CN112372509B - 一种将抛光垫的初始状态转变为亲水性的方法和装置 - Google Patents
一种将抛光垫的初始状态转变为亲水性的方法和装置 Download PDFInfo
- Publication number
- CN112372509B CN112372509B CN202011256546.5A CN202011256546A CN112372509B CN 112372509 B CN112372509 B CN 112372509B CN 202011256546 A CN202011256546 A CN 202011256546A CN 112372509 B CN112372509 B CN 112372509B
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- CN
- China
- Prior art keywords
- polishing
- conversion
- wafer
- polishing pad
- pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
- B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
- B24B37/107—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement in a rotary movement only, about an axis being stationary during lapping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011256546.5A CN112372509B (zh) | 2020-11-11 | 2020-11-11 | 一种将抛光垫的初始状态转变为亲水性的方法和装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011256546.5A CN112372509B (zh) | 2020-11-11 | 2020-11-11 | 一种将抛光垫的初始状态转变为亲水性的方法和装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN112372509A CN112372509A (zh) | 2021-02-19 |
CN112372509B true CN112372509B (zh) | 2022-02-25 |
Family
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Family Applications (1)
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CN202011256546.5A Active CN112372509B (zh) | 2020-11-11 | 2020-11-11 | 一种将抛光垫的初始状态转变为亲水性的方法和装置 |
Country Status (1)
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CN (1) | CN112372509B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115056045B (zh) * | 2022-06-30 | 2023-10-20 | 成都泰美克晶体技术有限公司 | 一种晶圆单面抛光装置及方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1316939A (zh) * | 1998-07-10 | 2001-10-10 | 卡伯特微电子公司 | 半导体基材的抛光垫 |
CN1336861A (zh) * | 1999-01-21 | 2002-02-20 | 罗德尔控股公司 | 改进的抛光垫及其抛光方法 |
JP2009253031A (ja) * | 2008-04-07 | 2009-10-29 | Elpida Memory Inc | 化学的機械研磨装置及び化学的機械研磨方法 |
CN104416466A (zh) * | 2013-08-26 | 2015-03-18 | 中芯国际集成电路制造(上海)有限公司 | 一种用于化学机械抛光工艺的抛光垫修整方法 |
CN105390417A (zh) * | 2014-08-26 | 2016-03-09 | 株式会社荏原制作所 | 抛光组件及基板处理装置 |
CN111251163A (zh) * | 2018-11-30 | 2020-06-09 | 有研半导体材料有限公司 | 一种获得亲水性表面的抛光硅片加工方法 |
CN211465947U (zh) * | 2020-05-19 | 2020-09-11 | 山东麦丰新材料科技股份有限公司 | 一种抛光垫、抛光装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6743080B2 (en) * | 2002-07-31 | 2004-06-01 | Seh America, Inc. | Method for seasoning a polishing pad |
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2020
- 2020-11-11 CN CN202011256546.5A patent/CN112372509B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1316939A (zh) * | 1998-07-10 | 2001-10-10 | 卡伯特微电子公司 | 半导体基材的抛光垫 |
CN1336861A (zh) * | 1999-01-21 | 2002-02-20 | 罗德尔控股公司 | 改进的抛光垫及其抛光方法 |
JP2009253031A (ja) * | 2008-04-07 | 2009-10-29 | Elpida Memory Inc | 化学的機械研磨装置及び化学的機械研磨方法 |
CN104416466A (zh) * | 2013-08-26 | 2015-03-18 | 中芯国际集成电路制造(上海)有限公司 | 一种用于化学机械抛光工艺的抛光垫修整方法 |
CN105390417A (zh) * | 2014-08-26 | 2016-03-09 | 株式会社荏原制作所 | 抛光组件及基板处理装置 |
CN111251163A (zh) * | 2018-11-30 | 2020-06-09 | 有研半导体材料有限公司 | 一种获得亲水性表面的抛光硅片加工方法 |
CN211465947U (zh) * | 2020-05-19 | 2020-09-11 | 山东麦丰新材料科技股份有限公司 | 一种抛光垫、抛光装置 |
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CN112372509A (zh) | 2021-02-19 |
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Effective date of registration: 20220805 Address after: Room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi 710065 Patentee after: Xi'an yisiwei Material Technology Co.,Ltd. Patentee after: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. Address before: No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi 710065 Patentee before: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. Patentee before: Xi'an yisiwei Material Technology Co.,Ltd. |
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Address after: Room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi 710065 Patentee after: Xi'an Yisiwei Material Technology Co.,Ltd. Patentee after: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. Address before: Room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi 710065 Patentee before: Xi'an yisiwei Material Technology Co.,Ltd. Patentee before: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. |