GB9910105D0 - Polishing apparatus - Google Patents

Polishing apparatus

Info

Publication number
GB9910105D0
GB9910105D0 GBGB9910105.7A GB9910105A GB9910105D0 GB 9910105 D0 GB9910105 D0 GB 9910105D0 GB 9910105 A GB9910105 A GB 9910105A GB 9910105 D0 GB9910105 D0 GB 9910105D0
Authority
GB
United Kingdom
Prior art keywords
polishing apparatus
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB9910105.7A
Other versions
GB2337014A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Speedfam Corp
Original Assignee
Speedfam Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/071,442 external-priority patent/US6001005A/en
Application filed by Speedfam Corp filed Critical Speedfam Corp
Publication of GB9910105D0 publication Critical patent/GB9910105D0/en
Publication of GB2337014A publication Critical patent/GB2337014A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/10—Single-purpose machines or devices
    • B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
    • B24B7/17—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings for simultaneously grinding opposite and parallel end faces, e.g. double disc grinders

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
GB9910105A 1998-05-01 1999-04-30 Polishing apparatus. Withdrawn GB2337014A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/071,442 US6001005A (en) 1997-09-19 1998-05-01 Polishing apparatus

Publications (2)

Publication Number Publication Date
GB9910105D0 true GB9910105D0 (en) 1999-06-30
GB2337014A GB2337014A (en) 1999-11-10

Family

ID=22101358

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9910105A Withdrawn GB2337014A (en) 1998-05-01 1999-04-30 Polishing apparatus.

Country Status (4)

Country Link
DE (1) DE19919583A1 (en)
GB (1) GB2337014A (en)
TW (1) TW414747B (en)
WO (1) WO1999056910A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002154049A (en) 2000-11-15 2002-05-28 Fujikoshi Mach Corp Polishing method
DE10132504C1 (en) 2001-07-05 2002-10-10 Wacker Siltronic Halbleitermat Method for simultaneously polishing both sides of semiconductor wafer mounted on cogwheel between central cogwheel and annulus uses upper and lower polishing wheel
DE10345335B4 (en) * 2003-09-22 2012-04-26 Supfina Grieshaber Gmbh & Co. Kg Surface grinding machine and method for controlling
CN109483388A (en) * 2018-12-30 2019-03-19 苏州富强科技有限公司 A kind of planet turnover type 3D bend glass polishing machine
CN114952577B (en) * 2022-07-08 2023-12-15 苏州近藤精密部件有限公司 Valve end face polishing machine
CN116276405A (en) * 2023-05-18 2023-06-23 扬州韩思半导体科技有限公司 Polishing device for wafer processing
CN117245516B (en) * 2023-11-15 2024-01-30 响水县环宇轴承座制造有限公司 Bearing seat continuous polishing device and use method thereof

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2963830A (en) * 1958-06-04 1960-12-13 Norton Co Lapping machine
DE2204581B2 (en) * 1972-02-01 1977-12-08 Wolters, Peter, 4020 Mettmann CONTROL DEVICE FOR THE PROCESSING PRESSURE OF A LAEPP OR HONING MACHINE
JPS63120077A (en) * 1986-11-08 1988-05-24 Otani Reiji Driving method for lapping and polishing machine for robot loading/unloading
US5595529A (en) * 1994-03-28 1997-01-21 Speedfam Corporation Dual column abrading machine

Also Published As

Publication number Publication date
DE19919583A1 (en) 1999-11-04
WO1999056910A1 (en) 1999-11-11
GB2337014A (en) 1999-11-10
TW414747B (en) 2000-12-11

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)