JP2001522504A - 磁気記録媒体用マンガン含有層 - Google Patents
磁気記録媒体用マンガン含有層Info
- Publication number
- JP2001522504A JP2001522504A JP54626198A JP54626198A JP2001522504A JP 2001522504 A JP2001522504 A JP 2001522504A JP 54626198 A JP54626198 A JP 54626198A JP 54626198 A JP54626198 A JP 54626198A JP 2001522504 A JP2001522504 A JP 2001522504A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- magnetic
- alloy
- magnetic layer
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 195
- 229910052748 manganese Inorganic materials 0.000 title claims description 20
- 239000011572 manganese Substances 0.000 title description 87
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 title description 3
- 239000010410 layer Substances 0.000 claims abstract description 329
- 239000000758 substrate Substances 0.000 claims abstract description 57
- 229910000531 Co alloy Inorganic materials 0.000 claims abstract description 38
- 239000013078 crystal Substances 0.000 claims abstract description 28
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 23
- 239000000956 alloy Substances 0.000 claims abstract description 23
- 239000000126 substance Substances 0.000 claims abstract description 19
- 239000000463 material Substances 0.000 claims abstract description 18
- 229910000943 NiAl Inorganic materials 0.000 claims abstract description 13
- NPXOKRUENSOPAO-UHFFFAOYSA-N Raney nickel Chemical compound [Al].[Ni] NPXOKRUENSOPAO-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910015372 FeAl Inorganic materials 0.000 claims abstract description 11
- 239000011229 interlayer Substances 0.000 claims abstract description 10
- 229910000599 Cr alloy Inorganic materials 0.000 claims abstract description 9
- -1 CrV Inorganic materials 0.000 claims abstract description 9
- 229910003321 CoFe Inorganic materials 0.000 claims abstract description 7
- 229910005438 FeTi Inorganic materials 0.000 claims abstract description 7
- 229910001149 41xx steel Inorganic materials 0.000 claims abstract description 6
- 229910002535 CuZn Inorganic materials 0.000 claims abstract description 6
- 229910010389 TiMn Inorganic materials 0.000 claims abstract description 5
- 229910019222 CoCrPt Inorganic materials 0.000 claims description 53
- 238000009792 diffusion process Methods 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 18
- 239000006104 solid solution Substances 0.000 claims description 14
- 229910052804 chromium Inorganic materials 0.000 claims description 12
- 238000000151 deposition Methods 0.000 claims description 11
- 229910000914 Mn alloy Inorganic materials 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 7
- 238000013500 data storage Methods 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 230000001737 promoting effect Effects 0.000 claims description 3
- 229910010169 TiCr Inorganic materials 0.000 claims 1
- 230000001965 increasing effect Effects 0.000 abstract description 14
- 229910001000 nickel titanium Inorganic materials 0.000 abstract description 4
- 230000002463 transducing effect Effects 0.000 abstract description 2
- 229910015136 FeMn Inorganic materials 0.000 abstract 1
- 239000010408 film Substances 0.000 description 124
- 239000011521 glass Substances 0.000 description 20
- 239000010409 thin film Substances 0.000 description 18
- 238000002441 X-ray diffraction Methods 0.000 description 10
- 230000008859 change Effects 0.000 description 9
- 239000002245 particle Substances 0.000 description 9
- 238000004544 sputter deposition Methods 0.000 description 9
- 239000010952 cobalt-chrome Substances 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 230000006872 improvement Effects 0.000 description 6
- 230000005415 magnetization Effects 0.000 description 6
- 239000012528 membrane Substances 0.000 description 6
- 239000011253 protective coating Substances 0.000 description 6
- 239000000314 lubricant Substances 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 238000004627 transmission electron microscopy Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000010941 cobalt Substances 0.000 description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000005755 formation reaction Methods 0.000 description 4
- 229910002521 CoMn Inorganic materials 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 229910017052 cobalt Inorganic materials 0.000 description 3
- 238000000407 epitaxy Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000001000 micrograph Methods 0.000 description 3
- 238000010587 phase diagram Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 229910052720 vanadium Inorganic materials 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910018979 CoPt Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229910002056 binary alloy Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000005347 demagnetization Effects 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000004151 rapid thermal annealing Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229910020632 Co Mn Inorganic materials 0.000 description 1
- 229910002441 CoNi Inorganic materials 0.000 description 1
- 229910020678 Co—Mn Inorganic materials 0.000 description 1
- 229910019582 Cr V Inorganic materials 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910017309 Mo—Mn Inorganic materials 0.000 description 1
- 240000005561 Musa balbisiana Species 0.000 description 1
- 235000018290 Musa x paradisiaca Nutrition 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229920001774 Perfluoroether Polymers 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 244000309464 bull Species 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000011177 media preparation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- UJMWVICAENGCRF-UHFFFAOYSA-N oxygen difluoride Chemical compound FOF UJMWVICAENGCRF-UHFFFAOYSA-N 0.000 description 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000009702 powder compression Methods 0.000 description 1
- 238000004663 powder metallurgy Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005204 segregation Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
- G11B5/676—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having magnetic layers separated by a nonmagnetic layer, e.g. antiferromagnetic layer, Cu layer or coupling layer
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/85—Coating a support with a magnetic layer by vapour deposition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/90—Magnetic feature
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1.下記を含んでなる磁気記録媒体: 基体; 磁気記録層を形成するCoもしくはCo合金膜;および 前記磁気層にエピタキシアル結晶構造を与えるために、前期基体と前記磁 気層との間に配置されるMnもしくは固溶体Mn合金を含んでなるMn含有層。 2.前記磁気層が、前記磁気層に実質的に平行に配向された磁気c軸を有する 、請求項1に記載の記録媒体。 3.前記Mn含有層が、Mnの拡散を前記磁気層に与えるのに有効な量で配置 される、請求項1に記載の記録媒体。 4.前記磁気層が、粒界を有する結晶粒を含み;かつ 前記Mn含有層が、Mnの拡散を前記磁気層の粒界に与えるのに有効な量 で配置される、請求項3に記載の記録媒体。 5.前記固溶体Mn合金が、CrMn、VMn、TiMn、MnZn、CrM nMo、CrMnW、CrMnVおよびCrMnTiからなる群から選ばれる物 質を含んでなる、請求項1に記載の記録媒体。 6.前記固溶体Mn合金が、CrMnを含んでなる、請求項1に記載の記録媒 体。 7.前記CrMn合金が、28%未満のMnを含んでなる、請求項6に記載の 記録媒体。 8.前記CrMn層が、少なくとも3nmの厚さである、請求項6に記載の記 録媒体。 9.前記CrMn層が、10〜25%のMnを含んでなる、請求項6に記載の 記録媒体。 10.前記CrMn層が、3〜100nmの厚さである、請求項9に記載の記 録媒体。 11.前記Mn含有層が、少なくとも3nmの厚さである、請求項1に記載の 記録媒体。 12.前記磁気層が、CoCrPt合金およびCoCrTa合金からなる群か ら選ばれる物質を含んでなる、請求項1に記載の記録媒体。 13.さらに前記基体上に配置される種層を含んでなる、請求項1に記載の記 録媒体。 14.前記種層が、(002)構造を有するMgO、CrおよびCrTiから なる群から選ばれる物質を含んでなる、請求項13に記載の記録媒体。 15.前記種層が、Ti、TiCrおよびptからなる群から選ばれる物質を 含んでなる、請求項13に記載の記録媒体。 16.前記磁気層にエピタキシアル結晶構造を促進するために、さらに前記基 体と選ばれた物質を含んでなる前記Mn含有層との間に配置される下層を含んで なる、請求項1に記載の記録媒体。 17.前記下層が、Cr、Cr合金、ならびにB2規則構造およびCrに実質 的に匹敵する格子定数を有する物質からなる群から選ばれる物質を含んでなる、 請求項16に記載の記録媒体。 18.前記下層が、Cr、CrV、CrMo、CrW、CrTi、NiAl、 AlCo、FeAl、FeTi、CoFe、CoTi、CoHf、CoZr、N iTi、CuBe、CuZn、AlMn、AlRe、AgMgおよびAl2Fe Mn2からなる群から選ばれる物質を含んでなる、請求項16に記載の記録媒体 。 19.前記物質の1種以上を含んでなる複数の下層を含んでなる、請求項16 に記載の記録媒体。 20.前記磁気層にエピタキシアル結晶構造を促進するために、さらに前記基 体と選ばれた物質を含んでなる前記Mn含有層との間に配置される中間層を含ん でなる、請求項1に記載の記録媒体。 21.前記中間層が、Cr、Cr合金、ならびにB2規則構造およびCrに実 質的に匹敵する格子定数を有する物質からなる群から選ばれる物質を含んでなる 、請求項20に記載の記録媒体。 22.前記中間層が、cr、crv、CrMo、CrW、CrTi、NiAl 、AlCo、FeAl、FeTi、CoFe、CoTi、CoHf、CoZr、 N iTi、CuBe、CuZn、AlMn、AlRe、AgMgおよびAl2Fe Mn2からなる群から選ばれる物質を含んでなる、請求項20に記載の記録媒体 。 23.さらに第二磁気層を含んでなり、前記磁気層が、前記第二磁気層と前記 基体との間にある、請求項1に記載の記録媒体。 24.さらに前記磁気層と前記第二磁気層との間に配置されるMn含有内層を 含んでなる、請求項23に記載の記録媒体。 25.下記を含んでなる磁気記録媒体: 基体; エピタキシアル結晶構造を有する磁気記録層を形成するCoもしくはCo 合金膜;および 前記磁気層と接触するMnもしくはMn合金を含んでなるMn含有層(前 記磁気層は、前記基体と前記Mn含有層との間にある)。 26.下記を含んでなるデータ貯蔵用装置: 基体; 磁気記録層を形成するCoもしくはCo合金膜; 前記磁気層にエピタキシアル成長を与えるために、前記磁気層と前記基体 との間に配置されるMnもしくは固溶体Mn合金を含んでなるMn含有層;およ び データを前記媒体に記録し、それから読み取るために、前記媒体に密に接 近して配置される磁気変換器。 27.前記媒体が、前記磁気層のエピタキシアル成長を促進するために、さら に前記Mn含有層と前記基体との間に置かれる下層を含んでなる、請求項26に 記載の装置。 28.前記下層が、Cr、CrV、CrMo、CrW、CrTi、NiAl、 AlCo、FeAl、FeTi、CoFe、CoTi、CoHf、CoZr、N iTi,CuBe、CuZn、AlMn、AlRe、AgMgおよびAl2Fe Mn2からなる群から選ばれる物質である、請求項27に記載の装置。 29.前記Mn含有層が、CrMn合金を含んでなる、請求項26に記載の装 置。 30.前記媒体が、前記変換器に対して回転できる、請求項26に記載の装置 。 31.前記磁気層が、前記Mn含有層から成長したエピタキシアル結晶構造を 有する、請求項26に記載の装置。 32.前記記録媒体の前記磁気層が、粒界を有する結晶粒を含み;かつ 前記Mn含有層が、Mnの拡散を前記磁気層の粒界に与えるのに有効な量 で配置される、請求項26に記載の装置。 33.下記を含んでなる、エピタキシアル結晶性CoもしくはCo合金磁気層 を記録基体上に生成する方法: CoもしくはCo合金磁気層のエピタキシアル成長を与えるために、Mn もしくは固溶体Mn合金を含んでなるMn含有層を基体上に配置し;かつ 前記Mn含有層にCoもしくはCo合金磁気層を生成する。 34.さらにMn含有層からのMnの磁気層への層間拡散を促進する工程を含 んでなる、請求項33に記載の方法。 35.前記促進工程が、Mn含有層からのMnの磁気層への層間拡散を促進す るために、Mn含有層を加熱することを含んでなる、請求項34に記載の方法。 36.前記加熱工程が、前記磁気層生成工程中に実施される、請求項35に記 載の方法。 37.前記配置工程が、さらにMn含有層上に生成された磁気層にエピタキシ アル結晶構造を促進するのに有効な量でMn含有層を配置することを含んでなる 、請求項33に記載の方法。 38.前記配置工程が、さらにCrMn合金を含んでなるMn含有層を基体上 に配置することを含んでなる、請求項33に記載の方法。 39.前記配置工程が、さらに少なくとも3nm厚さのCrMn合金層を基体 上に配置することを含んでなる、請求項38に記載の方法。 40.前記生成工程が、さらにMn含有層からのMnの磁気層部分への層間拡 散を生成するのに十分な温度で磁気層を付着させることを含んでなる、請求項3 3に記載の方法。 41.前記付着工程が、さらに磁気層を少なくとも250℃の温度でスパッタ ー付着させることを含んでなる、請求項39に記載の方法。 42.さらにMn含有層と磁気層との間に中間層を置く工程を含んでなる、請 求項33に記載の方法。 43.さらに前記基体上に種層を配置する工程を含んでなる、請求項33に記 載の方法。 44.さらに前記Mn含有層と前記基体との間に下層を供給する工程を含んで なる、請求項33に記載の方法。 45.前記供給工程が、Cr、Cr合金、ならびにB2規則構造およびCrに 実質的に匹敵する格子定数を有する物質からなる群から選ばれる物質を含んでな る下層を供給することを含んでなる、請求項44に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/844,835 | 1997-04-22 | ||
US08/844,835 US5993956A (en) | 1997-04-22 | 1997-04-22 | Manganese containing layer for magnetic recording media |
PCT/US1998/007984 WO1998048413A1 (en) | 1997-04-22 | 1998-04-22 | Manganese containing layer for magnetic recording media |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2001522504A true JP2001522504A (ja) | 2001-11-13 |
JP2001522504A5 JP2001522504A5 (ja) | 2005-11-24 |
Family
ID=25293754
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP54626198A Ceased JP2001522504A (ja) | 1997-04-22 | 1998-04-22 | 磁気記録媒体用マンガン含有層 |
Country Status (6)
Country | Link |
---|---|
US (1) | US5993956A (ja) |
EP (1) | EP0978121A1 (ja) |
JP (1) | JP2001522504A (ja) |
KR (1) | KR20010020160A (ja) |
CN (1) | CN1260899A (ja) |
WO (1) | WO1998048413A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006030961A1 (en) * | 2004-09-17 | 2006-03-23 | Showa Denko K.K. | Method for manufacturing perpedicular magnetic recording medium, perpendicular magnetic recording medium, and magnetic recording/ reproducing apparatus |
US9928866B2 (en) | 2012-01-19 | 2018-03-27 | Fuji Electric Co., Ltd. | Method for manufacturing magnetic recording medium |
Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6156422A (en) * | 1997-12-12 | 2000-12-05 | Seagate Technology, Inc. | High density magnetic recording medium with high Hr and low Mrt |
US6207269B1 (en) * | 1997-12-12 | 2001-03-27 | Seagate Technology Llc | High substrate bias sputtering underlayer for longitudinal recording media |
US6238809B1 (en) * | 1998-02-10 | 2001-05-29 | Seagate Technology Llc | Magnetic recording medium containing a Cr(Ta205) underlayer |
US6228515B1 (en) * | 1998-02-17 | 2001-05-08 | Korea Institute Of Science And Technology | Underlayer for use in a high density magnetic recording media |
US6432562B1 (en) * | 1998-09-25 | 2002-08-13 | Seagate Technology Llc | Magnetic recording medium with a nialru seedlayer |
US6623873B1 (en) * | 1998-11-20 | 2003-09-23 | Hitachi, Ltd. | Magnetic recording medium and magnetic disk apparatus using the same |
US6562488B1 (en) * | 1999-04-14 | 2003-05-13 | Seagate Technology Llc | CoCrPtTaNbB alloy for magnetic recording medium |
JP2000348323A (ja) * | 1999-06-08 | 2000-12-15 | Fujitsu Ltd | 磁気記録媒体、磁気記録媒体の製造方法及び磁気記憶装置 |
JP2001023142A (ja) * | 1999-07-05 | 2001-01-26 | Sony Corp | 磁気記録媒体 |
US6432563B1 (en) | 2000-04-03 | 2002-08-13 | Carnegie Mellon University | Zinc enhanced hard disk media |
US6790541B2 (en) * | 2000-04-12 | 2004-09-14 | Alps Electric Co., Ltd. | Exchange coupling film and electroresistive sensor using the same |
US6740397B1 (en) * | 2000-05-24 | 2004-05-25 | Seagate Technology Llc | Subseedlayers for magnetic recording media |
US6596419B1 (en) | 2000-09-27 | 2003-07-22 | Seagate Technology Llc | Medium with a seed layer and a B2-structured underlayer |
US6730420B1 (en) | 2000-10-31 | 2004-05-04 | Komag, Inc. | Magnetic thin film recording media having extremely low noise and high thermal stability |
JP3730518B2 (ja) * | 2001-01-19 | 2006-01-05 | 株式会社東芝 | 磁気記録媒体 |
US6593009B2 (en) | 2001-03-02 | 2003-07-15 | Hitachi Global Storage Technologies Netherlands N.V. | Magnetic thin film media with a pre-seed layer of CrTi |
US6852430B2 (en) | 2001-03-02 | 2005-02-08 | Hitachi Global Storage Technologies Netherlands, B.V. | Magnetic thin film media with a pre-seed layer of CrTi |
US7153597B2 (en) * | 2001-03-15 | 2006-12-26 | Seagate Technology Llc | Magnetic recording media having chemically modified patterned substrate to assemble self organized magnetic arrays |
US7041394B2 (en) | 2001-03-15 | 2006-05-09 | Seagate Technology Llc | Magnetic recording media having self organized magnetic arrays |
JP2003242621A (ja) * | 2002-02-18 | 2003-08-29 | Sony Corp | 磁気記録媒体 |
WO2003083840A1 (en) * | 2002-03-29 | 2003-10-09 | Fujitsu Limited | Magnetic recording medium and magnetic storage apparatus |
WO2003083841A1 (en) | 2002-03-29 | 2003-10-09 | Fujitsu Limited | Magnetic recording medium and magnetic storage apparatus |
US20030215676A1 (en) * | 2002-05-20 | 2003-11-20 | Yoshiharu Kashiwakura | Magnetic recording medium |
US6677052B2 (en) * | 2002-05-29 | 2004-01-13 | Hitachi Global Storage Technologies | Preseed layer for a magnetic recording disk |
WO2004027762A1 (en) | 2002-09-06 | 2004-04-01 | Fujitsu Limited | Magnetic recording medium and magnetic storage apparatus |
JP2004234718A (ja) * | 2003-01-28 | 2004-08-19 | Fuji Electric Device Technology Co Ltd | 磁気記録媒体 |
US7282278B1 (en) * | 2003-07-02 | 2007-10-16 | Seagate Technology Llc | Tilted recording media with L10 magnetic layer |
US7088562B2 (en) * | 2003-07-30 | 2006-08-08 | Hitachi Global Storage Technologies Netherlands B.V. | Electrical lead structures having crystalline structures that match underlying magnetic hard bias layers for magnetoresistive sensors |
US7466522B2 (en) * | 2003-07-30 | 2008-12-16 | Hitachi Global Storage Technologies Netherlands, B.V. | Electrical lead structures having crystalline structures that match underlying magnetic hard bias layers for magnetoresistive sensors |
US6858331B1 (en) | 2003-08-29 | 2005-02-22 | Hitachi Global Storage Technologies Netherlands, B.V. | Magnetic thin film media with a bi-layer structure of CrTi/Nip |
WO2006019063A1 (en) * | 2004-08-16 | 2006-02-23 | Showa Denko K.K. | Magnetic recording medium and magnetic recording and reproducing device |
US7300713B2 (en) * | 2004-10-29 | 2007-11-27 | Hitachi Global Storage Technologies Netherlands B.V. | Magnetic thin film media with an underlayer of CrMoZr, CrMoNb or CrMoMn |
US20070122660A1 (en) * | 2005-11-28 | 2007-05-31 | Seagate Technology Llc | Magnetic recording media with manganese-containing underlayer |
US20070264339A1 (en) * | 2006-05-12 | 2007-11-15 | Ap Pharma, Inc. | Base-stabilized polyorthoester formulations |
US7670694B2 (en) * | 2006-12-22 | 2010-03-02 | Hitachi Global Storage Technologies Netherlands B.V. | Media for recording devices |
US20120141667A1 (en) * | 2010-07-16 | 2012-06-07 | Applied Materials, Inc. | Methods for forming barrier/seed layers for copper interconnect structures |
CN102373427A (zh) * | 2010-08-18 | 2012-03-14 | 鸿富锦精密工业(深圳)有限公司 | 铝合金表面防腐处理方法及其制品 |
JP5787344B2 (ja) * | 2011-02-15 | 2015-09-30 | 昭和電工株式会社 | 熱アシスト磁気記録媒体及び磁気記憶装置 |
JP6199618B2 (ja) * | 2013-04-12 | 2017-09-20 | 昭和電工株式会社 | 磁気記録媒体、磁気記憶装置 |
CN105698929B (zh) * | 2016-02-29 | 2019-06-28 | 苏州宏策光电科技有限公司 | 氮气反应溅射制备CoCr/Sb极紫外多层膜人工晶体单色器及制作方法 |
CN105698928B (zh) * | 2016-02-29 | 2018-04-17 | 苏州宏策光电科技有限公司 | 氮气反应溅射制备CoCr/Ti极紫外多层膜人工晶体单色器及制作方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2250460C3 (de) * | 1972-10-14 | 1981-09-10 | Ibm Deutschland Gmbh, 7000 Stuttgart | Magnetischer Aufzeichnungsträger |
JPS62164205A (ja) * | 1986-01-13 | 1987-07-20 | Hitachi Metals Ltd | 磁気記録媒体 |
US4652499A (en) * | 1986-04-29 | 1987-03-24 | International Business Machines | Magnetic recording medium with a chromium alloy underlayer and a cobalt-based magnetic layer |
JP2513893B2 (ja) * | 1989-04-26 | 1996-07-03 | 日立金属株式会社 | 磁気記録媒体 |
US5162158A (en) * | 1989-07-24 | 1992-11-10 | Magnetic Peripherals Inc. | Low noise magnetic thin film longitudinal media |
US5605733A (en) * | 1992-01-22 | 1997-02-25 | Hitachi, Ltd. | Magnetic recording medium, method for its production, and system for its use |
US5456978A (en) * | 1993-08-03 | 1995-10-10 | Hmt Technology Corporation | Thin-film recording medium with thin metal sublayer |
US5693426A (en) * | 1994-09-29 | 1997-12-02 | Carnegie Mellon University | Magnetic recording medium with B2 structured underlayer and a cobalt-based magnetic layer |
US5506017A (en) * | 1995-06-07 | 1996-04-09 | Komag Incorporated | Method for texturing magnetic media |
-
1997
- 1997-04-22 US US08/844,835 patent/US5993956A/en not_active Expired - Lifetime
-
1998
- 1998-04-22 CN CN98806261A patent/CN1260899A/zh active Pending
- 1998-04-22 KR KR1019997009722A patent/KR20010020160A/ko not_active Application Discontinuation
- 1998-04-22 JP JP54626198A patent/JP2001522504A/ja not_active Ceased
- 1998-04-22 WO PCT/US1998/007984 patent/WO1998048413A1/en not_active Application Discontinuation
- 1998-04-22 EP EP98918504A patent/EP0978121A1/en not_active Withdrawn
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2006030961A1 (en) * | 2004-09-17 | 2006-03-23 | Showa Denko K.K. | Method for manufacturing perpedicular magnetic recording medium, perpendicular magnetic recording medium, and magnetic recording/ reproducing apparatus |
US9928866B2 (en) | 2012-01-19 | 2018-03-27 | Fuji Electric Co., Ltd. | Method for manufacturing magnetic recording medium |
Also Published As
Publication number | Publication date |
---|---|
US5993956A (en) | 1999-11-30 |
EP0978121A1 (en) | 2000-02-09 |
KR20010020160A (ko) | 2001-03-15 |
CN1260899A (zh) | 2000-07-19 |
WO1998048413A1 (en) | 1998-10-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2001522504A (ja) | 磁気記録媒体用マンガン含有層 | |
JP3809418B2 (ja) | 磁気記録媒体及び磁気記録装置 | |
EP1031143B1 (en) | Highly oriented magnetic thin films, recording media, transducers, devices made therefrom and methods of making | |
US6537684B1 (en) | Antiferromagnetically coupled magnetic recording media with boron-free first ferromagnetic film as nucleation layer | |
WO2007116813A1 (ja) | 垂直磁気記録ディスクの製造方法及び垂直磁気記録ディスク | |
JP2005044464A (ja) | 垂直磁気記録媒体 | |
JP3371062B2 (ja) | 磁気記録媒体、その製造方法及び磁気記憶装置 | |
JP2006313584A (ja) | 磁気記録媒体の製造方法 | |
US7521136B1 (en) | Coupling enhancement for medium with anti-ferromagnetic coupling | |
JP2004079148A (ja) | 磁気記録媒体及びその製造方法並びに磁気記録装置 | |
JP2004272958A (ja) | 垂直磁気記録媒体およびその製造方法 | |
US20050164035A1 (en) | Magnetic recording media | |
JP2006185489A (ja) | 磁気記録媒体および磁気記憶装置 | |
JP2006260633A (ja) | 磁気記録媒体および磁気記憶装置 | |
JP2003203330A (ja) | 磁気記録媒体 | |
US7314675B1 (en) | Magnetic media with high Ms magnetic layer | |
JP2002092865A (ja) | 垂直磁気記録媒体 | |
JP4491768B2 (ja) | 垂直磁気記録媒体およびその製造方法 | |
JP4123008B2 (ja) | 垂直磁気記録媒体及びその製造方法 | |
JP2004022082A (ja) | 垂直磁気記録媒体およびその製造方法 | |
JP2007102833A (ja) | 垂直磁気記録媒体 | |
JP4066845B2 (ja) | 磁気記録媒体及びその製造方法 | |
JP2809049B2 (ja) | 磁気記録媒体 | |
JPH09265619A (ja) | 磁気記録媒体、その製造方法及び磁気記憶装置 | |
JP4534347B2 (ja) | 磁気記録媒体およびその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050406 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20050406 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20061003 |
|
A313 | Final decision of rejection without a dissenting response from the applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A313 Effective date: 20070223 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20070403 |