JP2001058259A - 半田付け方法及び半田付け装置 - Google Patents
半田付け方法及び半田付け装置Info
- Publication number
- JP2001058259A JP2001058259A JP2000183553A JP2000183553A JP2001058259A JP 2001058259 A JP2001058259 A JP 2001058259A JP 2000183553 A JP2000183553 A JP 2000183553A JP 2000183553 A JP2000183553 A JP 2000183553A JP 2001058259 A JP2001058259 A JP 2001058259A
- Authority
- JP
- Japan
- Prior art keywords
- solder
- chamber
- soldering
- vacuum chamber
- free radical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000183553A JP2001058259A (ja) | 1999-06-18 | 2000-06-19 | 半田付け方法及び半田付け装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17238199 | 1999-06-18 | ||
| JP11-172381 | 1999-06-18 | ||
| JP2000183553A JP2001058259A (ja) | 1999-06-18 | 2000-06-19 | 半田付け方法及び半田付け装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001058259A true JP2001058259A (ja) | 2001-03-06 |
| JP2001058259A5 JP2001058259A5 (enExample) | 2007-08-02 |
Family
ID=26494755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000183553A Pending JP2001058259A (ja) | 1999-06-18 | 2000-06-19 | 半田付け方法及び半田付け装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001058259A (enExample) |
Cited By (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004006818A (ja) * | 2002-04-16 | 2004-01-08 | Tadatomo Suga | リフロー法とソルダペースト |
| US6887319B2 (en) | 2002-04-16 | 2005-05-03 | Senju Metal Industry Co., Ltd. | Residue-free solder paste |
| US6935553B2 (en) | 2002-04-16 | 2005-08-30 | Senju Metal Industry Co., Ltd. | Reflow soldering method |
| JP2005230830A (ja) * | 2004-02-17 | 2005-09-02 | Shinko Seiki Co Ltd | はんだ付け方法 |
| JP2006308748A (ja) * | 2005-04-27 | 2006-11-09 | Olympus Medical Systems Corp | 光学ユニット組立方法 |
| JP2008100235A (ja) * | 2006-10-17 | 2008-05-01 | Kyushu Institute Of Technology | 鉛フリーはんだ合金の処理方法 |
| WO2008155939A1 (ja) * | 2007-06-19 | 2008-12-24 | Tamura Corporation | リフロー装置 |
| JP2010000513A (ja) * | 2008-06-18 | 2010-01-07 | Sharp Corp | 接合構造体の製造方法 |
| GB2466865A (en) * | 2009-01-08 | 2010-07-14 | Fujitsu Ltd | Joining method using lead free solder and reflow apparatus |
| US20130075455A1 (en) * | 2011-09-28 | 2013-03-28 | Renesas Electronics Corporation | Reflow pretreatment apparatus and reflow pretreatment method |
| JP2013206980A (ja) * | 2012-03-27 | 2013-10-07 | Fujitsu Ltd | 部品搭載方法及び部品搭載装置 |
| US8765594B2 (en) | 2010-06-24 | 2014-07-01 | Yoshihiro Kitamura | Method of fabricating semiconductor device allowing smooth bump surface |
| JP2014210279A (ja) * | 2013-04-19 | 2014-11-13 | 昭和電工株式会社 | ろう付け方法及びろう付け装置 |
| JP2015179796A (ja) * | 2014-03-18 | 2015-10-08 | 株式会社坂本電機製作所 | リフロー方法および、その方法に用いるリフロー装置 |
| EP3357629A4 (en) * | 2015-09-30 | 2019-04-17 | Origin Electric Company, Limited | SOLDER PASTE FOR REDUCTION GAS AND METHOD FOR PRODUCING A SOLDERING PRODUCT |
| JP2020055011A (ja) * | 2018-10-01 | 2020-04-09 | 株式会社弘輝 | 接合構造体の製造方法 |
| CN110998813A (zh) * | 2017-08-07 | 2020-04-10 | 波士顿制程技术有限公司 | 热壁无助焊剂焊球处理装置 |
| JP2020064937A (ja) * | 2018-10-16 | 2020-04-23 | トヨタ自動車株式会社 | 半導体装置の製造方法 |
| RU2725443C1 (ru) * | 2019-06-07 | 2020-07-02 | Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" (Госкорпорация "Росатом") | Устройство для пайки свч нагревом |
| CN113133305A (zh) * | 2021-06-03 | 2021-07-16 | 常州井芯半导体设备有限公司 | 配备等离子发生装置的回流焊设备及回流焊方法 |
| CN113385763A (zh) * | 2021-07-14 | 2021-09-14 | 成都共益缘真空设备有限公司 | 一种真空回流焊正负压结合焊接工艺 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63293952A (ja) * | 1987-05-27 | 1988-11-30 | Hitachi Ltd | 半導体素子接続端子形成方法 |
| JPH02190489A (ja) * | 1988-11-30 | 1990-07-26 | Plessey Overseas Plc | 金属表面の清浄化方法 |
| JPH07142020A (ja) * | 1993-11-19 | 1995-06-02 | Rikagaku Kenkyusho | 電子ビーム励起負イオン源及び負イオン発生方法 |
-
2000
- 2000-06-19 JP JP2000183553A patent/JP2001058259A/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63293952A (ja) * | 1987-05-27 | 1988-11-30 | Hitachi Ltd | 半導体素子接続端子形成方法 |
| JPH02190489A (ja) * | 1988-11-30 | 1990-07-26 | Plessey Overseas Plc | 金属表面の清浄化方法 |
| JPH07142020A (ja) * | 1993-11-19 | 1995-06-02 | Rikagaku Kenkyusho | 電子ビーム励起負イオン源及び負イオン発生方法 |
Cited By (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1301173C (zh) * | 2002-04-16 | 2007-02-21 | 须贺唯知 | 回流钎焊方法 |
| US6887319B2 (en) | 2002-04-16 | 2005-05-03 | Senju Metal Industry Co., Ltd. | Residue-free solder paste |
| US6935553B2 (en) | 2002-04-16 | 2005-08-30 | Senju Metal Industry Co., Ltd. | Reflow soldering method |
| JP2004006818A (ja) * | 2002-04-16 | 2004-01-08 | Tadatomo Suga | リフロー法とソルダペースト |
| JP2009111399A (ja) * | 2002-04-16 | 2009-05-21 | Tadatomo Suga | リフロー法 |
| JP2005230830A (ja) * | 2004-02-17 | 2005-09-02 | Shinko Seiki Co Ltd | はんだ付け方法 |
| CN100455394C (zh) * | 2004-02-17 | 2009-01-28 | 神港精机株式会社 | 焊接方法 |
| JP2006308748A (ja) * | 2005-04-27 | 2006-11-09 | Olympus Medical Systems Corp | 光学ユニット組立方法 |
| JP2008100235A (ja) * | 2006-10-17 | 2008-05-01 | Kyushu Institute Of Technology | 鉛フリーはんだ合金の処理方法 |
| WO2008155939A1 (ja) * | 2007-06-19 | 2008-12-24 | Tamura Corporation | リフロー装置 |
| JP2010000513A (ja) * | 2008-06-18 | 2010-01-07 | Sharp Corp | 接合構造体の製造方法 |
| GB2466865A (en) * | 2009-01-08 | 2010-07-14 | Fujitsu Ltd | Joining method using lead free solder and reflow apparatus |
| US7975898B2 (en) | 2009-01-08 | 2011-07-12 | Fujitsu Limited | Joining method and reflow apparatus |
| GB2466865B (en) * | 2009-01-08 | 2014-09-24 | Fujitsu Ltd | Joining method and reflow apparatus |
| US8434658B2 (en) | 2009-01-08 | 2013-05-07 | Fujitsu Limited | Joining method and reflow apparatus |
| US8765594B2 (en) | 2010-06-24 | 2014-07-01 | Yoshihiro Kitamura | Method of fabricating semiconductor device allowing smooth bump surface |
| US20130075455A1 (en) * | 2011-09-28 | 2013-03-28 | Renesas Electronics Corporation | Reflow pretreatment apparatus and reflow pretreatment method |
| JP2013206980A (ja) * | 2012-03-27 | 2013-10-07 | Fujitsu Ltd | 部品搭載方法及び部品搭載装置 |
| JP2014210279A (ja) * | 2013-04-19 | 2014-11-13 | 昭和電工株式会社 | ろう付け方法及びろう付け装置 |
| JP2015179796A (ja) * | 2014-03-18 | 2015-10-08 | 株式会社坂本電機製作所 | リフロー方法および、その方法に用いるリフロー装置 |
| EP3357629A4 (en) * | 2015-09-30 | 2019-04-17 | Origin Electric Company, Limited | SOLDER PASTE FOR REDUCTION GAS AND METHOD FOR PRODUCING A SOLDERING PRODUCT |
| US10610981B2 (en) | 2015-09-30 | 2020-04-07 | Origin Company, Limited | Solder paste for reduction gas, and method for producing soldered product |
| CN110998813A (zh) * | 2017-08-07 | 2020-04-10 | 波士顿制程技术有限公司 | 热壁无助焊剂焊球处理装置 |
| CN110998813B (zh) * | 2017-08-07 | 2023-12-01 | 柏锐科技有限公司 | 热壁无助焊剂焊球处理装置 |
| US11446752B2 (en) | 2018-10-01 | 2022-09-20 | Koki Company Limited | Method for producing joined structure |
| JP2020055011A (ja) * | 2018-10-01 | 2020-04-09 | 株式会社弘輝 | 接合構造体の製造方法 |
| KR20210029820A (ko) * | 2018-10-01 | 2021-03-16 | 가부시키가이샤 코키 | 접합 구조체의 제조 방법 |
| KR102259122B1 (ko) | 2018-10-01 | 2021-06-01 | 가부시키가이샤 코키 | 접합 구조체의 제조 방법 |
| JP2020064937A (ja) * | 2018-10-16 | 2020-04-23 | トヨタ自動車株式会社 | 半導体装置の製造方法 |
| RU2725443C1 (ru) * | 2019-06-07 | 2020-07-02 | Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" (Госкорпорация "Росатом") | Устройство для пайки свч нагревом |
| CN113133305A (zh) * | 2021-06-03 | 2021-07-16 | 常州井芯半导体设备有限公司 | 配备等离子发生装置的回流焊设备及回流焊方法 |
| CN113133305B (zh) * | 2021-06-03 | 2023-11-10 | 常州井芯半导体设备有限公司 | 配备等离子发生装置的回流焊设备及回流焊方法 |
| CN113385763A (zh) * | 2021-07-14 | 2021-09-14 | 成都共益缘真空设备有限公司 | 一种真空回流焊正负压结合焊接工艺 |
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