IL145332A - A device for controlling drainage and a gas treatment system that includes the device - Google Patents

A device for controlling drainage and a gas treatment system that includes the device

Info

Publication number
IL145332A
IL145332A IL14533201A IL14533201A IL145332A IL 145332 A IL145332 A IL 145332A IL 14533201 A IL14533201 A IL 14533201A IL 14533201 A IL14533201 A IL 14533201A IL 145332 A IL145332 A IL 145332A
Authority
IL
Israel
Prior art keywords
fluid control
lines
control apparatus
bypass
channel
Prior art date
Application number
IL14533201A
Other languages
English (en)
Hebrew (he)
Other versions
IL145332A0 (en
Original Assignee
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk filed Critical Fujikin Kk
Publication of IL145332A0 publication Critical patent/IL145332A0/xx
Publication of IL145332A publication Critical patent/IL145332A/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B1/00—Installations or systems with accumulators; Supply reservoir or sump assemblies
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6851—With casing, support, protector or static constructional installations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Valve Housings (AREA)
  • Drying Of Semiconductors (AREA)
  • Pipeline Systems (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
IL14533201A 2000-09-11 2001-09-09 A device for controlling drainage and a gas treatment system that includes the device IL145332A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000274546A JP2002089798A (ja) 2000-09-11 2000-09-11 流体制御装置およびこれを用いたガス処理装置

Publications (2)

Publication Number Publication Date
IL145332A0 IL145332A0 (en) 2002-06-30
IL145332A true IL145332A (en) 2004-08-31

Family

ID=18760292

Family Applications (1)

Application Number Title Priority Date Filing Date
IL14533201A IL145332A (en) 2000-09-11 2001-09-09 A device for controlling drainage and a gas treatment system that includes the device

Country Status (9)

Country Link
US (1) US6648020B2 (de)
EP (1) EP1191265B1 (de)
JP (1) JP2002089798A (de)
KR (1) KR20020020854A (de)
CA (1) CA2357177A1 (de)
DE (1) DE60118674T2 (de)
IL (1) IL145332A (de)
SG (1) SG91938A1 (de)
TW (1) TW522443B (de)

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US7048007B2 (en) * 1998-03-05 2006-05-23 Swagelok Company Modular surface mount manifold assemblies
US7039999B2 (en) * 2002-04-25 2006-05-09 Tarr Adam L Method for installation of semiconductor fabrication tools
JP2004183771A (ja) 2002-12-03 2004-07-02 Fujikin Inc 流体制御装置
JP4677805B2 (ja) * 2005-03-22 2011-04-27 株式会社フジキン 流体制御装置
US7320339B2 (en) * 2005-06-02 2008-01-22 Ultra Clean Holdings, Inc. Gas-panel assembly
JP2007034667A (ja) * 2005-07-27 2007-02-08 Surpass Kogyo Kk 流量コントローラ、これに用いるレギュレータユニット、バルブユニット
EP1895214A1 (de) * 2005-08-10 2008-03-05 Fujikin Incorporated Flüssigkeitskontrollvorrichtung
JP4780555B2 (ja) * 2005-09-12 2011-09-28 株式会社フジキン 流体制御装置
TWI391804B (zh) * 2005-09-29 2013-04-01 3M Innovative Properties Co 流體控制裝置及其方法
US7575616B2 (en) * 2006-02-10 2009-08-18 Entegris, Inc. Low-profile surface mount filter
US9180232B2 (en) * 2006-05-19 2015-11-10 Novartis Ag Surgical system having manifolds with integral pneumatic accumulators
US20070270746A1 (en) * 2006-05-19 2007-11-22 Alcon, Inc. Surgical system having pneumatic manifolds with integral air cylinders
US20070282262A1 (en) * 2006-05-19 2007-12-06 Alcon, Inc. Surgical system having integral pneumatic manifolds
US20080009977A1 (en) * 2006-07-10 2008-01-10 Ultra Clean Holdings Apparatus and Method for Monitoring a Chemical-Supply System
JP5037510B2 (ja) * 2006-08-23 2012-09-26 株式会社堀場エステック 集積型ガスパネル装置
WO2008030501A2 (en) * 2006-09-06 2008-03-13 Ultra Clean Holdings, Incorporated Pre-certified process chamber and method
US20090078324A1 (en) * 2007-09-21 2009-03-26 Ultra Clean Technology, Inc. Gas-panel system
US20090114295A1 (en) * 2007-11-06 2009-05-07 Ultra Clean Holdings, Inc. Gas-panel assembly
JP5565962B2 (ja) * 2009-03-04 2014-08-06 株式会社堀場エステック ガス供給装置
DE102010043865A1 (de) 2009-11-30 2011-07-14 Horiba Stec Co., Ltd. Fluid device
JP5254948B2 (ja) * 2009-12-25 2013-08-07 株式会社堀場エステック 流体機器固定装置
JP5775696B2 (ja) * 2011-01-31 2015-09-09 株式会社フジキン 流体制御装置
US8851113B2 (en) * 2012-03-27 2014-10-07 Lam Research Coporation Shared gas panels in plasma processing systems
JP5616416B2 (ja) * 2012-11-02 2014-10-29 株式会社フジキン 集積型ガス供給装置
TWI646278B (zh) * 2013-12-05 2019-01-01 Ｃｋｄ股份有限公司 Piping joint, fluid supply control device, and piping connection structure
US10128087B2 (en) 2014-04-07 2018-11-13 Lam Research Corporation Configuration independent gas delivery system
US10557197B2 (en) 2014-10-17 2020-02-11 Lam Research Corporation Monolithic gas distribution manifold and various construction techniques and use cases therefor
JP6468801B2 (ja) 2014-10-29 2019-02-13 株式会社フジキン 継手
CN105714271B (zh) * 2014-12-22 2020-07-31 株式会社堀场Stec 汽化系统
JP6471938B2 (ja) * 2015-03-30 2019-02-20 株式会社フジキン 流体供給装置、ライン保持具及び流体供給装置の製造方法
US10022689B2 (en) 2015-07-24 2018-07-17 Lam Research Corporation Fluid mixing hub for semiconductor processing tool
US10118263B2 (en) 2015-09-02 2018-11-06 Lam Researech Corporation Monolithic manifold mask and substrate concepts
US10215317B2 (en) 2016-01-15 2019-02-26 Lam Research Corporation Additively manufactured gas distribution manifold
US9879795B2 (en) 2016-01-15 2018-01-30 Lam Research Corporation Additively manufactured gas distribution manifold
US11091837B2 (en) * 2016-10-24 2021-08-17 Fujikin Incorporated Fluid control system and product manufacturing method using fluid control system
JP6735688B2 (ja) * 2017-01-25 2020-08-05 東京エレクトロン株式会社 ガス導入部材
JP7446618B2 (ja) * 2018-10-26 2024-03-11 株式会社フジキン 流体供給システム、流体制御装置、及び半導体製造装置
WO2020163190A1 (en) * 2019-02-05 2020-08-13 Swagelok Company Integrated actuator manifold for multiple valve assembly
JP7333944B2 (ja) * 2019-06-27 2023-08-28 株式会社フジキン 流体制御装置
CN113892005A (zh) * 2019-06-28 2022-01-04 株式会社富士金 流体控制装置
JPWO2021166400A1 (de) 2020-02-20 2021-08-26
CN111945136B (zh) * 2020-08-13 2022-10-21 北京北方华创微电子装备有限公司 半导体工艺设备及其集成供气系统

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JPS62180200A (ja) * 1986-01-31 1987-08-07 Nobuo Mikoshiba ユニツト式高純度配管構造
JPH07122500A (ja) * 1993-10-28 1995-05-12 Fujitsu Ltd ガス機器及びこれを利用したガス供給装置
JPH0929996A (ja) 1995-07-18 1997-02-04 Seiko Epson Corp インクジェット記録方法
JP2922453B2 (ja) * 1996-01-05 1999-07-26 シーケーディ株式会社 ガス供給集積ユニット
KR100232112B1 (ko) * 1996-01-05 1999-12-01 아마노 시게루 가스공급유닛
US5992463A (en) * 1996-10-30 1999-11-30 Unit Instruments, Inc. Gas panel
US6293310B1 (en) * 1996-10-30 2001-09-25 Unit Instruments, Inc. Gas panel
JP3997338B2 (ja) * 1997-02-14 2007-10-24 忠弘 大見 流体制御装置
US6231260B1 (en) * 1997-07-11 2001-05-15 Insync Systems, Inc. Mounting plane for integrated gas panel
US6068016A (en) * 1997-09-25 2000-05-30 Applied Materials, Inc Modular fluid flow system with integrated pump-purge
JP4378553B2 (ja) * 1997-10-13 2009-12-09 忠弘 大見 流体制御装置
WO1999064772A1 (en) * 1998-06-12 1999-12-16 Hollingshead J Gregory Modular chemical delivery blocks

Also Published As

Publication number Publication date
CA2357177A1 (en) 2002-03-11
TW522443B (en) 2003-03-01
KR20020020854A (ko) 2002-03-16
JP2002089798A (ja) 2002-03-27
SG91938A1 (en) 2002-10-15
US6648020B2 (en) 2003-11-18
DE60118674T2 (de) 2006-09-21
EP1191265B1 (de) 2006-04-12
DE60118674D1 (de) 2006-05-24
EP1191265A2 (de) 2002-03-27
US20020033195A1 (en) 2002-03-21
EP1191265A3 (de) 2003-04-09
IL145332A0 (en) 2002-06-30

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Legal Events

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FF Patent granted
KB Patent renewed
MM9K Patent not in force due to non-payment of renewal fees