IL83280A - Film measuring device and method with internal calibration to minimize the effect of sample movement - Google Patents

Film measuring device and method with internal calibration to minimize the effect of sample movement

Info

Publication number
IL83280A
IL83280A IL83280A IL8328087A IL83280A IL 83280 A IL83280 A IL 83280A IL 83280 A IL83280 A IL 83280A IL 8328087 A IL8328087 A IL 8328087A IL 83280 A IL83280 A IL 83280A
Authority
IL
Israel
Prior art keywords
effect
minimize
measuring device
internal calibration
sample movement
Prior art date
Application number
IL83280A
Other languages
English (en)
Other versions
IL83280A0 (en
Original Assignee
Ares Serono Res & Dev Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ares Serono Res & Dev Ltd filed Critical Ares Serono Res & Dev Ltd
Publication of IL83280A0 publication Critical patent/IL83280A0/xx
Publication of IL83280A publication Critical patent/IL83280A/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4788—Diffraction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/2866—Markers; Calibrating of scan
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G01J2003/425—Reflectance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G01N21/553—Attenuated total reflection and using surface plasmons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/062—LED's
    • G01N2201/0627—Use of several LED's for spectral resolution

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Inert Electrodes (AREA)
  • Materials For Photolithography (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
IL83280A 1986-07-25 1987-07-22 Film measuring device and method with internal calibration to minimize the effect of sample movement IL83280A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB868618159A GB8618159D0 (en) 1986-07-25 1986-07-25 Spectrometer based instruments

Publications (2)

Publication Number Publication Date
IL83280A0 IL83280A0 (en) 1987-12-31
IL83280A true IL83280A (en) 1990-11-05

Family

ID=10601663

Family Applications (1)

Application Number Title Priority Date Filing Date
IL83280A IL83280A (en) 1986-07-25 1987-07-22 Film measuring device and method with internal calibration to minimize the effect of sample movement

Country Status (10)

Country Link
US (1) US4828387A (es)
EP (1) EP0255302B1 (es)
JP (1) JP2511057B2 (es)
AT (1) ATE106555T1 (es)
AU (1) AU598007B2 (es)
CA (1) CA1301470C (es)
DE (1) DE3789923T2 (es)
ES (1) ES2053545T3 (es)
GB (1) GB8618159D0 (es)
IL (1) IL83280A (es)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8620193D0 (en) * 1986-08-19 1986-10-01 Emi Plc Thorn Chemical sensor
FI875236L (fi) * 1987-11-27 1989-05-28 Outokumpu Oy Maetningsgivare foer baerbar analysator.
US5478755A (en) * 1988-07-25 1995-12-26 Ares Serono Research & Development Ltd. Long range surface plasma resonance immunoassay
DE3909144A1 (de) * 1989-03-21 1990-09-27 Basf Ag Verfahren zur bestimmung von brechungsindex und schichtdicke duenner schichten
US5830766A (en) * 1990-05-23 1998-11-03 Ares-Serono Research & Development Ltd. Partnership Enhanced signal-to-noise ratio and sensitivity optical immunoassay
GB9406142D0 (en) * 1994-03-28 1994-05-18 British Tech Group A sensor
US5955378A (en) * 1997-08-20 1999-09-21 Challener; William A. Near normal incidence optical assaying method and system having wavelength and angle sensitivity
US5925878A (en) * 1997-08-20 1999-07-20 Imation Corp. Diffraction anomaly sensor having grating coated with protective dielectric layer
US5994150A (en) 1997-11-19 1999-11-30 Imation Corp. Optical assaying method and system having rotatable sensor disk with multiple sensing regions
US5986762A (en) * 1998-06-15 1999-11-16 Imation Corp. Optical sensor having optimized surface profile
US6320991B1 (en) 1998-10-16 2001-11-20 Imation Corp. Optical sensor having dielectric film stack
US6771376B2 (en) * 1999-07-05 2004-08-03 Novartis Ag Sensor platform, apparatus incorporating the platform, and process using the platform
KR100883079B1 (ko) 1999-07-05 2009-02-10 노파르티스 아게 플랫폼, 플랫폼을 가지는 장치, 및 플랫폼을 사용하는 방법
US7167615B1 (en) 1999-11-05 2007-01-23 Board Of Regents, The University Of Texas System Resonant waveguide-grating filters and sensors and methods for making and using same
US6785433B2 (en) 2000-08-09 2004-08-31 Artificial Sensing Instruments Asi Ag Waveguide grid array and optical measurement arrangement
US6898537B1 (en) * 2001-04-27 2005-05-24 Nanometrics Incorporated Measurement of diffracting structures using one-half of the non-zero diffracted orders
WO2004059300A1 (ja) * 2002-12-24 2004-07-15 Kubota Corporation 果菜類の品質評価装置
US7151597B2 (en) * 2003-12-05 2006-12-19 Agilent Technologie, Inc Optical wavelength standard and optical wavelength calibration system and method
US7158240B2 (en) * 2004-06-16 2007-01-02 The United States Of America As Represented By The Secretary Of The Army Measurement device and method
DE102004033869B3 (de) * 2004-07-13 2006-03-30 Gesellschaft zur Förderung der Spektrochemie und angewandten Spektroskopie e.V. Verfahren zur Bestimmung von Oberflächenplasmonenresonanzen an zweidimensionalen Messflächen
US20110267623A1 (en) * 2009-11-02 2011-11-03 Matejka Steven R Multi-Wavelength Reference Microplate For Label-Independent Optical Reader
JP5947502B2 (ja) * 2011-08-11 2016-07-06 キヤノン株式会社 分光測色器、および画像形成装置
US9541998B2 (en) * 2015-01-29 2017-01-10 Samsung Electronics Co., Ltd. Electronic system with gaze alignment mechanism and method of operation thereof
US11300452B2 (en) * 2017-06-08 2022-04-12 Ushio Denki Kabushiki Kaisha Spectral measurement method, spectral measurement system, and broadband pulsed light source unit
WO2021193589A1 (ja) * 2020-03-23 2021-09-30 積水化学工業株式会社 検査方法、検査キット及び検査システム

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3985442A (en) * 1974-06-07 1976-10-12 Gte Sylvania Incorporated Data acquisition system for spectrophotometer
US3973849A (en) * 1975-06-16 1976-08-10 International Business Machines Corporation Self-calibratable spectrum analyzer
DE2655272A1 (de) * 1976-12-07 1978-06-08 Leybold Heraeus Gmbh & Co Kg Spektralfotometeranordnung
JPS5410576A (en) * 1978-01-06 1979-01-26 Hitachi Ltd Washer
US4207467A (en) * 1978-09-05 1980-06-10 Laser Precision Corp. Film measuring apparatus and method
US4345840A (en) * 1980-04-08 1982-08-24 California Institute Of Technology Method and apparatus for instantaneous band ratioing in a reflectance radiometer
AU543052B2 (en) * 1981-04-27 1985-03-28 Hajime Industries Ltd. Object inspection device
FR2510254A1 (fr) * 1981-07-21 1983-01-28 Guillaume Michel Procede et dispositif de mesure de temperature utilisant un reseau de diffraction
DE3224736A1 (de) * 1982-07-02 1984-01-05 Bodenseewerk Perkin-Elmer & Co GmbH, 7770 Überlingen Gitterspektrometer
DE3406645A1 (de) * 1984-02-24 1985-08-29 Leybold-Heraeus GmbH, 5000 Köln Spektralfotometeranordnung
US4664522A (en) * 1984-08-24 1987-05-12 Guided Wave, Inc. Optical waveguide spectrum analyzer and method
JPS61217705A (ja) * 1985-03-22 1986-09-27 Dainippon Screen Mfg Co Ltd 膜厚測定装置

Also Published As

Publication number Publication date
DE3789923T2 (de) 1994-09-08
AU598007B2 (en) 1990-06-14
EP0255302A3 (en) 1989-10-18
AU7600687A (en) 1988-01-28
GB8618159D0 (en) 1986-09-03
ES2053545T3 (es) 1994-08-01
CA1301470C (en) 1992-05-26
US4828387A (en) 1989-05-09
IL83280A0 (en) 1987-12-31
EP0255302A2 (en) 1988-02-03
JPS6381226A (ja) 1988-04-12
DE3789923D1 (de) 1994-07-07
ATE106555T1 (de) 1994-06-15
EP0255302B1 (en) 1994-06-01
JP2511057B2 (ja) 1996-06-26

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