GB906485A - Improvements in the production of mono-crystalline semiconductor material - Google Patents

Improvements in the production of mono-crystalline semiconductor material

Info

Publication number
GB906485A
GB906485A GB44257/60A GB4425760A GB906485A GB 906485 A GB906485 A GB 906485A GB 44257/60 A GB44257/60 A GB 44257/60A GB 4425760 A GB4425760 A GB 4425760A GB 906485 A GB906485 A GB 906485A
Authority
GB
United Kingdom
Prior art keywords
rod
pict
iii
pulling
induction coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB44257/60A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens and Halske AG
Siemens AG
Original Assignee
Siemens and Halske AG
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens and Halske AG, Siemens AG filed Critical Siemens and Halske AG
Publication of GB906485A publication Critical patent/GB906485A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/14—Heating of the melt or the crystallised materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1064—Seed pulling including a fully-sealed or vacuum-maintained crystallization chamber [e.g., ampoule]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]

Abstract

<PICT:0906485/III/1> <PICT:0906485/III/2> <PICT:0906485/III/3> <PICT:0906485/III/4> The end of a rod 1 (Fig. 1) is maintained molten by means of a double turn induction coil 4 having an aperture of smaller cross-section than rod 1 and a narrow monocrystalline rod 3 is pulled from the melt through the aperture. Rod 1, which may be of germanium or silicon, is maintained stationary and induction coil 4 is lowered during pulling. Pulling may be effected in an inert atmosphere in a quartz vessel. The pulled rod may have a diameter of down to 1 mm. Double turn coil 4 may be replaced by a single turn coil 6 (Fig. 2) attached to a silver hood 5 having a vertical slit 7. Preheating may be effected by means of a molybdenum cap 8 and induction coil 10 (Fig. 3) which are removed before crystal-pulling or by a molybdenum ring 9 and induction coil 4 (Fig. 4) which are also used during crystal-pulling.
GB44257/60A 1959-12-23 1960-12-23 Improvements in the production of mono-crystalline semiconductor material Expired GB906485A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES66407A DE1141978B (en) 1959-12-23 1959-12-23 Process for producing thin single-crystal semiconductor rods

Publications (1)

Publication Number Publication Date
GB906485A true GB906485A (en) 1962-09-19

Family

ID=7498786

Family Applications (1)

Application Number Title Priority Date Filing Date
GB44257/60A Expired GB906485A (en) 1959-12-23 1960-12-23 Improvements in the production of mono-crystalline semiconductor material

Country Status (6)

Country Link
US (1) US3232716A (en)
CH (1) CH425736A (en)
DE (1) DE1141978B (en)
FR (1) FR1277468A (en)
GB (1) GB906485A (en)
NL (2) NL258961A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1256626B (en) * 1963-03-13 1967-12-21 Siemens Ag Process for the production of semiconductor rods by drawing from the melt
DE1260439B (en) * 1964-02-08 1968-02-08 Siemens Ag Device for crucible-free zone melting
US4039283A (en) * 1973-04-18 1977-08-02 Siemens Aktiengesellschaft Apparatus for producing a controlled radial path of resistance in a semiconductor monocrystalline rod
GB1475261A (en) * 1975-04-02 1977-06-01 Nat Res Dev Siliceous materials
DK142586B (en) * 1977-07-07 1980-11-24 Topsil As Apparatus for zone melting of a semiconductor rod.

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL89230C (en) * 1952-12-17 1900-01-01
DE1061527B (en) * 1953-02-14 1959-07-16 Siemens Ag Process for zone-wise remelting of rods and other elongated workpieces
US2972525A (en) * 1953-02-26 1961-02-21 Siemens Ag Crucible-free zone melting method and apparatus for producing and processing a rod-shaped body of crystalline substance, particularly semiconductor substance
US2814707A (en) * 1954-11-12 1957-11-26 Rca Corp Induction heating device
AT207857B (en) * 1955-01-14 Degussa Process for the production of hydrocyanic acid by reacting hydrocarbons with ammonia in the catalyst bed
US2927008A (en) * 1956-10-29 1960-03-01 Shockley Transistor Corp Crystal growing apparatus
US2876324A (en) * 1957-11-29 1959-03-03 Sylvania Electric Prod Induction heating apparatus
NL234451A (en) * 1957-12-27
NL251304A (en) * 1959-05-08
US3096158A (en) * 1959-09-25 1963-07-02 Gerthart K Gaule Apparatus for pulling single crystals in the form of long flat strips from a melt
US2992311A (en) * 1960-09-28 1961-07-11 Siemens Ag Method and apparatus for floatingzone melting of semiconductor rods

Also Published As

Publication number Publication date
FR1277468A (en) 1961-12-01
NL258961A (en)
US3232716A (en) 1966-02-01
DE1141978B (en) 1963-01-03
NL133150C (en)
CH425736A (en) 1966-12-15

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