JP4169432B2 - 被加工物の保持具、研磨装置及び研磨方法 - Google Patents
被加工物の保持具、研磨装置及び研磨方法 Download PDFInfo
- Publication number
- JP4169432B2 JP4169432B2 JP12351199A JP12351199A JP4169432B2 JP 4169432 B2 JP4169432 B2 JP 4169432B2 JP 12351199 A JP12351199 A JP 12351199A JP 12351199 A JP12351199 A JP 12351199A JP 4169432 B2 JP4169432 B2 JP 4169432B2
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- workpiece
- polishing pad
- wafer
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12351199A JP4169432B2 (ja) | 1999-04-30 | 1999-04-30 | 被加工物の保持具、研磨装置及び研磨方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12351199A JP4169432B2 (ja) | 1999-04-30 | 1999-04-30 | 被加工物の保持具、研磨装置及び研磨方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2000317817A JP2000317817A (ja) | 2000-11-21 |
JP2000317817A5 JP2000317817A5 (ko) | 2005-11-24 |
JP4169432B2 true JP4169432B2 (ja) | 2008-10-22 |
Family
ID=14862430
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12351199A Expired - Fee Related JP4169432B2 (ja) | 1999-04-30 | 1999-04-30 | 被加工物の保持具、研磨装置及び研磨方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4169432B2 (ko) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5267918B2 (ja) * | 2008-07-15 | 2013-08-21 | 株式会社ニコン | 保持装置および研磨装置 |
JP2017127938A (ja) * | 2016-01-21 | 2017-07-27 | 信越半導体株式会社 | ウェーハの研磨方法、バックパッドの製造方法、バックパッド、及びそのバックパッドを具備する研磨ヘッド |
-
1999
- 1999-04-30 JP JP12351199A patent/JP4169432B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2000317817A (ja) | 2000-11-21 |
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