ATE29175T1 - Detektorsystem zur intensitaetsmessung einer in einem vorherbestimmten winkel von einer probe gestreuten strahlung, wobei die probe unter einem bestimmten einfallswinkel bestrahlt wird. - Google Patents
Detektorsystem zur intensitaetsmessung einer in einem vorherbestimmten winkel von einer probe gestreuten strahlung, wobei die probe unter einem bestimmten einfallswinkel bestrahlt wird.Info
- Publication number
- ATE29175T1 ATE29175T1 AT83105289T AT83105289T ATE29175T1 AT E29175 T1 ATE29175 T1 AT E29175T1 AT 83105289 T AT83105289 T AT 83105289T AT 83105289 T AT83105289 T AT 83105289T AT E29175 T1 ATE29175 T1 AT E29175T1
- Authority
- AT
- Austria
- Prior art keywords
- sample
- radiation
- detector system
- reflecting surface
- dome
- Prior art date
Links
- 230000005855 radiation Effects 0.000 title abstract 9
- 238000005259 measurement Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
- G01N21/474—Details of optical heads therefor, e.g. using optical fibres
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N2021/4704—Angular selective
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/064—Stray light conditioning
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| HU821733A HU188795B (en) | 1982-05-28 | 1982-05-28 | Detecting arrangement for meassuring the intensity of radiation scattering at a given angle from a sample exposed to radiation of given angle of incidence |
| EP83105289A EP0095759B1 (de) | 1982-05-28 | 1983-05-27 | Detektorsystem zur Intensitätsmessung einer in einem vorherbestimmten Winkel von einer Probe gestreuten Strahlung, wobei die Probe unter einem bestimmten Einfallswinkel bestrahlt wird |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE29175T1 true ATE29175T1 (de) | 1987-09-15 |
Family
ID=10955915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT83105289T ATE29175T1 (de) | 1982-05-28 | 1983-05-27 | Detektorsystem zur intensitaetsmessung einer in einem vorherbestimmten winkel von einer probe gestreuten strahlung, wobei die probe unter einem bestimmten einfallswinkel bestrahlt wird. |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4575244A (de) |
| EP (1) | EP0095759B1 (de) |
| AT (1) | ATE29175T1 (de) |
| DE (1) | DE3373212D1 (de) |
| HU (1) | HU188795B (de) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4770530A (en) * | 1986-04-23 | 1988-09-13 | Kollmorgen Corporation | Remote spectrophotometer |
| GB2193803A (en) * | 1986-07-04 | 1988-02-17 | De La Rue Syst | Monitoring diffuse reflectivity |
| DE3701721A1 (de) * | 1987-01-22 | 1988-08-04 | Zeiss Carl Fa | Remissionsmessgeraet zur beruehrungslosen messung |
| US5268749A (en) * | 1991-07-26 | 1993-12-07 | Kollmorgen Corporation | Apparatus and method for providing uniform illumination of a sample plane |
| DE4138679C2 (de) * | 1991-11-25 | 1998-07-23 | Helmut Dipl Ing Reiser | Gerät zur Bestimmung visueller Oberflächeneigenschaften |
| US6101034A (en) * | 1996-02-09 | 2000-08-08 | Cox; James Allen | Tunable multispectral optical filter and imaging apparatus |
| RU2473887C2 (ru) * | 2006-10-05 | 2013-01-27 | Конинклейке Филипс Электроникс Н.В. | Устройство и способ для наблюдения поверхности образца |
| SE532397C2 (sv) * | 2008-10-09 | 2010-01-12 | Microfluid Ab | Vätskefilmmätare |
| US8532364B2 (en) * | 2009-02-18 | 2013-09-10 | Texas Instruments Deutschland Gmbh | Apparatus and method for detecting defects in wafer manufacturing |
| JP5672709B2 (ja) | 2010-02-04 | 2015-02-18 | セイコーエプソン株式会社 | 生体情報検出器、生体情報測定装置および生体情報検出器における反射部の設計方法 |
| TWI485387B (zh) * | 2013-07-31 | 2015-05-21 | Genesis Photonics Inc | 發光二極體的檢測裝置 |
| ES2910779T3 (es) * | 2017-12-20 | 2022-05-13 | Fundacion Tecnalia Res & Innovation | Métodos y sistemas para inspección visual |
| CN109006744B (zh) * | 2018-06-20 | 2021-04-16 | 广东省农业科学院植物保护研究所 | 桔小实蝇辐照不羽化防疫处理系统以及处理方法 |
| CN113237842A (zh) * | 2021-04-25 | 2021-08-10 | 哈尔滨工业大学 | 一种傅里叶红外光谱仪样品架及使用方法 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE608644C (de) * | 1932-07-09 | 1935-01-28 | Zeiss Carl Fa | Kondensor fuer die Beleuchtung mikroskopischer Objekte mit auffallendem Lichte |
| US2741691A (en) * | 1952-02-18 | 1956-04-10 | Socony Mobil Oil Co Inc | Radiant energy source for infrared spectroscopy and the like |
| US3244062A (en) * | 1960-04-12 | 1966-04-05 | Gen Aniline & Film Corp | Photo-electrical sensitometric measuring apparatus |
| US3431423A (en) * | 1965-09-27 | 1969-03-04 | Bausch & Lomb | Forward scatter photometer |
| DE1797108A1 (de) * | 1968-08-16 | 1970-12-03 | Eltro Gmbh | IR-optisches Abbildungssystem |
| CH541140A (de) * | 1971-12-31 | 1973-08-31 | Gretag Ag | Beleuchtungsanordnung |
| CH607021A5 (de) * | 1975-12-30 | 1978-11-30 | Gretag Ag | |
| JPS5570732A (en) * | 1978-11-22 | 1980-05-28 | Hitachi Ltd | Inspection unit by laser light for fine deficiency on surface |
| US4341471A (en) * | 1979-01-02 | 1982-07-27 | Coulter Electronics, Inc. | Apparatus and method for measuring the distribution of radiant energy produced in particle investigating systems |
| DE2920120A1 (de) * | 1979-05-18 | 1980-11-20 | Klimsch & Co | Messonde |
| US4360275A (en) * | 1980-08-11 | 1982-11-23 | Litton Systems Inc. | Device for measurement of optical scattering |
-
1982
- 1982-05-28 HU HU821733A patent/HU188795B/hu not_active IP Right Cessation
-
1983
- 1983-05-19 US US06/496,250 patent/US4575244A/en not_active Expired - Fee Related
- 1983-05-27 DE DE8383105289T patent/DE3373212D1/de not_active Expired
- 1983-05-27 EP EP83105289A patent/EP0095759B1/de not_active Expired
- 1983-05-27 AT AT83105289T patent/ATE29175T1/de active
Also Published As
| Publication number | Publication date |
|---|---|
| DE3373212D1 (en) | 1987-10-01 |
| HU188795B (en) | 1986-05-28 |
| EP0095759A1 (de) | 1983-12-07 |
| EP0095759B1 (de) | 1987-08-26 |
| US4575244A (en) | 1986-03-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| ATE29175T1 (de) | Detektorsystem zur intensitaetsmessung einer in einem vorherbestimmten winkel von einer probe gestreuten strahlung, wobei die probe unter einem bestimmten einfallswinkel bestrahlt wird. | |
| ATE143138T1 (de) | Teilchengrössenanalyse unter benutzung der polarisierten differentiellen streuintensität | |
| ATE252229T1 (de) | Verbesserungen bezüglich der messung einer teilchengrössenverteilung | |
| SE7514389L (sv) | Forfarande for opto-elektronisk positionsavkenning och inspektion samt for utforande av forfarandet avsedd anordning | |
| WO2000058713A3 (de) | Gerät zur schnellen messung winkelabhängiger beugungseffekte an feinstrukturierten oberflächen | |
| IL83280A (en) | Film measuring device and method with internal calibration to minimize the effect of sample movement | |
| JPS56126747A (en) | Inspecting method for flaw, alien substance and the like on surface of sample and device therefor | |
| DE3772573D1 (de) | Sensor zur umsetzung eines abstandes in optische und weiterhin in elektrische energie | |
| US3610756A (en) | Apparatus for determining the color of cut diamonds | |
| JP2694304B2 (ja) | 光回折、散乱式粒度分布測定装置 | |
| FR2632724B1 (fr) | Procede et dispositif de mesure de la visibilite a travers un milieu d'opacite variable | |
| EP0291708A3 (en) | Apparatus for measuring the velocity of light scattering moving particles | |
| DE3772614D1 (de) | Vorrichtung zur guetepruefung. | |
| DE59208038D1 (de) | Einrichtung zur spektralphotometrischen Analyse | |
| JPS5596430A (en) | Interference prevention apparatus for aperture plate in passage for measuring light | |
| JPS5752807A (en) | Device for measuring film thickness | |
| JPH0260975B2 (de) | ||
| JPS5522157A (en) | Testing method for material surface | |
| JPS57171250A (en) | Detection of defect | |
| JPS6212282Y2 (de) | ||
| JPS57182604A (en) | Interference measuring device | |
| JPS54124780A (en) | Surface inspection apparatus | |
| JPS5798846A (en) | X-ray diffractometer | |
| JPS57113311A (en) | Measuring device for surface coarseness of object | |
| JPS56126745A (en) | Automatic inspecting device for surface of plate material |