HK1084186A1 - Optical element holding device, lens barrel, exposing device, and device producing method - Google Patents

Optical element holding device, lens barrel, exposing device, and device producing method

Info

Publication number
HK1084186A1
HK1084186A1 HK06106029.6A HK06106029A HK1084186A1 HK 1084186 A1 HK1084186 A1 HK 1084186A1 HK 06106029 A HK06106029 A HK 06106029A HK 1084186 A1 HK1084186 A1 HK 1084186A1
Authority
HK
Hong Kong
Prior art keywords
optical element
element holding
lens barrel
producing method
exposing
Prior art date
Application number
HK06106029.6A
Other languages
English (en)
Inventor
Yuichi Shibazaki
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=33508740&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=HK1084186(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of HK1084186A1 publication Critical patent/HK1084186A1/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Epidemiology (AREA)
  • Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Environmental & Geological Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Lens Barrels (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Eyeglasses (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
HK06106029.6A 2003-06-06 2006-05-25 Optical element holding device, lens barrel, exposing device, and device producing method HK1084186A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003163023 2003-06-06
PCT/JP2004/007947 WO2004109357A1 (ja) 2003-06-06 2004-06-07 光学素子保持装置、鏡筒、露光装置、及びデバイスの製造方法

Publications (1)

Publication Number Publication Date
HK1084186A1 true HK1084186A1 (en) 2006-07-21

Family

ID=33508740

Family Applications (1)

Application Number Title Priority Date Filing Date
HK06106029.6A HK1084186A1 (en) 2003-06-06 2006-05-25 Optical element holding device, lens barrel, exposing device, and device producing method

Country Status (9)

Country Link
US (2) US20060139775A1 (ko)
EP (1) EP1632799B2 (ko)
JP (1) JP4665759B2 (ko)
KR (1) KR101281357B1 (ko)
CN (1) CN100576003C (ko)
AT (1) ATE449978T1 (ko)
DE (1) DE602004024302D1 (ko)
HK (1) HK1084186A1 (ko)
WO (1) WO2004109357A1 (ko)

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Also Published As

Publication number Publication date
US20060139775A1 (en) 2006-06-29
EP1632799A1 (en) 2006-03-08
US7764447B2 (en) 2010-07-27
DE602004024302D1 (de) 2010-01-07
CN100576003C (zh) 2009-12-30
JPWO2004109357A1 (ja) 2006-07-20
KR20060021339A (ko) 2006-03-07
EP1632799B1 (en) 2009-11-25
KR101281357B1 (ko) 2013-07-02
EP1632799A4 (en) 2006-07-05
JP4665759B2 (ja) 2011-04-06
US20070279768A1 (en) 2007-12-06
ATE449978T1 (de) 2009-12-15
CN1826547A (zh) 2006-08-30
WO2004109357A1 (ja) 2004-12-16
EP1632799B2 (en) 2013-11-20

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Effective date: 20200607