IT8822848A0 - Matrice di celle di memoria eprom con struttura a tovaglia con migliorato rapporto capacitivo e processo per la sua fabbricazione - Google Patents
Matrice di celle di memoria eprom con struttura a tovaglia con migliorato rapporto capacitivo e processo per la sua fabbricazioneInfo
- Publication number
- IT8822848A0 IT8822848A0 IT8822848A IT2284888A IT8822848A0 IT 8822848 A0 IT8822848 A0 IT 8822848A0 IT 8822848 A IT8822848 A IT 8822848A IT 2284888 A IT2284888 A IT 2284888A IT 8822848 A0 IT8822848 A0 IT 8822848A0
- Authority
- IT
- Italy
- Prior art keywords
- manufacturing
- memory cell
- eprom memory
- cell matrix
- improved capacitive
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000011159 matrix material Substances 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT8822848A IT1227989B (it) | 1988-12-05 | 1988-12-05 | Matrice di celle di memoria eprom con struttura a tovaglia con migliorato rapporto capacitivo e processo per la sua fabbricazione |
EP89202987A EP0372614B1 (en) | 1988-12-05 | 1989-11-24 | Matrix of EPROM memory cells with a tablecloth structure having an improved capacitative ratio and a process for its manufacture |
DE68923067T DE68923067T2 (de) | 1988-12-05 | 1989-11-24 | EPROM-Speichermatrix mit netzartiger Struktur, mit verbessertem kapazitiven Verhalten und Verfahren zu deren Herstellung. |
JP1313555A JP2696411B2 (ja) | 1988-12-05 | 1989-12-04 | Eprom記憶セルのマトリックス構造を製造する方法 |
US07/759,203 US5160986A (en) | 1988-12-05 | 1991-09-11 | Matrix of EPROM memory cells with a tablecloth structure having an improved capacitative ratio and a process for its manufacture |
US07/929,418 US5296396A (en) | 1988-12-05 | 1992-08-14 | Matrix of EPROM memory cells with a tablecloth structure having an improved capacitative ratio and a process for its manufacture |
US08/191,667 US5475250A (en) | 1988-12-05 | 1994-02-04 | Matrix of EPROM memory cells with a tablecloth structure having an improved capacitive ratio and a process for its manufacture |
US08/521,469 US5723351A (en) | 1988-12-05 | 1995-08-30 | Method of making matrix of EPROM memory cell with a tablecloth structure having an improved capacitative ratio |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT8822848A IT1227989B (it) | 1988-12-05 | 1988-12-05 | Matrice di celle di memoria eprom con struttura a tovaglia con migliorato rapporto capacitivo e processo per la sua fabbricazione |
Publications (2)
Publication Number | Publication Date |
---|---|
IT8822848A0 true IT8822848A0 (it) | 1988-12-05 |
IT1227989B IT1227989B (it) | 1991-05-20 |
Family
ID=11201126
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT8822848A IT1227989B (it) | 1988-12-05 | 1988-12-05 | Matrice di celle di memoria eprom con struttura a tovaglia con migliorato rapporto capacitivo e processo per la sua fabbricazione |
Country Status (5)
Country | Link |
---|---|
US (1) | US5160986A (it) |
EP (1) | EP0372614B1 (it) |
JP (1) | JP2696411B2 (it) |
DE (1) | DE68923067T2 (it) |
IT (1) | IT1227989B (it) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1236601B (it) * | 1989-12-22 | 1993-03-18 | Sgs Thomson Microelectronics | Dispositivo a semiconduttore integrato di tipo eprom con connessioni metalliche di source e procedimento per la sua fabbricazione. |
US5364806A (en) * | 1991-08-29 | 1994-11-15 | Hyundai Electronics Industries Co., Ltd. | Method of making a self-aligned dual-bit split gate (DSG) flash EEPROM cell |
KR950002948B1 (ko) * | 1991-10-10 | 1995-03-28 | 삼성전자 주식회사 | 반도체 장치의 금속층간 절연막 형성방법 |
US5470772A (en) * | 1991-11-06 | 1995-11-28 | Intel Corporation | Silicidation method for contactless EPROM related devices |
US5272117A (en) * | 1992-12-07 | 1993-12-21 | Motorola, Inc. | Method for planarizing a layer of material |
US5427967A (en) * | 1993-03-11 | 1995-06-27 | National Semiconductor Corporation | Technique for making memory cells in a way which suppresses electrically conductive stringers |
TW299475B (it) * | 1993-03-30 | 1997-03-01 | Siemens Ag | |
US5543343A (en) * | 1993-12-22 | 1996-08-06 | Sgs-Thomson Microelectronics, Inc. | Method fabricating an integrated circuit |
US5650960A (en) * | 1994-05-18 | 1997-07-22 | United Microelectronics Corporation | Polysilicon programming memory cell |
EP0957521A1 (en) | 1998-05-11 | 1999-11-17 | STMicroelectronics S.r.l. | Matrix of memory cells fabricated by means of a self-aligned source process, comprising ROM memory cells, and related manufacturing process |
US6936883B2 (en) * | 2003-04-07 | 2005-08-30 | Silicon Storage Technology, Inc. | Bi-directional read/program non-volatile floating gate memory cell and array thereof, and method of formation |
US7190018B2 (en) | 2003-04-07 | 2007-03-13 | Silicon Storage Technology, Inc. | Bi-directional read/program non-volatile floating gate memory cell with independent controllable control gates, and array thereof, and method of formation |
TW200601461A (en) * | 2004-03-09 | 2006-01-01 | Silicon Storage Tech Inc | Buried bit line non-volatile floating gate memory cell with independent controllable control gate in a trench, and array thereof, and method of formation |
US20070166903A1 (en) * | 2006-01-17 | 2007-07-19 | Bohumil Lojek | Semiconductor structures formed by stepperless manufacturing |
US20070166971A1 (en) * | 2006-01-17 | 2007-07-19 | Atmel Corporation | Manufacturing of silicon structures smaller than optical resolution limits |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5519851A (en) * | 1978-07-31 | 1980-02-12 | Hitachi Ltd | Manufacture of non-volatile memories |
US4258466A (en) * | 1978-11-02 | 1981-03-31 | Texas Instruments Incorporated | High density electrically programmable ROM |
US4422092A (en) * | 1979-09-17 | 1983-12-20 | Texas Instruments Incorporated | High coupling ratio electrically programmable ROM |
US4334347A (en) * | 1979-10-19 | 1982-06-15 | Rca Corporation | Method of forming an improved gate member for a gate injected floating gate memory device |
US4253106A (en) * | 1979-10-19 | 1981-02-24 | Rca Corporation | Gate injected floating gate memory device |
US4387447A (en) * | 1980-02-04 | 1983-06-07 | Texas Instruments Incorporated | Column and ground select sequence in electrically programmable memory |
JPS5743470A (en) * | 1980-08-29 | 1982-03-11 | Fujitsu Ltd | Semiconductor device |
JPS5836508B2 (ja) * | 1980-12-25 | 1983-08-09 | 富士通株式会社 | 半導体装置の製造方法 |
US4437174A (en) * | 1981-01-19 | 1984-03-13 | Tokyo Shibaura Denki Kabushiki Kaisha | Semiconductor memory device |
US4423491A (en) * | 1981-11-23 | 1983-12-27 | Fairchild Camera & Instrument Corp. | Self-refreshing memory cell |
US4490900A (en) * | 1982-01-29 | 1985-01-01 | Seeq Technology, Inc. | Method of fabricating an MOS memory array having electrically-programmable and electrically-erasable storage devices incorporated therein |
IT1213241B (it) * | 1984-11-07 | 1989-12-14 | Ates Componenti Elettron | Matrice di memoria eprom con celle elementari simmetriche mos e suo metodo di scrittura. |
US4698787A (en) * | 1984-11-21 | 1987-10-06 | Exel Microelectronics, Inc. | Single transistor electrically programmable memory device and method |
JPH0762960B2 (ja) * | 1984-12-28 | 1995-07-05 | 日本電気株式会社 | 半導体回路 |
JPS61222159A (ja) * | 1985-01-30 | 1986-10-02 | テキサス インスツルメンツ インコ−ポレイテツド | 電気的にプログラム可能なメモリ・セル |
US4597060A (en) * | 1985-05-01 | 1986-06-24 | Texas Instruments Incorporated | EPROM array and method for fabricating |
JPS62163376A (ja) * | 1986-01-14 | 1987-07-20 | Fujitsu Ltd | 半導体記憶装置の製造方法 |
US4855800A (en) * | 1986-03-27 | 1989-08-08 | Texas Instruments Incorporated | EPROM with increased floating gate/control gate coupling |
US4749443A (en) * | 1986-12-04 | 1988-06-07 | Texas Instruments Incorporated | Sidewall oxide to reduce filaments |
JPS63160097A (ja) * | 1986-12-24 | 1988-07-02 | Toshiba Corp | 半導体不揮発性メモリ |
US4829351A (en) * | 1987-03-16 | 1989-05-09 | Motorola, Inc. | Polysilicon pattern for a floating gate memory |
US4905062A (en) * | 1987-11-19 | 1990-02-27 | Texas Instruments Incorporated | Planar famos transistor with trench isolation |
JPH0247868A (ja) * | 1988-08-10 | 1990-02-16 | Fujitsu Ltd | 不揮発性半導体記憶装置 |
US5023680A (en) * | 1988-11-10 | 1991-06-11 | Texas Instruments Incorporated | Floating-gate memory array with silicided buried bitlines and with single-step-defined floating gates |
EP0368097A3 (en) * | 1988-11-10 | 1992-04-29 | Texas Instruments Incorporated | A cross-point contact-free floating-gate memory array with silicided buried bitlines |
-
1988
- 1988-12-05 IT IT8822848A patent/IT1227989B/it active
-
1989
- 1989-11-24 DE DE68923067T patent/DE68923067T2/de not_active Expired - Fee Related
- 1989-11-24 EP EP89202987A patent/EP0372614B1/en not_active Expired - Lifetime
- 1989-12-04 JP JP1313555A patent/JP2696411B2/ja not_active Expired - Lifetime
-
1991
- 1991-09-11 US US07/759,203 patent/US5160986A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0372614B1 (en) | 1995-06-14 |
IT1227989B (it) | 1991-05-20 |
JP2696411B2 (ja) | 1998-01-14 |
DE68923067D1 (de) | 1995-07-20 |
US5160986A (en) | 1992-11-03 |
DE68923067T2 (de) | 1996-02-22 |
EP0372614A1 (en) | 1990-06-13 |
JPH02213163A (ja) | 1990-08-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19961227 |