IT1112624B - Processo di fabbricazione di circuiti integrati - Google Patents
Processo di fabbricazione di circuiti integratiInfo
- Publication number
- IT1112624B IT1112624B IT22794/78A IT2279478A IT1112624B IT 1112624 B IT1112624 B IT 1112624B IT 22794/78 A IT22794/78 A IT 22794/78A IT 2279478 A IT2279478 A IT 2279478A IT 1112624 B IT1112624 B IT 1112624B
- Authority
- IT
- Italy
- Prior art keywords
- manufacturing process
- integrated circuits
- circuits manufacturing
- integrated
- manufacturing
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
- H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/02—Manufacture or treatment characterised by using material-based technologies
- H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
- H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
-
- H10W20/01—
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Memories (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/793,217 US4123300A (en) | 1977-05-02 | 1977-05-02 | Integrated circuit process utilizing lift-off techniques |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| IT7822794A0 IT7822794A0 (it) | 1978-04-28 |
| IT1112624B true IT1112624B (it) | 1986-01-20 |
Family
ID=25159410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IT22794/78A IT1112624B (it) | 1977-05-02 | 1978-04-28 | Processo di fabbricazione di circuiti integrati |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US4123300A (enExample) |
| JP (1) | JPS5856267B2 (enExample) |
| DE (1) | DE2818525A1 (enExample) |
| FR (1) | FR2390007B1 (enExample) |
| GB (1) | GB1600048A (enExample) |
| IT (1) | IT1112624B (enExample) |
| NL (1) | NL7804517A (enExample) |
| SE (1) | SE7804921L (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4305760A (en) * | 1978-12-22 | 1981-12-15 | Ncr Corporation | Polysilicon-to-substrate contact processing |
| JPS6043656B2 (ja) * | 1979-06-06 | 1985-09-30 | 株式会社東芝 | 半導体装置の製造方法 |
| US4240845A (en) * | 1980-02-04 | 1980-12-23 | International Business Machines Corporation | Method of fabricating random access memory device |
| JPS56116670A (en) * | 1980-02-20 | 1981-09-12 | Hitachi Ltd | Semiconductor integrated circuit device and manufacture thereof |
| JPS5736844A (en) * | 1980-08-15 | 1982-02-27 | Hitachi Ltd | Semiconductor device |
| US4358326A (en) * | 1980-11-03 | 1982-11-09 | International Business Machines Corporation | Epitaxially extended polycrystalline structures utilizing a predeposit of amorphous silicon with subsequent annealing |
| US4814285A (en) * | 1985-09-23 | 1989-03-21 | Harris Corp. | Method for forming planarized interconnect level using selective deposition and ion implantation |
| US5075817A (en) * | 1990-06-22 | 1991-12-24 | Ramtron Corporation | Trench capacitor for large scale integrated memory |
| US5104822A (en) * | 1990-07-30 | 1992-04-14 | Ramtron Corporation | Method for creating self-aligned, non-patterned contact areas and stacked capacitors using the method |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3847687A (en) * | 1972-11-15 | 1974-11-12 | Motorola Inc | Methods of forming self aligned transistor structure having polycrystalline contacts |
| GB1444047A (en) * | 1973-02-28 | 1976-07-28 | Hitachi Ltd | Charge transfer semiconductor devices and methods of fabricating such devices |
| US4055885A (en) * | 1973-02-28 | 1977-11-01 | Hitachi, Ltd. | Charge transfer semiconductor device with electrodes separated by oxide region therebetween and method for fabricating the same |
-
1977
- 1977-05-02 US US05/793,217 patent/US4123300A/en not_active Expired - Lifetime
-
1978
- 1978-03-28 JP JP53034960A patent/JPS5856267B2/ja not_active Expired
- 1978-03-31 FR FR7810337A patent/FR2390007B1/fr not_active Expired
- 1978-04-19 GB GB15487/78A patent/GB1600048A/en not_active Expired
- 1978-04-27 DE DE19782818525 patent/DE2818525A1/de not_active Withdrawn
- 1978-04-27 NL NL7804517A patent/NL7804517A/xx not_active Application Discontinuation
- 1978-04-28 SE SE7804921A patent/SE7804921L/xx unknown
- 1978-04-28 IT IT22794/78A patent/IT1112624B/it active
Also Published As
| Publication number | Publication date |
|---|---|
| FR2390007B1 (enExample) | 1982-05-14 |
| NL7804517A (nl) | 1978-11-06 |
| IT7822794A0 (it) | 1978-04-28 |
| FR2390007A1 (enExample) | 1978-12-01 |
| DE2818525A1 (de) | 1978-11-09 |
| GB1600048A (en) | 1981-10-14 |
| JPS5856267B2 (ja) | 1983-12-14 |
| SE7804921L (sv) | 1978-11-03 |
| JPS53136494A (en) | 1978-11-29 |
| US4123300A (en) | 1978-10-31 |
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