a device for reversing the substrate W. As shown in FIG. 1, the reversing device 1 includes a first holding member 2 a, a second holding member 2 b, and a support member 4. The first holding member 2a, the second holding member 2b, and the support member 4 are collectively referred to as a reversing unit 10. As the reversing unit 10 rotates, the substrate W is reversed.

反転装置１は、ベース部材５と、土台部材６と、第１テーブル部材７、第２テーブル部材８をさらに備えている。ベース部材５は、反転ユニット１０を回転可能に支持する部材である。土台部材６は、ベース部材５を移動可能に支持する部材である。第１及び第２テーブル部材７，８は、基板Ｗを載置するための部材であって、第１テーブル部材７には反転処理前の基板Ｗが載置され、第２テーブル部材８には反転処理後の基板Ｗが載置される。第１テーブル部材７と第２テーブル部材８とは所定間隔をおいて配置されている。なお、第１テーブル部材７と第２テーブル部材８との間の領域には、反転ユニット１０が配置されている。以下、各部材について詳細に説明する。   The reversing device 1 further includes a base member 5, a base member 6, a first table member 7, and a second table member 8. The base member 5 is a member that rotatably supports the reversing unit 10. The base member 6 is a member that supports the base member 5 so as to be movable. The first and second table members 7 and 8 are members for mounting the substrate W. The substrate W before the reversing process is mounted on the first table member 7, and the second table member 8 is mounted on the second table member 8. The substrate W after the inversion process is placed. The first table member 7 and the second table member 8 are arranged at a predetermined interval. A reversing unit 10 is disposed in a region between the first table member 7 and the second table member 8. Hereinafter, each member will be described in detail.

図２は反転装置１の側面図、図３は反転装置１の正面図である。なお、図２では、第１及び第２テーブル部材７，８などの記載を省略している。また、以下の説明において、「前方」とは図２の左側を意味し、「後方」とは図２の右側を意味する。通常、作業者は、反転装置１の前方において作業を行う。   FIG. 2 is a side view of the reversing device 1, and FIG. 3 is a front view of the reversing device 1. In FIG. 2, the first and second table members 7 and 8 are not shown. Further, in the following description, “front” means the left side of FIG. 2, and “rear” means the right side of FIG. Usually, the worker performs work in front of the reversing device 1.

図２及び図３に示すように、第１保持部材２ａ及び第２保持部材２ｂは、基板Ｗを保持するための部材である。具体的には、第１保持部材２ａと第２保持部材２ｂとによって基板Ｗを挟持することによって基板Ｗを保持する。   As shown in FIGS. 2 and 3, the first holding member 2 a and the second holding member 2 b are members for holding the substrate W. Specifically, the substrate W is held by sandwiching the substrate W between the first holding member 2a and the second holding member 2b.

第１保持部材２ａは、平面視が矩形状の部材であり、第１保持面２１ａと裏面２２ａとを有している。第１保持面２１ａは第１方向を向いており、裏面２２ａは第１方向とは反対の第２方向を向いている。具体的には、反転ユニット１０に基板Ｗの供給を待っている待機状態、すなわち反転処理を行っていない状態において、第１保持面２１ａは下方又は上方を向いており、裏面２２ａは上方又は下方を向いている。なお、図２及び図３においては、第１保持面２１ａは下方を向いており、裏面２２ａは上方を向いている。   The first holding member 2a is a member having a rectangular shape in plan view, and has a first holding surface 21a and a back surface 22a. The first holding surface 21a faces the first direction, and the back surface 22a faces the second direction opposite to the first direction. Specifically, in a standby state in which the substrate W is waiting to be supplied to the reversing unit 10, that is, in a state where the reversing process is not performed, the first holding surface 21a faces downward or upward, and the back surface 22a faces upward or downward. Facing. 2 and 3, the first holding surface 21a faces downward and the back surface 22a faces upward.

第１保持面２１ａは、基板Ｗなどを吸着するための吸着面を構成している。具体的には、第１保持面２１ａには複数の穴部が形成されており、各穴部から空気を吸うことによって第１保持面２１ａ上に載置されたものを吸着する。第１保持部材２ａは、対向する一対の端部において、複数の切欠２３ａが形成されている（図４参照）。   The first holding surface 21a constitutes an adsorption surface for adsorbing the substrate W and the like. Specifically, a plurality of holes are formed in the first holding surface 21a, and the one placed on the first holding surface 21a is adsorbed by sucking air from each hole. The first holding member 2a is formed with a plurality of notches 23a at a pair of opposed end portions (see FIG. 4).

第２保持部材２ｂは、第１保持部材２ａを回転軸Ｃを中心に１８０度回転させたものと基本的に同じ構成であるため、その詳細な説明を省略する。なお、第２保持部材２ｂの各部品には、対応する第１保持部材２ａの各部品と同じ符号（末尾のみが異なる）が付されている。なお、第１保持部材２ａの各部品は末尾に「ａ」を有する符号が付されている一方、第２保持部材２ｂの各部品は末尾に「ｂ」を有する符号が付されている。   Since the second holding member 2b has basically the same configuration as that obtained by rotating the first holding member 2a by 180 degrees about the rotation axis C, detailed description thereof is omitted. The parts of the second holding member 2b are assigned the same reference numerals as the parts of the corresponding first holding member 2a (only the end is different). Each component of the first holding member 2a is labeled with a symbol having “a” at the end, while each component of the second holding member 2b is labeled with a symbol having “b” at the end.

支持部材４は、第１保持面２１ａと第２保持面２１ｂとが互いに接近及び離反するように第１保持部材２ａ及び第２保持部材２ｂを移動可能に支持している。詳細には、支持部材４は、連結部４１と、第１支持部４２ａと、第２支持部４２ｂとを有する。連結部４１は、正面視が略矩形状である。   The support member 4 movably supports the first holding member 2a and the second holding member 2b so that the first holding surface 21a and the second holding surface 21b approach and separate from each other. Specifically, the support member 4 includes a connecting portion 41, a first support portion 42a, and a second support portion 42b. The connecting portion 41 has a substantially rectangular shape when viewed from the front.

第１支持部４２ａは、連結部４１の第２方向側の端部から前方に向かって延びている。また、第２支持部４２ｂは、連結部４１の第１方向側の端部から前方に向かって延びている。第１支持部４２ａは、第１保持部材２ａを移動可能に支持している。第１保持部材２ａは、第１支持部４２ａに対して接近及び離反するように移動する。   The first support portion 42a extends forward from the end of the connecting portion 41 on the second direction side. Further, the second support portion 42 b extends forward from the end portion on the first direction side of the connecting portion 41. The 1st support part 42a is supporting the 1st holding member 2a so that movement is possible. The first holding member 2a moves so as to approach and separate from the first support portion 42a.

図４は、反転装置１の部分斜視図である。図４に示すように、第１支持部４２ａは、一対の側壁部４２１ａ、４２２ａと、前壁部４２３ａと、プレート部４２４ａとを有している。一対の側壁部４２１ａ、４２２ａは、対向して配置されており、連結部４１から前方に延びている。一対の側壁部４２１ａ、４２２ａの前端同士を連結するように前壁部４２３ａが延びている。プレート部４２４ａは、一対の側壁部４２１ａ、４２２ａ間に亘って延びており、一対の側壁部４２１ａ、４２２ａに固定されている。   FIG. 4 is a partial perspective view of the reversing device 1. As shown in FIG. 4, the first support part 42a has a pair of side wall parts 421a and 422a, a front wall part 423a, and a plate part 424a. The pair of side wall portions 421a and 422a are disposed to face each other and extend forward from the connecting portion 41. The front wall portion 423a extends so as to connect the front ends of the pair of side wall portions 421a and 422a. The plate portion 424a extends between the pair of side wall portions 421a and 422a, and is fixed to the pair of side wall portions 421a and 422a.

第１支持部４２ａは、摺動駆動部４２５ａと、複数本（例えば４本）のガイドロッド４２６ａとをさらに有している。摺動駆動部４２５ａは、第１保持部材２ａを駆動し、第１保持部材２ａを第１方向に移動させたり第２方向に移動させたりする。摺動駆動部４２５ａは、プレート部４２４ａに支持されている。具体的には、摺動駆動部４２５ａは、例えばエアシリンダであって、シリンダ本体４２７ａと、ピストンロッド４２８ａとを有している。シリンダ本体４２７ａがプレート部４２４ａに固定されており、ピストンロッド４２８ａの先端が第１保持部材２ａの裏面２２ａに固定されている。ピストンロッド４２８ａが長手方向に往復動することにより、第１保持部材２ａが第１方向又は第２方向に移動する。   The first support part 42a further includes a sliding drive part 425a and a plurality of (for example, four) guide rods 426a. The sliding drive unit 425a drives the first holding member 2a, and moves the first holding member 2a in the first direction or in the second direction. The sliding drive part 425a is supported by the plate part 424a. Specifically, the sliding drive unit 425a is an air cylinder, for example, and includes a cylinder body 427a and a piston rod 428a. The cylinder body 427a is fixed to the plate portion 424a, and the tip of the piston rod 428a is fixed to the back surface 22a of the first holding member 2a. As the piston rod 428a reciprocates in the longitudinal direction, the first holding member 2a moves in the first direction or the second direction.

各ガイドロッド４２６ａは、第１保持部材２ａの第１方向及び第２方向への移動を安定させるための部材である。詳細には、各ガイドロッド４２６ａは、先端が第１保持部材２ａの裏面２２ａに固定されている。また、各ガイドロッド４２６ａは、プレート部４２４ａに対して摺動可能に支持されている。具体的には、プレート部４２４ａから第２方向へ延びる複数（例えば４つ）の筒状部４２９ａがプレート部４２４ａに固定されている。筒状部４２９ａの内径は、ガイドロッド４２６ａが筒状部４２９ａ内を摺動できる程度に設計される。プレート部４２４ａは、この筒状部４２９ａが固定された場所において貫通孔が形成されており、この貫通孔は筒状部４２９ａの貫通孔と連通している。そして、各ガイドロッド４２６ａは、各筒状部４２９ａ内を貫通することによって、プレート部４２４ａ及び筒状部４２９ａに摺動可能に支持されている。なお、ガイドロッド４２６ａの後端部は、筒状部４２９ａ内を通過不能なストッパー部４２６１ａを有する。プレート部４２４ａと筒状部４２９ａとは一体的に形成されていてもよい。   Each guide rod 426a is a member for stabilizing the movement of the first holding member 2a in the first direction and the second direction. Specifically, the tip of each guide rod 426a is fixed to the back surface 22a of the first holding member 2a. Each guide rod 426a is supported to be slidable with respect to the plate portion 424a. Specifically, a plurality of (for example, four) cylindrical portions 429a extending in the second direction from the plate portion 424a are fixed to the plate portion 424a. The inner diameter of the cylindrical portion 429a is designed to such an extent that the guide rod 426a can slide in the cylindrical portion 429a. The plate portion 424a is formed with a through hole at a place where the tubular portion 429a is fixed, and the through hole communicates with the through hole of the tubular portion 429a. Each guide rod 426a is slidably supported by the plate portion 424a and the tubular portion 429a by penetrating the inside of each tubular portion 429a. The rear end portion of the guide rod 426a has a stopper portion 4261a that cannot pass through the cylindrical portion 429a. The plate part 424a and the cylindrical part 429a may be integrally formed.

第２支持部４２ｂは、第１支持部４２ａを回転軸Ｃを中心に１８０度回転させたものと基本的に同じ構成であるため、その詳細な説明を省略する。なお、第２支持部４２ｂは、第２保持部材２ｂを移動可能に支持するものであり、第２保持部材２ｂは、第２支持部４２ｂに対して接近及び離反するように移動する。第２支持部４２ｂの各部品には、対応する第１支持部４２ａの各部品と同じ符号（末尾のみが異なる）が付されている。なお、第１支持部４２ａの各部品は末尾に「ａ」を有する符号が付されている一方、第２支持部４２ｂの各部品は末尾に「ｂ」を有する符号が付されている。   Since the second support part 42b has basically the same configuration as that obtained by rotating the first support part 42a about the rotation axis C by 180 degrees, detailed description thereof is omitted. In addition, the 2nd support part 42b supports the 2nd holding member 2b so that a movement is possible, and the 2nd holding member 2b moves so that it may approach and separate with respect to the 2nd support part 42b. Each component of the second support portion 42b is assigned the same reference numeral (only the end is different) as each component of the corresponding first support portion 42a. Each component of the first support portion 42a is labeled with a symbol having an “a” at the end, while each component of the second support portion 42b is labeled with a symbol having a “b” at the end.

図５は、図３のＡ−Ａ線断面図である。なお、図５では、第１及び第２テーブル部材７，８などの記載を省略している。図５に示すように、支持部材４は、ボス部４３をさらに有している。ボス部４３は、連結部４１から後方に延びる円筒状の部材であり、連結部４１に対してボルトなどにより固定されている。ボス部４３は、軸受を介してベース部材５に回転可能に支持されている。このため、支持部材４は、ベース部材５に対して回転軸Ｃを中心に回転可能である。   5 is a cross-sectional view taken along line AA in FIG. In FIG. 5, the description of the first and second table members 7, 8 and the like is omitted. As shown in FIG. 5, the support member 4 further has a boss portion 43. The boss portion 43 is a cylindrical member extending rearward from the connecting portion 41 and is fixed to the connecting portion 41 with a bolt or the like. The boss portion 43 is rotatably supported by the base member 5 via a bearing. For this reason, the support member 4 can rotate around the rotation axis C with respect to the base member 5.

ベース部材５は、ベース本体部５１と、減速部５２と、スライド部５３とを備えている。ベース部材５１には、上述したように支持部材４のボス部４３が回転可能に支持されている。また、ベース本体部５１には、ロータリージョイント９が取り付けられており、ロータリージョイント９には回転駆動部１１が取り付けられている。この回転駆動部１１は、反転ユニット１０を回転軸Ｃを中心に回転させるための部材である。回転駆動部１１によって駆動される反転ユニット１０は、時計周りの回転と反時計回りの回転とを交互に行う。なお、反転ユニット１０の回転角度は１８０度である。このため、反転ユニット１０は、第１保持部材２ａが第２保持部材２ｂの上方に配置されたり、第１保持部材２ａが第２保持部材２ｂの下方に配置されたりする。回転駆動部１１は、例えばサーボモータである。   The base member 5 includes a base body 51, a speed reduction part 52, and a slide part 53. As described above, the boss portion 43 of the support member 4 is rotatably supported by the base member 51. In addition, the rotary joint 9 is attached to the base main body 51, and the rotation drive unit 11 is attached to the rotary joint 9. The rotation drive unit 11 is a member for rotating the reversing unit 10 around the rotation axis C. The reversing unit 10 driven by the rotation driving unit 11 alternately performs clockwise rotation and counterclockwise rotation. Note that the rotation angle of the reversing unit 10 is 180 degrees. For this reason, in the reversing unit 10, the first holding member 2a is arranged above the second holding member 2b, or the first holding member 2a is arranged below the second holding member 2b. The rotation drive unit 11 is, for example, a servo motor.

この回転駆動部１１の回転は、ロータリージョイント９を介してモータ減速部５２に伝達され、モータ減速部５２によって回転数が減速される。減速部５２は、ボス部４３に接続されており、減速された回転をボス部４３に伝達する。この結果、回転駆動部１１によって、反転ユニット１０を回転させることができる。なお、連結部４１、ボス部４３、及び減速部５３には、回転軸Ｃに沿って貫通孔が形成されているため、この内部に、チューブを通すことができる。このチューブをロータリージョイントに接続して、エアー源からのエアーをチューブに送ることができる。   The rotation of the rotation drive unit 11 is transmitted to the motor speed reduction unit 52 via the rotary joint 9, and the rotation speed is reduced by the motor speed reduction unit 52. The speed reduction part 52 is connected to the boss part 43 and transmits the reduced speed rotation to the boss part 43. As a result, the reversing unit 10 can be rotated by the rotation driving unit 11. In addition, since the through-hole is formed in the connection part 41, the boss | hub part 43, and the deceleration part 53 along the rotating shaft C, a tube can be let through this inside. This tube can be connected to a rotary joint to send air from an air source to the tube.

スライド部５３は、ベース本体部５１の下端部に設けられている。このスライド部５３は、ベース部材５を前後方向に摺動させるための部材である。詳細には、土台部材６は、前後方向（図５の左右方向）に延びる一対のガイドレール６１を有している。そして、スライド部５３は、一対のガイドレール６１に摺動可能に支持される。この結果、ベース部材５は、土台部材６に対して前後方向に摺動可能となる。   The slide portion 53 is provided at the lower end portion of the base main body portion 51. The slide portion 53 is a member for sliding the base member 5 in the front-rear direction. Specifically, the base member 6 has a pair of guide rails 61 extending in the front-rear direction (left-right direction in FIG. 5). The slide portion 53 is slidably supported by the pair of guide rails 61. As a result, the base member 5 can slide in the front-rear direction with respect to the base member 6.

図２に示すように、土台部材６は、駆動機構６２を有している。この駆動機構６２によって、ベース部材５を前後方向（図２の左右方向）に移動させることができる。例えば、駆動機構６２は、ボールネジ装置とすることができ、サーボモータ６３と、ネジ軸６４と、ナット部（図示省略）とを備えている。サーボモータ６３はネジ軸６４を回転駆動する。ネジ軸６４は、前後方向に延びており、複数のボールを介してナット部と螺合している。ナット部は、ベース本体部５１の底面に固定されている。この駆動機構６２は、サーボモータ６３がネジ軸６４を回転駆動することによって、ナット部がネジ軸６４に沿って移動する。この結果、ナット部が固定されたベース部材５もネジ軸６４に沿って移動する。   As shown in FIG. 2, the base member 6 has a drive mechanism 62. By this drive mechanism 62, the base member 5 can be moved in the front-rear direction (left-right direction in FIG. 2). For example, the drive mechanism 62 can be a ball screw device, and includes a servo motor 63, a screw shaft 64, and a nut portion (not shown). The servo motor 63 rotationally drives the screw shaft 64. The screw shaft 64 extends in the front-rear direction and is screwed to the nut portion via a plurality of balls. The nut portion is fixed to the bottom surface of the base body portion 51. In the drive mechanism 62, the nut portion moves along the screw shaft 64 when the servomotor 63 rotationally drives the screw shaft 64. As a result, the base member 5 to which the nut portion is fixed also moves along the screw shaft 64.

ベース部材５は、反転ユニット１０を支持しているため、ベース部材５が前後方向に移動することにより、反転ユニット１０も前後方向に移動する。この前後方向の移動によって、反転ユニット１０は、受け取り位置と反転位置との間で移動可能となる。反転ユニット１０が受け取り位置にあるとき、第１及び第２保持部材２ａ、２ｂは、図１に示すように第１テーブル部材７と第２テーブル部材８との間の領域に位置している。そして、駆動機構６２が作動することによって、反転ユニット１０は図１の状態より後方へ移動する。この結果、第１及び第２保持部材２ａ、２ｂは、第１テーブル部材７と第２テーブル部材８との間の領域から外れる。この位置を反転位置とする。反転ユニット１０は、反転位置において反転処理を実行する。なお、反転ユニット１０が反転位置にあるとき、第１及び第２保持部材２ａ、２ｂは、第１テーブル部材７と第２テーブル部材８との間の領域から完全に外れていなくてもよく、例えば第１及び第２保持部材２ａ、２ｂの一部が第１テーブル部材７と第２テーブル部材８との間の領域に位置していてもよい。   Since the base member 5 supports the reversing unit 10, when the base member 5 moves in the front-rear direction, the reversing unit 10 also moves in the front-rear direction. By this movement in the front-rear direction, the reversing unit 10 can move between the receiving position and the reversing position. When the reversing unit 10 is in the receiving position, the first and second holding members 2a and 2b are located in a region between the first table member 7 and the second table member 8 as shown in FIG. When the drive mechanism 62 operates, the reversing unit 10 moves rearward from the state shown in FIG. As a result, the first and second holding members 2 a and 2 b are disengaged from the region between the first table member 7 and the second table member 8. This position is set as the reverse position. The reversing unit 10 performs a reversal process at the reversal position. When the reversing unit 10 is in the reversing position, the first and second holding members 2a and 2b may not be completely detached from the region between the first table member 7 and the second table member 8, For example, a part of the first and second holding members 2 a and 2 b may be located in a region between the first table member 7 and the second table member 8.

図４及び図５に示すように、反転装置１は、第１押さえ部材１２ａと第２押さえ部材１２ｂとをさらに備えている。第１押さえ部材１２ａ及び第２押さえ部材１２ｂは、第１保持部材２ａと第２保持部材２ｂとによって基板Ｗを保持する前に、基板Ｗを押さえるための部材である。なお、第２保持部材２ｂの第２保持面２１ｂ上に基板Ｗが載置されたときは第１押さえ部材１２ａによって基板Ｗを押さえる。また、第１保持部材２ａの第１保持面２１ａ上に基板Ｗが載置されたときは第２押さえ部材１２ｂによって基板Ｗを押さえる。   As shown in FIGS. 4 and 5, the reversing device 1 further includes a first pressing member 12a and a second pressing member 12b. The first pressing member 12a and the second pressing member 12b are members for pressing the substrate W before the substrate W is held by the first holding member 2a and the second holding member 2b. When the substrate W is placed on the second holding surface 21b of the second holding member 2b, the substrate W is pressed by the first pressing member 12a. When the substrate W is placed on the first holding surface 21a of the first holding member 2a, the substrate W is pressed by the second pressing member 12b.

図４に示すように、第１押さえ部材１２ａは、一対の第１押さえ部１２１ａと、連結部１２２ａと、第１駆動部１２３ａとを有する。一対の第１押さえ部１２１ａは、連結部１２２ａによって連結されている。各第１押さえ部１２１ａは、第１保持部材２ａに形成された貫通孔２４ａ（図４参照）を介して第１保持面２１ａに対して進退可能である。すなわち、各第１押さえ部１２１ａは、押さえ位置と解除位置とを取り得る。各第１押さえ部１２１ａが押さえ位置にあるとき、各第１押さえ部１２１ａの先端面は、第１保持面２１ａよりも第１方向側に位置する。すなわち、各第１押さえ部１２１ａの先端面は、第１保持面２１ａから第２保持面２１ｂ側に突出して第２保持面２１ｂ上に載置された基板Ｗなどを押さえる。また、各第１押さえ部１２１ａが解除位置にあるとき、各第１押さえ部１２１ａの先端面は、第１保持面２１ａと同じ位置、又は第１保持面２１ａよりも第２方向側に位置する。   As shown in FIG. 4, the first pressing member 12a has a pair of first pressing portions 121a, a connecting portion 122a, and a first driving portion 123a. The pair of first pressing parts 121a are connected by a connecting part 122a. Each first pressing portion 121a can advance and retreat with respect to the first holding surface 21a through a through hole 24a (see FIG. 4) formed in the first holding member 2a. That is, each first pressing portion 121a can take a pressing position and a release position. When each first pressing portion 121a is in the pressing position, the front end surface of each first pressing portion 121a is positioned on the first direction side with respect to the first holding surface 21a. That is, the front end surface of each first pressing portion 121a protrudes from the first holding surface 21a toward the second holding surface 21b and presses the substrate W and the like placed on the second holding surface 21b. Moreover, when each 1st holding | suppressing part 121a exists in a cancellation | release position, the front end surface of each 1st holding | suppressing part 121a is located in the 2nd direction side from the same position as the 1st holding surface 21a, or the 1st holding surface 21a. .

第１駆動部１２３ａは、一対の第１押さえ部１２１ａが押さえ位置と解除位置とを取り得るように、一対の第１押さえ部１２１ａを駆動する。詳細には、第１駆動部１２３ａは、例えばエアシリンダである。この第１駆動部１２３ａは、シリンダ本体１２３１ａと、ピストン１２３２ａと、スライダ１２３３ａとを有する。ピストン１２３２ａは、シリンダ本体１２３１ａ内を摺動する。スライダ１２３３ａは、ピストン１２３２ａと連結されており、ピストン１２３２ａと一緒に摺動する。このスライダ１２３３ａは、シリンダ本体１２３１ａに沿って摺動する。また、スライダ１２３３ａには、連結部１２２ａが固定されている。   The 1st drive part 123a drives a pair of 1st press part 121a so that a pair of 1st press part 121a can take a press position and a release position. In detail, the 1st drive part 123a is an air cylinder, for example. The first drive unit 123a includes a cylinder body 1231a, a piston 1232a, and a slider 1233a. The piston 1232a slides in the cylinder body 1231a. The slider 1233a is connected to the piston 1232a and slides together with the piston 1232a. The slider 1233a slides along the cylinder body 1231a. Further, the connecting portion 122a is fixed to the slider 1233a.

第２押さえ部材１２ｂは、第１押さえ部材１２ａを回転軸Ｃを中心に１８０度回転させたものと基本的に同じ構成であるため、その詳細な説明を省略する。なお、第２押さえ部材１２ｂの各部品には、対応する第１押さえ部材１２ａの各部品と同じ符号（末尾のみが異なる）が付されている。なお、第１押さえ部材１２ａの各部品は末尾に「ａ」を有する符号が付されている一方、第２押さえ部材１２ｂの各部品は末尾に「ｂ」を有する符号が付されている。   The second pressing member 12b has basically the same configuration as that obtained by rotating the first pressing member 12a about the rotation axis C by 180 degrees, and thus detailed description thereof is omitted. In addition, each component of the 2nd pressing member 12b is attached | subjected with the same code | symbol (only a tail is different) as each component of the corresponding 1st pressing member 12a. Each component of the first pressing member 12a is labeled with a symbol having “a” at the end, while each component of the second pressing member 12b is labeled with a symbol having “b” at the end.

図６は、解除姿勢における第１規制部材３ａの斜視図である。図６に示すように、第１保持部材２ａの裏面２２ａ上に、第１規制部材３ａが設置されている。より詳細には、第１規制部材３ａは、第１保持部材２ａの裏面２２ａ上の端部に設置されている。なお、第１規制部材３ａが設置される第１保持部材２ａの端部には、上述した複数の切欠２３ａが形成されている。第１規制部材３ａは、複数の取付部３１ａと、連結ロッド３２ａと、複数の規制部３３ａと、回転駆動部３４ａと、を有している。   FIG. 6 is a perspective view of the first restricting member 3a in the release posture. As shown in FIG. 6, the 1st control member 3a is installed on the back surface 22a of the 1st holding member 2a. In more detail, the 1st control member 3a is installed in the edge part on the back surface 22a of the 1st holding member 2a. In addition, the several notch 23a mentioned above is formed in the edge part of the 1st holding member 2a in which the 1st control member 3a is installed. The first restricting member 3a includes a plurality of attachment portions 31a, a connecting rod 32a, a plurality of restricting portions 33a, and a rotation drive portion 34a.

各取付部３１ａは、第１保持部材２ａの裏面２２ａ上に、ボルトなどによって固定されている。また、各取付部３１ａは、裏面２２ａの端部に沿って所定間隔をあけて配置されている。各取付部３１ａは、本体部３１１ａと、軸受部３１２ａとを有している。本体部３１１ａは貫通孔を有しており、この貫通孔内に軸受部３１２ａが固定されている。   Each attachment portion 31a is fixed on the back surface 22a of the first holding member 2a by a bolt or the like. Moreover, each attaching part 31a is arrange | positioned at predetermined intervals along the edge part of the back surface 22a. Each attachment portion 31a has a main body portion 311a and a bearing portion 312a. The main body 311a has a through hole, and the bearing 312a is fixed in the through hole.

連結ロッド３２ａは、各取付部３１ａに亘って延びている。連結ロッド３２ａは、円柱状であって、各取付部３１ａの軸受部３１２ａによって支持されている。よって、連結ロッド３２ａは、各取付部３１ａに回転可能に支持されている。   The connecting rod 32a extends over each attachment portion 31a. The connecting rod 32a has a cylindrical shape and is supported by the bearing portion 312a of each mounting portion 31a. Therefore, the connecting rod 32a is rotatably supported by each attachment part 31a.

各規制部３３ａは、第１保持面２１ａと第２保持面２１ｂとによって基板Ｗを挟んだ状態において、第１保持部材２ａと第２保持部材２ｂとに亘って延びる。具体的には、各規制部３３ａは、連結ロッド３２ａに固定されている。すなわち、各規制部３３ａは、連結ロッド３２ａと一体的に回転する。各規制部３３ａは、第１部分３３１ａ及び第２部分３３２ａから構成されており、全体として略Ｌ字状に形成されている。第１部分３３１ａは連結ロッド３２ａに固定されている。第２部分３３２ａは、第１規制部材３ａが後述する規制姿勢となった場合、第１保持部材２ａと第２保持部材２ｂとに亘って延びる部分である。   Each restricting portion 33a extends across the first holding member 2a and the second holding member 2b in a state where the substrate W is sandwiched between the first holding surface 21a and the second holding surface 21b. Specifically, each restricting portion 33a is fixed to the connecting rod 32a. That is, each restricting portion 33a rotates integrally with the connecting rod 32a. Each regulation part 33a is comprised from the 1st part 331a and the 2nd part 332a, and is formed in the substantially L shape as a whole. The first portion 331a is fixed to the connecting rod 32a. The second portion 332a is a portion that extends across the first holding member 2a and the second holding member 2b when the first restricting member 3a assumes a restricting posture described later.

回転駆動部３４ａは、連結ロッド３２ａを回転させるための部材である。回転駆動部３４ａは、エアシリンダ３５ａと、リンク機構３６ａとを有する。エアシリンダ３５ａは、シリンダ本体３５１ａとピストンロッド３５２ａとを有している。シリンダ本体３５１ａは、第１保持部材２ａの裏面２２ａに揺動可能に設置されている。ピストンロッド３５２ａは、シリンダ本体３５１ａ内において摺動するピストンヘッド（図示省略）に連結されている。シリンダ本体３５１ａ内にエアーが供給されることにより、ピストンロッド３５２ａは長手方向に往復動する。エアシリンダ３５ａは、ピストンロッド３５２ａの往復動によって、リンク機構３６ａを駆動する。   The rotation drive unit 34a is a member for rotating the connecting rod 32a. The rotation drive unit 34a includes an air cylinder 35a and a link mechanism 36a. The air cylinder 35a has a cylinder body 351a and a piston rod 352a. The cylinder body 351a is swingably installed on the back surface 22a of the first holding member 2a. The piston rod 352a is connected to a piston head (not shown) that slides within the cylinder body 351a. By supplying air into the cylinder body 351a, the piston rod 352a reciprocates in the longitudinal direction. The air cylinder 35a drives the link mechanism 36a by the reciprocating motion of the piston rod 352a.

リンク機構３６ａは、第１リンク３６１ａと第２リンク３６２ａとを有しており、第１リンク３６１ａと第２リンク３６２ａとは回転可能に連結されている。なお、第１リンク３６１ａと第２リンク３６２ａとを連結する回転軸は、連結ロッド３３ａの長手方向と平行に延びている。第１リンク３６１ａはピストンロッド３５２ａに接続されている。第２リンク３６２ａは、連結ロッド３２ａに固定されており、連結ロッド３２ａから連結ロッド３２ａの径方向に延びている。   The link mechanism 36a has a first link 361a and a second link 362a, and the first link 361a and the second link 362a are rotatably connected. In addition, the rotating shaft which connects the 1st link 361a and the 2nd link 362a is extended in parallel with the longitudinal direction of the connecting rod 33a. The first link 361a is connected to the piston rod 352a. The second link 362a is fixed to the connecting rod 32a and extends from the connecting rod 32a in the radial direction of the connecting rod 32a.

図７は、規制姿勢における第１規制部材３ａの斜視図である。第１規制部材３ａは、図６に示す解除姿勢と、図７に示す規制姿勢とを取り得る。第１規制部材３ａは、反転させる基板Ｗを待機しているときは、解除姿勢となる。第１規制部材３ａが解除姿勢となるとき、各規制部３３ａは第１保持部材２ａの第１保持面２１ａよりも第２方向側に位置する。例えば図６に示すように、第１保持部材２ａの第１保持面２１ａが下方を向くような状態では、各規制部３３ａは第１保持面２１ａよりも上方に位置する。これにより、基板Ｗの供給及び取り出しをスムーズに行うことができる。   FIG. 7 is a perspective view of the first restricting member 3a in the restricting posture. The 1st control member 3a can take the release attitude | position shown in FIG. 6, and the control attitude | position shown in FIG. The first restricting member 3a assumes a release posture when waiting for the substrate W to be reversed. When the first restricting member 3a is in the release posture, each restricting portion 33a is positioned on the second direction side with respect to the first holding surface 21a of the first holding member 2a. For example, as shown in FIG. 6, in a state where the first holding surface 21a of the first holding member 2a faces downward, each regulating portion 33a is positioned above the first holding surface 21a. Thereby, supply and extraction of the substrate W can be performed smoothly.

第１規制部材３ａは、基板Ｗの反転処理を実行する際は、図７に示すような規制姿勢となる。なお、第１規制部材３ａが規制姿勢となる前に、まず、第１保持部材２ａと第２保持部材２ｂとが互いに接近して基板Ｗを挟んで保持する状態となる。このように第１及び第２保持部材２ａ、２ｂによって基板Ｗが保持された後に第１規制部材３ａが規制姿勢となると、各規制部３３ａは、第１保持部材２ａの切欠２３ａと第２保持部材２ｂの切欠２３ｂとに亘って延びる。より具体的には、まず、図６に示す状態から、回転駆動部３４ａが作動して連結ロッド３２ａを矢印Ｘの方向に回転させる。これにより、各規制部３３ａが第１保持部材２ａと第２保持部材２ｂとに亘って延びる状態となる。なお、第１保持面２１ａ及び第２保持面２１ｂが水平方向を向いたとき、すなわち、第１保持面２１ａ及び第２保持面２１ｂが垂直方向と平行に延びるとき、各規制部３３ａは、第１保持部材及び第２保持部材の下方となる位置に配置される。   The first restricting member 3a assumes a restricting posture as shown in FIG. 7 when performing the inversion processing of the substrate W. Before the first restricting member 3a assumes the restricting posture, first, the first holding member 2a and the second holding member 2b come close to each other and hold the substrate W therebetween. When the first restricting member 3a assumes the restricting posture after the substrate W is held by the first and second holding members 2a and 2b as described above, the restricting portions 33a are connected to the notches 23a of the first holding member 2a and the second holding members. It extends over the notch 23b of the member 2b. More specifically, first, from the state shown in FIG. 6, the rotation driving unit 34 a operates to rotate the connecting rod 32 a in the direction of the arrow X. Thereby, each regulation part 33a will be in the state extended over the 1st holding member 2a and the 2nd holding member 2b. When the first holding surface 21a and the second holding surface 21b face the horizontal direction, that is, when the first holding surface 21a and the second holding surface 21b extend in parallel with the vertical direction, each regulating portion 33a The first holding member and the second holding member are arranged at positions below the first holding member.

（反転装置の動作）
次に、上述した反転装置１の動作について説明する。まず、反転処理が必要な基板Ｗが第１テーブル部材７上に載置される。この第１テーブル部材７上に載置された基板Ｗを第２保持部材２ｂの第２保持面２１ｂ上に移動させる。基板Ｗは、第１保護シート（図示省略）上に載置されているため、第１保護シートを引きずって基板Ｗを第１テーブル部材７から第２保持面２１ｂ上に移動させることができる。なお、作業者が手作業で基板Ｗを移動させてもよいし、ベルトコンベアなどの移動装置によって基板Ｗを移動させてもよい。また、この段階では、第１及び第２保持部材２ａ、２ｂは、第１テーブル部材７と第２テーブル部材８との間の領域に位置している。すなわち、反転ユニット１０は受け取り位置に位置している。 (Operation of reversing device)
Next, the operation of the reversing device 1 described above will be described. First, the substrate W that needs to be reversed is placed on the first table member 7. The substrate W placed on the first table member 7 is moved onto the second holding surface 21b of the second holding member 2b. Since the substrate W is placed on the first protective sheet (not shown), the substrate W can be moved from the first table member 7 onto the second holding surface 21b by dragging the first protective sheet. An operator may move the substrate W manually, or the substrate W may be moved by a moving device such as a belt conveyor. Further, at this stage, the first and second holding members 2 a and 2 b are located in a region between the first table member 7 and the second table member 8. That is, the reversing unit 10 is located at the receiving position.

基板Ｗを第２保持部材２ｂの第２保持面２１ｂ上に移動させた後、基板Ｗの上に第２保護シート（図示省略）を載置する。これにより、後述するように基板Ｗを第１保持部材２ａの第１保持面２１ａから第２テーブル部材８に移動させる際に、第２保護シートを引きずることによって基板Ｗを移動させることができる。   After the substrate W is moved onto the second holding surface 21b of the second holding member 2b, a second protective sheet (not shown) is placed on the substrate W. Thereby, when moving the board | substrate W from the 1st holding surface 21a of the 1st holding member 2a to the 2nd table member 8 so that it may mention later, the board | substrate W can be moved by dragging a 2nd protection sheet.

次に、第１押さえ部材１２ａの一対の第１押さえ部１２１ａが押さえ位置に移動し、第２保持面２１ｂ上の基板Ｗを、第２保護シートを介して押さえる。これにより、後述するようにベース部材５が後方に移動する際に、第２保持面２１ｂ上の基板Ｗ又は第２保護シートの位置がずれることを防止することができる。なお、第１押さえ部１２１ａが押さえ位置に移動する際に、第２保持部材２ｂが上方に移動してもよい。なお、この段階では、第１保持面２１ａと第２保持面２１ｂとは離れており、基板Ｗは第１保持部材２ａと第２保持部材２ｂとによって保持されていない。   Next, the pair of first pressing portions 121a of the first pressing member 12a moves to the pressing position, and presses the substrate W on the second holding surface 21b via the second protective sheet. Thereby, when the base member 5 moves backward as described later, it is possible to prevent the position of the substrate W or the second protective sheet on the second holding surface 21b from being shifted. Note that the second holding member 2b may move upward when the first pressing portion 121a moves to the pressing position. At this stage, the first holding surface 21a and the second holding surface 21b are separated from each other, and the substrate W is not held by the first holding member 2a and the second holding member 2b.

次に、ベース部材５が後方へ移動する。具体的には、駆動機構６２がベース部材５を駆動することにより、ベース部材５は後方へと移動する。この結果、第１及び第２保持部材２ａ、２ｂは、第１テーブル部材７と第２テーブル部材８との間の領域から外れる。すなわち、反転ユニット１０は反転位置に移動する。なお、第１及び第２保持部材２ａ、２ｂの一部が、第１テーブル部材７と第２テーブル部材８との間の領域に位置していてもよい。   Next, the base member 5 moves backward. Specifically, when the drive mechanism 62 drives the base member 5, the base member 5 moves rearward. As a result, the first and second holding members 2 a and 2 b are disengaged from the region between the first table member 7 and the second table member 8. That is, the reversing unit 10 moves to the reversing position. Part of the first and second holding members 2 a and 2 b may be located in a region between the first table member 7 and the second table member 8.

次に、第１保持部材２ａが下方へ移動する。これにより、第１保持部材２ａと第２保持部材２ｂとによって、基板Ｗを挟み込んで保持する。なお、第１保持部材２ａが下方へ移動する際、一対の第１押さえ部１２１ａは移動しない。すなわち、一対の第１押さえ部１２１ａは、第１保持部材２ａに対して相対的に上方へ移動する。この結果、一対の第１押さえ部１２１ａは、解除位置に移動する。   Next, the first holding member 2a moves downward. Accordingly, the substrate W is sandwiched and held by the first holding member 2a and the second holding member 2b. In addition, when the 1st holding member 2a moves below, a pair of 1st press part 121a does not move. That is, the pair of first pressing portions 121a moves upward relative to the first holding member 2a. As a result, the pair of first pressing portions 121a moves to the release position.

第１及び第２保持部材２ａ、２ｂによって基板Ｗを挟み込んだ後、第１規制部材３ａは、解除姿勢から規制姿勢となる。具体的には、第１規制部材３ａの各規制部３３ａが、第１及び第２保持部材２ａ、２ｂの各切欠２３ａ、２３ｂ内において、第１保持部材２ａと第２保持部材２ｂとに亘って延びた状態となる。なお、第２規制部材３ｂも、第１規制部材３ａと同様に解除姿勢から規制姿勢となる。   After the substrate W is sandwiched between the first and second holding members 2a and 2b, the first restricting member 3a changes from the release posture to the restricting posture. Specifically, each regulating portion 33a of the first regulating member 3a spans between the first holding member 2a and the second holding member 2b in the notches 23a and 23b of the first and second holding members 2a and 2b. Will be extended. In addition, the 2nd control member 3b also becomes a control attitude | position from a releasing attitude | position like the 1st control member 3a.

次に、反転ユニット１０が回転軸Ｃを中心に１８０度だけ回転する。例えば、前方から見た状態において、反転ユニット１０は時計周りに１８０度回転する。この結果、第１保持部材２ａは、回転前に下方を向いていた第１保持面２１ａが、上方を向いた状態となる。また、第２保持部材２ｂは、回転前に上方を向いていた第２保持面２１ｂが下方を向いた状態となる。すなわち、第１保持部材２ａと第２保持部材２ｂとの位置が入れ替わる。このように反転ユニット１０が１８０度回転することにより、基板Ｗは表裏が反転した状態となる。   Next, the reversing unit 10 rotates about the rotation axis C by 180 degrees. For example, when viewed from the front, the reversing unit 10 rotates 180 degrees clockwise. As a result, the first holding member 2a is in a state in which the first holding surface 21a facing downward before rotating faces upward. Moreover, the 2nd holding member 2b will be in the state in which the 2nd holding surface 21b which faced the upper direction before rotation faced the downward direction. That is, the positions of the first holding member 2a and the second holding member 2b are switched. Thus, when the reversing unit 10 rotates 180 degrees, the substrate W is turned over.

反転ユニット１０の回転が完了すると、ベース部材５が前方へ移動する。すなわち、反転ユニット１０は、受け取り位置に移動する。そして、反転ユニット１０の回転により第２保持部材２ｂの下方に位置するようになった第１保持部材２ａは、下方へ移動する。また、第１保持部材２ａの上方に位置するようになった第２保持部材２ｂは上方へ移動する。また、第１及び第２規制部材３ａ、３ｂは、規制姿勢から解除姿勢となる。この結果、第１及び第２保持部材２ａ、２ｂによる基板Ｗの保持が解除される。   When the rotation of the reversing unit 10 is completed, the base member 5 moves forward. That is, the reversing unit 10 moves to the receiving position. And the 1st holding member 2a which came to be located under the 2nd holding member 2b by rotation of the inversion unit 10 moves below. Further, the second holding member 2b that comes to be positioned above the first holding member 2a moves upward. Further, the first and second regulating members 3a and 3b change from the regulated posture to the released posture. As a result, the holding of the substrate W by the first and second holding members 2a and 2b is released.

基板Ｗの保持が解除された後、基板Ｗを第２テーブル部材８に移動させる。具体的には、基板Ｗを覆う第１保護シートを取り除き、第２保護シートを引きずることにより第２保護シート上に載置された基板Ｗも一緒に移動させる。   After the holding of the substrate W is released, the substrate W is moved to the second table member 8. Specifically, the first protective sheet covering the substrate W is removed, and the substrate W placed on the second protective sheet is moved together by dragging the second protective sheet.

次に、反転装置１は、上述した動作と同様の動作を繰り返す。なお、上述した動作とは異なり、第１保持部材２ａが第２保持部材２ｂと位置が入れ替わっているため、第１保持部材２ａの動作と第２保持部材２ｂの動作とが入れ替わる。また、これに伴い、第１規制部材３ａの動作と第２規制部材３ｂの動作とが入れ替わり、第１押さえ部材１２ａの動作と第２押さえ部材１２ｂの動作とが入れ替わる。また、基板Ｗを第１保持部材２ａと第２保持部材２ｂとによって挟み込んで保持した後、反転ユニット１０は、前方から見て反時計回りに１８０度回転する。   Next, the inverting device 1 repeats the same operation as described above. Note that, unlike the above-described operation, the position of the first holding member 2a is interchanged with the position of the second holding member 2b, and therefore the operation of the first holding member 2a and the operation of the second holding member 2b are interchanged. Accordingly, the operation of the first restricting member 3a and the operation of the second restricting member 3b are interchanged, and the operation of the first retaining member 12a and the operation of the second retaining member 12b are interchanged. In addition, after the substrate W is sandwiched and held between the first holding member 2a and the second holding member 2b, the reversing unit 10 rotates 180 degrees counterclockwise when viewed from the front.

［変形例］
以上、本発明の実施形態について説明したが、本発明はこれらに限定されるものではなく、本発明の趣旨を逸脱しない限りにおいて種々の変更が可能である。 [Modification]
As mentioned above, although embodiment of this invention was described, this invention is not limited to these, A various change is possible unless it deviates from the meaning of this invention.

変形例１
上記実施形態では、第２保持部材２ｂよりも上方にある第１保持部材２ａが、第２保持部材２ｂよりも下方に位置するように反転ユニット１０が回転する際、反転ユニット１０は、前方から見て時計周りに回転するが、特にこれに限定されない。例えば、反転ユニット１０は、第１保持部材２ａが第２保持部材２ｂの上方にあるとき、前方から見て反時計回りに１８０度回転してもよい。 Modification 1
In the above embodiment, when the reversing unit 10 rotates so that the first holding member 2a located above the second holding member 2b is positioned below the second holding member 2b, the reversing unit 10 is moved from the front. Although it rotates clockwise as seen, it is not particularly limited to this. For example, the reversing unit 10 may rotate 180 degrees counterclockwise when viewed from the front when the first holding member 2 a is above the second holding member 2 b.

変形例２
上記実施形態では、第１保持部材２ａは第１支持部４２ａに支持され、第２保持部材２ｂは第２支持部４２ｂに支持されているが、特にこれに限定されない。例えば、第１及び第２保持部材２ａ、２ｂは、連結部４１に摺動可能に支持されていてもよい。 Modification 2
In the above-described embodiment, the first holding member 2a is supported by the first support portion 42a, and the second holding member 2b is supported by the second support portion 42b, but is not particularly limited thereto. For example, the first and second holding members 2a and 2b may be slidably supported by the connecting portion 41.

変形例３
上記実施形態では、第１保持部材２ａ及び第２保持部材２ｂの両方が移動可能に支持されているが、特にこれに限定されない。例えば、第１保持部材２ａのみが移動可能に支持部材４に支持されており、第２保持部材２ｂは移動不能に支持部材４に支持されていてもよい。他にも、第１保持部材２ａが移動不能に支持部材４に支持されており、第２保持部材２ｂは移動可能に支持部材４に支持されていてもよい。 Modification 3
In the said embodiment, although both the 1st holding member 2a and the 2nd holding member 2b are supported so that a movement is possible, it is not limited to this in particular. For example, only the first holding member 2a may be supported by the support member 4 so as to be movable, and the second holding member 2b may be supported by the support member 4 so as not to move. In addition, the first holding member 2a may be supported by the support member 4 so as not to move, and the second holding member 2b may be supported by the support member 4 so as to be movable.

１ 反転装置
２ａ 第１保持部材
２１ａ 第１保持面
２ｂ 第２保持部材
２１ｂ 第２保持面
４ 支持部材
５ ベース部材
Ｗ 基板 DESCRIPTION OF SYMBOLS 1 Inversion apparatus 2a 1st holding member 21a 1st holding surface 2b 2nd holding member 21b 2nd holding surface 4 Support member 5 Base member W board | substrate

Claims (4)

基板を反転させるための反転装置であって、
第１方向を向く第１保持面を有する第１保持部材と、
前記第１保持面と対向する第２保持面を有する第２保持部材と、
前記第１保持面と前記第２保持面とが互いに接近及び離反するように前記第１保持部材及び前記第２保持部材の少なくとも一方を移動可能に支持する支持部材と、
前記第１保持面が前記第１方向と反対の第２方向を向くように前記支持部材を回転可能に支持するベース部材と、
を備える、反転装置。 A reversing device for reversing a substrate,
A first holding member having a first holding surface facing the first direction;
A second holding member having a second holding surface facing the first holding surface;
A support member that movably supports at least one of the first holding member and the second holding member such that the first holding surface and the second holding surface approach and separate from each other;
A base member that rotatably supports the support member such that the first holding surface faces a second direction opposite to the first direction;
A reversing device. 前記支持部材は、第１回転方向への回転と、前記第１回転方向とは反対の第２回転方向への回転とを交互に行う、請求項１に記載の反転装置。   The reversing device according to claim 1, wherein the support member alternately performs rotation in the first rotation direction and rotation in the second rotation direction opposite to the first rotation direction. 前記第１保持面及び前記第２保持面の少なくとも一方は、前記基板を吸着する吸着部を有する、請求項１又は２に記載の反転装置。   3. The reversing device according to claim 1, wherein at least one of the first holding surface and the second holding surface has an adsorption portion that adsorbs the substrate. 前記支持部材は、
連結部と、
前記連結部の前記第２方向側端部から延び、前記第１保持部材を支持する第１支持部と、
前記連結部の前記第１方向側端部から延び、前記第２保持部材を支持する第２支持部と、
を有する、請求項１から３のいずれかに記載の反転装置。 The support member is
A connecting portion;
A first support portion extending from the second direction side end portion of the connecting portion and supporting the first holding member;
A second support part extending from the first direction side end of the connecting part and supporting the second holding member;
The reversing device according to claim 1, comprising:
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KR1020140043044A KR102250030B1 (en) 2013-08-07 2014-04-10 Inverting apparatus
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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109625967B (en) * 2018-12-28 2020-09-01 海安明光光学玻璃科技有限公司 Glass piece reflux unit on glass production line
KR102712687B1 (en) * 2019-01-28 2024-10-04 삼성디스플레이 주식회사 Substrate inversion device
CN110077153B (en) * 2019-06-11 2020-09-01 广州市欧邦标识制品有限公司 Turnover vehicle
CN112537624A (en) * 2020-11-06 2021-03-23 南京涛余鑫贸易有限公司 Reflector panel intelligent manufacturing adjustment mechanism capable of achieving turnover conveying

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60228345A (en) * 1984-04-23 1985-11-13 Aida Eng Ltd Reversing device for article to be worked
JP2002302248A (en) * 2001-03-30 2002-10-18 Shibaura Mechatronics Corp Substrate reversing device, and panel manufacturing device using it
US20050002761A1 (en) * 2003-07-04 2005-01-06 Roland Franz Arrangement for transferring plates between a plate conveyor and a storage rack or similar structure
JP2006227181A (en) * 2005-02-16 2006-08-31 Shibaura Mechatronics Corp Device and method for inverting substrate, and device for manufacturing substrate
JP2008166368A (en) * 2006-12-27 2008-07-17 Dainippon Screen Mfg Co Ltd Substrate processing apparatus
JP2008192746A (en) * 2007-02-02 2008-08-21 Toshiba Electronic Engineering Corp Carrying tool of article, apparatus and method for reversing article, and apparatus and method for manufacturing flat panel display

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3895722A (en) * 1973-12-20 1975-07-22 Inland Container Corp Box inverting apparatus
KR19990051056A (en) * 1997-12-19 1999-07-05 양재신 Fixed jig for panel inversion
WO2005028172A1 (en) * 2003-09-24 2005-03-31 Mitsuboshi Diamond Industrial Co., Ltd. Substrate dicing system, substrate manufacturing apparatus, and substrate dicing method
JP4467367B2 (en) * 2004-06-22 2010-05-26 大日本スクリーン製造株式会社 Substrate reversing device, substrate transporting device, substrate processing device, substrate reversing method, substrate transporting method, and substrate processing method
KR101265085B1 (en) * 2006-06-30 2013-05-16 엘지디스플레이 주식회사 Apparatus for transferring having reverse device and reversion method of glasspanel using the reverse device
CN201035276Y (en) * 2007-05-15 2008-03-12 北京京东方光电科技有限公司 High time turnover device
JP2012203235A (en) 2011-03-25 2012-10-22 Seiko Epson Corp Liquid crystal device and electronic appliance

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60228345A (en) * 1984-04-23 1985-11-13 Aida Eng Ltd Reversing device for article to be worked
JP2002302248A (en) * 2001-03-30 2002-10-18 Shibaura Mechatronics Corp Substrate reversing device, and panel manufacturing device using it
US20050002761A1 (en) * 2003-07-04 2005-01-06 Roland Franz Arrangement for transferring plates between a plate conveyor and a storage rack or similar structure
JP2006227181A (en) * 2005-02-16 2006-08-31 Shibaura Mechatronics Corp Device and method for inverting substrate, and device for manufacturing substrate
JP2008166368A (en) * 2006-12-27 2008-07-17 Dainippon Screen Mfg Co Ltd Substrate processing apparatus
JP2008192746A (en) * 2007-02-02 2008-08-21 Toshiba Electronic Engineering Corp Carrying tool of article, apparatus and method for reversing article, and apparatus and method for manufacturing flat panel display

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TW201505984A (en) 2015-02-16
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