JP2001210685A5 - - Google Patents

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Publication number
JP2001210685A5
JP2001210685A5 JP2000264193A JP2000264193A JP2001210685A5 JP 2001210685 A5 JP2001210685 A5 JP 2001210685A5 JP 2000264193 A JP2000264193 A JP 2000264193A JP 2000264193 A JP2000264193 A JP 2000264193A JP 2001210685 A5 JP2001210685 A5 JP 2001210685A5
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JP
Japan
Prior art keywords
test
semiconductor chip
test circuit
semiconductor wafer
semiconductor
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Pending
Application number
JP2000264193A
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English (en)
Japanese (ja)
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JP2001210685A (ja
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Publication date
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Priority to JP2000264193A priority Critical patent/JP2001210685A/ja
Priority claimed from JP2000264193A external-priority patent/JP2001210685A/ja
Publication of JP2001210685A publication Critical patent/JP2001210685A/ja
Publication of JP2001210685A5 publication Critical patent/JP2001210685A5/ja
Pending legal-status Critical Current

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JP2000264193A 1999-11-19 2000-08-31 テストシステムおよび半導体集積回路装置の製造方法 Pending JP2001210685A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000264193A JP2001210685A (ja) 1999-11-19 2000-08-31 テストシステムおよび半導体集積回路装置の製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11-329281 1999-11-19
JP32928199 1999-11-19
JP2000264193A JP2001210685A (ja) 1999-11-19 2000-08-31 テストシステムおよび半導体集積回路装置の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2004053271A Division JP2004260188A (ja) 2004-02-27 2004-02-27 半導体集積回路装置の製造方法

Publications (2)

Publication Number Publication Date
JP2001210685A JP2001210685A (ja) 2001-08-03
JP2001210685A5 true JP2001210685A5 (enExample) 2005-02-03

Family

ID=26573140

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000264193A Pending JP2001210685A (ja) 1999-11-19 2000-08-31 テストシステムおよび半導体集積回路装置の製造方法

Country Status (1)

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JP (1) JP2001210685A (enExample)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3934434B2 (ja) 2002-02-19 2007-06-20 富士通株式会社 回路の試験装置
KR100465541B1 (ko) * 2002-04-29 2005-01-13 주식회사 하이닉스반도체 멀티 프로빙 패드를 구비한 반도체 테스트 장치
JP4800564B2 (ja) * 2003-06-26 2011-10-26 株式会社日本マイクロニクス プローブカード
US7307433B2 (en) * 2004-04-21 2007-12-11 Formfactor, Inc. Intelligent probe card architecture
US8581610B2 (en) * 2004-04-21 2013-11-12 Charles A Miller Method of designing an application specific probe card test system
TWI274166B (en) * 2004-06-18 2007-02-21 Unitest Inc Semiconductor test apparatus for simultaneously testing plurality of semiconductor devices
US7245134B2 (en) * 2005-01-31 2007-07-17 Formfactor, Inc. Probe card assembly including a programmable device to selectively route signals from channels of a test system controller to probes
JP4322827B2 (ja) 2005-02-09 2009-09-02 エルピーダメモリ株式会社 半導体チップ
JP2006349402A (ja) * 2005-06-14 2006-12-28 Fukuoka Pref Gov Sangyo Kagaku Gijutsu Shinko Zaidan プローブ、多層基板、及び半導体装置
TWI398640B (zh) * 2005-09-19 2013-06-11 Gunsei Kimoto Contact assembly and its LSI wafer inspection device
KR100712561B1 (ko) 2006-08-23 2007-05-02 삼성전자주식회사 웨이퍼 형태의 프로브 카드 및 그 제조방법과 웨이퍼형태의 프로브 카드를 구비한 반도체 검사장치
WO2009118850A1 (ja) * 2008-03-26 2009-10-01 株式会社アドバンテスト プローブウエハ、プローブ装置、および、試験システム
WO2009139070A1 (ja) * 2008-05-16 2009-11-19 株式会社アドバンテスト 製造方法および試験用ウエハユニット
JP5461394B2 (ja) * 2008-05-21 2014-04-02 株式会社アドバンテスト 試験用ウエハユニットおよび試験システム
JP5269897B2 (ja) * 2008-06-02 2013-08-21 株式会社アドバンテスト 試験システムおよび試験用基板ユニット
JP5475674B2 (ja) 2008-10-14 2014-04-16 株式会社アドバンテスト 試験装置
JP5617768B2 (ja) * 2011-06-10 2014-11-05 株式会社デンソー 半導体装置および半導体装置の測定方法
JP2013088288A (ja) * 2011-10-18 2013-05-13 Fujitsu Semiconductor Ltd 検査装置及び検査システム
JP5731417B2 (ja) * 2012-01-18 2015-06-10 東京エレクトロン株式会社 半導体デバイスの検査装置
KR20160110588A (ko) * 2015-03-09 2016-09-22 삼성전기주식회사 반도체 장치 및 그 제조 방법
JP2017129544A (ja) * 2016-01-22 2017-07-27 東京エレクトロン株式会社 基板検査装置及びプログラム
KR102578644B1 (ko) * 2017-08-30 2023-09-13 삼성전자주식회사 반도체 집적회로의 수율 예측 장치, 및 이를 이용한 반도체 장치 제조 방법
CN109994400A (zh) * 2017-12-29 2019-07-09 江苏凯尔生物识别科技有限公司 用于芯片测试的收料装置
US10823787B2 (en) * 2018-06-15 2020-11-03 Nxp B.V. Apparatuses and methods involving self-testing voltage regulation circuits
KR102604010B1 (ko) * 2019-01-22 2023-11-20 주식회사 아도반테스토 온-칩-시스템 테스트 제어기를 사용하는 자동 테스트 장비
CN114076891B (zh) * 2021-11-18 2024-08-30 中大智能科技股份有限公司 一种芯片检测系统

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