JP2005150191A5 - - Google Patents
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- Publication number
- JP2005150191A5 JP2005150191A5 JP2003382139A JP2003382139A JP2005150191A5 JP 2005150191 A5 JP2005150191 A5 JP 2005150191A5 JP 2003382139 A JP2003382139 A JP 2003382139A JP 2003382139 A JP2003382139 A JP 2003382139A JP 2005150191 A5 JP2005150191 A5 JP 2005150191A5
- Authority
- JP
- Japan
- Prior art keywords
- manual valve
- flow path
- gas
- common flow
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims description 136
- 238000010926 purge Methods 0.000 claims description 113
- 239000007789 gas Substances 0.000 description 320
- 238000010586 diagram Methods 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000000875 corresponding Effects 0.000 description 6
- 238000010276 construction Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Chemical group N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003382139A JP3809162B2 (ja) | 2003-11-12 | 2003-11-12 | ガス供給集積ユニット |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003382139A JP3809162B2 (ja) | 2003-11-12 | 2003-11-12 | ガス供給集積ユニット |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005150191A JP2005150191A (ja) | 2005-06-09 |
| JP2005150191A5 true JP2005150191A5 (de) | 2005-11-10 |
| JP3809162B2 JP3809162B2 (ja) | 2006-08-16 |
Family
ID=34691291
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003382139A Expired - Fee Related JP3809162B2 (ja) | 2003-11-12 | 2003-11-12 | ガス供給集積ユニット |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3809162B2 (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100408900C (zh) * | 2004-05-20 | 2008-08-06 | 喜开理株式会社 | 气体供给集成单元和气体单元的增设方法 |
| KR101194104B1 (ko) | 2011-01-27 | 2012-10-24 | 주식회사 바이코 | 집적화 가스블럭을 이용한 가스공급장치 |
| JP6085492B2 (ja) * | 2013-02-08 | 2017-02-22 | Ckd株式会社 | プロセスガス分流供給装置 |
-
2003
- 2003-11-12 JP JP2003382139A patent/JP3809162B2/ja not_active Expired - Fee Related
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