IT1402434B1 - Struttura di rilevamento dell'allineamento di una sonda atta a testare circuiti integrati - Google Patents

Struttura di rilevamento dell'allineamento di una sonda atta a testare circuiti integrati

Info

Publication number
IT1402434B1
IT1402434B1 ITVI2010A000159A ITVI20100159A IT1402434B1 IT 1402434 B1 IT1402434 B1 IT 1402434B1 IT VI2010A000159 A ITVI2010A000159 A IT VI2010A000159A IT VI20100159 A ITVI20100159 A IT VI20100159A IT 1402434 B1 IT1402434 B1 IT 1402434B1
Authority
IT
Italy
Prior art keywords
probe
integrated circuits
alignment structure
testing integrated
sensing alignment
Prior art date
Application number
ITVI2010A000159A
Other languages
English (en)
Inventor
Alberto Pagani
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to ITVI2010A000159A priority Critical patent/IT1402434B1/it
Priority to US13/155,623 priority patent/US9134367B2/en
Publication of ITVI20100159A1 publication Critical patent/ITVI20100159A1/it
Application granted granted Critical
Publication of IT1402434B1 publication Critical patent/IT1402434B1/it
Priority to US14/754,906 priority patent/US9880219B2/en
Priority to US15/848,996 priority patent/US10267849B2/en
Priority to US16/296,052 priority patent/US10746788B2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12Q—MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
    • C12Q1/00—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06794—Devices for sensing when probes are in contact, or in position to contact, with measured object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
    • H01L22/34—Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12Q—MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
    • C12Q2304/00—Chemical means of detecting microorganisms
    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12Q—MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
    • C12Q2326/00—Chromogens for determinations of oxidoreductase enzymes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R11/00—Electromechanical arrangements for measuring time integral of electric power or current, e.g. of consumption
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Proteomics, Peptides & Aminoacids (AREA)
  • Wood Science & Technology (AREA)
  • Zoology (AREA)
  • Automation & Control Theory (AREA)
  • Power Engineering (AREA)
  • Immunology (AREA)
  • Biophysics (AREA)
  • General Health & Medical Sciences (AREA)
  • Genetics & Genomics (AREA)
  • Molecular Biology (AREA)
  • Microbiology (AREA)
  • Analytical Chemistry (AREA)
  • Biotechnology (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Biochemistry (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Semiconductor Integrated Circuits (AREA)
ITVI2010A000159A 2010-06-10 2010-06-10 Struttura di rilevamento dell'allineamento di una sonda atta a testare circuiti integrati IT1402434B1 (it)

Priority Applications (5)

Application Number Priority Date Filing Date Title
ITVI2010A000159A IT1402434B1 (it) 2010-06-10 2010-06-10 Struttura di rilevamento dell'allineamento di una sonda atta a testare circuiti integrati
US13/155,623 US9134367B2 (en) 2010-06-10 2011-06-08 Sensing structure of alignment of a probe for testing integrated circuits
US14/754,906 US9880219B2 (en) 2010-06-10 2015-06-30 Sensing structure of alignment of a probe for testing integrated circuits
US15/848,996 US10267849B2 (en) 2010-06-10 2017-12-20 Sensing structure of alignment of a probe for testing integrated circuits
US16/296,052 US10746788B2 (en) 2010-06-10 2019-03-07 Sensing structure of alignment of a probe for testing integrated circuits

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITVI2010A000159A IT1402434B1 (it) 2010-06-10 2010-06-10 Struttura di rilevamento dell'allineamento di una sonda atta a testare circuiti integrati

Publications (2)

Publication Number Publication Date
ITVI20100159A1 ITVI20100159A1 (it) 2011-12-11
IT1402434B1 true IT1402434B1 (it) 2013-09-04

Family

ID=43513875

Family Applications (1)

Application Number Title Priority Date Filing Date
ITVI2010A000159A IT1402434B1 (it) 2010-06-10 2010-06-10 Struttura di rilevamento dell'allineamento di una sonda atta a testare circuiti integrati

Country Status (2)

Country Link
US (4) US9134367B2 (it)
IT (1) IT1402434B1 (it)

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US9110129B1 (en) 2010-11-17 2015-08-18 Michael Ames Test fixture utilizing a docking station and interchangeable cassettes and method of use
US8633721B1 (en) * 2010-11-17 2014-01-21 Michael Ames Test fixture utilizing a docking station and interchangeable cassettes
US9562943B2 (en) * 2012-11-19 2017-02-07 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer temperature sensing methods and related semiconductor wafer
KR20140128620A (ko) * 2013-04-29 2014-11-06 에스케이하이닉스 주식회사 테스트 패드의 미스얼라인 검출 장치
US20150084659A1 (en) * 2013-09-20 2015-03-26 Infineon Technologies Ag Contact arrangements and methods for detecting incorrect mechanical contacting of contact structures
US10161962B2 (en) 2014-06-06 2018-12-25 Advantest Corporation Universal test cell
KR20150046476A (ko) * 2013-10-22 2015-04-30 삼성전자주식회사 반도체 장치, 반도체 장치의 테스트 구조 및 반도체 장치의 테스트 방법
KR102184697B1 (ko) * 2014-02-20 2020-12-01 에스케이하이닉스 주식회사 반도체 장치
JP6339834B2 (ja) * 2014-03-27 2018-06-06 東京エレクトロン株式会社 基板検査装置
US9618574B2 (en) 2014-06-06 2017-04-11 Advantest Corporation Controlling automated testing of devices
US9618570B2 (en) 2014-06-06 2017-04-11 Advantest Corporation Multi-configurable testing module for automated testing of a device
US9638749B2 (en) 2014-06-06 2017-05-02 Advantest Corporation Supporting automated testing of devices in a test floor system
US9678148B2 (en) 2014-06-06 2017-06-13 Advantest Corporation Customizable tester having testing modules for automated testing of devices
KR20160076219A (ko) * 2014-12-22 2016-06-30 에스케이하이닉스 주식회사 얼라인먼트 검사 장치 및 이를 포함하는 반도체 집적 회로 장치
KR102577263B1 (ko) * 2015-10-08 2023-09-12 삼성전자주식회사 반도체 장치
US9570446B1 (en) * 2015-10-08 2017-02-14 Samsung Electronics Co., Ltd. Semiconductor device
KR102600623B1 (ko) * 2017-02-08 2023-11-08 삼성전자주식회사 프로브 카드 어셈블리
CN108663648A (zh) * 2017-03-27 2018-10-16 富泰华工业（深圳）有限公司 调校探针位置的测试板及测试方法
WO2019217842A2 (en) * 2018-05-10 2019-11-14 University Of Virginia Patent Foundation System and method for integrating diode sensors on micromachined wafer probes
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JP2023035702A (ja) * 2021-09-01 2023-03-13 富士電機株式会社 試験方法

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Also Published As

Publication number Publication date
US9880219B2 (en) 2018-01-30
US20120068725A1 (en) 2012-03-22
US10746788B2 (en) 2020-08-18
US9134367B2 (en) 2015-09-15
ITVI20100159A1 (it) 2011-12-11
US20190204381A1 (en) 2019-07-04
US20180113168A1 (en) 2018-04-26
US20150301106A1 (en) 2015-10-22
US10267849B2 (en) 2019-04-23

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