ES2053545T3 - Mejoras referentes a espectrometros. - Google Patents

Mejoras referentes a espectrometros.

Info

Publication number
ES2053545T3
ES2053545T3 ES87306569T ES87306569T ES2053545T3 ES 2053545 T3 ES2053545 T3 ES 2053545T3 ES 87306569 T ES87306569 T ES 87306569T ES 87306569 T ES87306569 T ES 87306569T ES 2053545 T3 ES2053545 T3 ES 2053545T3
Authority
ES
Spain
Prior art keywords
spectrometers
effect
reflecting structure
improvements regarding
utilise
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES87306569T
Other languages
English (en)
Inventor
Craig George Sawyers
Lawrence John Robinson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ARS HOLDING 89 NV
Original Assignee
ARS HOLDING 89 NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ARS HOLDING 89 NV filed Critical ARS HOLDING 89 NV
Application granted granted Critical
Publication of ES2053545T3 publication Critical patent/ES2053545T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4788—Diffraction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/2866—Markers; Calibrating of scan
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G01J2003/425—Reflectance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G01N21/553—Attenuated total reflection and using surface plasmons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/062—LED's
    • G01N2201/0627—Use of several LED's for spectral resolution

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Inert Electrodes (AREA)
  • Materials For Photolithography (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

METODO Y APARATO PARA ANALIZAR EL ESPECTRO DEL LUZ REFLEJADA POR UNA ESTRUCTURA REFLECTANTE (24) EN LA CUAL EL EFECTO SOBRE LOS RESULTADOS DE ANALISIS DE LA VARIACION EN EL ANGULO ENTRE LA ESTRUCTURA REFLECTANTE Y EL HAZ INCIDENTE (22) SE MINIMIZA. EL METODO Y APARATO PUEDE UTILIZAR UN ELEMENTO DISPERSIVO (26) CONSTRUIDO Y DISPUESTO DE FORMA QUE SE MINIMICE EL EFECTO DE LAS VARIACIONES. EL METODO Y APARATO PUEDE TAMBIEN UTILIZAR UNA TECNICA DE CALIBRACION EN LA CUAL LA LUZ CON UN ESPECTRO CONOCIDO SE REFLEJA FUERA DE LA ESTRUCTURA REFLECTANTE Y ES ANALIZADA DE FORMA QUE LA COMPENSACION PUEDA HACERSE POR EL EFECTO DE LA VARIACION.
ES87306569T 1986-07-25 1987-07-24 Mejoras referentes a espectrometros. Expired - Lifetime ES2053545T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB868618159A GB8618159D0 (en) 1986-07-25 1986-07-25 Spectrometer based instruments

Publications (1)

Publication Number Publication Date
ES2053545T3 true ES2053545T3 (es) 1994-08-01

Family

ID=10601663

Family Applications (1)

Application Number Title Priority Date Filing Date
ES87306569T Expired - Lifetime ES2053545T3 (es) 1986-07-25 1987-07-24 Mejoras referentes a espectrometros.

Country Status (10)

Country Link
US (1) US4828387A (es)
EP (1) EP0255302B1 (es)
JP (1) JP2511057B2 (es)
AT (1) ATE106555T1 (es)
AU (1) AU598007B2 (es)
CA (1) CA1301470C (es)
DE (1) DE3789923T2 (es)
ES (1) ES2053545T3 (es)
GB (1) GB8618159D0 (es)
IL (1) IL83280A (es)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8620193D0 (en) * 1986-08-19 1986-10-01 Emi Plc Thorn Chemical sensor
FI875236L (fi) * 1987-11-27 1989-05-28 Outokumpu Oy Maetningsgivare foer baerbar analysator.
US5478755A (en) * 1988-07-25 1995-12-26 Ares Serono Research & Development Ltd. Long range surface plasma resonance immunoassay
DE3909144A1 (de) * 1989-03-21 1990-09-27 Basf Ag Verfahren zur bestimmung von brechungsindex und schichtdicke duenner schichten
US5830766A (en) * 1990-05-23 1998-11-03 Ares-Serono Research & Development Ltd. Partnership Enhanced signal-to-noise ratio and sensitivity optical immunoassay
GB9406142D0 (en) * 1994-03-28 1994-05-18 British Tech Group A sensor
US5925878A (en) * 1997-08-20 1999-07-20 Imation Corp. Diffraction anomaly sensor having grating coated with protective dielectric layer
US5955378A (en) * 1997-08-20 1999-09-21 Challener; William A. Near normal incidence optical assaying method and system having wavelength and angle sensitivity
US5994150A (en) 1997-11-19 1999-11-30 Imation Corp. Optical assaying method and system having rotatable sensor disk with multiple sensing regions
US5986762A (en) * 1998-06-15 1999-11-16 Imation Corp. Optical sensor having optimized surface profile
US6320991B1 (en) 1998-10-16 2001-11-20 Imation Corp. Optical sensor having dielectric film stack
US6771376B2 (en) * 1999-07-05 2004-08-03 Novartis Ag Sensor platform, apparatus incorporating the platform, and process using the platform
PT1192448E (pt) 1999-07-05 2007-01-31 Novartis Ag Processo para a utilização de uma plataforma de sensor
US7167615B1 (en) 1999-11-05 2007-01-23 Board Of Regents, The University Of Texas System Resonant waveguide-grating filters and sensors and methods for making and using same
US6785433B2 (en) * 2000-08-09 2004-08-31 Artificial Sensing Instruments Asi Ag Waveguide grid array and optical measurement arrangement
US6898537B1 (en) * 2001-04-27 2005-05-24 Nanometrics Incorporated Measurement of diffracting structures using one-half of the non-zero diffracted orders
WO2004059300A1 (ja) * 2002-12-24 2004-07-15 Kubota Corporation 果菜類の品質評価装置
US7151597B2 (en) * 2003-12-05 2006-12-19 Agilent Technologie, Inc Optical wavelength standard and optical wavelength calibration system and method
US7158240B2 (en) * 2004-06-16 2007-01-02 The United States Of America As Represented By The Secretary Of The Army Measurement device and method
DE102004033869B3 (de) * 2004-07-13 2006-03-30 Gesellschaft zur Förderung der Spektrochemie und angewandten Spektroskopie e.V. Verfahren zur Bestimmung von Oberflächenplasmonenresonanzen an zweidimensionalen Messflächen
US20110267623A1 (en) * 2009-11-02 2011-11-03 Matejka Steven R Multi-Wavelength Reference Microplate For Label-Independent Optical Reader
JP5947502B2 (ja) * 2011-08-11 2016-07-06 キヤノン株式会社 分光測色器、および画像形成装置
US9541998B2 (en) * 2015-01-29 2017-01-10 Samsung Electronics Co., Ltd. Electronic system with gaze alignment mechanism and method of operation thereof
US11300452B2 (en) * 2017-06-08 2022-04-12 Ushio Denki Kabushiki Kaisha Spectral measurement method, spectral measurement system, and broadband pulsed light source unit
WO2021193589A1 (ja) * 2020-03-23 2021-09-30 積水化学工業株式会社 検査方法、検査キット及び検査システム

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3985442A (en) * 1974-06-07 1976-10-12 Gte Sylvania Incorporated Data acquisition system for spectrophotometer
US3973849A (en) * 1975-06-16 1976-08-10 International Business Machines Corporation Self-calibratable spectrum analyzer
DE2655272A1 (de) * 1976-12-07 1978-06-08 Leybold Heraeus Gmbh & Co Kg Spektralfotometeranordnung
JPS5410576A (en) * 1978-01-06 1979-01-26 Hitachi Ltd Washer
US4207467A (en) * 1978-09-05 1980-06-10 Laser Precision Corp. Film measuring apparatus and method
US4345840A (en) * 1980-04-08 1982-08-24 California Institute Of Technology Method and apparatus for instantaneous band ratioing in a reflectance radiometer
AU543052B2 (en) * 1981-04-27 1985-03-28 Hajime Industries Ltd. Object inspection device
FR2510254A1 (fr) * 1981-07-21 1983-01-28 Guillaume Michel Procede et dispositif de mesure de temperature utilisant un reseau de diffraction
DE3224736A1 (de) * 1982-07-02 1984-01-05 Bodenseewerk Perkin-Elmer & Co GmbH, 7770 Überlingen Gitterspektrometer
DE3406645A1 (de) * 1984-02-24 1985-08-29 Leybold-Heraeus GmbH, 5000 Köln Spektralfotometeranordnung
US4664522A (en) * 1984-08-24 1987-05-12 Guided Wave, Inc. Optical waveguide spectrum analyzer and method
JPS61217705A (ja) * 1985-03-22 1986-09-27 Dainippon Screen Mfg Co Ltd 膜厚測定装置

Also Published As

Publication number Publication date
JPS6381226A (ja) 1988-04-12
EP0255302A2 (en) 1988-02-03
AU598007B2 (en) 1990-06-14
ATE106555T1 (de) 1994-06-15
GB8618159D0 (en) 1986-09-03
AU7600687A (en) 1988-01-28
CA1301470C (en) 1992-05-26
DE3789923D1 (de) 1994-07-07
US4828387A (en) 1989-05-09
IL83280A0 (en) 1987-12-31
DE3789923T2 (de) 1994-09-08
JP2511057B2 (ja) 1996-06-26
IL83280A (en) 1990-11-05
EP0255302A3 (en) 1989-10-18
EP0255302B1 (en) 1994-06-01

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