ATE29175T1 - Detektorsystem zur intensitaetsmessung einer in einem vorherbestimmten winkel von einer probe gestreuten strahlung, wobei die probe unter einem bestimmten einfallswinkel bestrahlt wird. - Google Patents

Detektorsystem zur intensitaetsmessung einer in einem vorherbestimmten winkel von einer probe gestreuten strahlung, wobei die probe unter einem bestimmten einfallswinkel bestrahlt wird.

Info

Publication number
ATE29175T1
ATE29175T1 AT83105289T AT83105289T ATE29175T1 AT E29175 T1 ATE29175 T1 AT E29175T1 AT 83105289 T AT83105289 T AT 83105289T AT 83105289 T AT83105289 T AT 83105289T AT E29175 T1 ATE29175 T1 AT E29175T1
Authority
AT
Austria
Prior art keywords
sample
radiation
detector system
reflecting surface
dome
Prior art date
Application number
AT83105289T
Other languages
English (en)
Inventor
Karoly Dr Kaffka
Bela Dr Nadai
Andras Czabaffy
Lorand Dr Horvath
Original Assignee
Koezponti Elelmiszeripari
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koezponti Elelmiszeripari filed Critical Koezponti Elelmiszeripari
Application granted granted Critical
Publication of ATE29175T1 publication Critical patent/ATE29175T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
    • G01N21/474—Details of optical heads therefor, e.g. using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N2021/4704—Angular selective
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/064—Stray light conditioning

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
AT83105289T 1982-05-28 1983-05-27 Detektorsystem zur intensitaetsmessung einer in einem vorherbestimmten winkel von einer probe gestreuten strahlung, wobei die probe unter einem bestimmten einfallswinkel bestrahlt wird. ATE29175T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
HU821733A HU188795B (en) 1982-05-28 1982-05-28 Detecting arrangement for meassuring the intensity of radiation scattering at a given angle from a sample exposed to radiation of given angle of incidence
EP83105289A EP0095759B1 (de) 1982-05-28 1983-05-27 Detektorsystem zur Intensitätsmessung einer in einem vorherbestimmten Winkel von einer Probe gestreuten Strahlung, wobei die Probe unter einem bestimmten Einfallswinkel bestrahlt wird

Publications (1)

Publication Number Publication Date
ATE29175T1 true ATE29175T1 (de) 1987-09-15

Family

ID=10955915

Family Applications (1)

Application Number Title Priority Date Filing Date
AT83105289T ATE29175T1 (de) 1982-05-28 1983-05-27 Detektorsystem zur intensitaetsmessung einer in einem vorherbestimmten winkel von einer probe gestreuten strahlung, wobei die probe unter einem bestimmten einfallswinkel bestrahlt wird.

Country Status (5)

Country Link
US (1) US4575244A (de)
EP (1) EP0095759B1 (de)
AT (1) ATE29175T1 (de)
DE (1) DE3373212D1 (de)
HU (1) HU188795B (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4770530A (en) * 1986-04-23 1988-09-13 Kollmorgen Corporation Remote spectrophotometer
GB2193803A (en) * 1986-07-04 1988-02-17 De La Rue Syst Monitoring diffuse reflectivity
DE3701721A1 (de) * 1987-01-22 1988-08-04 Zeiss Carl Fa Remissionsmessgeraet zur beruehrungslosen messung
US5268749A (en) * 1991-07-26 1993-12-07 Kollmorgen Corporation Apparatus and method for providing uniform illumination of a sample plane
DE4138679C2 (de) * 1991-11-25 1998-07-23 Helmut Dipl Ing Reiser Gerät zur Bestimmung visueller Oberflächeneigenschaften
US6101034A (en) * 1996-02-09 2000-08-08 Cox; James Allen Tunable multispectral optical filter and imaging apparatus
CN101523195B (zh) * 2006-10-05 2012-04-25 皇家飞利浦电子股份有限公司 用于观察样品表面的设备和方法
SE532397C2 (sv) * 2008-10-09 2010-01-12 Microfluid Ab Vätskefilmmätare
US8532364B2 (en) * 2009-02-18 2013-09-10 Texas Instruments Deutschland Gmbh Apparatus and method for detecting defects in wafer manufacturing
JP5672709B2 (ja) 2010-02-04 2015-02-18 セイコーエプソン株式会社 生体情報検出器、生体情報測定装置および生体情報検出器における反射部の設計方法
TWI485387B (zh) * 2013-07-31 2015-05-21 Genesis Photonics Inc 發光二極體的檢測裝置
EP3502672B1 (de) * 2017-12-20 2022-02-09 Fundación Tecnalia Research & Innovation Verfahren und systeme für sichtprüfungen
CN109006744B (zh) * 2018-06-20 2021-04-16 广东省农业科学院植物保护研究所 桔小实蝇辐照不羽化防疫处理系统以及处理方法
CN113237842A (zh) * 2021-04-25 2021-08-10 哈尔滨工业大学 一种傅里叶红外光谱仪样品架及使用方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE608644C (de) * 1932-07-09 1935-01-28 Zeiss Carl Fa Kondensor fuer die Beleuchtung mikroskopischer Objekte mit auffallendem Lichte
US2741691A (en) * 1952-02-18 1956-04-10 Socony Mobil Oil Co Inc Radiant energy source for infrared spectroscopy and the like
US3244062A (en) * 1960-04-12 1966-04-05 Gen Aniline & Film Corp Photo-electrical sensitometric measuring apparatus
US3431423A (en) * 1965-09-27 1969-03-04 Bausch & Lomb Forward scatter photometer
DE1797108A1 (de) * 1968-08-16 1970-12-03 Eltro Gmbh IR-optisches Abbildungssystem
CH541140A (de) * 1971-12-31 1973-08-31 Gretag Ag Beleuchtungsanordnung
CH607021A5 (de) * 1975-12-30 1978-11-30 Gretag Ag
JPS5570732A (en) * 1978-11-22 1980-05-28 Hitachi Ltd Inspection unit by laser light for fine deficiency on surface
US4341471A (en) * 1979-01-02 1982-07-27 Coulter Electronics, Inc. Apparatus and method for measuring the distribution of radiant energy produced in particle investigating systems
DE2920120A1 (de) * 1979-05-18 1980-11-20 Klimsch & Co Messonde
US4360275A (en) * 1980-08-11 1982-11-23 Litton Systems Inc. Device for measurement of optical scattering

Also Published As

Publication number Publication date
HU188795B (en) 1986-05-28
EP0095759B1 (de) 1987-08-26
EP0095759A1 (de) 1983-12-07
DE3373212D1 (en) 1987-10-01
US4575244A (en) 1986-03-11

Similar Documents

Publication Publication Date Title
ATE29175T1 (de) Detektorsystem zur intensitaetsmessung einer in einem vorherbestimmten winkel von einer probe gestreuten strahlung, wobei die probe unter einem bestimmten einfallswinkel bestrahlt wird.
ATE143138T1 (de) Teilchengrössenanalyse unter benutzung der polarisierten differentiellen streuintensität
ATE252229T1 (de) Verbesserungen bezüglich der messung einer teilchengrössenverteilung
SE7514389L (sv) Forfarande for opto-elektronisk positionsavkenning och inspektion samt for utforande av forfarandet avsedd anordning
DE3586967D1 (de) Roentgengeraet.
IL83280A (en) Film measuring device and method with internal calibration to minimize the effect of sample movement
JPS56126747A (en) Inspecting method for flaw, alien substance and the like on surface of sample and device therefor
DE3772573D1 (de) Sensor zur umsetzung eines abstandes in optische und weiterhin in elektrische energie
EP0274403A3 (de) Lichtabsorptionsanalysator
EP0396409A3 (de) Ellipsometrische Vorrichtung mit hohem Auflösungsvermögen
ATE49295T1 (de) Optisch-elektronisches messverfahren, eine dafuer erforderliche einrichtung und deren verwendung.
US3610756A (en) Apparatus for determining the color of cut diamonds
ATE113121T1 (de) Vorrichtung zur dimensionsmessung.
JP2694304B2 (ja) 光回折、散乱式粒度分布測定装置
AU5410486A (en) Measurement of optical density via nephelometry
EP0291708A3 (en) Apparatus for measuring the velocity of light scattering moving particles
DE3772614D1 (de) Vorrichtung zur guetepruefung.
DE59208038D1 (de) Einrichtung zur spektralphotometrischen Analyse
JPS5465059A (en) Profile measuring apparatus
JPS5667739A (en) Defect inspecting apparatus
JPS5596430A (en) Interference prevention apparatus for aperture plate in passage for measuring light
JPS54124780A (en) Surface inspection apparatus
JPS5752807A (en) Device for measuring film thickness
JPS5522157A (en) Testing method for material surface
JPS57171250A (en) Detection of defect