JP2001524386A5 - - Google Patents

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Publication number
JP2001524386A5
JP2001524386A5 JP2000523021A JP2000523021A JP2001524386A5 JP 2001524386 A5 JP2001524386 A5 JP 2001524386A5 JP 2000523021 A JP2000523021 A JP 2000523021A JP 2000523021 A JP2000523021 A JP 2000523021A JP 2001524386 A5 JP2001524386 A5 JP 2001524386A5
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JP
Japan
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JP2000523021A
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Japanese (ja)
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JP4526704B2 (ja
JP2001524386A (ja
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Priority claimed from US08/980,947 external-priority patent/US6045864A/en
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JP2000523021A 1997-12-01 1998-11-12 蒸気コーティング装置および方法 Expired - Fee Related JP4526704B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/980,947 US6045864A (en) 1997-12-01 1997-12-01 Vapor coating method
US08/980,947 1997-12-01
PCT/US1998/024230 WO1999028051A1 (en) 1997-12-01 1998-11-12 Vapor coating apparatus and method

Publications (3)

Publication Number Publication Date
JP2001524386A JP2001524386A (ja) 2001-12-04
JP2001524386A5 true JP2001524386A5 (https=) 2006-01-05
JP4526704B2 JP4526704B2 (ja) 2010-08-18

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JP2000523021A Expired - Fee Related JP4526704B2 (ja) 1997-12-01 1998-11-12 蒸気コーティング装置および方法

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US (2) US6045864A (https=)
EP (1) EP1035927B1 (https=)
JP (1) JP4526704B2 (https=)
KR (1) KR100571893B1 (https=)
DE (1) DE69829774T2 (https=)
WO (1) WO1999028051A1 (https=)

Families Citing this family (194)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6224948B1 (en) 1997-09-29 2001-05-01 Battelle Memorial Institute Plasma enhanced chemical deposition with low vapor pressure compounds
FR2774013B1 (fr) * 1998-01-23 2000-04-07 Jean Paul Garidel Procede de traitement thermique d'une piece a l'aide d'au moins un liquide de transfert thermique et four a condensation pour sa mise en oeuvre
US6546757B1 (en) * 1998-07-28 2003-04-15 Brown University Research Foundation Liquid spray pyrolysis method for the fabrication of optical fiber preforms, with reactant mixing
EP1127381B1 (en) 1998-11-02 2015-09-23 3M Innovative Properties Company Transparent conductive oxides for plastic flat panel displays
US6217947B1 (en) 1998-12-16 2001-04-17 Battelle Memorial Institute Plasma enhanced polymer deposition onto fixtures
US6207238B1 (en) * 1998-12-16 2001-03-27 Battelle Memorial Institute Plasma enhanced chemical deposition for high and/or low index of refraction polymers
US6207239B1 (en) 1998-12-16 2001-03-27 Battelle Memorial Institute Plasma enhanced chemical deposition of conjugated polymer
US6228434B1 (en) * 1998-12-16 2001-05-08 Battelle Memorial Institute Method of making a conformal coating of a microtextured surface
US6268695B1 (en) 1998-12-16 2001-07-31 Battelle Memorial Institute Environmental barrier material for organic light emitting device and method of making
US6274204B1 (en) 1998-12-16 2001-08-14 Battelle Memorial Institute Method of making non-linear optical polymer
US6228436B1 (en) 1998-12-16 2001-05-08 Battelle Memorial Institute Method of making light emitting polymer composite material
US6503564B1 (en) * 1999-02-26 2003-01-07 3M Innovative Properties Company Method of coating microstructured substrates with polymeric layer(s), allowing preservation of surface feature profile
US6358570B1 (en) 1999-03-31 2002-03-19 Battelle Memorial Institute Vacuum deposition and curing of oligomers and resins
US6506461B2 (en) * 1999-03-31 2003-01-14 Battelle Memorial Institute Methods for making polyurethanes as thin films
US6503561B1 (en) * 1999-07-08 2003-01-07 Air Products And Chemicals, Inc. Liquid precursor mixtures for deposition of multicomponent metal containing materials
US6238734B1 (en) * 1999-07-08 2001-05-29 Air Products And Chemicals, Inc. Liquid precursor mixtures for deposition of multicomponent metal containing materials
US6229640B1 (en) * 1999-08-11 2001-05-08 Adc Telecommunications, Inc. Microelectromechanical optical switch and method of manufacture thereof
US7081277B1 (en) * 1999-10-22 2006-07-25 Fujitsu Limited Magnetic disk drive having a surface coating on a magnetic disk
US6623861B2 (en) * 2001-04-16 2003-09-23 Battelle Memorial Institute Multilayer plastic substrates
US6573652B1 (en) 1999-10-25 2003-06-03 Battelle Memorial Institute Encapsulated display devices
US6866901B2 (en) 1999-10-25 2005-03-15 Vitex Systems, Inc. Method for edge sealing barrier films
US20100330748A1 (en) 1999-10-25 2010-12-30 Xi Chu Method of encapsulating an environmentally sensitive device
US20070196682A1 (en) * 1999-10-25 2007-08-23 Visser Robert J Three dimensional multilayer barrier and method of making
US6413645B1 (en) 2000-04-20 2002-07-02 Battelle Memorial Institute Ultrabarrier substrates
US6548912B1 (en) 1999-10-25 2003-04-15 Battelle Memorial Institute Semicoductor passivation using barrier coatings
US20090191342A1 (en) * 1999-10-25 2009-07-30 Vitex Systems, Inc. Method for edge sealing barrier films
US6492026B1 (en) 2000-04-20 2002-12-10 Battelle Memorial Institute Smoothing and barrier layers on high Tg substrates
DE10057491A1 (de) * 2000-11-20 2002-05-23 Aixtron Ag Vorrichtung und Verfahren zum Zuführen eines in die Gasform gebrachten flüssigen Ausgangsstoffes in einen CVD-Reaktor
DE10058700A1 (de) * 2000-11-25 2002-06-06 Saint Gobain Glasscheibe mit einem metallisch reflektierenden Schichtsystem
US6468595B1 (en) * 2001-02-13 2002-10-22 Sigma Technologies International, Inc. Vaccum deposition of cationic polymer systems
US20090208754A1 (en) * 2001-09-28 2009-08-20 Vitex Systems, Inc. Method for edge sealing barrier films
US7442227B2 (en) * 2001-10-09 2008-10-28 Washington Unniversity Tightly agglomerated non-oxide particles and method for producing the same
US6709514B1 (en) * 2001-12-28 2004-03-23 Advanced Cardiovascular Systems, Inc. Rotary coating apparatus for coating implantable medical devices
US7119418B2 (en) * 2001-12-31 2006-10-10 Advanced Technology Materials, Inc. Supercritical fluid-assisted deposition of materials on semiconductor substrates
US7030168B2 (en) * 2001-12-31 2006-04-18 Advanced Technology Materials, Inc. Supercritical fluid-assisted deposition of materials on semiconductor substrates
US7208195B2 (en) * 2002-03-27 2007-04-24 Ener1Group, Inc. Methods and apparatus for deposition of thin films
US8808457B2 (en) 2002-04-15 2014-08-19 Samsung Display Co., Ltd. Apparatus for depositing a multilayer coating on discrete sheets
US8900366B2 (en) * 2002-04-15 2014-12-02 Samsung Display Co., Ltd. Apparatus for depositing a multilayer coating on discrete sheets
US20050041292A1 (en) * 2002-05-21 2005-02-24 Wheatley John A. Visible wavelength detector systems and filters therefor
US7095009B2 (en) * 2002-05-21 2006-08-22 3M Innovative Properties Company Photopic detector system and filter therefor
US7215473B2 (en) * 2002-08-17 2007-05-08 3M Innovative Properties Company Enhanced heat mirror films
US6929864B2 (en) * 2002-08-17 2005-08-16 3M Innovative Properties Company Extensible, visible light-transmissive and infrared-reflective film and methods of making and using the film
US6818291B2 (en) 2002-08-17 2004-11-16 3M Innovative Properties Company Durable transparent EMI shielding film
US6933051B2 (en) * 2002-08-17 2005-08-23 3M Innovative Properties Company Flexible electrically conductive film
US7018713B2 (en) * 2003-04-02 2006-03-28 3M Innovative Properties Company Flexible high-temperature ultrabarrier
US7510913B2 (en) * 2003-04-11 2009-03-31 Vitex Systems, Inc. Method of making an encapsulated plasma sensitive device
US7648925B2 (en) 2003-04-11 2010-01-19 Vitex Systems, Inc. Multilayer barrier stacks and methods of making multilayer barrier stacks
US20040202708A1 (en) * 2003-04-14 2004-10-14 3M Innovative Properties Company Transdermal drug delivery device with translucent inorganic barrier layer
JP2004335564A (ja) * 2003-05-01 2004-11-25 Japan Pionics Co Ltd 気化器
US7442412B2 (en) * 2003-05-08 2008-10-28 Texas Instruments Incorporated Hydrophobic coating for oxide surfaces
US7051282B2 (en) * 2003-06-13 2006-05-23 Microsoft Corporation Multi-layer graphical user interface
US20040261707A1 (en) * 2003-06-26 2004-12-30 Venkat Selvamanickam Apparatus for and method of cooling and positioning a translating substrate tape for use with a continuous vapor deposition process
US7758699B2 (en) * 2003-06-26 2010-07-20 Superpower, Inc. Apparatus for and method of continuous HTS tape buffer layer deposition using large scale ion beam assisted deposition
US7052772B2 (en) * 2003-08-14 2006-05-30 3M Innovative Properties Company Material for packaging electronic components
US20050079278A1 (en) * 2003-10-14 2005-04-14 Burrows Paul E. Method and apparatus for coating an organic thin film on a substrate from a fluid source with continuous feed capability
FI115209B (fi) * 2003-12-15 2005-03-31 Waertsilae Finland Oy Järjestely vesialuksessa
BRPI0418341A (pt) * 2003-12-30 2007-05-02 3M Innovative Properties Co artigo retrorreflexivo com variação de cor e método para produzir um artigo retrorreflexivo com variação de cor
US7399668B2 (en) * 2004-09-30 2008-07-15 3M Innovative Properties Company Method for making electronic devices having a dielectric layer surface treatment
JP2008518280A (ja) * 2004-10-29 2008-05-29 スリーエム イノベイティブ プロパティズ カンパニー 環状オレフィンコポリマーを組み入れた光学フィルム
US7435353B2 (en) * 2004-12-09 2008-10-14 President And Fellows Of Harvard College Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers
US20070014018A1 (en) * 2004-12-30 2007-01-18 Wheatley John A Internal components of optical device comprising hardcoat
US9050615B2 (en) * 2005-04-26 2015-06-09 Bayer Intellectual Property Gmbh Apparatus and method for coating substrates for analyte detection by means of an affinity assay method
US20070020451A1 (en) * 2005-07-20 2007-01-25 3M Innovative Properties Company Moisture barrier coatings
US7767498B2 (en) * 2005-08-25 2010-08-03 Vitex Systems, Inc. Encapsulated devices and method of making
US8945684B2 (en) * 2005-11-04 2015-02-03 Essilor International (Compagnie Generale D'optique) Process for coating an article with an anti-fouling surface coating by vacuum evaporation
KR20140121888A (ko) * 2005-12-29 2014-10-16 쓰리엠 이노베이티브 프로퍼티즈 컴파니 코팅 공정을 위한 물질의 분무화 방법
US20070194470A1 (en) * 2006-02-17 2007-08-23 Aviza Technology, Inc. Direct liquid injector device
JP2007260895A (ja) 2006-03-28 2007-10-11 Erich Thallner マイクロ構造および/またはナノ構造の構造基板をコーティングするための装置および方法
EP1840940B8 (de) 2006-03-28 2014-11-26 Thallner, Erich, Dipl.-Ing. Vorrichtung und Verfahren zum Beschichten eines mikro- und/oder nanostrukturierten Struktursubstrats
US20070237897A1 (en) * 2006-03-28 2007-10-11 Erich Thallner Device and method for coating a microstructured and/or nanostructured structural substrate
US20070243258A1 (en) * 2006-04-13 2007-10-18 3M Innovative Properties Company Method and apparatus for forming crosslinked chromonic nanoparticles
US20070285778A1 (en) * 2006-06-13 2007-12-13 Walker Christopher B Optical films comprising high refractive index and antireflective coatings
US20070285779A1 (en) * 2006-06-13 2007-12-13 Walker Christopher B Optical films comprising high refractive index and antireflective coatings
US20080006819A1 (en) * 2006-06-19 2008-01-10 3M Innovative Properties Company Moisture barrier coatings for organic light emitting diode devices
US20080033336A1 (en) * 2006-08-02 2008-02-07 Sangha Jangbir S Specimen collector with dissolvable coating
KR101263005B1 (ko) * 2006-12-19 2013-05-08 비코 인스트루먼츠 인코포레이티드 증착 장치 및 방법
US8120854B2 (en) * 2006-12-28 2012-02-21 3M Innovative Properties Company Interference films having acrylamide layer and method of making same
WO2008083308A1 (en) * 2006-12-28 2008-07-10 3M Innovative Properties Company Nucleation layer for thin film metal layer formation
CN101573471A (zh) * 2006-12-29 2009-11-04 3M创新有限公司 固化含有金属烷氧化物的膜的方法
BRPI0720867A2 (pt) * 2006-12-29 2014-03-04 3M Innovative Properties Company. Método para fabricação de filmes inorgânicos ou híbridos inorgânicos/orgânicos
US8084102B2 (en) * 2007-02-06 2011-12-27 Sion Power Corporation Methods for co-flash evaporation of polymerizable monomers and non-polymerizable carrier solvent/salt mixtures/solutions
EP2193024A4 (en) 2007-09-25 2013-11-06 Entrotech Inc PAINT SHEET FILMS, COMPOUNDS THEREOF AND RELATED METHODS
KR101487708B1 (ko) * 2007-10-30 2015-01-29 에이씨엠 리서치 (상하이) 인코포레이티드 전해질 용액으로부터 금속배선 형성을 위해 웨이퍼 표면을 프리웨팅하는 방법 및 장치
SG185934A1 (en) * 2007-10-30 2012-12-28 3M Innovative Properties Co Multi-stack optical bandpass film with electro magnetic interference shielding for optical display filters
US9295167B2 (en) 2007-10-30 2016-03-22 Acm Research (Shanghai) Inc. Method to prewet wafer surface
CN104327758A (zh) * 2007-12-28 2015-02-04 3M创新有限公司 柔性封装膜系统
US9034459B2 (en) * 2007-12-28 2015-05-19 3M Innovative Properties Company Infrared reflecting films for solar control and other uses
US10981371B2 (en) 2008-01-19 2021-04-20 Entrotech, Inc. Protected graphics and related methods
JP5231028B2 (ja) * 2008-01-21 2013-07-10 東京エレクトロン株式会社 塗布液供給装置
US20100300351A1 (en) * 2008-02-29 2010-12-02 Yasui Seiki Co., Ltd. Apparatus for production of composite material sheet
US9498790B2 (en) * 2008-04-16 2016-11-22 Imbox Shoecare A/S Apparatus for impregnation of items with an impregnating agent
US8350451B2 (en) * 2008-06-05 2013-01-08 3M Innovative Properties Company Ultrathin transparent EMI shielding film comprising a polymer basecoat and crosslinked polymer transparent dielectric layer
JP5624033B2 (ja) 2008-06-30 2014-11-12 スリーエム イノベイティブプロパティズカンパニー 無機又は無機/有機ハイブリッドバリアフィルムの製造方法
US9790318B2 (en) * 2008-09-26 2017-10-17 entrotech, inc Methods for polymerizing films in-situ
JP4988965B2 (ja) 2008-10-23 2012-08-01 インターナショナル・ビジネス・マシーンズ・コーポレーション 高密度データ記憶のための記憶媒体製造方法およびデータ記憶媒体または装置
US20110223434A1 (en) * 2008-11-17 2011-09-15 Roehrig Mark A Gradient composition barrier
CN102301032A (zh) * 2008-12-18 2011-12-28 维易科精密仪器国际贸易(上海)有限公司 具有加热的泻流孔的真空沉积源
US9184410B2 (en) * 2008-12-22 2015-11-10 Samsung Display Co., Ltd. Encapsulated white OLEDs having enhanced optical output
US9337446B2 (en) * 2008-12-22 2016-05-10 Samsung Display Co., Ltd. Encapsulated RGB OLEDs having enhanced optical output
US20100167002A1 (en) * 2008-12-30 2010-07-01 Vitex Systems, Inc. Method for encapsulating environmentally sensitive devices
US20120009231A1 (en) * 2009-03-19 2012-01-12 Anthony Herbert Apparatus and method for deposition of functional coatings
WO2010110871A2 (en) * 2009-03-25 2010-09-30 Veeco Instruments Inc. Deposition of high vapor pressure materials
US9464179B2 (en) 2009-04-15 2016-10-11 3M Innovative Properties Company Process and apparatus for a nanovoided article
CN102458819B (zh) 2009-04-15 2014-09-03 3M创新有限公司 回射光学构造
TWI491930B (zh) 2009-04-15 2015-07-11 3M新設資產公司 光學膜
JP5671003B2 (ja) 2009-04-15 2015-02-18 スリーエム イノベイティブ プロパティズ カンパニー ナノ中空物品用プロセス及び装置
US9291752B2 (en) 2013-08-19 2016-03-22 3M Innovative Properties Company Retroreflecting optical construction
US9012044B2 (en) 2009-08-03 2015-04-21 3M Innovative Properties Company Process for forming optically clear conductive metal or metal alloy thin films and films made therefrom
BR112012011654A2 (pt) 2009-11-18 2020-08-25 3M Innovantive Properties Company filmes opticos de multiplas camadas
US20120236528A1 (en) * 2009-12-02 2012-09-20 Le John D Multilayer emi shielding thin film with high rf permeability
US8590338B2 (en) * 2009-12-31 2013-11-26 Samsung Mobile Display Co., Ltd. Evaporator with internal restriction
US8828303B2 (en) 2010-03-31 2014-09-09 Entrotech, Inc. Methods for polymerizing films in-situ using a radiation source
US9791604B2 (en) 2010-04-15 2017-10-17 3M Innovative Properties Company Retroreflective articles including optically active areas and optically inactive areas
MX341955B (es) 2010-04-15 2016-09-08 3M Innovative Properties Co Articulos retrorreflectantes que incluyen areas opticamente activas y areas opticamente inactivas.
EP2558290B1 (en) 2010-04-15 2019-01-23 3M Innovative Properties Company Retroreflective articles including optically active areas and optically inactive areas
US8555965B2 (en) * 2010-05-06 2013-10-15 Schlumberger Technology Corporation High frequency surface treatment methods and apparatus to extend downhole tool survivability
US9254506B2 (en) 2010-07-02 2016-02-09 3M Innovative Properties Company Moisture resistant coating for barrier films
WO2012003416A1 (en) 2010-07-02 2012-01-05 3M Innovative Properties Company Barrier assembly
RU2445150C1 (ru) * 2010-08-09 2012-03-20 Государственное образовательное учреждение высшего профессионального образования "Санкт-Петербургский государственный горный институт имени Г.В. Плеханова (технический университет)" Способ очистки от углеводородов парогазовой среды
TW201209219A (en) * 2010-08-16 2012-03-01 Hon Hai Prec Ind Co Ltd Coating apparatus and coating method
WO2012029765A1 (ja) * 2010-09-03 2012-03-08 株式会社アルバック 保護膜形成方法、表面平坦化方法
CN103154320B (zh) 2010-10-06 2015-12-16 3M创新有限公司 具有纳米二氧化硅基涂层的抗反射制品
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DE102011014311A1 (de) * 2011-03-17 2012-09-20 Centrotherm Thermal Solutions Gmbh & Co. Kg Verfahren und Vorrichtung zum Einbringen eines Prozessgases in einem Prozessraum einer Prozesskammer
WO2013019695A2 (en) 2011-08-04 2013-02-07 3M Innovative Properties Company Edge protected barrier assemblies
KR102040758B1 (ko) 2011-08-05 2019-11-05 쓰리엠 이노베이티브 프로퍼티즈 캄파니 증기 처리 시스템 및 방법
KR101930849B1 (ko) * 2011-12-28 2018-12-20 삼성디스플레이 주식회사 박막 증착 장치 및 그것을 이용한 박막 증착 방법
WO2014002842A1 (ja) * 2012-06-29 2014-01-03 株式会社アルバック 有機薄膜形成装置
TWI610806B (zh) 2012-08-08 2018-01-11 3M新設資產公司 障壁膜,製造該障壁膜之方法,及包含該障壁膜之物件
EP2883248B1 (en) 2012-08-08 2017-07-19 3M Innovative Properties Company Photovoltaic devices with encapsulating barrier film
WO2014025570A1 (en) 2012-08-08 2014-02-13 3M Innovative Properties Company Barrier film constructions and methods of making same
EP2882761B1 (en) 2012-08-08 2017-04-19 3M Innovative Properties Company Urea (multi)-urethane (meth)acrylate-silane compositions and articles including the same
US10784455B2 (en) 2012-08-08 2020-09-22 3M Innovative Properties Company Coatings for barrier films and methods of making and using the same
WO2014081918A2 (en) 2012-11-21 2014-05-30 3M Innovative Properties Company Multilayer film including first and second dielectric layers
US20150294793A1 (en) 2012-11-21 2015-10-15 3M Innovative Properties Company Multilayer film including first and second dielectric layers
CN105073909B (zh) 2012-12-20 2019-05-21 3M创新有限公司 包含具有紫外线吸收基团的低聚物的含氟聚合物组合物
CN104884486A (zh) 2012-12-20 2015-09-02 3M创新有限公司 包含紫外线吸收基团的共聚物以及包含其的含氟聚合物组合物
JP2016519039A (ja) 2013-03-15 2016-06-30 エヌディーエスユー リサーチ ファウンデーション 直接注入による液状ヒドロロシラン組成物を用いたシリコン含有材料の合成方法
US20150024522A1 (en) * 2013-07-22 2015-01-22 Rohm And Haas Electronic Materials Llc Organometal materials and process
EP3024883A1 (en) 2013-07-24 2016-06-01 3M Innovative Properties Company Adhesive barrier film construction
FI125920B (en) * 2013-09-09 2016-04-15 Beneq Oy A method of coating a substrate
CN105531114B (zh) 2013-09-24 2017-10-10 3M创新有限公司 可转移的透明导电图案和显示器叠堆材料
US20160326741A1 (en) 2013-12-19 2016-11-10 3M Innovative Properties Company Barrier films and vacuum insulated panels employing same
US9380813B2 (en) 2014-02-11 2016-07-05 Timothy McCullough Drug delivery system and method
US10821240B2 (en) 2014-02-11 2020-11-03 Vapor Cartridge Technology Llc Methods and drug delivery devices using cannabis
US9220294B2 (en) 2014-02-11 2015-12-29 Timothy McCullough Methods and devices using cannabis vapors
KR101540969B1 (ko) 2014-05-28 2015-08-03 한국원자력연구원 임팩트 구조 개선에 의한 입자회수율 제고장치
SG11201610789SA (en) 2014-06-25 2017-01-27 3M Innovative Properties Co Pressure sensitive adhesive composition including ultraviolet light-absorbing oligomer
US11110689B2 (en) 2014-06-25 2021-09-07 3M Innovative Properties Company Pressure sensitive adhesive composition including ultraviolet light-absorbing oligomer
KR101884576B1 (ko) 2014-06-25 2018-08-29 쓰리엠 이노베이티브 프로퍼티즈 캄파니 적어도 하나의 올리고머를 포함하는 플루오로중합체 조성물
CN105633300B (zh) * 2014-11-07 2018-03-06 罗门哈斯电子材料有限公司 金属有机材料和方法
EP3047915B1 (en) * 2015-01-23 2018-11-14 Flosfia Inc. Method and apparatus for producing polymer and method and apparatus for producing organic film
US20160223269A1 (en) * 2015-02-04 2016-08-04 Outlast Technologies, LLC Thermal management films containing phase change materials
RU2594423C1 (ru) * 2015-05-29 2016-08-20 Общество с ограниченной ответственностью "КОРА Инжиниринг" Установка для дозированной подачи компонентов композитного материала
KR20160147482A (ko) * 2015-06-15 2016-12-23 삼성전자주식회사 가스 혼합부를 갖는 반도체 소자 제조 설비
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WO2017003791A1 (en) 2015-06-30 2017-01-05 3M Innovative Properties Company Discontinuous coatings and methods of forming the same
CN107925010B (zh) 2015-08-17 2020-11-06 3M创新有限公司 阻挡膜构造
US10738224B2 (en) 2015-08-17 2020-08-11 3M Innovative Properties Company Nanoclay filled barrier adhesive compositions
JP6507309B2 (ja) 2015-08-19 2019-04-24 スリーエム イノベイティブ プロパティズ カンパニー 複合材物品及その製造方法
EP3337658B1 (en) 2015-08-19 2021-02-03 3M Innovative Properties Company Composite article including a multilayer barrier assembly and methods of making the same
CN107922657B (zh) 2015-08-19 2020-07-17 3M创新有限公司 包括多层阻隔组件的复合材料制品及其制造方法
WO2017151285A1 (en) 2016-03-04 2017-09-08 3M Innovative Properties Company Magnetic multilayer sheet
CN109075262A (zh) 2016-03-25 2018-12-21 3M创新有限公司 多层阻挡膜
WO2017172531A1 (en) 2016-04-01 2017-10-05 3M Innovative Properties Company Roll-to-roll atomic layer deposition apparatus and method
CH712376A1 (de) * 2016-04-19 2017-10-31 Camag Derivatisierungsgerät und -verfahren.
US11034865B2 (en) 2016-06-16 2021-06-15 3M Innovative Properties Company Nanoparticle filled barrier adhesive compositions
WO2017218476A2 (en) 2016-06-16 2017-12-21 3M Innovative Properties Company Nanoparticle filled barrier adhesive compositions
SI3419826T1 (sl) 2016-09-20 2026-01-30 Ppg Advanced Surface Technologies, Llc Metoda oblikovanja aplikacij barvne folije, aplikacije barvne folije, izdelki in uporaba
EP3533090A1 (en) 2016-10-28 2019-09-04 3M Innovative Properties Company Nanostructured article
CN106880135A (zh) * 2017-03-22 2017-06-23 岳西县海创饰品有限公司 一种拉链打蜡设备
CN106901460A (zh) * 2017-03-22 2017-06-30 岳西县海创饰品有限公司 一种利用蜡蒸汽冷凝附着的拉链打蜡装置
CN110476268A (zh) 2017-03-30 2019-11-19 3M创新有限公司 转移制品
US20200123419A1 (en) 2017-04-21 2020-04-23 3M Innovative Properties Company Barrier adhesive compositions and articles
WO2019064417A1 (ja) * 2017-09-28 2019-04-04 シャープ株式会社 成膜方法及びそれを用いた表示装置の製造方法
CN109628910B (zh) * 2017-10-07 2023-06-30 株式会社Flosfia 形成膜的方法
US11591501B2 (en) 2017-12-06 2023-02-28 3M Innovative Properties Company Barrier adhesive compositions and articles
EP3877454B1 (en) 2018-11-09 2026-04-29 3M Innovative Properties Company Nanostructured optical films and intermediates
US20220186360A1 (en) * 2019-03-05 2022-06-16 Xefco Pty Ltd Improved vapour deposition system, method and moisture control device
CA3154135A1 (en) 2019-09-16 2021-03-25 Vapor Cartridge Technology Llc Drug delivery system with stackable substrates
CN114829986B (zh) 2019-12-02 2025-05-16 3M创新有限公司 光学超表面膜
KR20260033632A (ko) * 2020-01-21 2026-03-10 가부시키가이샤 니콘 미스트 성막 장치 및 미스트 성막 방법
WO2021229340A1 (en) 2020-05-14 2021-11-18 3M Innovative Properties Company Fluorinated photoinitiators and fluorinated (co)polymer layers made using the same
US12305063B2 (en) 2020-05-14 2025-05-20 3M Innovative Properties Company Fluorinated coupling agents and fluorinated (co)polymer layers made using the same
US12517285B2 (en) 2020-05-14 2026-01-06 3M Innovative Properties Company Multilayer optical films comprising at least one fluorinated (co)polymer layer made using a fluorinated photoinitiator, and methods of making and using the same
WO2022123456A1 (en) 2020-12-09 2022-06-16 3M Innovative Properties Company Barrier assembly for solar cells
WO2022130260A1 (en) 2020-12-18 2022-06-23 3M Innovative Properties Company Structured film and optical article including structured film
US12157941B2 (en) 2021-05-17 2024-12-03 3M Innovative Properties Company Ultraviolet radiation and atomic oxygen barrier films and methods of making and using the same
EP4341086A1 (en) 2021-05-19 2024-03-27 3M Innovative Properties Company Packaged abrasive articles
US20240227431A1 (en) 2021-05-20 2024-07-11 3M Innovative Properties Company Micro-cut patterned article and method of making same
CN120225923A (zh) 2022-11-17 2025-06-27 3M创新有限公司 结构化紫外光屏蔽制品和包括该制品的太阳能电池阵列
KR20260051066A (ko) 2023-08-11 2026-04-15 쓰리엠 이노베이티브 프로퍼티즈 컴파니 패키징된 연마 물품
WO2025133762A1 (en) 2023-12-21 2025-06-26 3M Innovative Properties Company Retroreflective article comprising a retroreflective layer and an antireflective layer, kits, and methods thereof
DE102024202567A1 (de) 2024-03-19 2025-09-25 Robert Bosch Gesellschaft mit beschränkter Haftung Kondensationsbeschichtungsverfahren für Schaltungsträger

Family Cites Families (65)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3379803A (en) * 1964-05-04 1968-04-23 Union Carbide Corp Coating method and apparatus for deposition of polymer-forming vapor under vacuum
US3374111A (en) * 1964-06-30 1968-03-19 Ibm Method for depositing thin dielectric polymer films
GB1168641A (en) * 1966-05-19 1969-10-29 British Iron Steel Research Formation of Polymer Coatings on Substrates.
US3518111A (en) * 1966-12-01 1970-06-30 Gen Electric Photopolymerized film,coating and product,and method of forming
US3665269A (en) * 1969-12-29 1972-05-23 Gen Electric Capacitors having a photopolymerized dielectric film
FR2110622A5 (https=) * 1970-10-23 1972-06-02 Commissariat Energie Atomique
CA1071035A (en) * 1975-01-20 1980-02-05 Rudolph J. Angelo Gas-barrier coated films, sheets or foils and method of preparation
US4104438A (en) * 1975-01-20 1978-08-01 E. I. Du Pont De Nemours And Company Gas-barrier coated films, sheets or foils and method of preparation
US4076866A (en) * 1975-03-30 1978-02-28 Massachusetts Institute Of Technology Method of growing films by flash vaporization
US4325986A (en) * 1979-05-29 1982-04-20 University Of Delaware Method for continuous deposition by vacuum evaporation
US4290384A (en) * 1979-10-18 1981-09-22 The Perkin-Elmer Corporation Coating apparatus
JPS57134558A (en) * 1981-02-16 1982-08-19 Fuji Photo Film Co Ltd Production of organic vapor deposited thin film
US4734227A (en) * 1983-09-01 1988-03-29 Battelle Memorial Institute Method of making supercritical fluid molecular spray films, powder and fibers
US4734451A (en) * 1983-09-01 1988-03-29 Battelle Memorial Institute Supercritical fluid molecular spray thin films and fine powders
US5097800A (en) * 1983-12-19 1992-03-24 Spectrum Control, Inc. High speed apparatus for forming capacitors
US5032461A (en) * 1983-12-19 1991-07-16 Spectrum Control, Inc. Method of making a multi-layered article
US5125138A (en) * 1983-12-19 1992-06-30 Spectrum Control, Inc. Miniaturized monolithic multi-layer capacitor and apparatus and method for making same
US4499520A (en) * 1983-12-19 1985-02-12 General Electric Company Capacitor with dielectric comprising poly-functional acrylate polymer and method of making
US4842893A (en) * 1983-12-19 1989-06-27 Spectrum Control, Inc. High speed process for coating substrates
US5018048A (en) * 1983-12-19 1991-05-21 Spectrum Control, Inc. Miniaturized monolithic multi-layer capacitor and apparatus and method for making
EP0155823B1 (en) * 1984-03-21 1989-07-26 Nihon Shinku Gijutsu Kabushiki Kaisha Improvements in or relating to the covering of substrates with synthetic resin films
JPS60239921A (ja) * 1984-05-11 1985-11-28 Fujitsu Ltd 磁気記録媒体表面の潤滑膜形成方法
US4722515A (en) * 1984-11-06 1988-02-02 Spectrum Control, Inc. Atomizing device for vaporization
US4682565A (en) * 1984-11-19 1987-07-28 Sfe Technologies Vapor nozzle with gas barrier bars
EP0242460A1 (en) * 1985-01-18 1987-10-28 SPECTRUM CONTROL, INC. (a Pennsylvania corporation) Monomer atomizer for vaporization
EP0209403B1 (en) * 1985-07-15 1991-10-23 Research Development Corporation of Japan Process for preparing ultrafine particles of organic compounds
JP2543337B2 (ja) * 1985-07-22 1996-10-16 ノ−ドソン株式会社 熱可塑性接着剤の塗布方法
US4675270A (en) * 1986-02-10 1987-06-23 Loctite (Ireland) Limited Imaging method for vapor deposited photoresists of anionically polymerizable monomer
US4954371A (en) * 1986-06-23 1990-09-04 Spectrum Control, Inc. Flash evaporation of monomer fluids
US4771946A (en) * 1986-11-13 1988-09-20 Ashland Oil, Inc. Modified spray guns for vaporous amine-assisted spray coatings and method therefor
IT1199795B (it) * 1986-12-17 1988-12-30 Ausimont Spa Processo per il consolidamento di materiali a struttura discontinua
DE3856483T2 (de) * 1987-03-18 2002-04-18 Kabushiki Kaisha Toshiba, Kawasaki Verfahren zur Herstellung von Dünnschichten
US4891249A (en) * 1987-05-26 1990-01-02 Acumeter Laboratories, Inc. Method of and apparatus for somewhat-to-highly viscous fluid spraying for fiber or filament generation, controlled droplet generation, and combinations of fiber and droplet generation, intermittent and continuous, and for air-controlling spray deposition
JPH0829273B2 (ja) * 1988-08-24 1996-03-27 マークテック株式会社 複数のノズルを持つ二流体スプレーガン
US5316579A (en) * 1988-12-27 1994-05-31 Symetrix Corporation Apparatus for forming a thin film with a mist forming means
US5456945A (en) * 1988-12-27 1995-10-10 Symetrix Corporation Method and apparatus for material deposition
DE3921255A1 (de) * 1989-06-29 1991-01-03 Krebsoege Gmbh Sintermetall Verfahren zur erzeugung eines in einem traegergasstrom foerderbaren fluessigkeitsnebels und vorrichtung zur durchfuehrung des verfahrens
US5090985A (en) * 1989-10-17 1992-02-25 Libbey-Owens-Ford Co. Method for preparing vaporized reactants for chemical vapor deposition
JP2992760B2 (ja) * 1990-02-15 1999-12-20 ノードソン株式会社 ノズル孔より流出する液体又は溶融体をその周辺よりの気体噴出流により偏向分配する方法
US5190592A (en) * 1990-05-02 1993-03-02 Commissariat A L'energie Atomique Aerosol injection system for producing composite layers by pyrolysis
JPH05138083A (ja) * 1991-11-15 1993-06-01 Matsushita Electric Ind Co Ltd 液体の微粒化装置
US5229171A (en) * 1991-12-23 1993-07-20 Research Triangle Institute Apparatus and method for uniformly coating a substrate in an evacuable chamber
EP0548990B1 (en) * 1991-12-26 1997-03-12 Canon Kabushiki Kaisha Chemical vapor deposition method for forming a deposited film with the use of a liquid raw material and apparatus suitable for practising said method
JP3222518B2 (ja) * 1991-12-26 2001-10-29 キヤノン株式会社 液体原料気化装置および薄膜形成装置
DE4202652C2 (de) * 1992-01-30 1996-03-28 Fraunhofer Ges Forschung Verfahren zum Aufbringen einer UV- und/oder elektronenstrahlempfindlichen Lackschicht
NL9200415A (nl) * 1992-03-06 1993-10-01 Bronkhorst High Tech Bv Werkwijze voor het omzetten van een vloeistofstroom in een gasstroom, en inrichting voor het uitvoeren van de werkwijze.
US5271957A (en) * 1992-06-18 1993-12-21 Eastman Kodak Company Chemical vapor deposition of niobium and tantalum oxide films
FR2704558B1 (fr) 1993-04-29 1995-06-23 Air Liquide Procede et dispositif pour creer un depot d'oxyde de silicium sur un substrat solide en defilement.
ATE233939T1 (de) * 1993-10-04 2003-03-15 3M Innovative Properties Co Vernetztes acrylatbeschichtungsmaterial zur herstellung von kondensatordielektrika und sauerstoffbarrieren
US5440446A (en) * 1993-10-04 1995-08-08 Catalina Coatings, Inc. Acrylate coating material
US5630878A (en) * 1994-02-20 1997-05-20 Stec Inc. Liquid material-vaporizing and supplying apparatus
US5492724A (en) * 1994-02-22 1996-02-20 Osram Sylvania Inc. Method for the controlled delivery of vaporized chemical precursor to an LPCVD reactor
US5478014A (en) * 1994-04-20 1995-12-26 Hynds; James E. Method and system for hot air spray coating and atomizing device for use therein
US5776254A (en) * 1994-12-28 1998-07-07 Mitsubishi Denki Kabushiki Kaisha Apparatus for forming thin film by chemical vapor deposition
US5607789A (en) * 1995-01-23 1997-03-04 Duracell Inc. Light transparent multilayer moisture barrier for electrochemical cell tester and cell employing same
US5540959A (en) * 1995-02-21 1996-07-30 Howard J. Greenwald Process for preparing a coated substrate
US5877895A (en) * 1995-03-20 1999-03-02 Catalina Coatings, Inc. Multicolor interference coating
US5653813A (en) * 1995-04-03 1997-08-05 Novellus Systems, Inc. Cyclone evaporator
US5811183A (en) * 1995-04-06 1998-09-22 Shaw; David G. Acrylate polymer release coated sheet materials and method of production thereof
US5681615A (en) * 1995-07-27 1997-10-28 Battelle Memorial Institute Vacuum flash evaporated polymer composites
US5711994A (en) * 1995-12-08 1998-01-27 Kimberly-Clark Worldwide, Inc. Treated nonwoven fabrics
US5958510A (en) * 1996-01-08 1999-09-28 Applied Materials, Inc. Method and apparatus for forming a thin polymer layer on an integrated circuit structure
DE19882473T1 (de) * 1997-06-02 2002-01-31 Msp Corp Verfahren und Vorrichtung zur Dampferzeugung und Schichtaufbringung
US5882416A (en) * 1997-06-19 1999-03-16 Advanced Technology Materials, Inc. Liquid delivery system, heater apparatus for liquid delivery system, and vaporizer
US6203898B1 (en) 1997-08-29 2001-03-20 3M Innovatave Properties Company Article comprising a substrate having a silicone coating

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