JP2002157929A - 透明導電性薄膜積層体及びそのエッチング方法 - Google Patents

透明導電性薄膜積層体及びそのエッチング方法

Info

Publication number
JP2002157929A
JP2002157929A JP2001151896A JP2001151896A JP2002157929A JP 2002157929 A JP2002157929 A JP 2002157929A JP 2001151896 A JP2001151896 A JP 2001151896A JP 2001151896 A JP2001151896 A JP 2001151896A JP 2002157929 A JP2002157929 A JP 2002157929A
Authority
JP
Japan
Prior art keywords
thin film
transparent
gas
transparent conductive
conductive thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001151896A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002157929A5 (enExample
Inventor
Katsuhiko Koike
小池　　勝彦
Hiroaki Saigo
宏明 西郷
Shin Fukuda
福田　　伸
Noriyuki Yanagawa
紀行 柳川
Mitsuru Sadamoto
満 貞本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Chemicals Inc
Original Assignee
Mitsui Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Chemicals Inc filed Critical Mitsui Chemicals Inc
Priority to JP2001151896A priority Critical patent/JP2002157929A/ja
Publication of JP2002157929A publication Critical patent/JP2002157929A/ja
Publication of JP2002157929A5 publication Critical patent/JP2002157929A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electroluminescent Light Sources (AREA)
  • Laminated Bodies (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
  • Drying Of Semiconductors (AREA)
  • Non-Insulated Conductors (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Liquid Crystal (AREA)
JP2001151896A 2000-09-08 2001-05-22 透明導電性薄膜積層体及びそのエッチング方法 Pending JP2002157929A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001151896A JP2002157929A (ja) 2000-09-08 2001-05-22 透明導電性薄膜積層体及びそのエッチング方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000272583 2000-09-08
JP2000-272583 2000-09-08
JP2001151896A JP2002157929A (ja) 2000-09-08 2001-05-22 透明導電性薄膜積層体及びそのエッチング方法

Publications (2)

Publication Number Publication Date
JP2002157929A true JP2002157929A (ja) 2002-05-31
JP2002157929A5 JP2002157929A5 (enExample) 2009-01-08

Family

ID=26599506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001151896A Pending JP2002157929A (ja) 2000-09-08 2001-05-22 透明導電性薄膜積層体及びそのエッチング方法

Country Status (1)

Country Link
JP (1) JP2002157929A (enExample)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006061964A1 (ja) * 2004-12-08 2006-06-15 Asahi Glass Company, Limited 導電膜付き基体およびその製造方法
JP2009004383A (ja) * 2003-05-29 2009-01-08 Sony Corp 表示装置の製造方法
JP2009259509A (ja) * 2008-04-15 2009-11-05 Seiko Epson Corp 有機エレクトロルミネッセンス装置
KR101120142B1 (ko) 2003-05-29 2012-03-26 소니 가부시키가이샤 적층구조의 제조방법과 표시소자 및 표시장치
CN102751043A (zh) * 2011-04-20 2012-10-24 日东电工株式会社 导电性层叠薄膜的制造方法
JP2015173050A (ja) * 2014-03-12 2015-10-01 コニカミノルタ株式会社 透明導電体の製造方法及びパターニングされた透明導電体
JP2015178196A (ja) * 2014-03-19 2015-10-08 コニカミノルタ株式会社 透明導電体
WO2016136578A1 (ja) * 2015-02-24 2016-09-01 日東電工株式会社 光透過性フィルム
CN107408421A (zh) * 2015-03-26 2017-11-28 Tdk株式会社 透明导电体和触摸面板
US10510457B2 (en) 2015-12-11 2019-12-17 Tdk Corporation Transparent conductor
US10540045B2 (en) 2015-04-24 2020-01-21 Tdk Corporation Transparent conductor, method for producing same, and touch panel
US10989966B2 (en) 2018-02-23 2021-04-27 Tdk Corporation Transparent semiconductor, light control body, and electronic device
US20220320209A1 (en) * 2021-03-30 2022-10-06 Samsung Display Co., Ltd. Display apparatus and method of manufacturing the same

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0897190A (ja) * 1994-09-22 1996-04-12 Ulvac Japan Ltd 透明導電性膜のドライエッチング方法
JPH10278159A (ja) * 1997-04-08 1998-10-20 Mitsui Chem Inc 透明導電性薄膜積層体の製造方法
JPH1170610A (ja) * 1996-07-26 1999-03-16 Asahi Glass Co Ltd 透明導電膜、および透明電極の形成方法
JP2000150466A (ja) * 1998-11-04 2000-05-30 Mitsui Chemicals Inc Ｉｔｏドライエッチング方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0897190A (ja) * 1994-09-22 1996-04-12 Ulvac Japan Ltd 透明導電性膜のドライエッチング方法
JPH1170610A (ja) * 1996-07-26 1999-03-16 Asahi Glass Co Ltd 透明導電膜、および透明電極の形成方法
JPH10278159A (ja) * 1997-04-08 1998-10-20 Mitsui Chem Inc 透明導電性薄膜積層体の製造方法
JP2000150466A (ja) * 1998-11-04 2000-05-30 Mitsui Chemicals Inc Ｉｔｏドライエッチング方法

Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009004383A (ja) * 2003-05-29 2009-01-08 Sony Corp 表示装置の製造方法
KR101120142B1 (ko) 2003-05-29 2012-03-26 소니 가부시키가이샤 적층구조의 제조방법과 표시소자 및 표시장치
WO2006061964A1 (ja) * 2004-12-08 2006-06-15 Asahi Glass Company, Limited 導電膜付き基体およびその製造方法
JP2009259509A (ja) * 2008-04-15 2009-11-05 Seiko Epson Corp 有機エレクトロルミネッセンス装置
US8400055B2 (en) 2008-04-15 2013-03-19 Seiko Epson Corporation Organic electroluminescence apparatus with metal auxiliary wiring
CN102751043A (zh) * 2011-04-20 2012-10-24 日东电工株式会社 导电性层叠薄膜的制造方法
JP2015173050A (ja) * 2014-03-12 2015-10-01 コニカミノルタ株式会社 透明導電体の製造方法及びパターニングされた透明導電体
JP2015178196A (ja) * 2014-03-19 2015-10-08 コニカミノルタ株式会社 透明導電体
JP2016210192A (ja) * 2015-02-24 2016-12-15 日東電工株式会社 光透過性フィルム
CN106794670B (zh) * 2015-02-24 2019-09-20 日东电工株式会社 透光性薄膜
WO2016136578A1 (ja) * 2015-02-24 2016-09-01 日東電工株式会社 光透過性フィルム
CN106794670A (zh) * 2015-02-24 2017-05-31 日东电工株式会社 透光性薄膜
JP2016155377A (ja) * 2015-02-24 2016-09-01 日東電工株式会社 光透過性フィルム
US10527873B2 (en) 2015-03-26 2020-01-07 Tdk Corporation Transparent conductor and touch panel
CN107408421A (zh) * 2015-03-26 2017-11-28 Tdk株式会社 透明导电体和触摸面板
CN107408421B (zh) * 2015-03-26 2020-04-14 Tdk株式会社 透明导电体和触摸面板
US10540045B2 (en) 2015-04-24 2020-01-21 Tdk Corporation Transparent conductor, method for producing same, and touch panel
US10510457B2 (en) 2015-12-11 2019-12-17 Tdk Corporation Transparent conductor
US10989966B2 (en) 2018-02-23 2021-04-27 Tdk Corporation Transparent semiconductor, light control body, and electronic device
DE112019000952B4 (de) 2018-02-23 2023-05-11 Tdk Corporation Transparenter Halbleiter, Lichtlenkkörper und elektronische Vorrichtung
US20220320209A1 (en) * 2021-03-30 2022-10-06 Samsung Display Co., Ltd. Display apparatus and method of manufacturing the same
US12369485B2 (en) * 2021-03-30 2025-07-22 Samsung Display Co., Ltd. Display apparatus and method of manufacturing the same

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