GB939102A - Improvements in and relating to the production of crystals, and apparatus for use therein - Google Patents
Improvements in and relating to the production of crystals, and apparatus for use thereinInfo
- Publication number
- GB939102A GB939102A GB577260A GB577260A GB939102A GB 939102 A GB939102 A GB 939102A GB 577260 A GB577260 A GB 577260A GB 577260 A GB577260 A GB 577260A GB 939102 A GB939102 A GB 939102A
- Authority
- GB
- United Kingdom
- Prior art keywords
- melt
- crucible
- crystal
- annular partition
- pict
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
- C30B15/12—Double crucible methods
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
<PICT:0939102/III/1> <PICT:0939102/III/2> In pulling a single crystal C (Fig. 1) from molten material, e.g. silicon or germanium, within a rotating crucible 10, the zone from which the crystal is pulled is surrounded by a stationary annular partition 16 of quartz having notches 35 (Fig. 2) providing a passage for the melt from the annular space between the crucible and the annular partition to the interior of the annular partition, and the melt is replaced by lowering one or more rods B of material into the melt in the said annular space. The crucible 10 is of graphite having a quartz lining 30 of inverted frusto-conical shape and is contained in a gas tight tube 13 which is surrounded by an induction heating coil 27 and has a closure member 14 provided with cooling passages 26. The crystal C may be rotated on withdrawal.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US79418359A | 1959-02-18 | 1959-02-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB939102A true GB939102A (en) | 1963-10-09 |
Family
ID=25161934
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB577260A Expired GB939102A (en) | 1959-02-18 | 1960-02-18 | Improvements in and relating to the production of crystals, and apparatus for use therein |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB939102A (en) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3607115A (en) * | 1969-10-29 | 1971-09-21 | Gen Motors Corp | Crystal pulling from molten melts including solute introduction means below the seed-melt interface |
US4036595A (en) * | 1975-11-06 | 1977-07-19 | Siltec Corporation | Continuous crystal growing furnace |
US4203951A (en) * | 1976-11-23 | 1980-05-20 | Eidelman Lev G | Apparatus for growing single crystals from melt with additional feeding of comminuted charge |
EP0069821A1 (en) * | 1981-07-10 | 1983-01-19 | Westinghouse Electric Corporation | Apparatus for growing a dendritic web |
US4454096A (en) * | 1981-06-15 | 1984-06-12 | Siltec Corporation | Crystal growth furnace recharge |
EP0170856A1 (en) * | 1984-07-06 | 1986-02-12 | General Signal Corporation | Process for growing monocrystals of semiconductor materials from shallow crucibles by Czochralski technique |
EP0219776A1 (en) * | 1985-10-12 | 1987-04-29 | Sumitomo Electric Industries Limited | Crucible recovering method and apparatus therefor |
EP0293865A1 (en) * | 1987-06-01 | 1988-12-07 | Mitsubishi Materials Corporation | Apparatus and process for growing crystals of semiconductor materials |
US4911895A (en) * | 1987-06-08 | 1990-03-27 | Mitsubishi Kinzoku Kabushiki Kaisha | Apparatus for growing crystals of semiconductor materials |
EP0364899A1 (en) * | 1988-10-13 | 1990-04-25 | Mitsubishi Materials Corporation | Apparatus and process for growing crystals of semiconductor materials |
EP0400266A1 (en) * | 1989-05-30 | 1990-12-05 | Nkk Corporation | Apparatus for manufacturing single silicon crystal |
-
1960
- 1960-02-18 GB GB577260A patent/GB939102A/en not_active Expired
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3607115A (en) * | 1969-10-29 | 1971-09-21 | Gen Motors Corp | Crystal pulling from molten melts including solute introduction means below the seed-melt interface |
US4036595A (en) * | 1975-11-06 | 1977-07-19 | Siltec Corporation | Continuous crystal growing furnace |
US4203951A (en) * | 1976-11-23 | 1980-05-20 | Eidelman Lev G | Apparatus for growing single crystals from melt with additional feeding of comminuted charge |
US4454096A (en) * | 1981-06-15 | 1984-06-12 | Siltec Corporation | Crystal growth furnace recharge |
EP0069821A1 (en) * | 1981-07-10 | 1983-01-19 | Westinghouse Electric Corporation | Apparatus for growing a dendritic web |
EP0170856A1 (en) * | 1984-07-06 | 1986-02-12 | General Signal Corporation | Process for growing monocrystals of semiconductor materials from shallow crucibles by Czochralski technique |
EP0219776A1 (en) * | 1985-10-12 | 1987-04-29 | Sumitomo Electric Industries Limited | Crucible recovering method and apparatus therefor |
EP0293865A1 (en) * | 1987-06-01 | 1988-12-07 | Mitsubishi Materials Corporation | Apparatus and process for growing crystals of semiconductor materials |
US4936949A (en) * | 1987-06-01 | 1990-06-26 | Mitsubishi Kinzoku Kabushiki Kaisha | Czochraski process for growing crystals using double wall crucible |
US4911895A (en) * | 1987-06-08 | 1990-03-27 | Mitsubishi Kinzoku Kabushiki Kaisha | Apparatus for growing crystals of semiconductor materials |
EP0364899A1 (en) * | 1988-10-13 | 1990-04-25 | Mitsubishi Materials Corporation | Apparatus and process for growing crystals of semiconductor materials |
US5196173A (en) * | 1988-10-13 | 1993-03-23 | Mitsubishi Materials Corporation | Apparatus for process for growing crystals of semiconductor materials |
EP0400266A1 (en) * | 1989-05-30 | 1990-12-05 | Nkk Corporation | Apparatus for manufacturing single silicon crystal |
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