JP2000317817A5 - - Google Patents

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Publication number
JP2000317817A5
JP2000317817A5 JP1999123511A JP12351199A JP2000317817A5 JP 2000317817 A5 JP2000317817 A5 JP 2000317817A5 JP 1999123511 A JP1999123511 A JP 1999123511A JP 12351199 A JP12351199 A JP 12351199A JP 2000317817 A5 JP2000317817 A5 JP 2000317817A5
Authority
JP
Japan
Prior art keywords
workpiece
polishing pad
work piece
polishing
polished
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1999123511A
Other languages
English (en)
Japanese (ja)
Other versions
JP4169432B2 (ja
JP2000317817A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP12351199A priority Critical patent/JP4169432B2/ja
Priority claimed from JP12351199A external-priority patent/JP4169432B2/ja
Publication of JP2000317817A publication Critical patent/JP2000317817A/ja
Publication of JP2000317817A5 publication Critical patent/JP2000317817A5/ja
Application granted granted Critical
Publication of JP4169432B2 publication Critical patent/JP4169432B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP12351199A 1999-04-30 1999-04-30 被加工物の保持具、研磨装置及び研磨方法 Expired - Fee Related JP4169432B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12351199A JP4169432B2 (ja) 1999-04-30 1999-04-30 被加工物の保持具、研磨装置及び研磨方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12351199A JP4169432B2 (ja) 1999-04-30 1999-04-30 被加工物の保持具、研磨装置及び研磨方法

Publications (3)

Publication Number Publication Date
JP2000317817A JP2000317817A (ja) 2000-11-21
JP2000317817A5 true JP2000317817A5 (ko) 2005-11-24
JP4169432B2 JP4169432B2 (ja) 2008-10-22

Family

ID=14862430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12351199A Expired - Fee Related JP4169432B2 (ja) 1999-04-30 1999-04-30 被加工物の保持具、研磨装置及び研磨方法

Country Status (1)

Country Link
JP (1) JP4169432B2 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5267918B2 (ja) * 2008-07-15 2013-08-21 株式会社ニコン 保持装置および研磨装置
JP2017127938A (ja) * 2016-01-21 2017-07-27 信越半導体株式会社 ウェーハの研磨方法、バックパッドの製造方法、バックパッド、及びそのバックパッドを具備する研磨ヘッド

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