GB892088A - Method and apparatus for crystal growth - Google Patents

Method and apparatus for crystal growth

Info

Publication number
GB892088A
GB892088A GB1882/60A GB188260A GB892088A GB 892088 A GB892088 A GB 892088A GB 1882/60 A GB1882/60 A GB 1882/60A GB 188260 A GB188260 A GB 188260A GB 892088 A GB892088 A GB 892088A
Authority
GB
United Kingdom
Prior art keywords
rod
crucible
tube
melt
semi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1882/60A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Clevite Corp
Original Assignee
Clevite Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Clevite Corp filed Critical Clevite Corp
Publication of GB892088A publication Critical patent/GB892088A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

<PICT:0892088/III/1> A monocrystalline rod 48 of semi-conductor material, e.g. silicon or germanium, containing doping additives is pulled from a melt 20 contained in a crucible 18 which is supplied with doping material from an upper tube 60 and with semi-conductor material from a lower extension tube 22 of diameter narrower than that of the crucible. The supplied semi-conductor material is in the form of a rod 24 which closely fits tube 22 and is melted at its upper end to form the melt 20 by means of an induction heating coil 14. Tube 22 slides over rod 24 under the action of gravity as melting proceeds, the relative downward movement being controlled by a pin 28 which prevents rod 24 from passing into crucible 18. Rods 24 and 48 pass through packing members 40 and 46 respectively in an enclosure 16 adapted to provide a desired atmosphere around the melt. Upward movement of rods 24 and 48 is effected by means of rollers 42 and 58 respectively. Rod 24 may move upwards continuously at such a rate that the crucible is maintained stationary. Alternatively, rod 24 may be intermittently moved rapidly upwards carrying the crucible 18 therewith from a position in which a stop 25 rests on the bottom of enclosure 16, the crucible thereafter being allowed to return to its original position under the action of gravity while the rod is stationary.
GB1882/60A 1959-01-20 1960-01-19 Method and apparatus for crystal growth Expired GB892088A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US892088XA 1959-01-20 1959-01-20

Publications (1)

Publication Number Publication Date
GB892088A true GB892088A (en) 1962-03-21

Family

ID=22216326

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1882/60A Expired GB892088A (en) 1959-01-20 1960-01-19 Method and apparatus for crystal growth

Country Status (4)

Country Link
DE (1) DE1188040B (en)
FR (1) FR1244045A (en)
GB (1) GB892088A (en)
NL (1) NL246541A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10255981A1 (en) * 2002-11-26 2004-06-17 Forschungsverbund Berlin E.V. Device for drawing a crystal from a melt or melt solution by the Czochralski method comprises a crucible containing the molten raw material, a seed crystal of predetermined crystal orientation, and a crystal holder

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1044768B (en) * 1954-03-02 1958-11-27 Siemens Ag Method and device for pulling a rod-shaped crystalline body, preferably a semiconductor body
NL98843C (en) * 1956-07-02

Also Published As

Publication number Publication date
NL246541A (en)
DE1188040B (en) 1965-03-04
FR1244045A (en) 1960-10-21

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