JP5565962B2 - ガス供給装置 - Google Patents
ガス供給装置 Download PDFInfo
- Publication number
- JP5565962B2 JP5565962B2 JP2010510004A JP2010510004A JP5565962B2 JP 5565962 B2 JP5565962 B2 JP 5565962B2 JP 2010510004 A JP2010510004 A JP 2010510004A JP 2010510004 A JP2010510004 A JP 2010510004A JP 5565962 B2 JP5565962 B2 JP 5565962B2
- Authority
- JP
- Japan
- Prior art keywords
- tank
- valve
- gas
- mass flow
- flow controller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000007788 liquid Substances 0.000 claims description 35
- 239000000463 material Substances 0.000 claims description 34
- 239000007789 gas Substances 0.000 description 122
- 238000010926 purge Methods 0.000 description 20
- 201000005569 Gout Diseases 0.000 description 9
- 239000012530 fluid Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000009795 derivation Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C9/00—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure
- F17C9/02—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure with change of state, e.g. vaporisation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2201/00—Vessel construction, in particular geometry, arrangement or size
- F17C2201/03—Orientation
- F17C2201/032—Orientation with substantially vertical main axis
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/0323—Valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/0382—Constructional details of valves, regulators
- F17C2205/0385—Constructional details of valves, regulators in blocks or units
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
- F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
- F17C2223/0146—Two-phase
- F17C2223/0153—Liquefied gas, e.g. LPG, GPL
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
- F17C2227/03—Heat exchange with the fluid
- F17C2227/0302—Heat exchange with the fluid by heating
- F17C2227/0309—Heat exchange with the fluid by heating using another fluid
- F17C2227/0311—Air heating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
- F17C2227/03—Heat exchange with the fluid
- F17C2227/0367—Localisation of heat exchange
- F17C2227/0369—Localisation of heat exchange in or on a vessel
- F17C2227/0376—Localisation of heat exchange in or on a vessel in wall contact
- F17C2227/0383—Localisation of heat exchange in or on a vessel in wall contact outside the vessel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
- F17C2227/04—Methods for emptying or filling
- F17C2227/044—Methods for emptying or filling by purging
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
- F17C2250/06—Controlling or regulating of parameters as output values
- F17C2250/0605—Parameters
- F17C2250/0636—Flow or movement of content
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2260/00—Purposes of gas storage and gas handling
- F17C2260/04—Reducing risks and environmental impact
- F17C2260/048—Refurbishing
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Chemical Vapour Deposition (AREA)
Description
1・・・タンク
11・・・外壁表面
13・・・内部流路
2・・・マスフローコントローラ
31・・・第1バルブユニット
32・・・第2バルブユニット
33・・・第3バルブユニット
Gout・・・発生ガス導出ライン
Min・・・材料液導入ライン
Pin・・・パージガス導入ライン
GP・・・ガスパネル
Claims (5)
- 材料液が貯留され、その材料液が加熱されるタンクと、前記タンクの内部と第1バルブユニットを介して接続され、前記材料液が気化したガスの流量を制御するマスフローコントローラとを具備するガス供給装置であって、
前記第1バルブユニットは、前記タンクの外壁表面に直接取り付けられ、一面に第1インレットポート及び第1アウトレットポートが形成された第1バルブボディと、前記第1インレットポート及び前記第1アウトレットポートをつなぐ流路に設けられる第1バルブとから構成され、
前記タンクの外壁内部には内部流路が形成されており、前記内部流路は、タンクの内部と前記第1インレットポートとを接続する第1バルブ流入流路と、前記第1アウトレットポートと前記マスフローコントローラの導入口とを接続するための第1バルブ流出流路とを具備する発生ガス導出ラインを備えたことを特徴とするガス供給装置。 - 前記タンクの外壁表面に直接取り付けられる第2バルブユニットと、前記内部流路が前記タンクの内部に材料液を導入するための材料液導入ラインを更に備え、
前記第2バルブユニットは、第2インレットポート及び第2アウトレットポートが形成された第2バルブボディと、前記第2バルブボディの内部に設けられ、前記第2インレットポート及び前記第2アウトレットポートにそれぞれ接続される第2バルブとから構成され、
前記材料液導入ラインは、前記第2アウトレットポートと前記タンクの内部とを接続する第2バルブ流出流路を具備する請求項1記載のガス供給装置。 - 前記ガス発生ラインが複数設けられており、各ガス発生ラインにマスフローコントローラが接続されている請求項1記載のガス供給装置。
- 前記タンク又は前記マスフローコントローラが、ガスパネルに取り付けられている請求項1記載のガス供給装置。
- ガス供給装置において材料液が貯留され、その材料液が加熱されるタンクであって、前記タンクの外壁表面に直接取り付けられ、一面に第1インレットポート及び第1アウトレットポートが形成された第1バルブボディと、前記第1インレットポート及び前記第1アウトレットポートをつなぐ流路に設けられる第1バルブとから構成される第1バルブユニットを具備し、
前記タンクの外壁内部には内部流路が形成されており、前記内部流路は、タンクの内部と前記第1インレットポートとを接続する第1バルブ流入流路と、前記第1アウトレットポートとマスフローコントローラの導入口とを接続するための第1バルブ流出流路とを具備する発生ガス導出ラインを備えたことを特徴とするガス供給装置用タンク。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010510004A JP5565962B2 (ja) | 2009-03-04 | 2010-02-26 | ガス供給装置 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009051407 | 2009-03-04 | ||
JP2009051407 | 2009-03-04 | ||
JP2010510004A JP5565962B2 (ja) | 2009-03-04 | 2010-02-26 | ガス供給装置 |
PCT/JP2010/053038 WO2010101077A1 (ja) | 2009-03-04 | 2010-02-26 | ガス供給装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2010101077A1 JPWO2010101077A1 (ja) | 2012-09-10 |
JP5565962B2 true JP5565962B2 (ja) | 2014-08-06 |
Family
ID=42709636
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010510004A Active JP5565962B2 (ja) | 2009-03-04 | 2010-02-26 | ガス供給装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9157578B2 (ja) |
JP (1) | JP5565962B2 (ja) |
KR (1) | KR20110123254A (ja) |
CN (1) | CN102326129A (ja) |
SG (1) | SG174218A1 (ja) |
WO (1) | WO2010101077A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5616416B2 (ja) * | 2012-11-02 | 2014-10-29 | 株式会社フジキン | 集積型ガス供給装置 |
CN105714271B (zh) | 2014-12-22 | 2020-07-31 | 株式会社堀场Stec | 汽化系统 |
JP6648603B2 (ja) * | 2016-03-30 | 2020-02-14 | 株式会社Ihi | 燃料供給装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63121898U (ja) * | 1987-01-30 | 1988-08-08 | ||
JPH07243591A (ja) * | 1994-03-02 | 1995-09-19 | Stec Kk | 液体材料気化流量制御器 |
JP2004356595A (ja) * | 2003-05-30 | 2004-12-16 | Samco International Inc | カソードカップリング型プラズマcvd装置を用いた炭素含有シリコン系膜の製造方法 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63121898A (ja) | 1986-11-12 | 1988-05-25 | 横浜ゴム株式会社 | 給排管内の液体遮音装置 |
JPH01115119A (ja) | 1987-10-28 | 1989-05-08 | Nec Corp | 液体蒸気原料供給装置 |
NL9002164A (nl) | 1990-10-05 | 1992-05-06 | Philips Nv | Werkwijze voor het voorzien van een substraat van een oppervlaktelaag vanuit een damp en een inrichting voor het toepassen van een dergelijke werkwijze. |
JP2567099Y2 (ja) * | 1991-06-07 | 1998-03-30 | 山形日本電気株式会社 | ガス供給装置 |
JP2703694B2 (ja) | 1992-05-28 | 1998-01-26 | 信越半導体株式会社 | ガス供給装置 |
US5630878A (en) * | 1994-02-20 | 1997-05-20 | Stec Inc. | Liquid material-vaporizing and supplying apparatus |
US5605179A (en) * | 1995-03-17 | 1997-02-25 | Insync Systems, Inc. | Integrated gas panel |
JP3546275B2 (ja) * | 1995-06-30 | 2004-07-21 | 忠弘 大見 | 流体制御装置 |
GB9724168D0 (en) * | 1997-11-14 | 1998-01-14 | Air Prod & Chem | Gas control device and method of supplying gas |
US6290088B1 (en) * | 1999-05-28 | 2001-09-18 | American Air Liquide Inc. | Corrosion resistant gas cylinder and gas delivery system |
JP2002089798A (ja) * | 2000-09-11 | 2002-03-27 | Ulvac Japan Ltd | 流体制御装置およびこれを用いたガス処理装置 |
JP2003332327A (ja) | 2002-05-16 | 2003-11-21 | Japan Pionics Co Ltd | 気化供給方法 |
JP4331464B2 (ja) | 2002-12-02 | 2009-09-16 | 株式会社渡辺商行 | 気化器への原料溶液供給系及び洗浄方法 |
JP4202856B2 (ja) | 2003-07-25 | 2008-12-24 | 東京エレクトロン株式会社 | ガス反応装置 |
US7556059B2 (en) * | 2005-04-27 | 2009-07-07 | Ckd Corporation | Tank structure |
JP5037510B2 (ja) * | 2006-08-23 | 2012-09-26 | 株式会社堀場エステック | 集積型ガスパネル装置 |
JP4973071B2 (ja) * | 2006-08-31 | 2012-07-11 | 東京エレクトロン株式会社 | 成膜装置 |
JP5073751B2 (ja) * | 2006-10-10 | 2012-11-14 | エーエスエム アメリカ インコーポレイテッド | 前駆体送出システム |
KR100851439B1 (ko) | 2007-02-01 | 2008-08-11 | 주식회사 테라세미콘 | 소스가스 공급장치 |
US20080305014A1 (en) * | 2007-06-07 | 2008-12-11 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus |
US8137468B2 (en) * | 2008-03-17 | 2012-03-20 | Applied Materials, Inc. | Heated valve manifold for ampoule |
-
2010
- 2010-02-26 KR KR1020117020374A patent/KR20110123254A/ko not_active Application Discontinuation
- 2010-02-26 JP JP2010510004A patent/JP5565962B2/ja active Active
- 2010-02-26 US US13/254,826 patent/US9157578B2/en active Active
- 2010-02-26 SG SG2011063252A patent/SG174218A1/en unknown
- 2010-02-26 WO PCT/JP2010/053038 patent/WO2010101077A1/ja active Application Filing
- 2010-02-26 CN CN2010800090258A patent/CN102326129A/zh active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63121898U (ja) * | 1987-01-30 | 1988-08-08 | ||
JPH07243591A (ja) * | 1994-03-02 | 1995-09-19 | Stec Kk | 液体材料気化流量制御器 |
JP2004356595A (ja) * | 2003-05-30 | 2004-12-16 | Samco International Inc | カソードカップリング型プラズマcvd装置を用いた炭素含有シリコン系膜の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US9157578B2 (en) | 2015-10-13 |
SG174218A1 (en) | 2011-10-28 |
CN102326129A (zh) | 2012-01-18 |
KR20110123254A (ko) | 2011-11-14 |
JPWO2010101077A1 (ja) | 2012-09-10 |
US20110314838A1 (en) | 2011-12-29 |
WO2010101077A1 (ja) | 2010-09-10 |
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