IT994153B - Mordenzatura di semiconduttori del gruppo iii v - Google Patents

Mordenzatura di semiconduttori del gruppo iii v

Info

Publication number
IT994153B
IT994153B IT51988/73A IT5198873A IT994153B IT 994153 B IT994153 B IT 994153B IT 51988/73 A IT51988/73 A IT 51988/73A IT 5198873 A IT5198873 A IT 5198873A IT 994153 B IT994153 B IT 994153B
Authority
IT
Italy
Prior art keywords
molar
etchant
group iii
concentration
etching
Prior art date
Application number
IT51988/73A
Other languages
English (en)
Italian (it)
Original Assignee
Western Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co filed Critical Western Electric Co
Application granted granted Critical
Publication of IT994153B publication Critical patent/IT994153B/it

Links

Classifications

    • H10P50/646—
    • H10W72/00—
    • H10W72/60—

Landscapes

  • Weting (AREA)
  • ing And Chemical Polishing (AREA)
IT51988/73A 1972-08-15 1973-08-13 Mordenzatura di semiconduttori del gruppo iii v IT994153B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/280,784 US3947304A (en) 1972-08-15 1972-08-15 Etching of group III-V semiconductors

Publications (1)

Publication Number Publication Date
IT994153B true IT994153B (it) 1975-10-20

Family

ID=23074635

Family Applications (1)

Application Number Title Priority Date Filing Date
IT51988/73A IT994153B (it) 1972-08-15 1973-08-13 Mordenzatura di semiconduttori del gruppo iii v

Country Status (9)

Country Link
US (1) US3947304A (en:Method)
JP (1) JPS525231B2 (en:Method)
BE (1) BE803610A (en:Method)
CA (1) CA988817A (en:Method)
FR (1) FR2196604A5 (en:Method)
GB (1) GB1401114A (en:Method)
IT (1) IT994153B (en:Method)
NL (1) NL176412C (en:Method)
SE (1) SE387198B (en:Method)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5631320A (en) * 1979-08-22 1981-03-30 Mitsubishi Electric Corp Grounddfault current detector
JPS5631321A (en) * 1979-08-22 1981-03-30 Mitsubishi Electric Corp Grounddfault current detector
JPS5635626A (en) * 1979-08-24 1981-04-08 Mitsubishi Electric Corp Dc leakage breaker
JPS5635627A (en) * 1979-08-24 1981-04-08 Mitsubishi Electric Corp Dc leakage breaker
US4354898A (en) * 1981-06-24 1982-10-19 Bell Telephone Laboratories, Incorporated Method of preferentially etching optically flat mirror facets in InGaAsP/InP heterostructures
US4765865A (en) * 1987-05-04 1988-08-23 Ford Motor Company Silicon etch rate enhancement
US20230230897A1 (en) * 2022-01-17 2023-07-20 Amulaire Thermal Technology, Inc. Automobile heat dissipation device having modified surface and surface modification and joint method for automobile heat dissipation device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3674580A (en) * 1970-05-08 1972-07-04 Bell Telephone Labor Inc Zirconium mask for semiconductor fabricated using alkaline etchants
US3716429A (en) * 1970-06-18 1973-02-13 Rca Corp Method of making semiconductor devices

Also Published As

Publication number Publication date
FR2196604A5 (en:Method) 1974-03-15
SE387198B (sv) 1976-08-30
BE803610A (fr) 1973-12-03
CA988817A (en) 1976-05-11
GB1401114A (en) 1975-07-16
NL176412B (nl) 1984-11-01
NL176412C (nl) 1985-04-01
JPS525231B2 (en:Method) 1977-02-10
NL7311019A (en:Method) 1974-02-19
US3947304A (en) 1976-03-30
DE2340479B2 (de) 1977-04-14
DE2340479A1 (de) 1974-03-14
JPS4960478A (en:Method) 1974-06-12

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