IT1314142B1 - Dispositivo di memoria non volatile e relativo processo difabbricazione - Google Patents

Dispositivo di memoria non volatile e relativo processo difabbricazione

Info

Publication number
IT1314142B1
IT1314142B1 IT1999MI002650A ITMI992650A IT1314142B1 IT 1314142 B1 IT1314142 B1 IT 1314142B1 IT 1999MI002650 A IT1999MI002650 A IT 1999MI002650A IT MI992650 A ITMI992650 A IT MI992650A IT 1314142 B1 IT1314142 B1 IT 1314142B1
Authority
IT
Italy
Prior art keywords
memory device
manufacturing process
volatile memory
related manufacturing
volatile
Prior art date
Application number
IT1999MI002650A
Other languages
English (en)
Inventor
Alessandra Foraboschi
Luca Zanotti
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to IT1999MI002650A priority Critical patent/IT1314142B1/it
Publication of ITMI992650A0 publication Critical patent/ITMI992650A0/it
Priority to US09/731,065 priority patent/US20010004119A1/en
Publication of ITMI992650A1 publication Critical patent/ITMI992650A1/it
Application granted granted Critical
Publication of IT1314142B1 publication Critical patent/IT1314142B1/it

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3157Partial encapsulation or coating
    • H01L23/3171Partial encapsulation or coating the coating being directly applied to the semiconductor body, e.g. passivation layer
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/417Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
    • H01L29/41725Source or drain electrodes for field effect devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/423Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
    • H01L29/42312Gate electrodes for field effect devices
    • H01L29/42316Gate electrodes for field effect devices for field-effect transistors
    • H01L29/4232Gate electrodes for field effect devices for field-effect transistors with insulated gate
    • H01L29/42324Gate electrodes for transistors with a floating gate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007Multistep manufacturing processes
    • H01L29/66075Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409Unipolar field-effect transistors
    • H01L29/66477Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/66825Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a floating gate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B41/00Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/30Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Stored Programmes (AREA)
  • Glass Compositions (AREA)
  • Document Processing Apparatus (AREA)
  • Semiconductor Memories (AREA)
  • Formation Of Insulating Films (AREA)
IT1999MI002650A 1999-12-20 1999-12-20 Dispositivo di memoria non volatile e relativo processo difabbricazione IT1314142B1 (it)

Priority Applications (2)

Application Number Priority Date Filing Date Title
IT1999MI002650A IT1314142B1 (it) 1999-12-20 1999-12-20 Dispositivo di memoria non volatile e relativo processo difabbricazione
US09/731,065 US20010004119A1 (en) 1999-12-20 2000-12-06 Non-volatile memory device and manufacturing process thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT1999MI002650A IT1314142B1 (it) 1999-12-20 1999-12-20 Dispositivo di memoria non volatile e relativo processo difabbricazione

Publications (3)

Publication Number Publication Date
ITMI992650A0 ITMI992650A0 (it) 1999-12-20
ITMI992650A1 ITMI992650A1 (it) 2001-06-20
IT1314142B1 true IT1314142B1 (it) 2002-12-04

Family

ID=11384150

Family Applications (1)

Application Number Title Priority Date Filing Date
IT1999MI002650A IT1314142B1 (it) 1999-12-20 1999-12-20 Dispositivo di memoria non volatile e relativo processo difabbricazione

Country Status (2)

Country Link
US (1) US20010004119A1 (it)
IT (1) IT1314142B1 (it)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006173479A (ja) * 2004-12-17 2006-06-29 Sharp Corp 半導体装置の製造方法
US10777561B2 (en) * 2019-01-28 2020-09-15 Micron Technology, Inc. Semiconductor structure formation

Also Published As

Publication number Publication date
ITMI992650A1 (it) 2001-06-20
ITMI992650A0 (it) 1999-12-20
US20010004119A1 (en) 2001-06-21

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