JP2000121192A - 極低温冷凍装置 - Google Patents

極低温冷凍装置

Info

Publication number
JP2000121192A
JP2000121192A JP29950898A JP29950898A JP2000121192A JP 2000121192 A JP2000121192 A JP 2000121192A JP 29950898 A JP29950898 A JP 29950898A JP 29950898 A JP29950898 A JP 29950898A JP 2000121192 A JP2000121192 A JP 2000121192A
Authority
JP
Japan
Prior art keywords
frequency
conversion means
signal
cooled
refrigerator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29950898A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000121192A5 (enExample
Inventor
Kenji Fujiwara
健治 藤原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daikin Industries Ltd
Original Assignee
Daikin Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daikin Industries Ltd filed Critical Daikin Industries Ltd
Priority to JP29950898A priority Critical patent/JP2000121192A/ja
Publication of JP2000121192A publication Critical patent/JP2000121192A/ja
Publication of JP2000121192A5 publication Critical patent/JP2000121192A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP29950898A 1998-10-21 1998-10-21 極低温冷凍装置 Pending JP2000121192A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29950898A JP2000121192A (ja) 1998-10-21 1998-10-21 極低温冷凍装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29950898A JP2000121192A (ja) 1998-10-21 1998-10-21 極低温冷凍装置

Publications (2)

Publication Number Publication Date
JP2000121192A true JP2000121192A (ja) 2000-04-28
JP2000121192A5 JP2000121192A5 (enExample) 2005-09-22

Family

ID=17873500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29950898A Pending JP2000121192A (ja) 1998-10-21 1998-10-21 極低温冷凍装置

Country Status (1)

Country Link
JP (1) JP2000121192A (enExample)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002106991A (ja) * 2000-09-29 2002-04-10 Sanyo Electric Co Ltd ヘリウム圧縮機ユニット
JP2003279185A (ja) * 2002-03-25 2003-10-02 Aisin Seiki Co Ltd 極低温冷凍機
WO2004018947A1 (ja) * 2002-08-20 2004-03-04 Sumitomo Heavy Industries, Ltd. 極低温冷凍機
JP2004085048A (ja) * 2002-08-26 2004-03-18 Sumitomo Heavy Ind Ltd 極低温冷凍装置、及び、その運転方法
JP2005061707A (ja) * 2003-08-11 2005-03-10 Chubu Electric Power Co Inc 電力貯蔵装置
JP2005160277A (ja) * 2003-11-28 2005-06-16 Sumitomo Heavy Ind Ltd 動力装置とそれを用いた冷凍機、応用機器
JP2007007393A (ja) * 2005-06-27 2007-01-18 General Electric Co <Ge> 冷却器ガス流振動周波数を調節することによってクライオクーラを制御する装置及び方法
JP2008518181A (ja) * 2004-10-26 2008-05-29 レスピロニックス イン−エックス， インコーポレイテッド 液化ガスおよびガスの貯蔵
KR101175938B1 (ko) 2012-07-23 2012-08-22 한국항공우주연구원 부하변동에 따른 가변압축 극저온 냉동기
JP2014025625A (ja) * 2012-07-26 2014-02-06 Ulvac Japan Ltd 減圧システム
JP2018179316A (ja) * 2017-04-04 2018-11-15 株式会社東芝 極低温装置および極低温装置の運転方法
US10288052B2 (en) 2001-07-20 2019-05-14 Brooks Automation, Inc. Helium management control system
WO2019146215A1 (ja) * 2018-01-29 2019-08-01 住友重機械工業株式会社 極低温冷却システム
WO2019172144A1 (ja) * 2018-03-07 2019-09-12 住友重機械工業株式会社 極低温冷凍機および極低温冷凍機の配管システム
KR102033991B1 (ko) * 2019-04-04 2019-11-08 주식회사 휘온 크라이오 펌프시스템용 헬륨 컴프레서의 전력 절감 장치 및 이를 이용한 전력 절감 방법
WO2023189805A1 (ja) * 2022-03-28 2023-10-05 住友重機械工業株式会社 極低温冷凍機の運転方法

Cited By (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002106991A (ja) * 2000-09-29 2002-04-10 Sanyo Electric Co Ltd ヘリウム圧縮機ユニット
US10288052B2 (en) 2001-07-20 2019-05-14 Brooks Automation, Inc. Helium management control system
JP2003279185A (ja) * 2002-03-25 2003-10-02 Aisin Seiki Co Ltd 極低温冷凍機
DE10393146B4 (de) * 2002-08-20 2015-07-02 Sumitomo Heavy Industries, Ltd. Tieftemperaturkühlvorrichtung
WO2004018947A1 (ja) * 2002-08-20 2004-03-04 Sumitomo Heavy Industries, Ltd. 極低温冷凍機
US7555911B2 (en) 2002-08-20 2009-07-07 Sumitomo Heavy Industries, Ltd. Cryogenic refrigerator
JP2004085048A (ja) * 2002-08-26 2004-03-18 Sumitomo Heavy Ind Ltd 極低温冷凍装置、及び、その運転方法
JP2005061707A (ja) * 2003-08-11 2005-03-10 Chubu Electric Power Co Inc 電力貯蔵装置
JP2005160277A (ja) * 2003-11-28 2005-06-16 Sumitomo Heavy Ind Ltd 動力装置とそれを用いた冷凍機、応用機器
JP2008518181A (ja) * 2004-10-26 2008-05-29 レスピロニックス イン−エックス， インコーポレイテッド 液化ガスおよびガスの貯蔵
JP2007007393A (ja) * 2005-06-27 2007-01-18 General Electric Co <Ge> 冷却器ガス流振動周波数を調節することによってクライオクーラを制御する装置及び方法
KR101175938B1 (ko) 2012-07-23 2012-08-22 한국항공우주연구원 부하변동에 따른 가변압축 극저온 냉동기
JP2014025625A (ja) * 2012-07-26 2014-02-06 Ulvac Japan Ltd 減圧システム
JP2018179316A (ja) * 2017-04-04 2018-11-15 株式会社東芝 極低温装置および極低温装置の運転方法
WO2019146215A1 (ja) * 2018-01-29 2019-08-01 住友重機械工業株式会社 極低温冷却システム
JP2019132452A (ja) * 2018-01-29 2019-08-08 住友重機械工業株式会社 極低温冷却システム
CN111656108A (zh) * 2018-01-29 2020-09-11 住友重机械工业株式会社 超低温冷却系统
CN111656108B (zh) * 2018-01-29 2021-10-12 住友重机械工业株式会社 超低温冷却系统
US11525607B2 (en) 2018-01-29 2022-12-13 Sumitomo Heavy Industries, Ltd. Cryogenic cooling system
WO2019172144A1 (ja) * 2018-03-07 2019-09-12 住友重機械工業株式会社 極低温冷凍機および極低温冷凍機の配管システム
JP2019158160A (ja) * 2018-03-07 2019-09-19 住友重機械工業株式会社 極低温冷凍機および極低温冷凍機の配管システム
US11262105B2 (en) 2018-03-07 2022-03-01 Sumitomo Heavy Industries, Ltd. Cryocooler and cryocooler pipe system
KR102033991B1 (ko) * 2019-04-04 2019-11-08 주식회사 휘온 크라이오 펌프시스템용 헬륨 컴프레서의 전력 절감 장치 및 이를 이용한 전력 절감 방법
WO2023189805A1 (ja) * 2022-03-28 2023-10-05 住友重機械工業株式会社 極低温冷凍機の運転方法

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