IL121813A0 - Multi-oxidizer slurry for chemical mechanical polishing - Google Patents

Multi-oxidizer slurry for chemical mechanical polishing

Info

Publication number
IL121813A0
IL121813A0 IL12181397A IL12181397A IL121813A0 IL 121813 A0 IL121813 A0 IL 121813A0 IL 12181397 A IL12181397 A IL 12181397A IL 12181397 A IL12181397 A IL 12181397A IL 121813 A0 IL121813 A0 IL 121813A0
Authority
IL
Israel
Prior art keywords
mechanical polishing
chemical mechanical
oxidizer slurry
oxidizer
slurry
Prior art date
Application number
IL12181397A
Other languages
English (en)
Original Assignee
Cabot Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/718,937 external-priority patent/US5783489A/en
Priority claimed from US08/800,562 external-priority patent/US6033596A/en
Application filed by Cabot Corp filed Critical Cabot Corp
Publication of IL121813A0 publication Critical patent/IL121813A0/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
IL12181397A 1996-09-24 1997-09-22 Multi-oxidizer slurry for chemical mechanical polishing IL121813A0 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/718,937 US5783489A (en) 1996-09-24 1996-09-24 Multi-oxidizer slurry for chemical mechanical polishing
US08/800,562 US6033596A (en) 1996-09-24 1997-02-18 Multi-oxidizer slurry for chemical mechanical polishing
US08/890,778 US6039891A (en) 1996-09-24 1997-07-11 Multi-oxidizer precursor for chemical mechanical polishing

Publications (1)

Publication Number Publication Date
IL121813A0 true IL121813A0 (en) 1998-02-22

Family

ID=27418986

Family Applications (1)

Application Number Title Priority Date Filing Date
IL12181397A IL121813A0 (en) 1996-09-24 1997-09-22 Multi-oxidizer slurry for chemical mechanical polishing

Country Status (9)

Country Link
US (2) US6039891A (id)
EP (1) EP0831136A3 (id)
JP (1) JPH10226784A (id)
CN (1) CN1238812A (id)
AU (1) AU4589897A (id)
ID (1) ID18410A (id)
IL (1) IL121813A0 (id)
TW (1) TW438880B (id)
WO (1) WO1998013536A1 (id)

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CN101724346A (zh) * 2008-10-10 2010-06-09 安集微电子（上海）有限公司 一种化学机械抛光液
CN102452036B (zh) * 2010-10-29 2016-08-24 安集微电子（上海）有限公司 一种钨化学机械抛光方法
CN102181232B (zh) * 2011-03-17 2013-12-11 清华大学 Ulsi多层铜布线铜的低下压力化学机械抛光的组合物
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CN111962080A (zh) * 2020-07-10 2020-11-20 沈阳中钛装备制造有限公司 一种化学抛光剂及钛合金的金相组织显示方法
CN112920716A (zh) * 2021-01-26 2021-06-08 中国科学院上海微系统与信息技术研究所 一种用于氮化钛化学机械抛光的组合物及其使用方法
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Also Published As

Publication number Publication date
EP0831136A3 (en) 1998-10-21
US6039891A (en) 2000-03-21
CN1238812A (zh) 1999-12-15
WO1998013536A1 (en) 1998-04-02
ID18410A (id) 1998-04-09
TW438880B (en) 2001-06-07
AU4589897A (en) 1998-04-17
JPH10226784A (ja) 1998-08-25
US6316366B1 (en) 2001-11-13
EP0831136A2 (en) 1998-03-25

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