IT1247438B - Dispositivo a semiconduttore avente well (pozzo) retrogrado e well (pozzo) diffuso e procedimento per la sua fabbricazione - Google Patents
Dispositivo a semiconduttore avente well (pozzo) retrogrado e well (pozzo) diffuso e procedimento per la sua fabbricazioneInfo
- Publication number
- IT1247438B IT1247438B ITMI911175A ITMI911175A IT1247438B IT 1247438 B IT1247438 B IT 1247438B IT MI911175 A ITMI911175 A IT MI911175A IT MI911175 A ITMI911175 A IT MI911175A IT 1247438 B IT1247438 B IT 1247438B
- Authority
- IT
- Italy
- Prior art keywords
- well
- diffusion type
- inversion
- retrograde
- diffused
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 238000009792 diffusion process Methods 0.000 abstract 5
- 239000012535 impurity Substances 0.000 abstract 2
- 239000011159 matrix material Substances 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 239000007943 implant Substances 0.000 abstract 1
- 230000010354 integration Effects 0.000 abstract 1
- 238000002955 isolation Methods 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N69/00—Integrated devices, or assemblies of multiple devices, comprising at least one superconducting element covered by group H10N60/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823892—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the wells or tubs, e.g. twin tubs, high energy well implants, buried implanted layers for lateral isolation [BILLI]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76202—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO
- H01L21/76221—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using a local oxidation of silicon, e.g. LOCOS, SWAMI, SILO with a plurality of successive local oxidation steps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823493—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the wells or tubs, e.g. twin tubs, high energy well implants, buried implanted layers for lateral isolation [BILLI]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
- H01L27/085—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only
- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
- H01L27/092—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors
- H01L27/0928—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate complementary MIS field-effect transistors comprising both N- and P- wells in the substrate, e.g. twin-tub
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/105—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including field-effect components
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Semiconductor Memories (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Element Separation (AREA)
Abstract
Una DRAM è formata su un substrato di silicio (1) avente un well a retrocessione o inversione (4, 5) ed un well (2, 3) del tipo a diffusione. Il well a retrocessione ha un profilo di concentrazione delle impurità che è impostato in passi mediante una pluralità di impianti ionici. Il well del tipo a diffusione ha un profilo di concentrazione delle impurità che varia in modo monotono mediante diffusione termica. Una matrice di celle di memoria è formata nella regione del well ad inversione. Un circuito periferico è formato nella regione del well del tipo a diffusione. Il well ad inversione migliora l'integrazione di dispositivi inclusi nella matrice di celle di memoria. Il well del tipo a diffusione migliora la caratteristica di isolamento tra i dispostivi.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2116276A JPH0824171B2 (ja) | 1990-05-02 | 1990-05-02 | 半導体記憶装置およびその製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
ITMI911175A0 ITMI911175A0 (it) | 1991-04-30 |
ITMI911175A1 ITMI911175A1 (it) | 1992-10-30 |
IT1247438B true IT1247438B (it) | 1994-12-14 |
Family
ID=14683068
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ITMI911175A IT1247438B (it) | 1990-05-02 | 1991-04-30 | Dispositivo a semiconduttore avente well (pozzo) retrogrado e well (pozzo) diffuso e procedimento per la sua fabbricazione |
Country Status (5)
Country | Link |
---|---|
US (1) | US5428239A (it) |
JP (1) | JPH0824171B2 (it) |
KR (1) | KR940005891B1 (it) |
DE (1) | DE4114000C2 (it) |
IT (1) | IT1247438B (it) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3462886B2 (ja) * | 1993-03-11 | 2003-11-05 | 株式会社東芝 | 半導体装置 |
US6310384B1 (en) * | 1993-07-02 | 2001-10-30 | Hitachi, Ltd. | Low stress semiconductor devices with thermal oxide isolation |
JPH08125034A (ja) | 1993-12-03 | 1996-05-17 | Mitsubishi Electric Corp | 半導体記憶装置 |
JP2790167B2 (ja) * | 1995-01-09 | 1998-08-27 | 日本電気株式会社 | 半導体装置及びその製造方法 |
JPH0936325A (ja) * | 1995-07-25 | 1997-02-07 | Hitachi Ltd | 半導体集積回路装置 |
JP3777000B2 (ja) | 1996-12-20 | 2006-05-24 | 富士通株式会社 | 半導体装置とその製造方法 |
KR100260559B1 (ko) | 1997-12-29 | 2000-07-01 | 윤종용 | 비휘발성 메모리 장치의 웰 구조 및 그 제조 방법 |
US6440819B1 (en) | 1998-03-03 | 2002-08-27 | Advanced Micro Devices, Inc. | Method for differential trenching in conjunction with differential fieldox growth |
JP3733252B2 (ja) | 1998-11-02 | 2006-01-11 | セイコーエプソン株式会社 | 半導体記憶装置及びその製造方法 |
JP3536693B2 (ja) * | 1998-11-24 | 2004-06-14 | セイコーエプソン株式会社 | 半導体記憶装置及びその製造方法 |
US6268250B1 (en) * | 1999-05-14 | 2001-07-31 | Micron Technology, Inc. | Efficient fabrication process for dual well type structures |
US6445014B1 (en) | 1999-06-16 | 2002-09-03 | Micron Technology Inc. | Retrograde well structure for a CMOS imager |
US6310366B1 (en) | 1999-06-16 | 2001-10-30 | Micron Technology, Inc. | Retrograde well structure for a CMOS imager |
JP2001351989A (ja) * | 2000-06-05 | 2001-12-21 | Nec Corp | 半導体装置の製造方法 |
TW490814B (en) * | 2001-04-04 | 2002-06-11 | Macronix Int Co Ltd | Manufacturing method of memory device with floating gate |
US7411250B2 (en) * | 2001-04-05 | 2008-08-12 | Peregrine Semiconductor Corporation | Radiation-hardened silicon-on-insulator CMOS device, and method of making the same |
US6531739B2 (en) * | 2001-04-05 | 2003-03-11 | Peregrine Semiconductor Corporation | Radiation-hardened silicon-on-insulator CMOS device, and method of making the same |
US7545001B2 (en) * | 2003-11-25 | 2009-06-09 | Taiwan Semiconductor Manufacturing Company | Semiconductor device having high drive current and method of manufacture therefor |
US20080116528A1 (en) * | 2006-11-22 | 2008-05-22 | Tsuneichiro Sano | Semiconductor device and method of manufacturing the same |
DE102011051650B4 (de) * | 2011-07-07 | 2020-04-30 | Atlas Copco Energas Gmbh | Turbomaschine |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4411058A (en) * | 1981-08-31 | 1983-10-25 | Hughes Aircraft Company | Process for fabricating CMOS devices with self-aligned channel stops |
JPS60200568A (ja) * | 1984-03-26 | 1985-10-11 | Nec Corp | 半導体記憶装置 |
JP2724459B2 (ja) * | 1987-06-05 | 1998-03-09 | セイコーインスツルメンツ株式会社 | 半導体集積回路装置の製造方法 |
JPS6410656A (en) * | 1987-07-03 | 1989-01-13 | Hitachi Ltd | Complementary type semiconductor device |
-
1990
- 1990-05-02 JP JP2116276A patent/JPH0824171B2/ja not_active Expired - Lifetime
-
1991
- 1991-03-11 KR KR1019910003842A patent/KR940005891B1/ko not_active IP Right Cessation
- 1991-04-29 DE DE4114000A patent/DE4114000C2/de not_active Expired - Fee Related
- 1991-04-30 IT ITMI911175A patent/IT1247438B/it active IP Right Grant
-
1993
- 1993-06-03 US US08/071,023 patent/US5428239A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE4114000A1 (de) | 1991-11-07 |
ITMI911175A1 (it) | 1992-10-30 |
KR910020820A (ko) | 1991-12-20 |
KR940005891B1 (ko) | 1994-06-24 |
JPH0412565A (ja) | 1992-01-17 |
JPH0824171B2 (ja) | 1996-03-06 |
US5428239A (en) | 1995-06-27 |
DE4114000C2 (de) | 1994-07-21 |
ITMI911175A0 (it) | 1991-04-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
0001 | Granted | ||
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19970429 |